Grabbing device of vacuum coating machine with sinking cavity

Abstract

The utility model provides a material grabbing device of a sinking cavity vacuum coating machine, which comprises a main chamber of an evaporator, a tray support arranged in a feeding transition chamber and used for placing an uncoated plating pot, and a discharging transition chamber used for placing a tray support output by the main chamber of the evaporator. A material grabbing mechanism is arranged at the top of a main cavity of the evaporator, when a tray support of an uncoated plating pot is conveyed to a designated position of the main cavity of the evaporator, a connecting disc enters a chuck which is arranged on the lower portion of the material grabbing mechanism and provided with a downward opening, the uncoated plating pot is lifted through a lifting mechanism, and then the uncoated plating pot is conveyed to the designated position of the main cavity of the evaporator. According to the grabbing device of the sinking cavity vacuum coating machine, the positioning columns are connected with the positioning grooves in a clamped mode, the uncoated plating pot is lifted along with the lifting mechanism, the uncoated plating pot is separated from the tray support, and the tray support is conveyed to the discharging transition cavity, so that the body of the uncoated plating pot does not need to be improved, and the grabbing device of the sinking cavity vacuum coating machine is high in structural automation degree and high in working efficiency. And the limitation of subsequent vacuum coating cannot be caused.

Description

TECHNICAL FIELD

[0001] The utility model relates to a coating technology field, more specifically, relate to a sinking cavity vacuum coating machine gripping device. BACKGROUND

[0002] Vacuum evaporation coating (abbreviation evaporating) technology is the earliest development in PVD (physical vapor deposition) technology, and the application field is very wide coating technology. Its working principle: the film material is placed in the evaporation source (the device for heating the film material to make it gasification evaporation) of vacuum coating equipment, and the film material is evaporated to form vapor by heating the film material in high vacuum condition. The vapor reaches the surface of the substrate to be plated, and the vapor condenses on the surface of the substrate to form a thin film due to the low temperature of the substrate.

[0003] At present, the widely used is the box type evaporation coating machine, and the box type evaporation coating machine mainly adopts resistance heating evaporation source and electron beam heating evaporation source (composed of electron gun and crucible). The coating machine mainly comprises: vacuum chamber, pumping system, evaporation source, film thickness measuring system, ion source, heater and the like.

[0004] The basic process of the existing box type evaporation coating machine for coating processing of the substrate is: a, loading (loading the substrate to be evaporated on the workpiece frame); b, mounting (mounting the workpiece frame with the substrate to the vacuum chamber); c, pumping (closing the vacuum chamber door, pumping the vacuum chamber by the vacuum pump until the vacuum pressure value reaches the set value, such as less than 10-2Pa); d, heating (heating the substrate until the substrate temperature reaches the set value, and additionally, the substrate can also not be heated according to the coating requirement); e, ion cleaning (rotating the workpiece frame, and cleaning the substrate by the ion source, and additionally, the substrate can also not be cleaned according to the coating requirement); f, coating (starting the evaporation source to realize coating until the film thickness reaches the set value); g, stopping (stopping heating, stopping rotating the workpiece frame, and releasing the atmosphere of the vacuum chamber); h, unmounting (opening the vacuum chamber door, and taking out the coated substrate workpiece frame); and then returning to step a to execute the next production process.

[0005] The existing patent with the patent number CN103290364B discloses a continuous vacuum evaporation coating device, which comprises a coating chamber, a workpiece frame and a film material frame; one end of the coating chamber is communicated with a first transition chamber, and the other end is communicated with a second transition chamber; the first transition chamber, the coating chamber and the second transition chamber are respectively provided with first and second tracks; the two ends of the first transition chamber and the two ends of the second transition chamber are respectively provided with plug valves; the first transition chamber, the coating chamber and the second transition chamber are respectively provided with independent pumping systems. In the operation of the device provided by the patent, the loading and unloading of the workpiece frame and the film material are manually performed, and other operations are automatically completed by the device.

[0006] However, the workpiece rack comprises a workpiece rack body, a top of the workpiece rack body is provided with a first guide rail matched with the first pulley, and the first guide rail is provided with a first rack matched with the first gear on one side. When the workpiece rack is installed on the first track, the first pulley is matched with the first guide rail, the first gear is matched with the first rack, the first gear rotates under the drive of the motor, and the first rack drives the workpiece rack to move along the length direction of the first rack with the rotation of the first gear, so that the workpiece rack is transported. However, the workpiece rack body and the first rack are on the same part, which has great limitations for subsequent grabbing and installation of the workpiece rack body, which is a problem to be solved at present. Utility model content

