Gallium boat

Abstract

The gallium boat comprises a body, a lifting handle and a base, the body is installed on the base, a plurality of heat conduction holes penetrating through the two sides of the base are formed in the base, the body comprises a pipe barrel and two pipe heads, the two pipe heads are arranged at the two ends of the pipe barrel and detachably connected with the pipe barrel, and the lifting handle is arranged on the pipe barrel. The pipe head and the pipe barrel are jointly enclosed to form a reaction cavity, the pipe barrel is provided with a notch communicated with the reaction cavity, and the handle is connected with the body. According to the utility model, the gallium boat can be uniformly heated, gallium and arsenic can react more fully when gallium arsenide polycrystals are synthesized, and incomplete reaction caused by local overheating is reduced. Besides, due to the structure of the detachable tube head and the tube barrel, after gallium arsenide polycrystals are synthesized, the tube head can be detached, so that a synthesized gallium arsenide polycrystal bar can be taken out, the repeated utilization rate of the gallium boat is greatly increased, and the actual production cost of an enterprise is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor production component, especially a gallium boat. BACKGROUND

[0002] In the process of actual production of enterprises, when boron nitride boat synthesis is carried out by using horizontal directional solidification method to synthesize gallium arsenide polycrystal, the production cost is high, the use frequency is low and the reusability is low when quartz boat synthesis is used, thereby greatly increasing the actual production cost of enterprises. Meanwhile, the actual handling difficulty is greatly increased due to the smooth surface of the quartz boat, in addition, when gallium arsenide polycrystal is synthesized, the quartz boat and the quartz tube are pasted together in the traditional method of synthesizing gallium arsenide polycrystal, when gallium arsenide polycrystal is synthesized at high temperature, the gallium boat is not uniformly heated, thereby the gallium and arsenic cannot fully react, causing a large number of notches at the bottom of the synthesized gallium arsenide polycrystal rod, and the quartz boat and the quartz tube may also be adhered, after the gallium arsenide polycrystal is synthesized, it is difficult to take out the quartz boat from the quartz tube. SUMMARY

[0003] The technical problem to be solved by the utility model is that when gallium arsenide polycrystal is synthesized at high temperature, the gallium boat is not uniformly heated, thereby the gallium and arsenic cannot fully react, causing a large number of notches at the bottom of the synthesized gallium arsenide polycrystal rod, and the quartz boat and the quartz tube may also be adhered, after the gallium arsenide polycrystal is synthesized, it is difficult to take out the quartz boat from the quartz tube.

[0004] In order to solve the above technical problems, the utility model provides a gallium boat, which comprises a body, a handle and a base, the body is installed on the base, and a plurality of heat conduction holes penetrating through both sides of the base are arranged on the base, the body comprises a tube and two tube heads, the two tube heads are arranged at both ends of the tube and are detachably connected with the tube, the tube head and the tube jointly enclose a reaction cavity, the tube is provided with a slot communicating with the reaction cavity, and the handle is connected with the body.

[0005] Further, the heat conduction holes are arranged in multiple, the multiple heat conduction holes are arranged in the length direction of the base and are arranged in the width direction of the base.

[0006] Further, the diameter of the heat conduction hole is 30-45mm, and the interval between the adjacent two heat conduction holes is 40-50mm.

[0007] Further, the ratio of the length of the tube head to the length of the tube is 0.12-0.5.

[0008] Further, the tube is in a cylindrical shape, and the tube head is in a conical shape.

[0009] Further, the taper of the pipe head is 50-70°.

[0010] Further, the pipe cylinder and the pipe head are threadedly connected.

[0011] Further, the handle has an arc-shaped slot at one end towards the body and a gripping hole at one end away from the body.

[0012] Further, the handle and the body are detachably connected,

[0013] the handle has a buckle and the body has a buckle slot matched with the buckle; or,

[0014] the handle and the body have screw holes and are connected by a screwing piece.

[0015] Further, the base and the pipe cylinder are in an integral structure.

