Air floatation optical platform vibration isolator with three-line pendulum horizontal vibration isolation function

Abstract

The utility model provides an air floating optical platform vibration isolator with three-line pendulum horizontal vibration isolation, which comprises a shell and an air spring, the shell is nested on the outer side of the air spring, and the shell is connected with the air spring through a swing rod; the air spring is suspended in the shell with the help of the swing rod, the air spring does not make direct contact with the shell, and the stability of the air spring is maintained through pulling force provided by the swing rod. The air spring supports the table top where the optical equipment platform is arranged, and the side, away from the table top where the optical equipment platform is arranged, of the shell is connected with the basic table top. The three-line pendulum is designed to be in a flexible connection mode, the stability of the system in the vertical direction is guaranteed, transmission of horizontal vibration is effectively relieved, vertical vibration and horizontal vibration are restrained at the same time in cooperation with the damping springs, and the overall vibration isolation effect is improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of damping, especially, relate to a gas float optical platform vibration isolator with three-line swing horizontal vibration isolation. BACKGROUND

[0002] An optical bench is a rigid platform used to support vibration-sensitive equipment. A typical optical bench consists of two faceplates and a lightweight honeycomb core, forming a sandwich structure. Due to its high stiffness-to-weight ratio, these platforms are widely used in optical research and high-precision manufacturing, often in combination with pneumatic vibration isolators.

[0003] The existing pneumatic vibration isolator design mainly focuses on the vertical direction, resulting in ineffective suppression of horizontal vibration, which may even be amplified. In a multi-directional vibration environment, only vertical vibration can be suppressed, and the overall vibration isolation performance may be uneven. Additional equipment is needed to compensate for horizontal vibration, increasing the complexity and cost of the system. In a strong horizontal vibration environment, the adaptability of the pneumatic vibration isolator is poor, affecting its performance. In the face of rapidly changing vibrations, a single-direction vibration isolator may not respond in time, affecting stability. SUMMARY

[0004] The utility model provides a gas float optical platform vibration isolator with three-line swing horizontal vibration isolation, aiming to solve the problem of poor adaptability of the pneumatic vibration isolator in the current strong horizontal vibration environment, and the single-direction vibration isolator may not respond in time, affecting stability.

[0005] The utility model is realized in this way, a gas float optical platform vibration isolator with three-line swing horizontal vibration isolation, comprising:

[0006] The shell is nested on the outside of the air spring, and the shell and the air spring are connected through the swing rod. The air spring is suspended inside the shell with the help of the swing rod, and the air spring does not have direct contact. The stability of the air spring is maintained by the tension provided by the swing rod. The air spring supports the platform of the optical equipment, and the side of the shell away from the platform of the optical equipment is connected with the base platform.

[0007] One end of the air spring is provided with a groove, the bottom of the groove is provided with an elastic sealing film, a piston and a piston connector are arranged on the elastic sealing film, the elastic sealing film is connected to the top of the air spring, and the piston and the piston connector are assembled and pressed on the elastic sealing film. The air spring is connected with the platform of the optical equipment through the pressure-bearing part.

[0008] Preferably, the pressure-bearing part comprises a piston, an elastic sealing film and a piston connector, the elastic sealing film is connected to the top of the air spring, and the piston and the piston connector are assembled and connected to the elastic sealing film; the end face of the piston away from the air spring mainly serves as a support surface of the device platform, and when vibration is generated, the piston and the piston connector absorb external energy and transmit the energy to the air spring through the elastic sealing film, so that the air spring absorbs the longitudinal vibration.

[0009] Preferably, the air spring is provided with an end plate for connecting the swing rod, and the end plate is arranged in an annular array on the air spring and is arranged at an end of the air spring away from the pressure-bearing part.

[0010] The shell is a cylindrical structure provided with a port at the top, the inner wall of the shell is provided with a connecting seat for connecting the swing rod, the connecting seat is arranged in an annular array on the inner wall of the shell, and the connecting seat is arranged close to the inner wall of the shell on the side of the port.

[0011] The number of the end plate and the connecting seat is three groups, and the positions of the end plate and the connecting seat are one-to-one corresponding, the number of the end plate and the connecting seat is the lowest three groups based on the principle of the three-line swing, and the end plate and the connecting seat serve as the connecting end points of the swing rod, so that the shell and the air spring can form a basic three-line swing structure.

[0012] Preferably, the swing rod is a steel cable, the steel cable has a certain deformation capacity, can realize flexible connection between the end plate and the connecting seat, and thus the capacity of the air-floating optical platform vibration isolator with three-line swing horizontal vibration isolation for absorbing horizontal vibration is improved.

[0013] Preferably, the air spring is internally provided with a laminar flow damping.