[0007] Therefore, in order to solve the above problems, the utility model provides a sinking cavity vacuum coating machine grabbing device, including the main chamber 10 of evaporation machine, the tray support 70 is placed in the feeding transition chamber 21, for placing the uncoated plating pot 30, the tray support 70 output by the main chamber 10 of evaporation machine is placed in the discharging transition chamber 23, the top of the main chamber 10 of evaporation machine is equipped with grabbing mechanism 40, the grabbing mechanism 40 is hollow structure, one side of the grabbing mechanism 40 is connected with lifting mechanism 50, the lower part of the grabbing mechanism 40 is equipped with a downward open chuck 41, and the upper part is equipped with a separation port 42, the separation port 42 is communicated with the opening of the chuck 41, the corresponding position of the body of the chuck 41 is equipped with a positioning groove 43, the upper part of the uncoated plating pot 30 is equipped with a connecting disc 34 for clamping with the chuck 41, and the connecting disc 34 and the uncoated plating pot 30 are equipped with a connecting column 33, the outer circular edge of the connecting disc 34 is equipped with a positioning column 35 at intervals for clamping with the positioning groove 43, when the tray support 70 of the uncoated plating pot 30 is transported to the specified position of the main chamber 10 of evaporation machine, the connecting disc 34 enters the downward open chuck 41 in the lower part of the grabbing mechanism 40, the uncoated plating pot 30 is lifted by the lifting mechanism 50, the chuck 41 is clamped with the connecting disc 34, the positioning column 35 is clamped with the positioning groove 43, the uncoated plating pot 30 is separated from the tray support 70 with the lifting of the lifting mechanism 50, and the tray support 70 is transported to the discharging transition chamber 23. Without improving the body of the uncoated plating pot 30, the sinking cavity vacuum coating machine grabbing device has high degree of automation and will not cause subsequent limitations of vacuum coating.

[0008] The utility model provides a kind of sinking cavity vacuum coating machine grabbing device, including the main chamber 10 of evaporation machine, it is characterized in that: at least one side of the main chamber 10 of evaporation machine is connected with a transition chamber 20, when transition chamber 20 is two, two transition chambers 20 are symmetrically arranged in the two sides of the main chamber 10 of evaporation machine, one of which is feeding transition chamber 21, and the other is discharging transition chamber 23;When transition chamber 20 is one, the feeding transition chamber 21 and discharging transition chamber 23 of the transition chamber 20 are the same, the feeding transition chamber 21 is placed in tray support 70, for placing uncoated plating pot 30, the discharging transition chamber 23 is used to place the tray support 70 exported by the main chamber 10 of evaporation machine, the top of the main chamber 10 of evaporation machine is equipped with grabbing mechanism 40, the grabbing mechanism 40 is hollow structure, one side of the grabbing mechanism 40 is connected with lifting mechanism 50, the lower part of the grabbing mechanism 40 is equipped with a downwardly open chuck 41, and the upper part is equipped with a separation port 42, the separation port 42 is communicated with the opening of the chuck 41, the corresponding position of the body of the chuck 41 is equipped with positioning groove 43, the upper part of the uncoated plating pot 30 is equipped with connecting disc 34, for being clamped with the chuck 41, connecting column 33 is equipped between the connecting disc 34 and the uncoated plating pot 30, positioning column 35 is spaced apart and arranged on the outer circular edge of the connecting disc 34, for being clamped with positioning groove 43, when the tray support 70 of uncoated plating pot 30 is transported to the specified position of the main chamber 10 of evaporation machine, the connecting disc 34 enters the downwardly open chuck 41 equipped in the lower part of the grabbing mechanism 40, the uncoated plating pot 30 is lifted by lifting mechanism 50, the chuck 41 is clamped with the connecting disc 34, the positioning column 35 is clamped with the positioning groove 43, as the uncoated plating pot 30 is lifted by lifting mechanism 50, the uncoated plating pot 30 is separated from tray support 70, and the tray support 70 is conveyed to discharging transition chamber 23.

[0009] Further, the diameter of the connecting column 33 is less than the diameter of the opening of the positioning groove 43, the outer circular diameter of the connecting disc 34 is greater than the diameter of the opening of the positioning groove 43, and the outer circular diameter of the positioning column 35 is greater than the diameter of the connecting disc 34.

[0010] Further, the lifting mechanism 50 includes electric cylinder 51, the body of the electric cylinder 51 is fixedly connected with the outer shell of the main chamber 10 of evaporation machine, the shaft of the electric cylinder 51 is connected with one end of bellows 52 through connecting rod, and one end of bellows 52 is connected with grabbing mechanism 40.

[0011] Further, the top of the main chamber 10 of the evaporation machine is also provided with a rotating device 60, a plurality of openings 64 are formed in the rotating device 60, a clamping groove 65 is arranged at the opening 64, the upper part of the positioning column 35 of the uncoated plating pot 30 is provided with a plurality of corresponding clamping blocks 31, the clamping block 31 corresponds to the opening 64, the lifting mechanism 50 lifts the uncoated plating pot 30 to the rotating device 60, so that the clamping block 31 enters the opening 64, when the rotating device 60 rotates to the set position, the clamping block 31 is clamped with the clamping groove 65.

[0012] Further, the lower part of the clamping block 31 is also provided with a limiting block 32, and the corresponding position of the clamping groove 65 is also provided with a limiting groove 66, when the clamping block 31 is clamped with the clamping groove 65, the limiting block 32 is clamped with the limiting groove 66, so as to ensure that the uncoated plating pot 30 is always clamped with the rotating device 60 during the coating process.

