Turnover mechanism of sputter coating machine

Abstract

The utility model provides a turnover mechanism of a sputter coating machine, the turnover mechanism is arranged at the side edges of a heating cavity and a target opening and closing mechanism, the target opening and closing mechanism is connected with the heating cavity in a turnover manner through the turnover mechanism, the target opening and closing mechanism is arranged at the upper part of the heating cavity, and the target opening and closing mechanism is connected with the heating cavity in a turnover manner. The turnover mechanism comprises a lower support, a turnover bearing, an upper support and a turnover spring which are symmetrically arranged, one end of the side edge of the lower support is fixedly connected with one side of the heating cavity, the turnover bearing is arranged above the lower support, a connecting rod is arranged at one end of the upper support, and the turnover spring is arranged above the upper support. The two ends of the connecting rod protrude outwards and are rotationally connected with the overturning bearing, the end, away from the connecting rod, of the upper support is fixedly connected with the target opening and closing mechanism, and the lower support and the upper support are rotationally connected with each other with the overturning bearing as the rotating center through the overturning bearing. Therefore, the target opening and closing mechanism can open and close the heating cavity.

Description

TECHNICAL FIELD

[0001] The utility model relates to sputter coating technology field, more specifically, it relates to a kind of turnover mechanism of sputter coating machine. BACKGROUND

[0002] Sputter coating technology is the phenomenon that the atom of target material is hit by ion bombardment surface, the atom produced by sputtering is deposited on the surface of substrate and forms film, which is called sputter coating. In order to obtain high quality thin film, a certain amount of working gas is filled in the magnetron sputtering device, and voltage is applied to the two corresponding electrode plates. Under the electric field generated by the electrode plate, sufficient energy can be obtained to collide with gas molecules between the electrode plate and produce ionization. Ions are produced. Under the action of electric field and magnetic field, the target material is impacted, and the target material atoms are deposited on the substrate to form a film. Accurate control of reaction gas pressure, target material and substrate spacing, sputtering power and other parameters can accurately control the deposition rate to obtain high quality thin film material.

[0003] In the prior art, when the heating cavity and the target material mechanism need to be repaired, the target material mechanism needs to be opened. However, the target material mechanism is heavy when it is directly opened. Therefore, how to conveniently open and close the target material mechanism becomes a technical problem to be solved. UTILITY MODEL CONTENT

[0004] Therefore, in order to solve the above problems, the utility model provides a kind of turnover mechanism of sputter coating machine, the turnover mechanism 9 is located in the side of heating cavity 1 and target material opening and closing mechanism 6, target material opening and closing mechanism 6 and heating cavity 1 can be turned over by the turnover mechanism 9 Connection, the target material opening and closing mechanism 6 is arranged on the upper part of the heating cavity 1, the turnover mechanism 9 includes symmetrically arranged lower support 91, turnover bearing 92, upper support 93, turnover spring 936, one end of the side of the lower support 91 is fixedly connected with one side of the heating cavity 1, turnover bearing 92 is arranged above the lower support 91, one end of the upper support 93 is provided with connecting rod 931, both ends of the connecting rod 931 protrude outward and are rotatably connected with the turnover bearing 92, the end of the upper support 93 away from the connecting rod 931 is fixedly connected with the target material opening and closing mechanism 6, the side of the target material opening and closing mechanism 6 and the heating cavity 1 is provided with locking part 2, when the locking part 2 is opened, the turnover spring 936 loses stress and opens outward and stretches, drives the upper support 93 to open outward, the lower support 91 and the upper support 93 rotate around the turnover bearing 92 as the rotation center, so that the target material opening and closing mechanism 6 realizes the opening and closing of the heating cavity 1, without opening the target material opening and closing mechanism 6 by artificial effort, the operation is simple, and the turnover spring 936 is a mechanical power component and is not easy to be damaged, with long service life.