[0016] Compared with the prior art, the gallium boat has the beneficial effects that:

[0017] The heat conduction holes on the base make the heat pass through the holes to the bottom of the gallium boat, so that the gallium boat is uniformly heated, the gallium and arsenic can be more fully reacted when synthesizing the gallium arsenide polycrystal, and the incomplete reaction caused by local overheating is reduced, so as to avoid a large number of notches at the bottom of the synthesized gallium arsenide polycrystal rod and prevent the adhesion of the quartz boat and the quartz tube. In addition, the detachable pipe head and pipe cylinder structure can be disassembled after synthesizing the gallium arsenide polycrystal, so that the synthesized gallium arsenide polycrystal rod can be taken out, thereby greatly increasing the reuse rate of the gallium boat and reducing the actual production cost of the enterprise. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 is a structural schematic view of the gallium boat provided by the embodiment of the utility model;

[0019] Figure 2 is an exploded schematic view of the body provided by the embodiment of the utility model;

[0020] Figure 3 is a structural schematic view of the base provided by the embodiment of the utility model;

[0021] Figure 4 is a structural schematic view of the handle provided by the embodiment of the utility model;

[0022] In the figure, 1, the body; 11, the pipe head; 12, the pipe cylinder; 13, the slot; 2, the handle; 21, the arc-shaped slot; 22, the gripping hole; 3, the base; 31, the heat conduction hole. DETAILED DESCRIPTION

[0023] The specific embodiments of the present application are described in further detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present application, but are not used to limit the scope of the present application.

[0024] As shown in the drawings, Figures 1 to 3 The present application provides a gallium boat for synthesizing gallium arsenide, which comprises a body 1, a handle 2 and a base 3, the body 1 is installed on the base 3, and the base 3 has a plurality of heat conduction holes 31 penetrating through both sides thereof, which promotes the uniform distribution of heat and ensures that each part of the gallium boat can obtain sufficient heat during the reaction process, thereby avoiding product quality problems caused by local overheating or uneven cooling. In addition, good heat conduction performance also helps to speed up the cooling process and shorten the production cycle. The body 1 comprises a pipe cylinder 12 and two pipe heads 11, the two pipe heads 11 are arranged at both ends of the pipe cylinder 12 and are detachably connected with the pipe cylinder 12, which not only facilitates cleaning and maintenance, but also facilitates replacement of damaged parts, thereby improving the flexibility and reusability of the equipment. When a certain component is worn or damaged, the entire gallium boat does not need to be replaced, but only the corresponding assembly needs to be replaced, thereby saving costs. The pipe head 11 and the pipe cylinder 12 together form a reaction cavity for placing raw materials (such as gallium and arsenic), so that the raw materials can react in one space, avoiding interference from external impurities. The pipe cylinder 12 is provided with a slot 13 in communication with the reaction cavity for adding arsenic. The handle 2 is connected with the body 1, which facilitates safe movement of the gallium boat by the operator in a high-temperature environment, especially when the gallium boat is taken out of the quartz tube after the synthesis reaction is completed, thereby reducing the operation difficulty and improving the work efficiency.

[0025] In this embodiment, the heat conduction holes 31 on the base 3 allow heat to be transmitted to the bottom of the gallium boat through the holes, so that the gallium boat is uniformly heated. When synthesizing gallium arsenide polycrystal, gallium and arsenic can react more fully, and the incomplete reaction caused by local overheating is reduced, thereby avoiding a large number of notches at the bottom of the synthesized gallium arsenide polycrystal rod and preventing the adhesion of the quartz boat and the quartz tube. In addition, the detachable structure of the pipe head 11 and the pipe cylinder 12 allows the pipe head 11 to be detached after the synthesis of gallium arsenide polycrystal, so that the synthesized gallium arsenide polycrystal rod can be taken out, thereby greatly increasing the reusability of the gallium boat and reducing the actual production cost of the enterprise.

[0026] Further, the heat conduction holes 31 are provided in multiple numbers, and the multiple heat conduction holes 31 are arranged at intervals along the length direction of the base 3 and at intervals along the width direction of the base 3. In this embodiment, the multiple heat conduction holes 31 are provided, so that there are more paths on the base 3 to conduct heat, thereby improving the overall heat conduction efficiency and ensuring that the base 3 and the body 1 (especially the reaction cavity) can be uniformly heated. In addition, the interval arrangement of the heat conduction holes 31 can ensure that the heat is uniformly distributed in the entire length direction and the width direction, thereby avoiding overheating or overcooling in some areas.

