Groove type wet process equipment structure

Abstract

The utility model relates to the technical field of single crystal solar cell groove type wet method cleaning, and discloses a groove type wet method equipment structure which comprises a liquid medicine groove, a flow uniformizing plate is installed at the bottom in the liquid medicine groove, and a plurality of sets of lower flower basket supports are distributed on the flow uniformizing plate in an array mode. The two diversion trench covers which are distributed in a split mode are installed at the groove opening end of the liquid medicine groove through rotating rods respectively, diversion faces are integrally formed at the top ends of the diversion trench covers, and liquid medicine flows on the diversion faces in the direction close to the rotating rods; a plurality of groups of upper flower basket supports with the same number as the lower flower basket supports are distributed at the top ends of the two diversion trench covers in an array manner; and the grabbing mechanical arm is located above the liquid medicine tank, the grabbing mechanical arm is used for grabbing each pair of wet-process flower baskets, and the grabbing mechanical arm is provided with a spraying device.

Description

TECHNICAL FIELD

[0001] The utility model relates to single crystal solar cell tank type wet cleaning technical field, concretely relates to a tank type wet equipment structure. BACKGROUND

[0002] The tank cover of the tank type wet equipment structure widely used at present is flat plate type tank cover, and the tank cover is opened and closed through a pneumatic pump. After the flower basket passes through the set process time in the liquid tank body, the tank cover is opened, the flower basket is hooked by the mechanical arm to the water tank for bubble overflow cleaning, so that the residual liquid is removed, and then the flower basket is hooked to the next liquid tank.

[0003] However, the current mode has the following deficiencies, first, in the production process, the residual liquid on the flower basket and the silicon wafer is easy to drop on the tank cover when the basket is lifted, resulting in dirty tank cover, and the dirt on the tank cover falls into the tank body after a long time, causing pollution; second, in mass production, the mechanical arm is not dispatched in time or the equipment is abnormal, etc. The material is blocked, because the number of water tanks is limited, so that all the flower baskets cannot be placed in the water tank, resulting in a large number of silicon wafer process time exceeding, which needs to be reworked, resulting in additional rework and labor cost; third, the interval time of the mechanical arm for hooking the flower basket from the liquid tank to the water tank is long, which is about 10-30s, and the residual liquid on the flower basket and the silicon wafer is easy to cause uneven reaction of the silicon wafer. UTILITY MODEL CONTENTS

[0004] In order to improve the above problems, the utility model discloses a tank type wet equipment structure, which comprises:

[0005] The liquid tank is provided with a flow uniformizing plate on the bottom, and a plurality of groups of lower flower basket supports are arranged on the flow uniformizing plate;

[0006] The two split type guide tank covers are respectively installed on the tank opening end of the liquid tank through rotary rods, the top end of the guide tank cover is integrally formed with a guide surface, and the liquid flows on the guide surface towards the rotary rod;

[0007] The top end of the two guide tank covers is arranged with a plurality of groups of upper flower basket supports, and the number of the upper flower basket supports is equal to that of the lower flower basket supports.

[0008] The grabbing mechanical arm is located above the liquid tank, and is used for grabbing each pair of wet flower baskets. The grabbing mechanical arm is provided with a spraying device.

[0009] Preferably, the number of the lower flower basket supports is four groups, each group of lower flower basket supports is composed of four lower supporting blocks, and each lower supporting block is arranged close to the bottom corner position of the wet flower basket.

[0010] Preferably, two groups of upper flower basket supports are distributed on the top of each guide trough cover, and each group of upper flower basket supports is composed of four upper support blocks, and each upper support block is arranged near the bottom corner of the wet flower basket.

[0011] Preferably, the guide surface is any one or more combinations of an inclined surface, an inner concave arc surface, and an outer convex arc surface.

[0012] Preferably, the rotating rod is rotatably mounted on the side end of the medicine liquid tank near the top position through a side mounting frame, the flipping motor is mounted on the side end of the medicine liquid tank, one of the spur gears in the pair of meshing spur gears is mounted on the end of the rotating rod, and the other spur gear is mounted on the output end of the flipping motor, and the guide groove cover is mounted on the rotating rod.

