Atmosphere annealing gas uniformizing mechanism

Abstract

The utility model discloses an atmosphere annealing gas uniformizing mechanism which comprises a blowing pipe, blowing holes are evenly formed in the blowing pipe in the length direction, the blowing holes are located on the upper side of a substrate so as to blow the surface of the substrate, the blowing holes are located on the substrate, blowing is even, the atmosphere annealing gas uniformizing mechanism further comprises an air draft mechanism for generating negative pressure, and the air draft mechanism can enable equipment to generate negative pressure. The blowing holes are evenly formed in the blowing pipe, it is guaranteed that airflow is even, the blowing holes are attached to the surface of the substrate, and the effect is better. The exhaust pipe is arranged on the opposite side of the blowing pipe, so that internal impurity gas can be conveniently exhausted, and the purity is ensured. The diameter of the exhaust hole is larger than that of the blowing hole, and exhaust efficiency is guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of atmosphere annealing gas distribution mechanism, concretely to atmosphere annealing gas distribution mechanism. BACKGROUND

[0002] Atmosphere annealing equipment is a kind of heat treatment process that slowly heats to a certain temperature in heating furnace, passes in process-required gas, keeps warm for a period of time, and then cools at suitable speed.Atmosphere annealing in the market, air blowing is uneven, which reduces the effect, therefore, how to make air intake more uniform and blow on the surface of substrate is an urgent problem for the technical personnel in the field. SUMMARY

[0003] The utility model discloses an atmosphere annealing gas distribution mechanism to solve the problems in the above background.

[0004] To achieve the above object, the utility model provides the following technical scheme: an atmosphere annealing gas distribution mechanism, including blow pipe, the blow pipe is evenly provided with blowhole along the length direction, and blowhole is located on the upside of substrate to blow the surface of substrate, and blowhole is on the surface of substrate, and air blowing is uniform, also include the air extraction mechanism of generating negative pressure, and the air extraction mechanism can make equipment generate negative pressure.

[0005] Preferably, the blowhole is arranged on the surface of the substrate. The surface is swept along the surface.

[0006] Preferably, the air extraction mechanism includes an air extraction pipe, and the air extraction pipe is provided with an air extraction hole. The air extraction pipe is connected with an air extraction device, which can be a vacuum pump.

[0007] Preferably, the air extraction pipe is arranged on the opposite side of the blow pipe. The impurity gas in the cavity is blown to the side of the air extraction pipe through the blow pipe, and is extracted through the air extraction hole. Compared with being arranged on one side, the two are opposite, and it is easier to discharge.

[0008] Preferably, the diameter of the air extraction hole is greater than the diameter of the blowhole. In this way, the gas is more easily discharged.

[0009] Preferably, the diameter of the air extraction hole is 4-5 times the diameter of the blowhole. The cross section of the blow pipe is square, and the air extraction hole can be arranged one by one corresponding to the blowhole.

[0010] Preferably, the air extraction hole is in the shape of a long strip along the length direction. The air extraction hole can be arranged in the shape of a long strip, which is equivalent to connecting multiple air extraction holes together.

[0011] Preferably, the blow pipe is fixed by lugs at both ends. It is convenient to install.

[0012] Compared with the prior art, the utility model has the advantages that:

[0013] The blowholes arranged on the blow pipe are uniformly arranged to ensure uniform airflow, and the blowholes are attached to the surface of the substrate, and the effect is better.

[0014] The air extraction pipe is arranged on the opposite side of the blow pipe, so that the internal impurity gas can be extracted, and the purity is ensured.

[0015] The diameter of the air extraction hole is greater than that of the blowhole, so that the air extraction efficiency is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0016] Fig. 1 It is the first axis side view of the utility model;

[0017] Fig. 2 It is the second axis side view of the utility model;

[0018] Fig. 3 It is the first axis side view of the utility model on the main body equipment;

[0019] Fig. 4 It is the second axis side view of the utility model on the main body equipment,

[0020] In the drawing: 1, blow pipe; 2, blowhole; 3, air extraction pipe; 4, air extraction hole; 5, lug. EMBODIMENT

[0021] The technical scheme in the embodiments of the utility model will be described clearly and completely below in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.

