Ion source connecting device

Abstract

The utility model discloses an ion source connecting device which comprises an ion source mounting seat and a plurality of water-cooled electrodes, each water-cooled electrode comprises a flange, the ion source mounting seat comprises flange seats corresponding to the water-cooled electrodes respectively, and the flanges of the water-cooled electrodes are detachably connected with the flange seats of the ion source mounting seat through bolts.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of ion source, in particular to an ion source connecting device. BACKGROUND

[0002] With the continuous development of vacuum coating technology, how to improve the bonding strength of the film and the substrate has become a hot research topic. In the prior art, the bonding strength of the film layer and the substrate is usually improved by high pressure ion source assisted deposition, and the hardness and wear resistance of the film are also enhanced. Among them, the ion source mainly changes the properties and composition of the material surface by using the energy and momentum of the ion beam, so as to realize the processing and improvement of the material.

[0003] Figure 1 is the principle diagram of the existing ion source connecting device. As shown in Figure 1 , the existing ion source connecting device includes a cathode flange 1, an argon gas guide pipe 7, a shielding cover 8, a filament connecting column 9, a lower filament 10, an ion collecting electrode 11, a filament water cooling lead-in 12, a filament terminal column 13, an auxiliary support column 14 and a water joint 15. Figure 2 is a structural schematic diagram of the existing ion source connecting device. Figure 3 is a sectional view of the existing ion source connecting device. Figure 4 is Figure 3 the enlarged view of part A of the ion source connecting device shown in Figure 2 and Figure 3 As shown in Figure 4 , the ion source mounting seat includes a cathode flange 1 and a sealing cover 2, wherein the sealing cover 2 is provided with a water inlet (water outlet) 3. The water-cooled electrode includes an insulating tube 5, a pipe joint 4 and an argon gas guide pipe 7. Further, as shown in

[0004] Therefore, as can be seen from the above, since the existing water-cooled electrode and the ion source mounting seat are fixedly connected by welding (i.e., the insulating tube 5 and the pipe joint 4 are fixedly connected by welding through the solder 6, and the insulating tube 5 and the cathode flange 1 are fixedly connected by welding through the solder 6), once any one of the four water-cooled electrodes fails or is damaged, the ion source mounting seat needs to be replaced as a whole, thereby not only increasing the economic cost, but also causing resource waste.

[0005] In the prior art, the water-cooled electrode and the ion source mounting base are fixedly connected by welding, so that when any one of the plurality of water-cooled electrode seats fails or is damaged, the ion source mounting base needs to be replaced as a whole, thereby increasing the economic cost and causing resource waste. Utility model content

[0006] The utility model provides a kind of ion source connecting device, to at least solve the technical problems of prior art, the water-cooled electrode and the ion source mounting base are fixedly connected by welding, so that when any one of the plurality of water-cooled electrode seats fails or is damaged, the ion source mounting base needs to be replaced as a whole, thereby increasing the economic cost and causing resource waste.

[0007] According to one aspect of the present application, an ion source connecting device is provided, comprising: an ion source mounting base and a plurality of water-cooled electrodes, wherein the water-cooled electrode includes a flange, the ion source mounting base includes a flange seat corresponding to each water-cooled electrode, and the flange of the water-cooled electrode is detachably connected to the flange seat of the ion source mounting base by a bolt.

[0008] Optionally, the ion source mounting base further comprises a cathode flange, wherein the cathode flange is provided with a plurality of first connecting grooves, and the flange seat corresponding to each water-cooled electrode is fixedly connected to the cathode flange through the first connecting grooves.

[0009] Optionally, the cathode flange is provided with an annular cooling water groove, a waterproof piece is fixedly installed inside the cooling water groove, and the waterproof piece is used to divide the cooling water groove into a water inlet part and a water outlet part; the upper part of the cathode flange is provided with a fixedly connected sealing cover, and the sealing cover is provided with a water inlet and a water outlet; and the water inlet corresponds to the water inlet part, and the water outlet corresponds to the water outlet part.

[0010] Optionally, the water-cooled electrode further comprises a first connecting sleeve, an insulating tube, and an oxygen-free copper rod, wherein the oxygen-free copper rod is inserted into the inside of the flange, and the outside of the oxygen-free copper rod is sleeved with the insulating tube; and the insulating tube is fixedly connected to the flange through the first connecting sleeve.