[0013] Further, the diameter of the separation opening 42 is greater than the outer diameter of the positioning column 35, when the limiting block 32 is clamped with the limiting groove 66, the lifting device is used to lower the grabbing mechanism 40, so that the positioning column 35 is separated from the positioning groove 43, and the chuck 41 is separated from the connecting disc 34, at this time, the chuck 41 is located between the uncoated plating pot 30 and the connecting disc 34, but there is a gap between them, so as to ensure that the chuck 41 does not interfere with the uncoated plating pot 30 when the uncoated plating pot 30 rotates.

[0014] Further, the rotating mechanism of the rotating device 60 includes a motor 61, a speed reducer 62 and a magnetic fluid, the outer shell of the main chamber 10 of the evaporation machine is provided with the motor 61, the top of the inner shell of the main chamber 10 of the evaporation machine is connected with a bearing 63, the gear of the motor 61 shaft of the motor 61 is engaged with the gear on one side of the speed reducer 62, the magnetic fluid is sleeved on the outer shell of the main chamber 10 of the evaporation machine, the other side of the speed reducer 62 is connected with one end of the shaft in the magnetic fluid, the other end of the shaft in the magnetic fluid is engaged with the bearing 63, the bearing 63 is connected with the rotating device 60, the bearing 63 is a hollow structure, a crystal oscillator probe 80 is arranged in the hollow structure, and the crystal oscillator probe 80 is fixed on the top of the main chamber 10 of the evaporation machine, the crystal oscillator probe 80 is used for detecting the film thickness and rate of the coating film, the crystal oscillator probe 80 is arranged at the center position of the plating pot 30, the shaft of the magnetic fluid is driven to rotate by the motor 61 and the speed reducer 62, so as to drive the bearing 63 to rotate, thereby driving the rotating device 60 to rotate, the crystal oscillator probe 80 is fixed, so as to ensure the accuracy of testing the film thickness of the coating film.

[0015] Further, the lower part of the main chamber 10 of the evaporation machine is communicated with a sunken chamber 90, the main chamber 10 of the evaporation machine is separated from the sunken chamber 90 by a fifth shutter 91, the bottom of the sunken chamber 90 is provided with an evaporation source and a crucible, and the separation by the fifth shutter 91 enables the sunken chamber 90 to be independently filled with air and replaced with materials, thereby improving the efficiency.

[0016] Further, one side of the tray support 70 is provided with a rack 71, the upper part of the rack 71 is provided with a tooth, and the lower part is provided with a V-shaped roller 72, the sidewall of the feeding transition chamber 21 and the discharging transition chamber 23 is provided with a first gear 25 and a first guide rail 26, when the tray support 70 needs to be transported, the first gear 25 is engaged with the rack 71, the first guide rail 26 is matched and connected with the V-shaped roller 72, the first gear 25 is connected with a first driving mechanism, the first gear 25 is driven to rotate by the first driving mechanism, so that the V-shaped roller 72 slides on the first guide rail 26.

[0017] Further, when the transition chamber 20 is one, the feeding end of the feeding transition chamber 21 is provided with a first shutter, and the discharging end is provided with a second shutter 22, the top of the transition chamber 20 is provided with a vacuum pump, after the uncoated coating pot 30 is placed on the tray support 70, the first shutter and the second shutter 22 are closed, and the vacuum degree is extracted to be the same as that of the main chamber 10 of the evaporation machine, so as to ensure that the vacuum degree of the main chamber 10 is not destroyed, when the tray support 70 is transported out, the feeding transition chamber 21 becomes the discharging transition chamber 23 of the next time the tray support 70 is transported, when the main chamber 10 of the evaporation machine needs to output the tray support 70, the second shutter 22 is opened, and the first shutter is closed.

[0018] Further, when the transition chamber 20 is two, the feeding end of the feeding transition chamber 21 is provided with a first shutter, the discharging end is provided with a second shutter 22, the top of the transition chamber 20 is provided with a vacuum device, after the uncoated plating pot 30 is placed on the tray support 70, the first shutter and the second shutter 22 are closed, and the vacuum is extracted to the same degree of vacuum as the main chamber 10 of the evaporation machine, so as to ensure that the vacuum degree of the main chamber 10 is not destroyed, the feeding end of the discharging transition chamber 23 is provided with a third shutter 24, the discharging end is provided with a fourth shutter, the top of the transition chamber 20 is provided with a vacuum device, when the tray support 70 output by the main chamber 10 of the plating machine is needed, the third shutter 24 is opened and the fourth shutter is closed; after the tray support 70 is transported out, the feeding transition chamber 21 becomes the discharging transition chamber 23 for transporting the tray support 70 next time, when the tray support 70 output by the main chamber 10 of the plating machine is needed, the second shutter 22 is opened and the first shutter is closed, the discharging transition chamber 23 becomes the feeding transition chamber 21 for transporting the tray support 70 next time, after the uncoated plating pot 30 is placed on the tray support 70, the third shutter 24 and the fourth shutter are closed, and the vacuum is extracted to the same degree of vacuum as the main chamber 10 of the evaporation machine, so as to ensure that the vacuum degree of the main chamber 10 is not destroyed.