[0005] The turnover mechanism of a sputtering coating machine is provided with a turnover mechanism 9 arranged at the side of a heating cavity 1 and a target material opening and closing mechanism 6. The target material opening and closing mechanism 6 is connected to the heating cavity 1 through the turnover mechanism 9. The target material opening and closing mechanism 6 is arranged at the upper part of the heating cavity 1. The turnover mechanism 9 comprises symmetrically arranged lower supports 91, a turnover bearing 92, upper supports 93 and turnover springs 936. One end of the side of the lower support 91 is fixedly connected to one side of the heating cavity 1. The turnover bearing 92 is arranged above the lower support 91. One end of the upper support 93 is provided with a connecting rod 931. The two ends of the connecting rod 931 protrude outward and are rotatably connected to the turnover bearing 92. The end of the upper support 93 away from the connecting rod 931 is fixedly connected to the target material opening and closing mechanism 6. The target material opening and closing mechanism 6 and the heating cavity 1 are provided with locking members 2. When the locking members 2 are opened, the turnover springs 936 lose the force and open outward and stretch, driving the upper support 93 to open outward. The lower support 91 and the upper support 93 rotate around the turnover bearing 92, so that the target material opening and closing mechanism 6 opens and closes the heating cavity 1.

[0006] Further, the lower end of the outer side of the lower support 91 and the lower end of the outer side of the upper support 93 are connected with the turnover springs 936. The turnover springs 936 are nitrogen springs. One end of the turnover spring 936 connected to the lower support 91 is provided with a first joint shaft 9361, and the other end is provided with a second joint shaft 9362. The first joint shaft 9361 and the second joint shaft 9362 are connected to the lower support 91 and the upper support 93 through joint shaft screws 937. When the turnover mechanism 9 turns over, the upper support 93 rotates around the turnover bearing 92, driving the turnover spring 936 to stretch and rotate around the first joint shaft 9361.

[0007] Further, the joint shaft screws 937 connected to the first joint shaft 9361 and the second joint shaft 9362 are ball head ends, facilitating the adjustable adjustment of the turnover spring 936.

[0008] Further, the outer side of the lower support 91 is also provided with a bolt 911. When the target material opening and closing mechanism 6 is closed on the heating cavity 1, the turnover mechanism 9 is placed in the initial position. At this time, the turnover spring 936 does not contact the bolt 911. When the target material opening and closing mechanism 6 is opened and the turnover mechanism 9 is turned to the maximum, the upper support 93 is perpendicular to the lower support 91. At this time, the turnover spring 936 is also perpendicular to the lower support 91. The bolt 911 is in contact with the side of the turnover spring 936, limiting the turnover spring 936, so as to block the turnover mechanism 9 from continuing to turn over and prevent over-turning.

[0009] Further, the upper support 93 comprises a connecting rod 931, a first support frame 932, a second support frame 933, a connecting frame 934 and a reinforcing rib 935, the first support frame 932, the second support frame 933 and the connecting frame 934 are symmetrically arranged, the connecting rod 931 is arranged in parallel with the reinforcing rib 935 and is located at two ends of the upper support 93.

[0010] Further, the two ends of the connecting rod 931 are sleeved with the first support frame 932, the overturning bearing 92 is arranged outside the first support frame 932 and is sleeved with the connecting rod 931, when the overturning mechanism 9 overturns, the connecting rod 931 rotates in the overturning bearing 92, and the connecting rod 931 moves synchronously with the first support frame 932.

[0011] Further, one end of the second support frame 933 is connected with the first support frame 932, and the other end is connected with the target material opening and closing mechanism 6.

[0012] Further, the connecting frame 934 is in inverted L shape, one section of the connecting frame 934 is fixedly connected with the middle section of the second support frame 933, and the other section is movably connected with the second joint shaft 9362 of the overturning spring 936 through a joint shaft screw 937.