[0011] Optionally, the water-cooled electrode further comprises a second connecting sleeve sleeved outside the insulating tube, wherein the second connecting sleeve is used to fixedly connect the insulating tube and the oxygen-free copper rod.

[0012] Optionally, the bottom of the oxygen-free copper rod is provided with a first connecting hole, and the first connecting groove of the cathode flange is provided with a first supporting piece, wherein the oxygen-free copper rod is inserted onto the first supporting piece of the cathode flange through the first connecting hole.

[0013] Optionally, a second connection hole is opened on the top of the oxygen-free copper rod, and the water-cooled electrode includes a pipe joint, wherein the pipe joint is fixedly connected to the oxygen-free copper rod through the second connection hole.

[0014] Optionally, the water-cooled electrode further includes: a water inlet and return pipe, wherein the water inlet and return pipe is inserted into the pipe joint and extends to the interior of the oxygen-free copper rod through the second connecting hole; and the water inlet and return pipe is connected to the oxygen-free copper rod through the pipe joint.

[0015] Optionally, it further includes: an argon gas conduit, the cathode flange is provided with a second connecting groove, and the argon gas conduit is fixedly connected to the second connecting groove of the cathode flange.

[0016] Optionally, a copper sealing ring is provided between the flange and the flange seat.

[0017] The present application provides an ion source connection device, wherein the ion source connection device includes an ion source mounting base and multiple water-cooled electrodes. The water-cooled electrodes include flanges, and the ion source mounting base includes flange seats corresponding to each water-cooled electrode. The flanges of the water-cooled electrodes are detachably connected to the flange seats of the ion source mounting base via bolts.

[0018] As can be seen from the foregoing, the water-cooled electrode in the present application includes a flange, and the ion source mounting base includes a flange base, so that the water-cooled electrode and the ion source mounting base can be detachably connected by bolts. Therefore, if any of the multiple water-cooled electrodes fails or is damaged, the failed or damaged water-cooled electrode can be removed from the flange base, and only the failed or damaged water-cooled electrode can be replaced.

[0019] Unlike the prior art in which the water-cooled electrode and the ion source mounting seat are fixedly connected by welding, and therefore the ion source mounting seat needs to be replaced as a whole when any water-cooled electrode in multiple water-cooled motor seats fails or is damaged, in the present application, only the failed or damaged water-cooled electrode needs to be replaced, thereby achieving the technical effect of reducing economic costs and waste of resources.

[0020] This solves the technical problem in the prior art that, since the existing water-cooled electrode and the ion source mounting seat are fixedly connected by welding, when any water-cooled electrode in a plurality of water-cooled motor seats is fixed or damaged, the ion source mounting seat needs to be replaced as a whole, which not only increases the economic cost but also causes waste of resources.

[0021] Based on the detailed description of the specific embodiments of the present application in conjunction with the accompanying drawings below, those skilled in the art will become more aware of the above and other purposes, advantages and features of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Some specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. The same reference signs in the drawings denote the same or similar components or parts. Those skilled in the art should understand that the drawings are not necessarily drawn to scale. In the drawings:

[0023] Figure 1 is a schematic diagram of a prior ion source connection device;

[0024] Figure 2 is a structural schematic diagram of a prior ion source connection device;

[0025] Figure 3 is a sectional view of a prior ion source connection device;

[0026] Figure 4 is a partial enlarged view of the ion source connection device shown in Figure 3

[0027] Figure 5 is a structural schematic diagram of an ion source connection device according to an embodiment of the present application;

[0028] Figure 6 is a sectional view of an ion source connection device according to an embodiment of the present application;

[0029] Figure 7 is a schematic diagram of a cathode flange according to an embodiment of the present application; and

[0030] Figure 8 is a schematic diagram of a sealing cover according to an embodiment of the present application. DETAILED DESCRIPTION

[0031] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0032] In order to enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor should belong to the protection scope of the present application.

[0033] ​It should be noted that the terms "first", "second", and the like in the description and claims of the utility model and the above drawings are used to distinguish similar objects, and do not have to be used to describe a specific order or sequence. It should be understood that the terms used in this way can be interchanged under appropriate circumstances, so that the embodiments of the utility model described herein. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, the process, method, system, product or equipment including a series of steps or units does not have to be limited to the clearly listed steps or units, but can include other steps or units that are not clearly listed or inherent to these processes, methods, products or equipment.