[0019] Further, the sidewall of the main chamber 10 of the evaporation machine is provided with a second gear 11 and a second guide rail 12, the second gear 11 is on the same horizontal line as the first gear 25, and the first guide rail 26 and the second guide rail 12 are on the same horizontal line, so as to ensure that the racks 71 on both sides of the tray support 70 are precisely engaged with the second gear 11 and the guide rail when the tray support 70 is transported to the main chamber 10 of the evaporation machine, and the V-shaped rollers 72 are precisely matched and connected with the second guide rail 12.

[0020] Beneficial effects of the present invention: The present invention proposes a material grabbing device for a sinking cavity vacuum coating machine, comprising a main chamber 10 of the evaporation machine, a tray bracket 70 is placed in the feed transition chamber 21 for placing an uncoated coating pot 30, and the discharge transition chamber 23 is used to place the tray bracket 70 output by the main chamber 10 of the evaporation machine, a material grabbing mechanism 40 is provided on the top of the main chamber 10 of the evaporation machine, the material grabbing mechanism 40 is a hollow structure, one side of the material grabbing mechanism 40 is connected to the lifting mechanism 50, the lower part of the material grabbing mechanism 40 is provided with a chuck 41 with a downward opening, and the upper part is provided with a disengagement port 42, the disengagement port 42 is connected to the opening of the chuck 41, and a corresponding position of the body of the chuck 41 is provided with a positioning groove 43, the upper part of the uncoated coating pot 30 is provided with a connecting disk 34 for clamping with the chuck 41, and the connecting disk 34 is connected to the uncoated Connecting columns 33 are provided between the coated plating pots 30, and positioning columns 35 are provided at intervals on the outer circular edge of the connecting disk 34 for engaging with the positioning grooves 43. When the tray bracket 70 of the uncoated plating pot 30 is transported to the specified position of the main chamber 10 of the evaporation machine, the connecting disk 34 enters the downwardly open chuck 41 provided at the lower part of the grabbing mechanism 40, and the uncoated plating pot 30 is lifted by the lifting mechanism 50, and the chuck 41 is engaged with the connecting disk 34, and the positioning columns 35 are engaged with the positioning grooves 43. As the lifting mechanism 50 lifts the uncoated plating pot 30, the uncoated plating pot 30 is separated from the tray bracket 70, and the tray bracket 70 is transported to the discharge transition chamber 23. There is no need to improve the main body of the uncoated plating pot 30. The structure of the grabbing device of the sinking cavity vacuum coating machine has a high degree of automation and will not cause limitations in subsequent vacuum coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is an overall structural diagram of the buffer conveying device of the grabbing device of the sinking cavity vacuum coating machine of the present invention.

[0022] Figure 2 This is a structural diagram of the outer shell of the transition chamber of the material grabbing device of the sinking cavity vacuum coating machine of the present invention.

[0023] Figure 3 This is a structural diagram of the conveying device of the material grabbing device of the sinking cavity vacuum coating machine of the present invention.

[0024] Figure 4 This is a structural diagram of the tray bracket of the material grabbing device of the sinking cavity vacuum coating machine of the present invention.

[0025] Figure 5 This is a structural diagram of the main chamber of the evaporation machine of the sinking cavity vacuum coating machine grabbing device of the present utility model.

[0026] Figure 6This is a structural diagram of the connection between the coating pot of the evaporation machine and the material grabbing mechanism of the sinking cavity vacuum coating machine material grabbing device of the present invention.

[0027] Figure 7 This is a structural diagram of the material grabbing mechanism of the evaporation machine of the sinking cavity vacuum coating machine material grabbing device of the present utility model.

[0028] Figure 8 This is a structural diagram of the rotating device of the evaporation machine of the sinking cavity vacuum coating machine grabbing device of the present invention.

[0029] Figure 9 This is a structural diagram of the main chamber and sinking chamber of the evaporation machine of the sinking chamber vacuum coating machine grabbing device of the present utility model.

[0030] Description of main component symbols

[0031] Main chamber 10, second gear 11, second guide rail 12, transition chamber 20, feed transition chamber 21, second gate 22, discharge transition chamber 23, third gate 24, first gear 25, first guide rail 26, plating pot 30, clamping block 31, limit block 32, connecting column 33, connecting disk 34, positioning column 35, grabbing mechanism 40, chuck 41, disengagement port 42, positioning groove 43, lifting mechanism 50, electric cylinder 51, bellows 52, rotating device 60, motor 61, reducer 62, magnetic fluid, notch 64, clamping slot 65, limit slot 66, tray bracket 70, rack 71, V-shaped roller 72, crystal oscillator probe 80, sinking chamber 90, fifth gate 91.

[0032] The following specific embodiments will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION Example

[0033] like Figure 1 As shown, a material grabbing device of a sinking cavity vacuum coating machine includes a main chamber 10 of the evaporation machine, and a transition chamber 20 is provided on at least one side of the main chamber 10 of the evaporation machine. When there are two transition chambers 20, the two transition chambers 20 are symmetrically arranged on both sides of the main chamber 10 of the evaporation machine, one of which is a feed transition chamber 21, and the other is a discharge transition chamber 23; when there is only one transition chamber 20, the feed transition chamber 21 and the discharge transition chamber 23 of the transition chamber 20 are the same.