[0013] The sputtering coating machine overturning mechanism has the advantages that the target material opening and closing mechanism 6 and the heating cavity 1 can be connected in a overturning mode through the overturning mechanism 9, the target material opening and closing mechanism 6 is arranged on the upper portion of the heating cavity 1, the overturning mechanism 9 comprises symmetrically arranged lower supports 91, overturning bearings 92, upper supports 93 and overturning springs 936, one end of the lower support 91 is fixedly connected with one side of the heating cavity 1, the overturning bearings 92 are arranged above the lower support 91, one end of the upper support 93 is provided with the connecting rod 931, the two ends of the connecting rod 931 protrude outward and are rotatably connected with the overturning bearings 92, one end of the upper support 93, away from the connecting rod 931, is fixedly connected with the target material opening and closing mechanism 6, the target material opening and closing mechanism 6 and the heating cavity 1 are provided with locking members 2, when the locking members 2 are opened, the overturning spring 936 loses the stress and opens and stretches outward, drives the upper support 93 to open outward, and the lower support 91 and the upper support 93 rotate around the overturning bearings 92 as the rotation center, so that the target material opening and closing mechanism 6 can be opened and closed relative to the heating cavity 1, the target material opening and closing mechanism 6 does not need to be opened manually, the operation is simple, the overturning spring 936 is a mechanical power component and is not easy to be damaged, and the service life is long. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1This is a diagram of the overall connection structure of the flip mechanism of the sputtering coating machine of the present invention.

[0015] Figure 2 This is an overall structural diagram of the turning mechanism of the sputtering coating machine of the present invention.

[0016] Figure 3 It is a side view of the turning mechanism of the sputtering coating machine of the present invention.

[0017] Description of main component symbols

[0018] Heating chamber 1, locking part 2, target opening and closing mechanism 6, flipping mechanism 9, lower bracket 91, latch 911, flip bearing 92, upper bracket 93, connecting rod 931, first support frame 932, second support frame 933, connecting frame 934, reinforcing rib 935, notch 9351, flip spring 936, first joint shaft 9361, second joint shaft 9362, joint shaft screw 937.

[0019] The following specific embodiments will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0020] like Figure 1 As shown in FIG, it is the overall structural diagram of the connection of the turnover mechanism of the sputtering coating machine of the present invention; Figure 2 As shown in FIG, it is the overall structure diagram of the turning mechanism of the sputtering coating machine of the present invention; Figure 3 The figure shows a side view of the flipping mechanism of the sputtering coating machine of the present invention. Example 1:

[0021] The turnover mechanism of a sputtering coating machine is provided with a turnover mechanism 9 arranged at the side of a heating cavity 1 and a target material opening and closing mechanism 6, the target material opening and closing mechanism 6 is connected with the heating cavity 1 through the turnover mechanism 9, the target material opening and closing mechanism 6 is arranged at the upper part of the heating cavity 1, characterized in that the turnover mechanism 9 comprises symmetrically arranged lower supports 91, a turnover bearing 92, upper supports 93 and turnover springs 936, one end of the side of the lower support 91 is fixedly connected with one side of the heating cavity 1, the turnover bearing 92 is arranged above the lower support 91, one end of the upper support 93 is provided with a connecting rod 931, the two ends of the connecting rod 931 protrude outward and are rotatably connected with the turnover bearing 92, the end of the upper support 93 away from the connecting rod 931 is fixedly connected with the target material opening and closing mechanism 6, the side of the target material opening and closing mechanism 6 and the heating cavity 1 is provided with a locking part 2, when the locking part 2 is opened, the turnover spring 936 loses the force and opens outward and stretches, drives the upper support 93 to open outward, the lower support 91 and the upper support 93 rotate around the turnover bearing 92 as the rotation center, so that the target material opening and closing mechanism 6 realizes the opening and closing of the heating cavity 1.

[0022] The lower end of the outer side of the lower support 91 and the lower end of the outer side of the upper support 93 are connected with the turnover spring 936, the turnover spring 936 is a nitrogen spring, one end of the turnover spring 936 connected with the lower support 91 is provided with a first joint shaft 9361, the other end is provided with a second joint shaft 9362, the first joint shaft 9361 and the second joint shaft 9362 are connected with the lower support 91 and the upper support 93 through joint shaft screws 937 respectively, when the turnover mechanism 9 turns over, the upper support 93 rotates around the turnover bearing 92 as the rotation center, so that the turnover spring 936 is stretched and rotates to one side of the first joint shaft 9361 around the first joint shaft 9361 as the rotation center.