[0034] It should be noted that the terms used herein are only for the purpose of describing specific embodiments, and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form unless the context clearly indicates otherwise, and furthermore, it should be understood that when the terms "comprise" and / or "include" are used in the specification, there is a feature, step, operation, device, component and / or combination thereof.

[0035] Figure 5 It is a structural schematic diagram of the ion source connecting device according to the embodiments of the present application. Figure 6 It is a sectional view of the ion source connecting device according to the embodiments of the present application. Reference Figure 5 And Figure 6 As shown in FIGS. 1 and 2, an ion source connecting device includes an ion source mounting seat 10 and a plurality of water-cooled electrodes 20, wherein the water-cooled electrode 20 includes a flange 210, the ion source mounting seat 10 includes a flange seat 110 corresponding to each water-cooled electrode 20, and the flange 210 of the water-cooled electrode 20 is detachably connected to the flange seat 110 of the ion source mounting seat 10 by bolts.

[0036] As described in the background, since the existing water-cooled electrode and ion source mounting seat are fixedly connected by welding (i.e., the insulating pipe 5 and the pipe joint 4 are fixedly connected by welding, and the insulating pipe 5 and the cathode law 1 are fixedly connected by the solder 6 by welding), once any one of the four water-cooled electrodes fails or is damaged, the ion source mounting seat needs to be replaced as a whole, thereby not only increasing the economic cost, but also causing resource waste.

[0037] Therefore, the present application provides an ion source connecting device. The ion source connecting device includes an ion source mounting seat 10 and a plurality of water-cooled electrodes 20. Wherein, the water-cooled electrode 20 includes a flange 210, the ion source mounting seat 10 includes a flange seat 110 corresponding to each water-cooled electrode 20.

[0038] ReferenceFigure 4 And Figure 5 As shown in FIG. 10 and FIG. 11, the flange 210 and the flange seat 110 are both provided with a plurality of flange holes, and the flange holes of the flange 210 correspond to the flange holes of the flange seat 110 one by one, so that the flange 210 and the flange seat 110 can be detachably connected by using bolts, flange holes of the flange 210 and flange holes of the flange seat 110. Therefore, in the case that any one of the plurality of water-cooled electrodes 20 fails or is damaged, only the water-cooled electrode 20 that fails or is damaged can be detached from the flange seat 110, and only the water-cooled electrode 20 that fails or is damaged is replaced, and the water-cooled electrode 20 that does not fail or is not damaged is retained.

[0039] Therefore, unlike the prior art in which the water-cooled electrode 20 and the ion source mounting seat 10 are fixedly connected by welding, so that in the case that any one of the plurality of water-cooled electrodes 20 fails or is damaged, the ion source mounting seat 10 needs to be replaced as a whole, in the present application, only the water-cooled electrode 20 that fails or is damaged needs to be replaced, thereby achieving the technical effects of reducing economic cost and resource waste.

[0040] Further, the technical problem that in the prior art, the existing water-cooled electrode and the ion source mounting seat are fixedly connected by welding, so that in the case that any one of the plurality of water-cooled electrodes fails or is damaged, the ion source mounting seat needs to be replaced as a whole, thereby not only increasing the economic cost, but also causing resource waste is solved.

[0041] Optionally, the ion source mounting seat 10 further comprises a cathode flange 120, wherein the cathode flange 120 is provided with a plurality of first connecting grooves 121, and the flange seat 110 corresponding to each water-cooled electrode 20 is fixedly connected with the cathode flange 120 through the first connecting grooves 121.

[0042] Specifically, Figure 7 is a schematic view of the cathode flange 120 according to the embodiment of the present application. Referring to Figure 7 As shown in FIG. 10 and FIG. 11, the flange 210 and the flange seat 110 are both provided with a plurality of flange holes, and the flange holes of the flange 210 correspond to the flange holes of the flange seat 110 one by one, so that the flange 210 and the flange seat 110 can be detachably connected by using bolts, flange holes of the flange 210 and flange holes of the flange seat 110. Therefore, in the case that any one of the plurality of water-cooled electrodes 20 fails or is damaged, only the water-cooled electrode 20 that fails or is damaged can be detached from the flange seat 110, and only the water-cooled electrode 20 that fails or is damaged is replaced, and the water-cooled electrode 20 that does not fail or is not damaged is retained.