[0034] like Figure 2 and Figure 6As shown, the tray support 70 in the feeding transition chamber 21 is used to place the uncoated plating pot 30, and the tray support 70 output from the main chamber 10 of the evaporation machine is placed in the discharging transition chamber 23. The top of the main chamber 10 of the evaporation machine is provided with a grabbing mechanism 40, which is a hollow structure. One side of the grabbing mechanism 40 is connected to a lifting mechanism 50. The lower part of the grabbing mechanism 40 is provided with a downwardly open chuck 41, and the upper part is provided with a disengaging port 42, which is in communication with the opening of the chuck 41. The body of the chuck 41 is provided with a positioning groove 43 at a corresponding position. The upper part of the uncoated plating pot 30 is provided with a connecting disc 34 for clamping with the chuck 41. A connecting column 33 is arranged between the connecting disc 34 and the uncoated plating pot 30. Positioning columns 35 are arranged at the outer circular edge of the connecting disc 34 at intervals for clamping with the positioning groove 43. When the tray support 70 of the uncoated plating pot 30 is transported to the designated position of the main chamber 10 of the evaporation machine, the connecting disc 34 enters the downwardly open chuck 41 arranged in the lower part of the grabbing mechanism 40. The uncoated plating pot 30 is lifted by the lifting mechanism 50. The chuck 41 clamps with the connecting disc 34, and the positioning columns 35 clamp with the positioning groove 43. As the uncoated plating pot 30 is lifted by the lifting mechanism 50, the uncoated plating pot 30 is separated from the tray support 70, and the tray support 70 is transported to the discharging transition chamber 23.

[0035] As shown in Figure 6 and Figure 7 The diameter of the connecting column 33 is smaller than the diameter of the opening of the positioning groove 43. The outer circular diameter of the connecting disc 34 is larger than the diameter of the opening of the positioning groove 43. The outer circular diameter of the positioning column 35 is larger than the diameter of the connecting disc 34. The lifting mechanism 50 includes an electric cylinder 51. The body of the electric cylinder 51 is fixedly connected to the outer shell of the main chamber 10 of the evaporation machine. The shaft of the electric cylinder 51 is connected to one end of a bellows 52 through a connecting rod. One end of the bellows 52 is connected to the grabbing mechanism 40.

[0036] As shown in Figure 6 and as shown in Figure 8As shown, the top of the main chamber 10 of the evaporation machine is also provided with a rotating device 60, a plurality of openings 64 are provided at the rotating device 60, a clamping groove 65 is provided at the opening 64, the upper part of the positioning column 35 of the uncoated plating pot 30 is provided with a plurality of corresponding clamping blocks 31, the clamping block 31 corresponds to the opening 64 one by one, the lifting mechanism 50 lifts the uncoated plating pot 30 to the rotating device 60, so that the clamping block 31 enters the opening 64, when the rotating device 60 rotates to the set position, the clamping block 31 is clamped with the clamping groove 65, the lower part of the clamping block 31 is also provided with a limiting block 32, the corresponding position of the clamping groove 65 is also provided with a limiting groove 66, when the clamping block 31 is clamped with the clamping groove 65, the limiting block 32 is clamped with the limiting groove 66, so as to ensure that the uncoated plating pot 30 is always clamped with the rotating device 60 during the coating process, the diameter of the separation opening 42 is greater than the outer diameter of the positioning column 35, after the limiting block 32 is clamped with the limiting groove 66, the lifting device is used to lower the grabbing mechanism 40 to make the positioning column 35 separate from the positioning groove 43, the chuck 41 separates from the connecting disc 34, at this time, the chuck 41 is located between the uncoated plating pot 30 and the connecting disc 34 but there is a gap between them, so as to ensure that the chuck 41 does not interfere with the uncoated plating pot 30 when the uncoated plating pot 30 rotates, the rotating mechanism of the rotating device 60 includes a motor 61, a speed reducer 62 and a magnetic fluid, the motor 61 is arranged outside the shell of the main chamber 10 of the evaporation machine, the top of the inner shell of the main chamber 10 of the evaporation machine is connected with a bearing 63, the gear of the motor shaft of the motor 61 is engaged with the gear on one side of the speed reducer 62, the magnetic fluid is sleeved on the shell of the main chamber 10 of the evaporation machine, the other side of the speed reducer 62 is connected with one end of the shaft in the magnetic fluid, the other end of the shaft in the magnetic fluid is engaged with the bearing 63, the bearing 63 is connected with the rotating device 60, the bearing 63 is a hollow structure, a crystal oscillator probe 80 is arranged in the hollow structure and the crystal oscillator probe 80 is fixed on the top of the main chamber 10 of the evaporation machine, the crystal oscillator probe 80 is used for detecting the coating thickness and rate, the crystal oscillator probe 80 is arranged at the center position of the plating pot 30, the shaft of the magnetic fluid is driven to rotate by the motor 61 and the speed reducer 62, so as to drive the bearing 63 to rotate, thereby driving the rotating device 60 to rotate, the crystal oscillator probe 80 is fixed, so as to ensure the accuracy of testing the coating thickness.

