Metal organic source supply device

Abstract

A metal organic source supply device comprises: a steel cylinder for storing a metal organic source; the first pipeline is connected with the steel cylinder, one end of the first pipeline extends into the steel cylinder, and the first pipeline is used for introducing carrier gas into the steel cylinder; the second pipeline is connected with the steel cylinder, one end of the second pipeline extends into the steel cylinder, and the second pipeline is used for conveying the metal organic source carried by the carrier gas from the steel cylinder to the reaction device; the third pipeline is connected with the first pipeline and the second pipeline; the fourth pipeline is communicated with the third pipeline and is used for discharging the purging gas in the first pipeline and the second pipeline; the first valve is arranged on the third pipeline and used for controlling connection and disconnection of the third pipeline and the fourth pipeline; and the gas sensing device is arranged on the fourth pipeline and is used for detecting the concentration of the preset type of gas in the fourth pipeline. The safety performance of the metal organic source supply device is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to metal organic chemical vapor deposition equipment field especially relates to a metal organic source supply device. BACKGROUND

[0002] Metal organic source is metal organic chemical vapor deposition (MOCVD) equipment production raw material, because of its chemical characteristics and production process requirement, need to store the steel bottle that provides metal organic source in constant temperature tank, form saturated vapor pressure in the steel bottle inside, then by carrier gas (H2 or N2) into MOCVD reaction cavity carries out reaction.

[0003] Metal organic source belongs to consumable, and metal organic source is stored in the steel bottle, when metal organic source is used up, need to carry out steel bottle replacement, and metal organic source also belongs to dangerous goods, and in the steel bottle replacement process, personnel needs to be protected from the harm of misoperation.

[0004] Therefore, it is needed to improve the safety performance of metal organic source in the use process. UTILITY MODEL CONTENT

[0005] The utility model solves the technical problem to provide a kind of metal organic source supply device, improve the safety performance of metal organic source in the use process.

[0006] To solve the above technical problem, the utility model embodiment provides a kind of metal organic source supply device, comprising: steel bottle, the steel bottle is used to store metal organic source;With the first pipeline of the steel bottle connection, the first pipeline one end extends to steel bottle, and the first pipeline is used to into carrier gas into steel bottle;With the second pipeline of the steel bottle connection, the second pipeline one end extends to steel bottle, and the second pipeline is used to carry metal organic source from the steel bottle to reaction device by carrier gas;With the third pipeline of the first pipeline and second pipeline connection;With the fourth pipeline of the third pipeline intercommunication, the fourth pipeline is used to release the purge gas in the first pipeline and second pipeline;First valve is set on the third pipeline, and the first valve is used to control the intercommunication and disconnection of the third pipeline and the fourth pipeline;Gas sensing device is set on the fourth pipeline, and the gas sensing device is used to detect the concentration of the gas of the fourth pipeline in the preset kind.

[0007] Optionally, it further includes: fifth pipeline, the both ends of the fifth pipeline are connected with the third pipeline and the fourth pipeline respectively, and the fourth pipeline is connected with the third pipeline by the fifth pipeline.

[0008] Optionally, the application further comprises a second valve arranged on the first pipeline, wherein the second valve is arranged between the third pipeline and the cylinder along the extension direction of the first pipeline; and a third valve arranged on the second pipeline, wherein the third valve is arranged between the third pipeline and the cylinder along the extension direction of the second pipeline.

[0009] Optionally, the application further comprises a sixth pipeline, wherein two ends of the sixth pipeline are connected with the second pipeline and the reaction device respectively; and the third pipeline is arranged between the sixth pipeline and the cylinder along the extension direction of the second pipeline.

[0010] Optionally, the application further comprises a fourth valve arranged on the first pipeline and the second pipeline, wherein the fourth valve is used for controlling the opening and closing of the first pipeline and the second pipeline; and the third pipeline is arranged between the fourth valve and the cylinder along the extension direction of the second pipeline and along the extension direction of the first pipeline.

[0011] Optionally, the fourth valve is an automatic valve.