[0027] Further, the diameter of the heat conduction hole 31 is 30-45 mm to provide a larger heat conduction area, improve the heat conduction efficiency, and ensure that heat can be quickly transferred to the base 3 and the body 1, especially to achieve uniform heating in the reaction cavity; if the diameter is too large, the mechanical strength of the base 3 can be weakened, causing the base 3 to easily deform or break at high temperatures; if the diameter is too small, the heat conduction effect can be reduced; the interval between two adjacent heat conduction holes 31 is 40-50 mm, which can ensure the strength of the base 3 and also ensure uniform distribution of heat on the base 3, avoiding overheating or overcooling in some areas. If the interval is too small, the heat conduction holes 31 can be too dense, which can cause local overheating; if the interval is too large, the heat distribution can be uneven.

[0028] Further, the tube 12 is cylindrical, which can ensure uniform distribution of heat in all directions, avoiding local overheating or overcooling, thereby improving the uniformity of heating; in addition, the circular structure allows the synthesized crystal rod to have the shape of an equal-diameter circular cake, which can facilitate segmented growth during single crystal growth, ensuring that each segmented crystal rod has the same diameter, thereby improving the uniformity and quality of the single crystal; during single crystal growth, the irregularity of the material block can easily cause the crucible to tilt, thereby affecting the growth of the single crystal. This structure can reduce problems caused by the tilted growth of the crystal rod, improve the crystal yield of single crystal growth, and the tube head 11 is conical, allowing the two tapered ends of the synthesized gallium arsenide polycrystal to be directly inserted into the crucible, greatly increasing the stability of the crucible after loading, thereby improving the crystal yield of the single crystal.

[0029] Further, the ratio of the length of the tube head 11 to the length of the tube is 0.12-0.5, and an appropriate length of the tube head 11 can ensure the sealing of the reaction cavity, preventing gas leakage during the reaction or the entry of external impurities, which can affect the purity and quality of the reaction. The length ratio of the tube head 11 is between 0.12-0.5, which can ensure uniform distribution of heat in the transition zone between the tube head 11 and the tube, avoiding local overheating or overcooling, and improving the uniformity of heating. In addition, a longer tube can accommodate more raw materials, thereby producing a longer gallium arsenide polycrystal rod in one synthesis process, improving the yield of single production. It should be noted that the taper of the tube head 11 in this embodiment is 50-70°, which can reduce the resistance when the formed gallium arsenide polycrystal is loaded.

[0030] Further, the tube 12 and the tube head 11 are connected by threads, so that the tube head 11 can be easily detached from the tube 12, facilitating cleaning and maintenance. After the completion of the synthesis reaction, the tube head 11 can be quickly detached, and the residue in the reaction cavity can be cleaned, ensuring the cleanliness for the next synthesis. The threaded connection also allows the tube head 11 to be quickly installed back on the tube 12, reducing operation time and labor intensity, and improving production efficiency. In addition, the threaded connection can ensure the tight connection between the tube 12 and the tube head 11, preventing gas leakage or external impurities from entering the reaction cavity during the reaction, affecting the purity and quality of the reaction.

[0031] As shown in Figure 4 the end of the handle 2 towards the body 1 has an arc-shaped slot 21 to cooperate with the tube 12 of the body 1, playing a positioning and supporting role, ensuring the accurate position of the handle 2 during installation, preventing the handle 2 from deforming or falling off due to uneven stress in a high-temperature environment. In addition, the arc-shaped structure can reduce the contact area between the handle 2 and the body 1, thereby reducing the risk of heat being transferred from the handle 2 to the operator's hand, and improving the safety of operation.

[0032] The end of the handle 2 away from the body 1 has a gripping hole 22, which facilitates the operator to pass his fingers through the hole and firmly grasp the handle 2, ensuring the stability during moving or taking out the gallium boat. In addition, the gripping hole 22 can also be used to hang the gallium boat at a designated position, facilitating storage and management, and reducing the occupied space.