[0037] As Figure 9 As shown, the lower part of the main chamber 10 of the evaporation machine is communicated with a sinking chamber 90, the main chamber 10 of the evaporation machine and the sinking chamber 90 are separated by a fifth gate plate 91, the bottom of the sinking chamber 90 is provided with an evaporation source and a crucible, the sinking chamber 90 is separately aerated and replaced by the fifth gate plate 91, so as to improve the efficiency.

[0038] AsFigures 3-5 As shown, one side of the tray support 70 is provided with a rack 71, the upper part of the rack 71 is provided with a tooth, and the lower part is provided with a V-shaped roller 72. The sidewall of the feeding transition chamber 21 and the discharging transition chamber 23 is provided with a first gear 25 and a first guide rail 26. When the tray support 70 needs to be transported, the first gear 25 is engaged with the rack 71, and the first guide rail 26 is matched with the V-shaped roller 72. The first gear 25 is connected with a first driving mechanism. The first driving mechanism drives the first gear 25 to rotate, so that the V-shaped roller 72 slides on the first guide rail 26. When the transition chamber 20 is one, the feeding end of the feeding transition chamber 21 is provided with a first shutter, and the discharging end is provided with a second shutter 22. The top of the transition chamber 20 is provided with a vacuum pump. After the uncoated plating pot 30 is placed on the tray support 70, the first shutter and the second shutter 22 are closed, and the vacuum degree is extracted to be the same as that of the main chamber 10 of the evaporation machine, so as to ensure that the vacuum degree of the main chamber 10 is not damaged. When the tray support 70 is transported out, the feeding transition chamber 21 becomes the discharging transition chamber 23 of the next time of transporting the tray support 70. When the tray support 70 needs to be output from the main chamber 10 of the evaporation machine, the second shutter 22 is opened, and the first shutter is closed. When the transition chamber 20 is two, the feeding end of the feeding transition chamber 21 is provided with a first shutter, and the discharging end is provided with a second shutter 22. The top of the transition chamber 20 is provided with a vacuum pump. After the uncoated plating pot 30 is placed on the tray support 70, the first shutter and the second shutter 22 are closed, and the vacuum degree is extracted to be the same as that of the main chamber 10 of the evaporation machine, so as to ensure that the vacuum degree of the main chamber 10 is not damaged. The feeding end of the discharging transition chamber 23 is provided with a third shutter 24, and the discharging end is provided with a fourth shutter. The top of the transition chamber 20 is provided with a vacuum pump. When the tray support 70 needs to be output from the main chamber 10 of the evaporation machine, the third shutter 24 is opened, and the fourth shutter is closed. When the tray support 70 is transported out, the feeding transition chamber 21 becomes the discharging transition chamber 23 of the next time of transporting the tray support 70. When the tray support 70 needs to be output from the main chamber 10 of the evaporation machine, the second shutter 22 is opened, and the first shutter is closed. The discharging transition chamber 23 becomes the feeding transition chamber 21 of the next time of transporting the tray support 70. After the uncoated plating pot 30 is placed on the tray support 70, the third shutter 24 and the fourth shutter are closed, and the vacuum degree is extracted to be the same as that of the main chamber 10 of the evaporation machine, so as to ensure that the vacuum degree of the main chamber 10 is not damaged. The sidewall of the main chamber 10 of the evaporation machine is provided with a second gear 11 and a second guide rail 12. The second gear 11 is on the same horizontal line as the first gear 25, and the first guide rail 26 and the second guide rail 12 are on the same horizontal line, so as to ensure that the rack 71 on both sides of the tray support 70 is precisely engaged with the second gear 11 and the second guide rail 12 when the tray support 70 is transported to the main chamber 10 of the evaporation machine.

[0039] The utility model discloses a sinking cavity vacuum coating machine grabbing device, including the main chamber 10 of evaporation coating machine, the tray support 70 of placing in the feed transition chamber 21 is used for placing the plating pot 30 of not coating, the tray support 70 of the main chamber 10 output of evaporation coating machine is used for placing the feed transition chamber 23, the top of the main chamber 10 of evaporation coating machine is equipped with grabbing mechanism 40, the grabbing mechanism 40 is hollow structure, one side of grabbing mechanism 40 is connected lifting mechanism 50, the lower part of grabbing mechanism 40 is equipped with a downward open chuck 41, and the upper part is equipped with the separation mouth 42, the separation mouth 42 with the open communication of chuck 41, the corresponding position of the body of chuck 41 is equipped with the locating groove 43, the upper part of the plating pot 30 of not coating is equipped with the connecting disc 34 for with chuck 41 clamping, the connecting disc 34 with the plating pot 30 of not coating between is equipped with connecting column 33, the outer circle edge interval of connecting disc 34 is equipped with the locating column 35 for with locating groove 43 clamping, when the tray support 70 of plating pot 30 of not coating is transported to the specified position of the main chamber 10 of evaporation coating machine, the connecting disc 34 enters the downward open chuck 41 of the lower part of grabbing mechanism 40, and the plating pot 30 of not coating is lifted through lifting mechanism 50, chuck 41 and connecting disc 34 clamping, the locating column 35 and locating groove 43 clamping, with the plating pot 30 of not coating is lifted along with lifting mechanism 50, the plating pot 30 of not coating is separated from tray support 70, the tray support 70 is transported to the feed transition chamber 23, and the body of the plating pot 30 of not coating does not need to be improved, the sinking cavity vacuum coating machine grabbing device structure degree of automation is high, and subsequent vacuum coating limitation can not be caused.