[0012] Optionally, the application further comprises an automatic control system, wherein the automatic control system is communicatively connected with the gas sensing device, the automatic control system is communicatively connected with the fourth valve, and the automatic control system is used for sending a closing signal to the fourth valve to terminate the gas transmission and cut off the running state of the metal organic source supply device when the gas sensing device senses that the concentration of the preset type of gas in the fourth pipeline exceeds the preset value.

[0013] Optionally, the purge gas comprises nitrogen or hydrogen.

[0014] Optionally, the application further comprises a gas extraction pump connected with the fourth pipeline, and a fifth valve arranged on the fourth pipeline, wherein the fifth valve is arranged between the gas extraction pump and the gas sensing device.

[0015] Optionally, the preset type of gas comprises carrier gas or metal organic source gas; and the gas sensing device comprises carrier gas sensing device or metal organic source gas sensing device.

[0016] Optionally, the carrier gas comprises nitrogen or hydrogen.

[0017] Optionally, the metal organic source gas comprises trimethyl gallium, triethyl gallium, trimethyl aluminum, dimethyl magnesium or trimethyl indium.

[0018] Compared with the prior art, the technical scheme of the application has the following beneficial effects:

[0019] The metal organic source supply device can obtain whether the first valve leaks according to the concentration of the preset type of gas in the fourth pipeline in the working state, can timely solve the problem of the first valve not being closed, avoids causing waste of the metal organic source, and improves the supply efficiency of the metal organic source supply device and the production efficiency of the reaction device.

[0020] Further, the metal organic source supply device further comprises a second valve arranged on the first pipeline and a third valve arranged on the second pipeline, the gas sensing device can sense the concentration of the preset type of gas in the fourth pipeline, and the metal organic source supply device can obtain whether the second valve and the third valve leak according to the concentration of the preset type of gas in the fourth pipeline before the metal organic source cylinder is replaced, can timely solve the problem of the second valve and the third valve not being closed, avoids causing the metal organic source to leak when the cylinder is replaced, and improves the safety performance. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is a structure schematic view of the metal organic source supply device in an embodiment.

[0022] Figure 2 is a structure schematic view of the metal organic source supply device in an embodiment. DETAILED DESCRIPTION

[0023] As described in the background, the metal organic source needs to protect the personnel from the harm caused by the misoperation in the cylinder replacement process. The specific embodiments are combined for analysis and description.

[0024] Figure 1 is a structure schematic view of the metal organic source supply device in an embodiment.

[0025] Please refer to Figure 1The metal organic source supply device comprises a steel bottle 100 for storing a metal organic source; a first pipeline 101 connected with the steel bottle 100, one end of the first pipeline 101 extending into the steel bottle 100, the first pipeline 101 being used for introducing a carrier gas into the steel bottle 100; a second pipeline 102 connected with the steel bottle 100, one end of the second pipeline 102 extending into the steel bottle 100, the second pipeline 102 being used for conveying the metal organic source carried by the carrier gas; a third pipeline 103 connected with the first pipeline 101 and the second pipeline 102; a fourth pipeline 104 in communication with the third pipeline 103, the fourth pipeline 104 being used for discharging a purge gas for purging the first pipeline 101 and the second pipeline 102; a first valve 201 arranged on the third pipeline 103, the first valve 201 being used for controlling whether the carrier gas in the first pipeline 101 and the second pipeline 102 can enter the fourth pipeline 104; a fifth pipeline 106, both ends of the fifth pipeline 106 being connected with the third pipeline 103 and the fourth pipeline 104 respectively, the fourth pipeline 104 being in communication with the third pipeline 103 through the fifth pipeline 106; a second valve 202 arranged on the first pipeline 101, the second valve 202 being used for controlling whether the carrier gas can enter the steel bottle 100; a third valve 203 arranged on the second pipeline 102, the third valve 203 being used for controlling whether the carrier gas and the metal organic source carried by the carrier gas can flow from the steel bottle 100 into the second pipeline 102; a sixth pipeline 109, both ends of the sixth pipeline 109 being connected with the second pipeline 102 and a reaction device 110 respectively, the metal organic source carried by the carrier gas being conveyed to the reaction device 110 through the second pipeline 102 and the sixth pipeline 109; a fourth valve 205 arranged on the first pipeline 101 and the second pipeline 102, the fourth valve 205 being used for controlling whether the first pipeline 101 and the second pipeline 102 are conducted; a gas pump 107 connected with the fourth pipeline 104, the gas pump 107 being used for pumping and discharging the gas in the pipeline; and a fifth valve 204 arranged on the fourth pipeline 104.