[0023] The joint shaft screws 937 connected with the first joint shaft 9361 and the second joint shaft 9362 are ball head ends, which facilitates the adjustable adjustment of the turnover spring 936.

[0024] The outer side of the lower support 91 is also provided with a bolt 911, when the target material opening and closing mechanism 6 is closed on the heating cavity 1, the turnover mechanism 9 is placed in the initial position, at this time the turnover spring 936 does not contact with the bolt 911, when the target material opening and closing mechanism 6 is opened and the turnover mechanism 9 turns over to the maximum degree, that is, the upper support 93 is perpendicular to the lower support 91, the turnover spring 936 is also perpendicular to the lower support 91, at this time the bolt 911 just abuts against the side of the turnover spring 936, which is used for limiting the turnover spring 936, so as to block the turnover mechanism 9 from continuing to turn over and prevent over-turning.

[0025] The upper support 93 comprises a connecting rod 931, a first support frame 932, a second support frame 933, a connecting frame 934 and a reinforcing rib 935, the first support frame 932, the second support frame 933 and the connecting frame 934 are symmetrically arranged in groups, and the connecting rod 931 and the reinforcing rib 935 are arranged in parallel and are respectively located at two ends of the upper support 93.

[0026] Two ends of the connecting rod 931 are sleeved with the first support frame 932, the overturning bearing 92 is arranged outside the first support frame 932 and is sleeved with the connecting rod 931, when the overturning mechanism 9 overturns, the connecting rod 931 rotates in the overturning bearing 92, and the connecting rod 931 moves synchronously with the first support frame 932.

[0027] One end of the second support frame 933 is connected with the first support frame 932, and the other end is connected with the target material opening and closing mechanism 6.

[0028] The connecting frame 934 is in an inverted L shape, one section of the connecting frame 934 is fixedly connected with a middle section of the second support frame 933, and the other section is movably connected with a second joint shaft 9362 of the overturning spring 936 through a joint shaft screw 937.

[0029] The utility model discloses a kind of overturning mechanisms of sputter coating machine, the overturning mechanism 9 is located in the side of heating cavity 1 and target material opening and closing mechanism 6, by overturning mechanism 9, so that target material opening and closing mechanism 6 and heating cavity 1 can be overturned connection, the target material opening and closing mechanism 6 is located on the upper portion of heating cavity 1, the overturning mechanism 9 includes symmetrically arranged lower support 91, overturning bearing 92, upper support 93, overturning spring 936, one end of the side of lower support 91 is fixedly connected with the side of heating cavity 1, the upper portion of lower support 91 is equipped with overturning bearing 92, one end of upper support 93 is equipped with connecting rod 931, two ends of connecting rod 931 protrude outward and can be rotatably connected with overturning bearing 92, the end of upper support 93 away from connecting rod 931 is fixedly connected with target material opening and closing mechanism 6, target material opening and closing mechanism 6 and heating cavity 1 side are equipped with locking piece 2, when opening locking piece 2, the overturning spring 936 loses stress and opens and stretches outward, drives upper support 93 to open outward, lower support 91 and upper support 93 rotate with overturning bearing 92 as the rotation center, so that target material opening and closing mechanism 6 realizes the opening and closing of heating cavity 1, without opening target material opening and closing mechanism 6 by artificial effort, it is simple to operate, and overturning spring 936 is mechanical power component and is not easy to damage, and service life is long.

[0030] The above-described embodiments only express several implementation manners of the utility model, the description is more specific and detailed, but can not therefore be understood as the limitation of the utility model patent range. It should be pointed out that for ordinary skilled person in the art, without departing from the utility model concept, several deformations and improvements can be made, which belong to the protection range of the utility model. Therefore, the protection range of the utility model patent should be subject to the appended claims.