[0040] The above-mentioned embodiments only express several implementation manners of the utility model, and the description is more specific and detailed, but can not be understood as the limitation of the utility model patent scope. It should be pointed out that for ordinary skilled person in the art, without departing from the concept of the utility model, a number of variations and improvements can be made, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent should be according to the attached claims.

Claims

1. A sink chamber vacuum coater grabbing device, comprising a main chamber (10) of an evaporation machine, characterized in that: At least one side of the main chamber (10) of the evaporation machine is communicated with a transition chamber (20), when the transition chamber (20) is two, the two transition chambers (20) are symmetrically arranged at one side of the main chamber (10) of the evaporation machine, one of which is a feeding transition chamber (21), and the other is a discharging transition chamber (23); when the transition chamber (20) is one, the feeding transition chamber (21) and the discharging transition chamber (23) of the transition chamber (20) are the same, the feeding transition chamber (21) is provided with a tray support (70) for placing an uncoated plating pot (30), and the discharging transition chamber (23) is used for placing the tray support (70) output from the main chamber (10) of the evaporation machine, the top of the main chamber (10) of the evaporation machine is provided with a grabbing mechanism (40), the grabbing mechanism (40) is a hollow structure, one side of the grabbing mechanism (40) is connected with a lifting mechanism (50), the lower part of the grabbing mechanism (40) is provided with a chuck (41) with an open downward, and the upper part is provided with a disengaging port (42) communicated with the opening of the chuck (41), the corresponding position of the body of the chuck (41) is provided with a positioning groove (43), the upper part of the uncoated plating pot (30) is provided with a connecting disc (34) for clamping with the chuck (41), a connecting column (33) is arranged between the connecting disc (34) and the uncoated plating pot (30), and the outer circular edge of the connecting disc (34) is provided with a positioning column (35) for clamping with the positioning groove (43), when the tray support (70) of the uncoated plating pot (30) is transported to the specified position of the main chamber (10) of the evaporation machine, the connecting disc (34) enters the chuck (41) with an open downward arranged in the lower part of the grabbing mechanism (40), the uncoated plating pot (30) is lifted by the lifting mechanism (50), the chuck (41) is clamped with the connecting disc (34), and the positioning column (35) is clamped with the positioning groove (43), as the uncoated plating pot (30) is lifted by the lifting mechanism (50), the uncoated plating pot (30) is separated from the tray support (70), and the tray support (70) is conveyed to the discharging transition chamber (23).

2. The sink chamber vacuum coater gripping device according to claim 1, wherein: The lifting mechanism (50) comprises an electric cylinder (51), the body of the electric cylinder (51) is fixedly connected with the outer shell of the main chamber (10) of the evaporation machine, the shaft of the electric cylinder (51) is connected with one end of a bellows (52) through a connecting rod, and one end of the bellows (52) is connected with the grabbing mechanism (40).

3. The sink chamber vacuum coater gripping device according to claim 1, wherein: The top of the main chamber (10) of the evaporation machine is also provided with a rotating device (60), a plurality of openings (64) are arranged at the rotating device (60), a clamping groove (65) is arranged at the opening (64), the upper part of the positioning column (35) of the uncoated plating pot (30) is provided with a plurality of corresponding clamping blocks (31), the clamping block (31) corresponds to the opening (64), the lifting mechanism (50) lifts the uncoated plating pot (30) to the rotating device (60), so that the clamping block (31) enters the opening (64), when the rotating device (60) rotates to the set position, the clamping block (31) is clamped with the clamping groove (65).

4. The sink cavity vacuum coater gripping device according to claim 3, wherein: The lower part of the clamping block (31) is also provided with a limiting block (32), and the corresponding position of the clamping groove (65) is also provided with a limiting groove (66), when the clamping block (31) is clamped with the clamping groove (65), the limiting block (32) is clamped with the limiting groove (66), so as to ensure that the uncoated plating pot (30) is always clamped with the rotating device (60) during the coating process.

5. The sink-down cavity vacuum coating machine grabbing device according to claim 4, characterized in that: The diameter of the separation opening (42) is greater than the outer diameter of the positioning column (35), when the limiting block (32) is clamped with the limiting groove (66), the lifting device is used to lower the grabbing mechanism (40) to make the positioning column (35) separate from the positioning groove (43), and the chuck (41) separates from the connecting disc (34), at this time, the chuck (41) is located between the uncoated plating pot (30) and the connecting disc (34), but there is a gap between them, so as to ensure that the chuck (41) does not interfere with the uncoated plating pot (30) when the uncoated plating pot (30) rotates.