[0026] In the working state, the carrier gas enters the steel bottle 100 from the first pipeline 101, and the metal organic source carried by the carrier gas enters the reaction device 110 from the second pipeline 102 and the sixth pipeline 109 to react. In the working state, the first valve 201 is closed, the fourth valve 205 is opened, the second valve 202 is opened, the third valve 203 is opened, and the carrier gas and the metal organic source cannot enter the third pipeline 103 and the fourth pipeline 104.

[0027] When the metal organic source in the steel cylinder 100 is used up, the steel cylinder 100 needs to be replaced, and the pipeline needs to be purged before replacement. The purging process is as follows: the second valve 202 and the third valve 203 are closed, the fourth valve 205 and the first valve 201 are opened, and the purging gas is introduced into the pipeline from the first pipeline 101 and the second pipeline 102, then the fifth valve 204 is opened, and the air pump 107 is opened to perform air extraction, and the process of air introduction and air extraction is repeated several times to complete the pipeline purging. After purging, the steel cylinder 100 can be replaced.

[0028] Since the first valve 201, the second valve 202 and the third valve 203 are all manual valves, that is, they need to be opened and closed manually. On the one hand, if the manual valve is forgotten to be closed when a person is operating, the metal organic source will be wasted. On the other hand, the metal organic source is a dangerous article, and if the manual valve is forgotten to be closed when a person is operating, the metal organic source will be leaked during the replacement of the steel cylinder 100, and dangerous situations such as explosion or fire will occur, which will endanger personal safety.

[0029] In order to solve the above problems, the utility model provides a metal organic source supply device, the fourth pipeline is provided with a gas sensing device, the gas sensing device can sense the concentration of a preset kind of gas in the fourth pipeline, the metal organic source supply device can obtain whether the first valve leaks in the working state according to the concentration of the preset kind of gas in the fourth pipeline, can solve the problem that the first valve is not closed in time, can avoid wasting the metal organic source, and improves the supply efficiency of the metal organic source supply device and the production efficiency of the reaction device.

[0030] In order to make the above-mentioned purposes, characteristics and advantages of the utility model more obvious and easy to understand, the specific embodiments of the utility model will be described in detail below with reference to the drawings.

[0031] Figure 2 It is the structure schematic view of the metal organic source supply device in the embodiment of the utility model.

[0032] Please refer to Figure 2 , the metal organic source supply device comprises:

[0033] The steel cylinder 400 is used for storing the metal organic source;

[0034] The first pipeline 401 connected with the steel cylinder 400, one end of the first pipeline 401 extends into the steel cylinder 400, and the first pipeline 401 is used for introducing the carrier gas into the steel cylinder 400;

[0035] A second pipeline 402 connected with the steel cylinder 400, one end of the second pipeline 402 extending into the steel cylinder 400, the second pipeline 402 being used for conveying the metal organic source carried by the carrier gas from the steel cylinder 400 to the reaction device;

[0036] A third pipeline 403 connected with the first pipeline 401 and the second pipeline 402;

[0037] A fourth pipeline 404 connected with the third pipeline 403, the fourth pipeline 404 being used for discharging the purge gas in the first pipeline 401 and the second pipeline 402;

[0038] A first valve 301 arranged on the third pipeline 403, the first valve 301 being used for controlling the communication and disconnection of the third pipeline 403 and the fourth pipeline 404;

[0039] A gas sensing device 405 arranged on the fourth pipeline 404, the gas sensing device 405 being used for detecting the concentration of a preset kind of gas in the fourth pipeline 404.