[0013] Preferably, the rotating rod drives the guide trough cover to flip to an angle of 0-90°.

[0014] Preferably, the guide trough cover, the lower flower basket support and the upper flower basket support are made of any one or more combinations of PP, PVDF, PTFE and carbon fiber.

[0015] Preferably, the spraying device comprises:

[0016] Bow-shaped mounting bracket, which can be detachably mounted on the grabbing robot arm;

[0017] An adjusting screw, with rotating blocks installed at both ends of the adjusting screw, and an adjusting block installed at the end of the rotating block away from the adjusting screw;

[0018] The spring rod has two ends mounted on the two vertical arms of the bow-shaped mounting frame through supporting legs. The spring rod passes through the adjusting block. The return spring is sleeved on the spring rod and is positioned between the adjusting block and the supporting legs.

[0019] Hexagonal turn block, which is installed at one end of the adjusting screw;

[0020] Adjustment plates, multiple adjustment plates are installed in parallel on the adjustment screw, and the nozzle is installed at the end of the adjustment plate away from the adjustment screw;

[0021] The limit rod is installed on the two vertical arms of the bow-shaped mounting frame and passes through the adjustment plate near the nozzle end;

[0022] The eccentric rotating block is arranged against the end of the adjusting plate close to the adjusting screw, and the eccentric rotating block is mounted on the upper rotating shaft, which is rotatably mounted on the middle cross arm of the bow-shaped mounting frame;

[0023] Motor 1 is installed on one of the vertical arms of the bow-shaped mounting frame, and the output end of motor 1 is connected to the upper rotating shaft.

[0024] Preferably, the adjustment plate is provided with a waist-shaped hole near the nozzle end for the limiting rod to pass through.

[0025] Preferably, the adjusting block is provided with a waist-shaped hole for the spring rod.

[0026] Compared with the prior art, the utility model has the advantages of:

[0027] The groove type wet process equipment structure provided by the utility model is improved on the basis of the existing groove type wet process equipment, has simple overall structure, is convenient to operate, and is very helpful for improving the stability of the wet process technology. In addition, for some processes with low cleaning effect requirements, such as silicon wafer polishing and rework cleaning, the groove type wet process equipment can not be provided with a special water tank, and only relies on a mechanical arm spraying device to replace the water tank, so that the number of groove bodies and water consumption can be significantly reduced, and the cost can be greatly saved. BRIEF DESCRIPTION OF DRAWINGS

[0028] In order to more clearly illustrate the specific embodiments of the utility model or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or the prior art description, and obviously, the drawings in the following description are some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0029] Figure 1 It is a structural schematic diagram of the utility model;

[0030] Figure 2 It is a top view of the liquid tank of the utility model;

[0031] Figure 3 It is a structural schematic diagram of the guide groove cover of the utility model Figure 1 (outer convex arc surface shape);

[0032] Figure 4 It is a structural schematic diagram of the guide groove cover of the utility model Figure 2 (inner concave arc surface shape);

[0033] Figure 5 It is a structural schematic diagram of the guide groove cover of the utility model Figure 3 (inclined surface shape);

[0034] Figure 6 It is a structural schematic diagram of the spraying device of the utility model.

[0035] In the figure: 1. grabbing mechanical arm; 2. spraying device; 3. wet basket; 4. guide groove cover; 5. rotating rod; 6. upper basket support; 7. liquid tank; 8. lower basket support; 9. uniform flow plate; 20. arc-shaped mounting bracket; 21. adjusting screw; 22. rotating block; 23. adjusting block; 24. spring rod; 25. return spring; 26. hexagonal rotating block; 27. adjusting plate; 28. spray head; 29. limiting rod; 30. eccentric rotating block; 31. motor; 32. waist-shaped hole. DETAILED DESCRIPTION

[0036] The technical solutions of the present application will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of the present application.