[0043] Optionally, the cathode flange 120 is provided with an annular cooling water groove 122, and a water isolation sheet 123 is fixedly installed inside the cooling water groove 122, and the water isolation sheet 123 is used to separate the cooling water groove 122 into a water inlet part 124 and a water outlet part 125; the upper part of the cathode flange 120 is provided with a fixedly connected sealing cover 130, and the sealing cover 130 is provided with a water inlet 131 and a water outlet 132; and the water inlet 131 corresponds to the water inlet part 124, and the water outlet 132 corresponds to the water outlet part 125.

[0044] Specifically, Figure 8 is a schematic view of the sealing cover 130 according to the embodiments of the present application. Referring to Figure 7 and Figure 8 , the cathode flange 120 is provided with an annular cooling water groove 122, and a water isolation sheet 123 is fixedly installed inside the cooling water groove 122. Thus, the water isolation sheet 123 can separate the cooling water groove 122 into two parts, a water inlet part 124 and a water outlet part 125. The upper part of the cathode flange 120 is provided with a fixedly connected sealing cover 130, and the sealing cover 130 is provided with a water inlet 131 and a water outlet 132. And wherein the water inlet part 124 corresponds to the water inlet 131, and the water outlet part 125 corresponds to the water outlet 132.

[0045] Thus, cooling water can be introduced into the water inlet part 124 of the cooling water groove 122 through the water inlet 131 on the sealing cover 130; and the cooling water can be extracted from the water outlet part 125 of the cooling water groove 122 through the water outlet 123 on the sealing cover 130. Thus, the circulation of the cooling water in the cooling water groove 122 in the cathode flange 120 can be ensured, thereby ensuring the normal operation of the ion source connecting device.

[0046] Optionally, the water-cooled electrode 20 further comprises a first connecting sleeve 220, an insulating tube 230 and an oxygen-free copper rod 240, wherein the oxygen-free copper rod 240 is inserted into the inside of the flange 210, and the outside of the oxygen-free copper rod 240 is sleeved with the insulating tube 230; and the insulating tube 230 is fixedly connected with the flange 210 through the first connecting sleeve 220.

[0047] Specifically, referring to Figure 5 and Figure 6 , the water-cooled electrode 20 comprises a first connecting sleeve 220, an insulating tube 230 and an oxygen-free copper rod 240. Wherein the oxygen-free copper rod 240 is inserted into the inside of the flange 210, and the outside of the oxygen-free copper rod 240 is sleeved with the insulating tube 230. Thus, in the case of failure or damage of any one of the plurality of water-cooled electrodes 20, the operator can remove the failed or damaged water-cooled electrode 20 from the flange seat 110 by holding the insulating tube 230.

[0048] In addition, the insulating tube 230 is fixedly connected to the flange 210 through the first connecting sleeve 220, so that the insulating tube 230 can be further fixed to prevent the insulating tube 230 from falling off.

[0049] Optionally, the water-cooled electrode 20 further includes: a second connecting sleeve 250 sleeved on the outside of the insulating tube 230 , wherein the second connecting sleeve 250 is used to fix the insulating tube 230 and the oxygen-free copper rod 240 .

[0050] Specifically, refer to Figure 5 and Figure 6 As shown, the water-cooled electrode 20 further includes a second connecting sleeve 250 sleeved on the outside of the insulating tube 230, wherein the second connecting sleeve 250 is arranged on the upper part of the insulating tube 230 relative to the first connecting sleeve 220. The second connecting sleeve 250 is connected to the insulating tube 230 and the oxygen-free copper rod 240 respectively, thereby fixing the insulating tube 230 on the oxygen-free copper rod 240 to prevent the insulating tube 230 from falling off.

[0051] Optionally, a first connection hole 241 is opened at the bottom of the oxygen-free copper rod 240, and a first support member 126 is provided in the first connection groove 121 of the cathode flange 120, wherein the oxygen-free copper rod 240 is inserted into the first support member 126 of the cathode flange 120 through the first connection hole 241.