[0022] Please refer to Figs. 1 to 4 The utility model provides a kind of atmosphere annealing air distribution mechanism technical scheme: a kind of atmosphere annealing air distribution mechanism, including blow pipe 1, one end of blow pipe 1 is connected with air inlet equipment, provides required gas, blow pipe 1 is fixed by lug 5 in two ends. It is convenient to install. Blow pipe 1 is uniformly opened along the length direction and is provided with blowhole 2, and blowhole 2 is located on the upper side of substrate to blow the surface of substrate, and blowhole 2 is on the surface of substrate, and the air is uniform, and it further includes the air extraction mechanism of generating negative pressure, and the air extraction mechanism can make equipment generate negative pressure. Blowhole 2 is attached to the surface of substrate. It is attached to the surface and blows along the surface.

[0023] The air exhaust mechanism comprises an air exhaust pipe 3, and the air exhaust pipe 3 is provided with an air exhaust hole 4. The air exhaust pipe 3 is connected with an air exhaust device, which can be a vacuum pump. The air exhaust pipe 3 is arranged at the opposite side of the blowing pipe 1. The blowing pipe 1 blows the impurity gas in the cavity to the side of the air exhaust pipe 3, and the impurity gas is exhausted through the air exhaust hole 4. The blowing pipe 1 is arranged at one side, and the air exhaust pipe 3 is arranged at the opposite side, so that the impurity gas is more easily exhausted. The diameter of the air exhaust hole 4 is greater than the diameter of the blowing hole 2. In this way, the gas is more easily exhausted. The diameter of the air exhaust hole 4 is 4-5 times the diameter of the blowing hole 2. The cross section of the blowing pipe 1 is square, and the air exhaust hole 4 can be arranged in one-to-one correspondence with the blowing hole 2. The air exhaust hole 4 is in the shape of a long strip along the length direction. The air exhaust hole 4 can be arranged in the shape of a long strip, which is equivalent to a plurality of air exhaust holes 4 connected together.

[0024] Working principle: The blowing holes 2 arranged on the blowing pipe 1 are uniformly arranged to ensure uniform airflow, and the blowing holes 2 are attached to the surface of the substrate, which is better. The air exhaust pipe 3 is arranged at the opposite side of the blowing pipe 1, which facilitates the exhaust of the impurity gas in the cavity and ensures the purity. The diameter of the air exhaust hole 4 is greater than the diameter of the blowing hole 2, which ensures the air exhaust efficiency.

[0025] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. An atmosphere annealing gas uniformizing mechanism characterized by comprising: The utility model provides a kind of negative pressure blowing device, including blow pipe (1), the blow pipe (1) is evenly provided with blowhole (2) along length direction, and blowhole (2) is located on the upside of substrate to blow and clean substrate surface, it further includes the air extraction mechanism of generating negative pressure, and blowhole (2) is attached on substrate surface arrangement; The air extraction mechanism includes air extraction pipe (3), and air extraction pipe (3) is provided with air extraction hole (4); Air extraction pipe (3) is arranged at the opposite side of blow pipe (1).

2. The atmosphere anneal uniformity mechanism of claim 1, wherein: The diameter of air extraction hole (4) is greater than the diameter of blowhole (2).

3. The atmosphere anneal uniformity mechanism of claim 2, wherein: The diameter of air extraction hole (4) is 4-5 times the diameter of blowhole (2).

4. The atmosphere anneal uniformity mechanism of claim 3, wherein: Air extraction hole (4) is long strip-shaped along the length direction.

5. The atmosphere anneal uniformity mechanism of claim 1, wherein: Blow pipe (1) is fixed by lug (5) at both ends.

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