[0037] EMBODIMENT

[0038] The present application will be further described below in conjunction with the drawings.

[0039] As Figures 1 to 5 shown, the slot type wet process equipment structure provided by the embodiment comprises:

[0040] The liquid tank 7 is provided with the uniform flow plate 9 mounted on the inner bottom thereof, and a plurality of groups of lower basket supports 8 are arranged on the uniform flow plate 9;

[0041] The guide groove covers 4 are arranged in a split type and are respectively installed at the groove end of the liquid tank 7 through the rotating rods 5, the top end of the guide groove cover 4 is integrally formed with a guide surface, and the liquid flows on the guide surface towards the rotating rod 5;

[0042] The upper basket supports 6, the top end of the two guide groove covers 4 is arranged with a plurality of groups of upper basket supports 6 in an equal number to the lower basket supports 8;

[0043] The grabbing mechanical arm 1 is located above the liquid tank 7, and is used for grabbing each pair of wet process baskets 3, and the grabbing mechanical arm 1 is provided with the spraying device 2.

[0044] The working principle and beneficial effects of the above technical solution are:

[0045] The utility model discloses a kind of slot type wet process equipment structures, liquid medicine is stored in liquid medicine tank 7, rotating rod 5 drives flow guide groove cover 4 to overturn 90 ° upwards, grabbing mechanical arm 1 will every pair of wet process basket 3 be hung into lower basket support 8 located on uniform flow plate 9.The utility model provides a kind of slot type wet process equipment structures, it utilizes flow guide groove cover 4 with flow guide surface, make liquid medicine on flow guide groove cover 4 promptly discharge, can prevent flow guide groove cover 4 dirt;While flow guide groove cover 4 is attached with upper basket support 6, can directly place wet process basket 3, increase basket placement area, can reduce the probability of process overtime;And grabbing mechanical arm 1 is attached with spraying device 2, can promptly remove the residual liquid medicine of basket and silicon wafer.

[0046] In one embodiment, the number of lower basket supports 8 is four groups, each group of lower basket supports 8 is composed of four lower support blocks, and each lower support block is arranged near the bottom end corner position of the wet process basket 3.

[0047] In one embodiment, the top end of each flow guide groove cover 4 is distributed with two groups of upper basket supports 6, each group of upper basket supports 6 is composed of four upper support blocks, and each upper support block is arranged near the bottom end corner position of the wet process basket 3.

[0048] In one embodiment, the flow guide surface is any one or a combination of more of an inclined surface, an inner concave arc surface and an outer convex arc surface.

[0049] In one embodiment, the rotating rod 5 is rotatably installed on the side end of the liquid medicine tank 7 near the top end position through a side mounting bracket, the overturning motor is installed on the side end of the liquid medicine tank 7, one of the engaged pair of spur gears is installed on the end of the rotating rod 5, the other spur gear is installed on the output end of the overturning motor, and the flow guide groove cover 4 is installed on the rotating rod 5.

[0050] The working principle and beneficial effects of the above technical solution are as follows:

[0051] The overturning motor works, thereby driving the rotating rod 5 to rotate through the engaged pair of spur gears installed on the output end of the overturning motor, the rotating rod 5 drives the two flow guide groove covers 4 distributed in a pair of open to overturn upwards, thereby realizing the opening of the slot end of the liquid medicine tank 7, and after the overturning motor works in reverse, the rotating rod 5 drives the two flow guide groove covers 4 distributed in a pair of open to overturn downwards, thereby realizing the closing of the slot end of the liquid medicine tank 7.

[0052] In one embodiment, the overturning angle of the rotating rod 5 driving the flow guide groove cover 4 is 0-90 °.

[0053] In one embodiment, the materials of the flow guide groove cover 4, the lower basket support 8 and the upper basket support 6 are any one or a combination of more of PP, PVDF, PTFE and carbon fiber.