Claims

1. A turnover mechanism of a sputtering coating machine, the turnover mechanism (9) is arranged at the side of a heating cavity (1) and a target material opening and closing mechanism (6), the target material opening and closing mechanism (6) and the heating cavity (1) are connected through the turnover mechanism (9), the target material opening and closing mechanism (6) is arranged on the upper part of the heating cavity (1), characterized in that: The turnover mechanism (9) comprises symmetrically arranged lower supports (91), a turnover bearing (92), upper supports (93) and turnover springs (936), one end of the side edge of the lower support (91) is fixedly connected with one side of the heating cavity (1), the turnover bearing (92) is arranged above the lower support (91), one end of the upper support (93) is provided with a connecting rod (931), the two ends of the connecting rod (931) protrude outward and are rotatably connected with the turnover bearing (92), the end of the upper support (93) away from the connecting rod (931) is fixedly connected with the target material opening and closing mechanism (6), the target material opening and closing mechanism (6) and the side of the heating cavity (1) are provided with locking members (2), when the locking members (2) are opened, the turnover springs (936) lose the force and open outward and stretch, drive the upper support (93) to open outward, and the lower support (91) and the upper support (93) rotate around the turnover bearing (92) as the rotation center, so that the target material opening and closing mechanism (6) realizes the opening and closing of the heating cavity (1). ​ 2. The turnover mechanism of a sputter coater according to claim 1, wherein: The outer side edge lower end of the lower support (91) and the outer side edge lower end of the upper support (93) are connected with the turnover springs (936), the turnover springs (936) are nitrogen springs, one end of the turnover spring (936) connected with the lower support (91) is provided with a first joint shaft (9361), the other end is provided with a second joint shaft (9362), the first joint shaft (9361) and the second joint shaft (9362) are connected with the lower support (91) and the upper support (93) through joint shaft screws (937) respectively, when the turnover mechanism (9) turns over, the upper support (93) moves in a circular arc around the turnover bearing (92) as the rotation center, so as to drive the turnover spring (936) to be stretched and rotate to the side of the first joint shaft (9361) with the first joint shaft (9361) as the rotation center.

3. The turnover mechanism of a sputter coating machine according to claim 2, wherein: The joint shaft screw (937) is connected with the first joint shaft (9361) and the second joint shaft (9362) in a ball head end.

4. The turnover mechanism of a sputter coating machine as claimed in claim 1, wherein: The outer side edge of the lower support (91) is also provided with a bolt (911), when the target material opening and closing mechanism (6) is closed on the heating cavity (1), the turnover mechanism (9) is placed in the initial position, at this time, the turnover spring (936) does not contact with the bolt (911), when the target material opening and closing mechanism (6) is opened and the turnover mechanism (9) is turned over to the maximum degree, that is, the upper support (93) is perpendicular to the lower support (91), the turnover spring (936) is also perpendicular to the lower support (91), at this time, the bolt (911) just abuts against the side edge of the turnover spring (936).

5. The turnover mechanism of a sputter coating system as defined in claim 1, wherein: The upper support (93) comprises a connecting rod (931), a first support frame (932), a second support frame (933), a connecting frame (934) and a reinforcing rib (935), the first support frame (932), the second support frame (933) and the connecting frame (934) are symmetrically arranged in groups, and the connecting rod (931) and the reinforcing rib (935) are arranged in parallel and are respectively located at two ends of the upper support (93).

6. The turnover mechanism of a sputter coating system as defined in claim 1, wherein: Both ends of the connecting rod (931) are sleeved with the first support frame (932), the turnover bearing (92) is arranged outside the first support frame (932) and is sleeved with the connecting rod (931), when the turnover mechanism (9) is turned over, the connecting rod (931) rotates in the turnover bearing (92), and the connecting rod (931) moves synchronously with the first support frame (932).

7. The turnover mechanism of a sputter coater according to claim 5, wherein: One end of the second support frame (933) is connected with the first support frame (932), and the other end is connected with the target material opening and closing mechanism (6).

8. The turnover mechanism of a sputter coating system as defined in claim 5, wherein: The connecting frame (934) is inverted L-shaped, one section of the connecting frame (934) is fixedly connected with the middle section of the second support frame (933), and the other section is movably connected with the second joint shaft (9362) of the turnover spring (936) through a joint shaft screw (937).

Images