[0040] The metal organic source supply device, the fourth pipeline 404 being provided with the gas sensing device 405, the gas sensing device 405 being capable of detecting the concentration of a preset kind of gas in the fourth pipeline 404, the metal organic source supply device being capable of acquiring the situation of whether the first valve 301 leaks in the working state of supplying the metal organic source to the reaction device according to the concentration of the preset kind of gas in the fourth pipeline 404, being capable of timely solving the problem of the first valve 301 not being closed, avoiding the waste of the metal organic source, and improving the supply efficiency of the metal organic source supply device and the production efficiency of the reaction device.

[0041] In the embodiment, the preset kind of gas includes the carrier gas or the metal organic source gas.

[0042] In the embodiment, the carrier gas includes nitrogen or hydrogen.

[0043] In the embodiment, the metal organic source gas includes TMGa (Trimethyl Gallium), TEGa (triethyl gallium), TMIn (trimethyl indium), TMAl (Trimethyl aluminium), and Cp2Mg (Di-cyclopentadienyl magnesium).

[0044] In an embodiment, the gas sensing device 405 is a metal organic source gas sensing device, and the metal organic source gas sensing device includes a trimethyl gallium sensing device, a triethyl gallium sensing device, a trimethyl indium sensing device, a trimethyl aluminum sensing device, or a dimethyl magnesium sensing device.

[0045] In other embodiments, the gas sensing device 405 is a carrier gas sensing device, and the carrier gas sensing device includes a nitrogen gas sensing device or a hydrogen gas sensing device.

[0046] In the embodiment, the steel cylinder 400 can withstand a large vapor pressure of the metal organic source.

[0047] The gas sensing device 405 can be configured to detect any one of the carrier gas or the metal organic source gas. When the gas sensing device 405 detects that the concentration of the preset type of gas in the fourth pipeline 404 exceeds a preset value, it is determined that the metal organic source supply device is in an abnormal state, and the fourth valve needs to be closed to stop operation.

[0048] In the embodiment, the preset value is in a range that the concentration of the preset type of gas is greater than 0. That is, when the gas sensing device 405 detects that the fourth pipeline 404 contains the preset type of gas, it is determined that the metal organic source supply device is in an abnormal state.

[0049] In other embodiments, the preset value can also be set to other range values according to actual needs.

[0050] Please continue to refer to Figure 2 In the embodiment, the metal organic source supply device further includes a fifth pipeline 407, both ends of the fifth pipeline 407 are connected with the third pipeline 403 and the fourth pipeline 404 respectively, and the fourth pipeline 404 is in communication with the third pipeline 403 through the fifth pipeline 407.

[0051] In the embodiment, both ends of the fifth pipeline 407 are connected with the third pipeline 403 and the fourth pipeline 404 respectively, that is, both ends of the fifth pipeline 407 are directly connected with the third pipeline 403 and the fourth pipeline 404 respectively; and the fourth pipeline 404 is in communication with the third pipeline 403, that is, the fourth pipeline 404 does not directly contact with the third pipeline 403.

[0052] In the embodiment, the type of the first valve 301 includes a manual valve. That is, the first valve 301 needs to be opened and closed manually by an operator.

[0053] In the embodiment, the metal organic source supply device further comprises a second valve 302 arranged on the first pipeline 401, the second valve 302 is used to control whether the carrier gas can enter into the steel cylinder 400, and the second valve 302 is arranged between the third pipeline 403 and the steel cylinder 400 in the extension direction of the first pipeline 401; a third valve 303 arranged on the second pipeline 402, the third valve 303 is used to control whether the metal source carried by the carrier gas can flow out from the steel cylinder 400 into the second pipeline 402, and the third valve 303 is arranged between the third pipeline 403 and the steel cylinder 400 in the extension direction of the second pipeline 402.

[0054] In the embodiment, the type of the second valve 302 includes a manual valve, that is, the second valve 302 needs to be opened and closed manually by an operator. The type of the third valve 303 includes a manual valve, that is, the third valve 303 needs to be opened and closed manually by an operator.

[0055] When the second valve 302 is opened, the carrier gas can enter into the steel cylinder 400 through the first pipeline 401. When the second valve 302 is closed, the transmission path of the carrier gas in the first pipeline 401 can be cut off.