[0052] Specifically, refer to Figure 5 and Figure 6 As shown, a first connection hole 241 is formed at the bottom of the oxygen-free copper rod 240, and a first support member 126 is provided in the first connection groove 121 of the cathode flange 120. The size of the first connection hole 241 is adapted to the size of the first support member 126. Therefore, when an operator mounts the water-cooled electrode 20 on the flange seat 110 via the flange 210, the first connection hole 241 of the oxygen-free copper rod 240 is precisely inserted into the first support member 126 of the cathode flange 120, thereby further ensuring the stability between the water-cooled electrode 20 and the ion source mounting base 10.

[0053] Optionally, a second connection hole 242 is formed on the top of the oxygen-free copper rod 240 , and the water-cooled electrode 20 includes a pipe joint 260 , wherein the pipe joint 260 is fixedly connected to the oxygen-free copper rod 240 through the second connection hole 242 .

[0054] Specifically, refer to Figure 5 and Figure 6 As shown, the top of the oxygen-free copper rod 240 is provided with a second, recessed connection hole 242. The water-cooled electrode 20 also includes a hollow pipe joint 260. The pipe joint 260 can be inserted into the second connection hole 242 of the oxygen-free copper rod 240 and fixedly connected to the oxygen-free copper rod 240 through the second connection hole 242. This provides the necessary foundation for the subsequent installation of the water inlet and return pipes 270.

[0055] Optionally, the water-cooled electrode 20 further comprises an inlet and return water pipe 270, wherein the inlet and return water pipe 270 is inserted into the inside of the pipe joint 260 and extends to the inside of the oxygen-free copper rod 240 through the second connecting hole 242; and the inlet and return water pipe 270 is connected with the oxygen-free copper rod 240 through the pipe joint 260.

[0056] Specifically, referring to FIGS. 1 and 2, Figure 5 and Figure 6 The water-cooled electrode 20 comprises the inlet and return water pipe 270. And since the pipe joint 260 is a structure with a through hole on the top and hollow inside, the inlet and return water pipe 270 can be inserted into the inside of the pipe joint 260 through the through hole on the top of the pipe joint 260 and extends to the inside of the oxygen-free copper rod 240. Thus, water can be supplied to the inside of the oxygen-free copper rod 240 through the inlet and return water pipe 270, and the technical effect of cooling the oxygen-free copper rod 240 and maintaining the oxygen-free copper rod 240 at a normal temperature is achieved.

[0057] Optionally, the water-cooled electrode 20 further comprises an argon gas pipe 30, wherein the cathode flange 120 is provided with a second connecting groove 127, and the argon gas pipe 30 is fixedly connected to the second connecting groove 127 of the cathode flange 120.

[0058] Optionally, a copper sealing ring 280 is arranged between the flange 210 and the flange seat 110. Thus, the sealing property between the water-cooled electrode 20 and the ion source mounting seat 110 can be further ensured.

[0059] The relative arrangement of parts and steps, numerical expressions, and numerical values set forth in the various embodiments are not intended to limit the scope of the present application unless otherwise specifically stated. It is to be understood that the drawings are not necessarily to scale as the dimensions of the parts shown are for the purpose of illustration and description only and not limiting the scope of the application. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art can not be discussed in detail but are intended to be part of the scope of the present application. In all examples shown and discussed herein, any specific value should be interpreted as illustrative only and not as a limitation. Thus, other examples of the exemplary embodiments can have different values. It is noted that like numbers and letters on the figures identify like parts throughout the disclosure, and thus, once a part is defined in one figure, it is not necessary to discuss it further in connection with other figures.

[0060] For purposes of the description hereinafter, spatial terms, such as "above", "below", "upper", "lower", and the like, can be used with reference to the illustrated orientation of one device or component with respect to another device or component, as illustrated in the figures. It will be appreciated that the spatial terms are intended to encompass different orientations of the device or component in use or operation in addition to the orientation depicted in the figures. For example, if the device or component is inverted or flipped over, a spatial term that would have previously described a device or component "above" or "up" another device or component would have to be changed to "below" or "down" in reference to the new orientation. Accordingly, the exemplary spatial terminology used herein is for purposes of the description hereof, and can not limit the present application. There is no implication that the device or component as described is required to have any particular spatial orientation unless explicitly described as such.