[0014] Compared with the prior art, the embodiment of the present application has the following beneficial effects:

[0015] 1. The air-floating optical platform vibration isolator with three-line swing horizontal vibration isolation provided by the utility model is designed in a flexible connection mode through three-line swing, not only ensures the vertical stability of the system, but also effectively relieves the transmission of horizontal vibration, simultaneously suppresses vertical and horizontal vibration through cooperation of damping springs, and improves the overall vibration isolation effect.

[0016] 2. The air-floating optical platform vibration isolator with three-line swing horizontal vibration isolation provided by the utility model adopts a modular structure design for the shell and the internal air spring, facilitates installation, maintenance and replacement; such a design reduces construction steps, simplifies the production and maintenance process, and reduces system complexity. DETAILED DESCRIPTION

[0017] Fig. 1It is a structure schematic view of the air floating optical platform vibration isolator with three-line pendulum horizontal vibration isolation provided by the utility model.

[0018] Fig. 2 It is an internal structure schematic view of the air floating optical platform vibration isolator with three-line pendulum horizontal vibration isolation provided by the utility model.

[0019] Fig. 3 It is an air spring and cycloidal structure schematic view of the air floating optical platform vibration isolator with three-line pendulum horizontal vibration isolation provided by the utility model.

[0020] Mark explanation:

[0021] 1, isolator shell;2, air spring;3, cycloid;4, piston;5, elastic sealing membrane;6, piston connector;7, laminar flow damping;8, end plate. Specific implementation

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used in the description herein is for describing particular embodiments only and is not intended to be limiting of the application; the description and the drawings are to be regarded as illustrative in nature and are not intended to limit the application; the terminology used in the description and the claims of the present application and the above description of drawings includes the terms "comprising", "having" and "including" and their variations thereof and is intended to cover the non-exclusive inclusion; the terms "first", "second" and the like in the description and the claims of the present application and the above description of drawings are used to distinguish different objects and are not intended to describe a particular order.

[0023] In this paper, "embodiment" means that the specific features, structures or characteristics described in conjunction with the embodiment can be included in at least one embodiment of the application. The phrase appears in the specification does not necessarily refer to the same embodiment, nor is it independent or alternative to other embodiments. Those skilled in the art explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0024] The utility model embodiment provides a kind of air floating optical platform vibration isolator with three-line pendulum horizontal vibration isolation, as shown in Figs. 1-3 The air floating optical platform vibration isolator with three-line pendulum horizontal vibration isolation includes:

[0025] Shell 1 and air spring 2, shell 1 and air spring 2 are flexibly connected by adopting swing rod 3 made of steel cable, in general case, optical platform table top does not contact shell 1, all load from optical platform table top is borne by air spring 2, the inherent elasticity of air spring 2 has good isolation effect on vertical vibration, and horizontal vibration can be isolated by three-line pendulum structure consisting of shell 1, air spring 2 and swing rod 3.

[0026] The flexible connection of the three-line pendulum enables the system to effectively control the degree of freedom of vibration, allowing the structure to have flexibility in different directions, thereby reducing the transmission of horizontal vibration and achieving the effect of vibration isolation. This design can simultaneously suppress vertical and horizontal vibrations, improving overall vibration isolation performance.

[0027] The air spring 2 is provided with an end plate 8 for connecting the pendulum rod 3, which is arranged in a ring array on the air spring 2, and the end plate 8 is arranged at the end of the air spring 2 away from the pressure-bearing part. The outer shell 1 is a cylindrical structure with a port at the top, and the inner wall of the outer shell 1 is provided with a connecting seat for connecting the pendulum rod 3, which is arranged in a ring array on the inner wall of the outer shell 1 and is arranged near the inner wall of the side of the outer shell 1 close to the port. The number of end plates 8 and connecting seats is three, and the positions of the end plates 8 and connecting seats correspond one by one.

[0028] In this embodiment, the three-line pendulum is designed in a flexible connection mode, which not only ensures the vertical stability of the system, but also effectively alleviates the transmission of horizontal vibration, improving the overall vibration isolation effect. The air spring 2 can automatically adjust its internal air pressure according to the change of the load, thereby maintaining good vibration isolation effect, adapting to the needs of equipment of different weights and working states, and enhancing the versatility and practicality of the system.

[0029] The outer shell 1, air spring 2 and more pendulum rods 3 can also form a multi-line pendulum structure, which has a longer length and a lower frequency than the three-line pendulum structure, thereby achieving better horizontal vibration isolation capability.

[0030] In this embodiment, the outer shell 1 and the internal air spring 2 adopt a modular structure design, which is convenient for installation, maintenance and replacement. Such design reduces the construction steps, simplifies the production and maintenance process, and reduces the complexity of the system.