[0056] When the third valve 303 is opened, the metal organic source carried by the carrier gas can enter into the reaction device 410 through the second pipeline 402. When the third valve 303 is closed, the transmission path of the metal organic source carried by the carrier gas in the second pipeline 402 can be cut off.

[0057] Please continue to refer to Figure 2 In the embodiment, the metal organic source supply device further comprises a sixth pipeline 409, two ends of the sixth pipeline 409 are connected with the second pipeline 402 and the reaction device 410 respectively, the metal organic source carried by the carrier gas is transported to the reaction device 410 through the second pipeline 402 and the sixth pipeline 409, and the third pipeline 403 is arranged between the sixth pipeline 409 and the steel cylinder 400 in the extension direction of the second pipeline 402.

[0058] The reaction device 410 is a metal organic chemical vapor deposition (MOCVD) device.

[0059] Please continue to refer to Figure 2In the embodiment, the metal organic source supply device further comprises a fourth valve 305 arranged on the first pipeline 401 and the second pipeline 402, and the fourth valve 305 is used to control the opening and closing of the first pipeline 401 and the second pipeline 402; the third pipeline 403 is arranged between the fourth valve 305 and the steel cylinder 400 along the extension direction of the second pipeline 402 and along the extension direction of the first pipeline 401.

[0060] In the embodiment, the fourth valve 305 is an automatic valve. That is, the fourth valve 305 can be automatically opened and closed by a signal.

[0061] When the fourth valve 305 is opened, the first pipeline 401 and the second pipeline 402 are open, and the carrier gas or the metal organic source carried by the carrier gas can pass through. When the fourth valve 305 is closed, the first pipeline 401 and the second pipeline 402 are closed, and the carrier gas or the metal organic source carried by the carrier gas cannot pass through.

[0062] Please continue to refer to Figure 2 In the embodiment, the metal organic source supply device further comprises an automatic control system 408 (PLC), which is in communication connection with the gas sensing device 405 and in communication connection with the fourth valve 305. When the gas sensing device 405 detects that the concentration of the gas of the fourth pipeline 404 of the preset type exceeds the preset value, the automatic control system 408 sends a closing signal to the fourth valve 305 to terminate the gas transmission and cut off the running state of the metal organic source supply device.

[0063] The running state of the metal organic source supply device includes a working state or a purge state.

[0064] When the metal organic source supply device is in a normal working state, the control process of the automatic control system 408 includes: the gas sensing device 405 detects the concentration of the gas of the fourth pipeline 404 of the preset type, and the gas sensing device 405 sends a signal of the concentration of the gas of the fourth pipeline 404 of the preset type exceeding the standard to the automatic control system 408 (PLC); after the automatic control system 408 (PLC) obtains the signal of the concentration of the gas of the fourth pipeline 404 of the preset type exceeding the standard, the automatic control system 408 sends a closing signal to the fourth valve 305 to terminate the gas transmission in the first pipeline 401 and the second pipeline 402 and cut off the normal working state.

[0065] When the metal organic source supply device is working normally, i.e. the second valve 302 and the third valve 303 are opened, the carrier gas enters into the cylinder 400 through the first pipeline 401, and the metal organic source carried by the carrier gas is transported into the reaction device 410 through the second pipeline 402. When the first valve 301 is not closed, the carrier gas or the metal organic source carried by the carrier gas will enter into the fourth pipeline 404 through the third pipeline 403, the first valve 301 and the fifth pipeline 407.

[0066] In this embodiment, the gas sensing device 405 is a metal organic source gas sensing device. When the metal organic source gas sensing device 405 detects the existence of the metal organic source gas in the fourth pipeline 404 when the metal organic source supply device is working normally, it indicates that the first valve 301 is not closed normally. After the normal working state is cut off, the first valve 301 is closed again.

[0067] In another embodiment, the gas sensing device 405 is a carrier gas sensing device. When the carrier gas sensing device 405 detects the existence of the carrier gas in the fourth pipeline 404 when the metal organic source supply device is working normally, it indicates that the first valve 301 is not closed normally. After the normal working state is cut off, the first valve 301 is closed again.