[0033] Further, the handle 2 and the body 1 are detachably connected. In some embodiments, the detachable connection can be a snap connection, for example, the handle 2 has a snap, and the body 1 has a snap groove matched with the snap. By inserting the snap on the handle 2 into the snap groove on the body 1, the connection between the handle 2 and the body 1 is achieved. If the handle 2 is damaged and needs to be removed or replaced, only the snap needs to be disassembled, and a new handle 2 needs to be replaced, without the need to replace the entire device, thereby reducing the maintenance cost. In some embodiments, the detachable connection can also be a threaded connection, for example, the handle 2 and the body 1 have threaded holes, and the handle 2 and the body 1 are connected by a screw joint. The screw joint is inserted through the threaded hole on the handle 2 and screwed into the threaded hole on the body 1, achieving the connection between the handle 2 and the body 1. Similarly, if the handle 2 is damaged and needs to be removed or replaced, only the screw joint needs to be disassembled, and a new handle 2 needs to be replaced, without the need to replace the entire device, thereby reducing the maintenance cost.

[0034] Further, the base 3 and the tube 12 are of an integrated structure, eliminating the connection point between the base 3 and the tube 12, reducing the problems caused by loose or failed connection, and making the entire device more stable in a high-temperature environment, less likely to deform or be damaged. In addition, the integrated structure ensures uniform heating.

[0035] In summary, the utility model discloses a gallium boat, through the heat conduction hole 31 on the base 3, make heat through the hole to the bottom of gallium boat, make gallium boat even heating, when the synthesis of gallium arsenide polycrystal, make gallium and arsenic can be more fully reacted, make heating more even, reduce the incomplete reaction of local overheating, to avoid the synthesis of gallium arsenide polycrystal crystal bar bottom a large number of notches, prevent the situation of quartz boat and quartz tube adhesion simultaneously. In addition, detachable pipe head 11 and the structure of pipe cylinder 12, after the synthesis of gallium arsenide polycrystal, can be taken out through the dismounting pipe head 11, thereby the synthesis of gallium arsenide polycrystal crystal bar, thereby greatly increase the reusability of gallium boat, reduce the actual production cost of enterprise.

[0036] The above only is the preferred implementation of the utility model, should point out, for the ordinary skill of the prior art, on the premise of not departing from the technical principle of the utility model, can also make a number of improvements and substitutions, these improvements and substitutions also should be considered the protection scope of the utility model.

Claims

1. A gallium boat, characterized by, The utility model relates to a reaction kettle, including body, handle and base, the body is installed on the base, and the base has a plurality of heat conduction holes set through both sides thereof, the body includes tube cylinder and two pipe heads, two pipe heads are set to both ends of the tube cylinder, and with the tube cylinder detachable connection, the pipe head and the tube cylinder jointly enclose and form reaction cavity, the tube cylinder is provided with the notch that communicates with the reaction cavity, the handle is connected with the body.

2. The gallium boat of claim 1, wherein, The heat conduction holes have multiple, multiple heat conduction holes are spaced apart along the length direction of the base, and multiple heat conduction holes are spaced apart along the width direction of the base.

3. The gallium boat of claim 1, wherein, The aperture of the heat conduction hole is 30-45mm, and the interval between adjacent two heat conduction holes is 40-50mm.

4. The gallium boat of claim 1, wherein, The ratio of the length of the pipe head to the length of the tube cylinder is 0.12-0.

5.

5. The gallium boat of claim 1, wherein, The tube cylinder is cylindrical, and the pipe head is conical.

6. The gallium boat of claim 1, wherein, The taper of the pipe head is 50-70°.

7. The gallium boat of claim 1, wherein, The pipe head and the tube cylinder are threadedly connected.

8. The gallium boat of claim 1, wherein, The end of the handle towards the body has an arc-shaped groove, and the end of the handle away from the body has a lifting hole.

9. The gallium boat of claim 8, wherein, The handle and the body are detachably connected, The handle has a buckle, and the body has a buckle groove matched with the buckle; or, The handle and the body have threaded holes, and the handle and the body are connected through a screwing piece.

10. The gallium boat of claim 1, wherein, The base and the tube cylinder are of an integral structure.

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