[0031] As a preferred embodiment in this embodiment, referring to Fig. 2 , one end of the air spring 2 is also provided with a pressure-bearing part, and the end of the air spring 2 provided with the pressure-bearing part is provided with a groove, and the bottom of the groove is an elastic sealing film 5, which is connected with the air spring 2, and the pressure-bearing part extends out of the outer shell 1. The pressure-bearing part can also be an accessory structure;

[0032] When the pressure bearing part is an accessory structure, the air spring 2 is provided with a groove accommodating the pressure bearing part; the elastic sealing film 5 is provided with a piston 4 and a piston connector 6, both of which are prior art, the piston connector 6 is located inside the air spring 2, the piston connector 6 passes through the center of the elastic sealing film 5 and is assembled and connected with the piston 4, and the piston 4 and the piston connector 6 respectively apply clamping force to the elastic sealing film 5 from both sides of the elastic sealing film 5 and complete the sealing connection; the end surface of the piston 4 away from the air spring 2 mainly serves as a support surface of the equipment platform, when external vibration is generated, the air spring 2 absorbs the vibration to avoid the transmission of external vibration to the piston 4 and the piston connector 6, and the air spring 2 absorbs the longitudinal vibration;

[0033] As a preferred embodiment in the present embodiment, the air spring 2 is internally provided with a laminar flow damper 7, which is made of porous metal particles;

[0034] In the present embodiment, unlike a single throttling hole, the laminar flow damper design contains a considerable number of air flow holes, which increases the air flow resistance and helps to maintain laminar flow, thereby obtaining higher damping.

[0035] It should be noted that, for the foregoing embodiments, in order to simply describe, they are all expressed as a series of action combinations, but those skilled in the art should know that the present application is not limited by the described action sequence, because according to the present application, certain steps can be performed in other order or simultaneously. Secondly, those skilled in the art should also know that the embodiments described in the specification all belong to preferred embodiments, and the actions and modules involved are not necessarily necessary for the present application.

[0036] The above embodiments are only used to illustrate the technical solutions of the present application, and not to limit the protection scope of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all. Based on these embodiments, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application. Although the present application has been described in detail with reference to the above embodiments, those skilled in the art can still combine, delete or make other adjustments to the features in the embodiments of the present application according to the circumstances without making creative labor, so as to obtain different other technical solutions which do not deviate from the concept of the present application in essence. These technical solutions also belong to the scope of the present application to be protected.

Claims

1. An air floated optical platform isolator having three wire pendulous horizontal isolation, characterized in that, The utility model relates to a kind of air spring and shell, comprising: Shell and air spring, the shell is nested in the outside of air spring, it is connected between the shell and air spring by swing bar, no direct contact between the air spring and shell occurs; The air spring is further provided with pressure-bearing part at one end, the pressure-bearing part extends out of shell, one end of the swing bar is connected with the air spring away from the end of pressure-bearing part, the other end of the swing bar is connected with the inner wall of shell.

2. The gas float optical platform vibration isolator with three-line pendulum horizontal isolation according to claim 1, characterized in that, The air spring is provided with groove at one end, the bottom of the groove is provided with elastic sealing film, piston and piston connector are arranged on the elastic sealing film, the elastic sealing film is connected at the top of air spring, the piston and piston connector are assembled and pressed on the elastic sealing film.

3. The gas float optical platform vibration isolator with three-line pendulum horizontal isolation according to claim 2, characterized in that, The air spring is provided with end plate for connecting swing bar, the end plate is annularly arranged on the air spring, and the end plate is arranged at the end of air spring away from the pressure-bearing part.

4. The gas float optical platform vibration isolator with three-line pendulum horizontal isolation according to claim 3, characterized in that, The shell is cylindrical structure with port at top, the inner wall of the shell is provided with connecting seat for connecting swing bar, the connecting seat is annularly arranged on the inner wall of the shell, and the connecting seat is arranged close to the inner wall of the side of shell port.

5. The gas float optical platform vibration isolator with three-line pendulum horizontal isolation according to claim 4, characterized in that, The number of swing bar, end plate and connecting seat is three groups.

6. The gas float optical platform vibration isolator with three-line pendulum level vibration isolation according to claim 5, characterized in that, The position of end plate and connecting seat is one-to-one corresponding.

7. The gas float optical platform vibration isolator with three-line pendulum horizontal vibration isolation according to claim 6, characterized in that, The swing bar is steel cable.

8. The gas float optical platform vibration isolator with three-line pendulum horizontal vibration isolation according to claim 7, characterized in that, The air spring is provided with laminar flow damping inside.

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