6. The sink chamber vacuum coater gripping device according to claim 3, wherein: The rotating mechanism of the rotating device (60) includes a motor (61), a speed reducer (62) and a magnetic fluid, the outer shell of the main chamber (10) of the evaporation machine is provided with the motor (61), the top of the inner shell of the main chamber (10) of the evaporation machine is connected with a bearing (63), the gear of the motor shaft of the motor (61) is engaged with the gear on one side of the speed reducer (62), the magnetic fluid is sleeved on the outer shell of the main chamber (10) of the evaporation machine, the other side of the speed reducer (62) is connected with one end of the shaft in the magnetic fluid, the other end of the shaft in the magnetic fluid is engaged with the bearing (63), the bearing (63) is connected with the rotating device (60), the bearing (63) is a hollow structure, a crystal oscillator probe (80) is arranged in the hollow structure and fixed on the top of the main chamber (10) of the evaporation machine, the crystal oscillator probe (80) is used for detecting the coating thickness and speed, the crystal oscillator probe (80) is arranged at the center position of the plating pot (30), the shaft of the magnetic fluid is driven to rotate by the motor (61) and the speed reducer (62), so as to drive the bearing (63) to rotate, thereby driving the rotating device (60) to rotate, the crystal oscillator probe (80) is fixed, so as to ensure the accuracy of testing the coating thickness.

7. The sink chamber vacuum coater gripping device according to claim 1, wherein: The lower part of the main chamber (10) of the evaporation machine is communicated with a sunken chamber (90), the main chamber (10) of the evaporation machine is separated from the sunken chamber (90) through a fifth shutter (91), the bottom of the sunken chamber (90) is provided with an evaporation source and a crucible, and the separation through the fifth shutter (91) enables the sunken chamber (90) to be independently aerated and replaced, thereby improving efficiency.

8. The sink chamber vacuum coater gripping device of claim 1, wherein: The side of the tray support (70) is provided with a rack (71), the upper part of the rack (71) is provided with a tooth, and the lower part is provided with a V-shaped roller (72); the side wall of the feeding transition chamber (21) and the discharging transition chamber (23) is provided with a first gear (25) and a first guide rail (26); when the tray support (70) needs to be transported, the first gear (25) is engaged with the rack (71), the first guide rail (26) is matched with the V-shaped roller (72), the first gear (25) is connected with a first driving mechanism, the first gear (25) is driven to rotate through the first driving mechanism, so that the V-shaped roller (72) slides on the first guide rail (26), the side wall of the main chamber (10) of the evaporation machine is provided with a second gear (11) and a second guide rail (12), the second gear (11) is on the same horizontal line as the first gear (25), and the first guide rail (26) and the second guide rail (12) are on the same horizontal line, so that the rack (71) on both sides of the tray support (70) is precisely engaged with the second gear (11) and the V-shaped roller (72) is precisely matched with the second guide rail (12) when the tray support (70) is transported to the main chamber (10) of the evaporation machine.

9. The sink chamber vacuum coater gripping device of claim 1, wherein: When the transition chamber (20) is one, the feeding end of the feeding transition chamber (21) is provided with a first shutter, and the discharging end is provided with a second shutter (22); the top of the transition chamber (20) is provided with a vacuumizing device; after the uncoated plating pot (30) is placed on the tray support (70), the first shutter and the second shutter (22) are closed, and the vacuum degree is extracted to be the same as that of the main chamber (10) of the evaporation machine, so that the vacuum degree of the main chamber (10) is not damaged; when the tray support (70) is transported out, the feeding transition chamber (21) becomes the discharging transition chamber (23) for the next time the tray support (70) is transported; when the tray support (70) in the main chamber (10) of the evaporation machine needs to be output, the second shutter (22) is opened, and the first shutter is closed.

10. The sink chamber vacuum coater gripping device according to claim 1, wherein: When the transition chamber (20) is two, the feeding end of the feeding transition chamber (21) is provided with a first shutter, the discharging end is provided with a second shutter (22), the top of the transition chamber (20) is provided with a vacuum pumping device, after the uncoated plating pot (30) is placed on the tray support (70), the first shutter and the second shutter (22) are closed, vacuum pumping is performed to the same vacuum degree as the main chamber (10) of the evaporation machine, so as to ensure that the vacuum degree of the main chamber (10) is not destroyed, the feeding end of the discharging transition chamber (23) is provided with a third shutter (24), the discharging end is provided with a fourth shutter, the top of the transition chamber (20) is provided with a vacuum pumping device, when the tray support (70) output by the main chamber (10) of the plating machine is needed, the third shutter (24) is opened, and the fourth shutter is closed; after the tray support (70) is transported out, the feeding transition chamber (21) becomes the discharging transition chamber (23) for the next time of transporting the tray support (70), when the tray support (70) output by the main chamber (10) of the plating machine is needed, the second shutter (22) is opened, and the first shutter is closed, the discharging transition chamber (23) becomes the feeding transition chamber (21) for the next time of transporting the tray support (70), after the uncoated plating pot (30) is placed on the tray support (70), the third shutter (24) and the fourth shutter are closed, vacuum pumping is performed to the same vacuum degree as the main chamber (10) of the evaporation machine, so as to ensure that the vacuum degree of the main chamber (10) is not destroyed.

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