[0061] In the description of the present application, it is to be understood that the orientation words such as "front, back, up, down, left, right", "transverse, vertical, perpendicular, horizontal" and "top, bottom" and the like indicated orientation or position relationship is usually based on the orientation or position relationship shown in the drawings, only for the convenience of describing the present application and simplifying the description, without making the opposite statement, these orientation words do not indicate and imply that the device or element referred to must have a particular orientation or be constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation on the scope of protection of the present application; the orientation words "inner, outer" refer to the inner and outer relative to the contour of each component.

[0062] The above description is only the preferred specific implementation of the present application, but the protection scope of the present application is not limited to this, any person skilled in the art can easily think of the changes or replacements within the technical range disclosed in the present application, which should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. An ion source connection device, characterized by, The ion source mounting seat (10) and a plurality of water-cooled electrodes (20) are included, wherein The water-cooled electrode (20) includes a flange (210), the ion source mounting seat (10) includes a flange seat (110) corresponding to each water-cooled electrode (20) respectively, and the flange (210) of the water-cooled electrode (20) is detachably connected with the flange seat (110) of the ion source mounting seat (10) through a bolt. The ion source mounting seat (10) further includes a cathode flange (120), wherein 2. The ion source connection arrangement of claim 1, wherein, The cathode flange (120) is provided with a plurality of first connecting grooves (121), and the flange seat (110) corresponding to each water-cooled electrode (20) is fixedly connected with the cathode flange (120) through the first connecting grooves (121). The cathode flange (120) is provided with an annular cooling water groove (122), the inside of the cooling water groove (122) is fixedly installed with a waterproof sheet (123), and the waterproof sheet (123) is used for separating the cooling water groove (122) into a water inlet part (124) and a water outlet part (125); 3. The ion source connection arrangement of claim 2, wherein, The upper part of the cathode flange (120) is provided with a fixedly connected sealing cover (130), and the sealing cover (130) is provided with a water inlet (131) and a water outlet (132); and The water inlet (131) corresponds to the water inlet part (124), and the water outlet (132) corresponds to the water outlet part (125). The water-cooled electrode (20) further includes a first connecting sleeve (220), an insulating tube (230) and an oxygen-free copper rod (240), wherein 4. The ion source connection arrangement of claim 3, wherein, The oxygen-free copper rod (240) is inserted into the inside of the flange (210), and the outside of the oxygen-free copper rod (240) is sleeved with the insulating tube (230); and The insulating tube (230) is fixedly connected with the flange (210) through the first connecting sleeve (220). The water-cooled electrode (20) further includes a second connecting sleeve (250) sleeved outside the insulating tube (230), wherein 5. The ion source connection arrangement of claim 4, wherein, The second connecting sleeve (250) is used for fixedly connecting the insulating tube (230) and the oxygen-free copper rod (240). The bottom of the oxygen-free copper rod (240) is provided with a first connecting hole (241), and the first connecting groove (121) of the cathode flange (120) is provided with a first support (126), wherein 6. The ion source connection arrangement of claim 4, wherein, The oxygen-free copper rod (240) is inserted onto the first support (126) of the cathode flange (120) through the first connecting hole (241). The top of the oxygen-free copper rod (240) is provided with a second connecting hole (242), and the water-cooled electrode (20) includes a pipe joint (260), wherein 7. The ion source connection arrangement of claim 6, wherein, The pipe joint (260) is fixedly connected with the oxygen-free copper rod (240) through the second connecting hole (242). The water-cooled electrode (20) further includes a water inlet and outlet pipe (270), wherein 8. The ion source connection arrangement of claim 7, wherein, The water inlet and outlet pipe (270) is inserted into the inside of the pipe joint (260) and extends to the inside of the oxygen-free copper rod (240) through the second connecting hole (242); and ​ The inlet and outlet water pipe (270) is connected with the oxygen-free copper rod (240) through the pipe joint (260).

9. The ion source connection arrangement of claim 2, wherein, Also include: The cathode flange (120) is provided with a second connecting groove (127), and The argon gas conduit (30) is fixedly connected to the second connecting groove (127) of the cathode flange (120).

10. The ion source connection arrangement of claim 1, wherein, The flange (210) and the flange seat (110) are provided with a copper sealing ring (280).

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