[0068] Please continue to refer to Figure 2 In this embodiment, the metal organic source supply device further comprises a gas extraction pump 420 connected with the fourth pipeline 404, the gas extraction pump 420 is used for extracting the gas in the pipeline and discharging; and a fifth valve 304 arranged on the fourth pipeline 404, the fifth valve 304 is arranged between the gas extraction pump 420 and the gas sensing device 405.

[0069] The fifth valve 304 is used for isolating the fourth pipeline 404 from the gas extraction pump 420. When the gas extraction pump 420 is working, the fifth valve 304 is opened.

[0070] The purging process of the metal organic source supply device is as follows: the second valve 302, the third valve 303 and the fifth valve 304 are closed, the fourth valve 305 and the first valve 301 are opened, and the purging gas is introduced into the first pipeline 401 and the second pipeline 402; after the gas is filled, the fifth valve 304 is opened, and the gas extraction pump 420 is opened to extract the gas. The purging process is completed by repeating the process of filling and extracting the gas for several times.

[0071] In this embodiment, the purging gas includes nitrogen or hydrogen.

[0072] The metal organic source supply device is in a purging state, and the control process of the automatic control system 408 further includes: the gas sensing device 405 detects the concentration of the carrier gas or the metal organic source gas in the fourth pipeline 404, the type of the carrier gas being different from the type of the purging gas; the gas sensing device 405 sends a signal to the automatic control system 408 (PLC) that the carrier gas or the metal organic source gas exists in the fourth pipeline 404; after the automatic control system 408 (PLC) obtains the signal that the concentration of the carrier gas or the metal organic source gas in the fourth pipeline 404 exceeds the preset value, the automatic control system 408 sends a closing signal to the fourth valve 305 to terminate the gas transmission in the first pipeline 401 and the second pipeline 402, and cut off the purging state.

[0073] In the embodiment, the gas sensing device 405 is a metal organic source gas sensing device, and in the purging process, the gas sensing device 405 detects the concentration of the metal organic source gas in the fourth pipeline 404. When the gas sensing device 405 detects that the concentration of the metal organic source gas in the fourth pipeline 404 exceeds the preset value (for example, greater than 0), it indicates that one or both of the second valve 302 and the third valve 303 are not closed.

[0074] In another embodiment, the gas sensing device 405 is a carrier gas sensing device, the purging gas is introduced, and the purging is performed for a predetermined time (for example, 10s), and the gas sensing device 405 detects the concentration of the carrier gas in the fourth pipeline 404. If the carrier gas is hydrogen, the purging gas is nitrogen, the gas sensing device 405 is a hydrogen sensing device for detecting the concentration of hydrogen, and if the carrier gas is nitrogen, the purging gas is hydrogen, and the gas sensing device 405 is a nitrogen sensing device for detecting the concentration of nitrogen. If the gas sensing device 405 detects that the concentration of the carrier gas in the fourth pipeline 404 exceeds the preset value, it indicates that one or both of the second valve 302 and the third valve 303 are not closed, and the residual carrier gas in the cylinder 400 is blown out.

[0075] In the purging process, when one or both of the second valve 302 and the third valve 303 are not closed, the purging gas will enter the cylinder 400 and carry the metal organic source through the first pipeline 401, the second pipeline 402, the third pipeline 403, the first valve 301, the fifth pipeline 407 into the fourth pipeline 404; or, when one or both of the second valve 302 and the third valve 303 are not closed, the residual carrier gas in the cylinder 400 will also enter the fourth pipeline 404 through the first pipeline 401, the second pipeline 402, the third pipeline 403, the first valve 301, and the fifth pipeline 407.

[0076] When the gas sensing device 405 detects that the concentration of carrier gas or metal organic source gas in the fourth pipeline 404 exceeds the preset value during the purging of the metal organic source supply device, it indicates that one or both of the second valve 302 and the third valve 303 are not normally closed, and the purging state is cut off, and after the second valve 302 and the third valve 303 are reclosed, the purging is continued.