[0054] The technical scheme has the beneficial effects that:

[0055] The material is PP, PVDF, PTFE, carbon fiber, or other heat-resistant and acid-alkali corrosion-resistant materials.

[0056] As shown in Figure 6 In one embodiment, the spraying device 2 comprises:

[0057] An arc-shaped mounting frame 20 is detachably mounted on the grabbing mechanical arm 1.

[0058] An adjusting screw 21 is provided with a rotating block 22 at both ends, and the rotating block 22 is provided with an adjusting block 23 away from the end of the adjusting screw 21.

[0059] A spring rod 24 is mounted on the two vertical arms of the arc-shaped mounting frame 20 through the legs at both ends, the spring rod 24 penetrates the adjusting block 23, and a reset spring 25 is sleeved on the spring rod 24 and abuts between the adjusting block 23 and the leg.

[0060] A hexagonal rotating block 26 is mounted on one end of the adjusting screw 21.

[0061] A plurality of adjusting plates 27 are mounted side by side on the adjusting screw 21, and a spray head 28 is mounted on the adjusting plate 27 away from the end of the adjusting screw 21.

[0062] A limiting rod 29 is mounted on the two vertical arms of the arc-shaped mounting frame 20 and penetrates the adjusting plate 27 close to the spray head 28.

[0063] An eccentric rotating block 30 abuts against the adjusting plate 27 close to the end of the adjusting screw 21, and the eccentric rotating block 30 is mounted on an upper rotating shaft which is rotatably mounted on the middle horizontal arm of the arc-shaped mounting frame 20.

[0064] A motor 31 is mounted on one of the vertical arms of the arc-shaped mounting frame 20, and the output end of the motor 31 is connected with the upper rotating shaft.

[0065] The working principle and beneficial effects of the technical scheme are:

[0066] The adjusting screw 21 is rotated by a specific tool (like a wrench), and the adjusting screw 21 is rotated between the two rotating blocks 22, thereby driving the multiple adjusting plates 27 sleeved on the adjusting screw 21 to move in one direction synchronously, and the spray head 28 installed on the adjusting plate 27 is driven to move. The motor 31 is rotated, thereby driving the upper rotating shaft installed on the output end of the motor 31 to rotate, and the eccentric rotating block 30 installed on the upper rotating shaft is rotated, the eccentric rotating block 30 abuts against the adjusting plate 27, thereby driving the adjusting screw 21 connected with the adjusting plate 27, the rotating block 22 connected with the adjusting screw 21, and the adjusting block 23 connected with the rotating block 22 to move on the spring rod 24 in the direction of contraction of the return spring 25, thereby realizing that the spray head 28 connected with the adjusting plate 27 protrudes, and the adjustment of the spraying distance is realized. The middle cross arm of the arc-shaped mounting bracket 20 is detachably mounted on the grabbing mechanical arm 1 through the connecting bolt.

[0067] In one embodiment, the adjusting plate 27 is provided with a waist-shaped hole one 32 close to the end of the spray head 28, and the waist-shaped hole one 32 is convenient for the limiting rod 29 to pass through.

[0068] In one embodiment, the adjusting block 23 is provided with a waist-shaped hole two convenient for the spring rod 24 to pass through.

[0069] Obviously, the above embodiments are only examples for clearly illustrating, and are not limited to the embodiments. For those skilled in the art, other different forms of changes or variations can be made on the basis of the above description. All the embodiments do not need to be exhausted, and the obvious changes or variations derived therefrom are still within the protection scope of the present application.

Claims

1. A slot-die wet process apparatus configuration, characterized by, The utility model relates to a wet process basket automatic grabbing device, including: The utility model discloses a wet process basket automatic grabbing device, including: a liquid tank (7) is provided with a flow uniforming plate (9) on the bottom, and a plurality of groups of lower flower basket supports (8) are arranged on the flow uniforming plate (9); two guide groove covers (4) are arranged on the opening end of the liquid tank (7) through rotary rods (5), and the top end of the guide groove cover (4) is integrally formed with a guide surface, and the liquid flows to the rotary rod (5) on the guide surface; the top end of the two guide groove covers (4) is arranged with a plurality of groups of upper flower basket supports (6) in an array, and the number of the upper flower basket supports (6) is equal to that of the lower flower basket supports (8); a grabbing mechanical arm (1) is arranged above the liquid tank (7), and the grabbing mechanical arm (1) is used for grabbing each pair of wet process baskets (3); and the grabbing mechanical arm (1) is provided with a spraying device (2).

2. A slot-die wet process apparatus configuration according to claim 1, wherein, The number of the lower flower basket supports (8) is four groups, each group of the lower flower basket supports (8) is composed of four lower supporting blocks, and each lower supporting block is arranged close to the bottom edge corner position of the wet process basket (3).

3. A slot-die wet process apparatus configuration according to claim 2, wherein, The top end of each guide groove cover (4) is arranged with two groups of upper flower basket supports (6), each group of the upper flower basket supports (6) is composed of four upper supporting blocks, and each upper supporting block is arranged close to the bottom edge corner position of the wet process basket (3).

4. A slot-die wet process apparatus configuration according to claim 1, wherein, The guide surface is any one or a combination of the following: an inclined surface, an inner concave arc surface and an outer convex arc surface.

5. A slot-die wet process apparatus configuration according to claim 1, wherein, The rotary rod (5) is rotatably arranged on the side end of the liquid tank (7) close to the top end through a side mounting frame, a turnover motor is arranged on the side end of the liquid tank (7), one of a pair of straight gears is arranged on the end of the rotary rod (5), and the other straight gear is arranged on the output end of the turnover motor, and the guide groove cover (4) is arranged on the rotary rod (5).

6. A slot-die wet process apparatus configuration according to claim 5, wherein, The turnover angle of the guide groove cover (4) driven by the rotary rod (5) is 0-90 degrees.

7. A slot-die wet process apparatus configuration according to claim 1, wherein, The materials of the guide groove cover (4), the lower flower basket supports (8) and the upper flower basket supports (6) are any one or a combination of the following: PP, PVDF, PTFE and carbon fiber.

8. A slot-die wet process apparatus configuration according to claim 1, wherein, The spraying device (2) comprises: an arc-shaped mounting frame (20) detachably mounted on the grabbing mechanical arm (1); two ends of an adjusting screw rod (21) are provided with rotating blocks (22), and the rotating blocks (22) are provided with adjusting blocks (23) away from the ends of the adjusting screw rod (21); spring rods (24) are mounted on two vertical arms of the arc-shaped mounting frame (20) through legs at two ends, the spring rods (24) pass through the adjusting blocks (23), reset springs (25) are sleeved on the spring rods (24) and abut between the adjusting blocks (23) and the legs; a hexagonal rotating block (26) is mounted on one end of the adjusting screw rod (21); a plurality of adjusting plates (27) are installed side by side on the adjusting screw rod (21), and the adjusting plates (27) are provided with spray heads (28) away from the ends of the adjusting screw rod (21); limiting rods (29) are mounted on the two vertical arms of the arc-shaped mounting frame (20) and pass through the adjusting plates (27) close to the spray heads (28); eccentric rotating blocks (30) abut against the adjusting plates (27) close to the ends of the adjusting screw rod (21), the eccentric rotating blocks (30) are mounted on upper rotating shafts, and the upper rotating shafts are rotatably mounted on a middle horizontal arm of the arc-shaped mounting frame (20); a motor (31) is mounted on one of the vertical arms of the arc-shaped mounting frame (20), and an output end of the motor (31) is connected with the upper rotating shaft.

9. A slot-die wet process apparatus configuration according to claim 8, wherein, The adjusting plate (27) is provided with a waist-shaped hole (32) close to the end of the spray head (28) for the limiting rod (29) to pass through.

10. A slot-die wet process apparatus configuration according to claim 8, wherein, The adjusting block (23) is provided with a waist-shaped hole (32) for the spring rod (24) to pass through.

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