[0077] After the purging is completed, the gas sensing device 405 does not detect an abnormality, the closed state of the second valve 302 and the third valve 303 is maintained, and the steel cylinder 400 is disassembled and replaced. Due to the sensing and monitoring of the gas sensing device 405 on the preset type of gas in the fourth pipeline 404, metal organic source leakage during replacement of the steel cylinder is avoided, and safety performance is improved.

[0078] Although the utility model discloses as above, the utility model is not limited to this. Any person skilled in the art, without departing from the spirit and scope of the utility model, can make various changes and modifications, therefore the protection scope of the utility model should be the range defined by the claims.

Claims

1. A metal-organic source supply apparatus characterized by comprising: The application relates to a metal organic source supply device. The device comprises: a steel bottle for storing metal organic source; a first pipeline connected with the steel bottle, one end of the first pipeline extending into the steel bottle, the first pipeline being used for feeding carrier gas into the steel bottle; a second pipeline connected with the steel bottle, one end of the second pipeline extending into the steel bottle, the second pipeline being used for conveying metal organic source carried by the carrier gas from the steel bottle to a reaction device; a third pipeline connected with the first pipeline and the second pipeline; a fourth pipeline in communication with the third pipeline, the fourth pipeline being used for discharging purge gas in the first pipeline and the second pipeline; a first valve arranged on the third pipeline, the first valve being used for controlling the communication and disconnection of the third pipeline and the fourth pipeline; 2. The metal-organic source supply apparatus according to claim 1, wherein a gas sensing device arranged on the fourth pipeline, the gas sensing device being used for detecting the concentration of preset gas in the fourth pipeline. The device further comprises:

3. The metal-organic source supply apparatus according to claim 1, wherein a fifth pipeline, two ends of the fifth pipeline being connected with the third pipeline and the fourth pipeline respectively, the fourth pipeline being in communication with the third pipeline through the fifth pipeline. The device further comprises: a second valve arranged on the first pipeline, the second valve being arranged between the third pipeline and the steel bottle in the extension direction of the first pipeline; 4. The metal-organic source supply apparatus according to claim 1, wherein a third valve arranged on the second pipeline, the third valve being arranged between the third pipeline and the steel bottle in the extension direction of the second pipeline. The device further comprises:

5. The metal-organic source supply apparatus according to claim 1, wherein a sixth pipeline, two ends of the sixth pipeline being connected with the second pipeline and the reaction device respectively, the third pipeline being arranged between the sixth pipeline and the steel bottle in the extension direction of the second pipeline. The device further comprises: a fourth valve arranged on the first pipeline and the second pipeline, the fourth valve being used for controlling the conduction and closure of the first pipeline and the second pipeline; 6. The metal-organic source supply apparatus according to claim 5, wherein the third pipeline being arranged between the fourth valve and the steel bottle in the extension direction of the second pipeline and in the extension direction of the first pipeline.

7. The metal organic source supply device according to claim 5, characterized in that: The fourth valve is of an automatic type. The device further comprises:

8. The metal-organic source supply apparatus according to claim 1, wherein an automatic control system, the automatic control system being communicatively connected with the gas sensing device and communicatively connected with the fourth valve, the automatic control system being used for sending a closure signal to the fourth valve to terminate gas transmission and cut off the running state of the metal organic source supply device when the gas sensing device senses that the concentration of preset gas in the fourth pipeline exceeds a preset value.

9. The organometallic source supply apparatus according to claim 1, wherein The purge gas comprises nitrogen or hydrogen.

10. The organometallic source supply apparatus according to claim 1, wherein The device further comprises an air pump connected with the fourth pipeline and a fifth valve arranged on the fourth pipeline, the fifth valve being arranged between the air pump and the gas sensing device.

11. The metal-organic source supply apparatus according to claim 10, wherein The preset gas comprises carrier gas or metal organic source gas, and the gas sensing device comprises carrier gas sensing device or metal organic source gas sensing device.

12. The metal-organic source supply apparatus according to claim 10, wherein The carrier gas comprises nitrogen or hydrogen. The metal organic source gas comprises trimethyl gallium, triethyl gallium, trimethyl aluminum, dimethyl magnesium or trimethyl indium.

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