Magnetic type aluminum disc device

Abstract

The utility model provides a magnetic type aluminum disc device, which comprises an aluminum disc and a cover plate, a plurality of grooves are arranged on the aluminum disc, trays are arranged in the grooves and are used for placing wafers, and first magnetic connecting pieces are arranged on the surface of the aluminum disc between two adjacent grooves; a plurality of first through holes are formed in the cover plate, a second through hole is formed in the part, between every two adjacent first through holes, of the cover plate, and a second magnetic connecting piece is embedded in each second through hole; the magnetic type aluminum disc device further comprises a bearing table and a third magnetic connecting piece, when the aluminum disc is placed on the bearing table and covered with the cover plate, the first magnetic connecting piece is arranged in the second magnetic connecting piece in a penetrating mode, and the third magnetic connecting piece is arranged in the second through hole in the radial direction of the second through hole. And the magnetic pole directions of the third magnetic connecting piece and the second magnetic connecting piece are consistent with the magnetic pole direction of the first magnetic connecting piece, so that the aluminum disc and the cover plate are mutually attracted and connected into a whole. According to the utility model, a screwdriver and a ceramic screw are not required to be used for disassembly and assembly, and the phenomena of scratching and pollution to the wafer can be effectively avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to etching carrier technical field, especially relates to a magnetic formula aluminum disc device. BACKGROUND

[0002] ICP dry etching is a common micro-nano processing technology, its principle is to use high frequency electric field to ionize gas, make it form plasma, then introduce plasma into reaction chamber, use chemical reaction in reaction chamber to corrode or deposit material, this method can realize high precision, high speed and high uniformity etching, and the damage to material is smaller, is widely used in microelectronic device manufacturing, optical device processing and other fields.

[0003] The etching carrier used in the existing ICP dry etching process generally includes an aluminum disc, a guide disc, a quartz cover plate and a ceramic screw, specifically, first, the wafer is positioned and placed on the aluminum disc through the guide disc, when the wafer is placed, the guide disc is taken away, and the position of the wafer on the aluminum disc is fixed by using the quartz cover plate, the ceramic screw and the screwdriver, so as to avoid the phenomenon that the wafer is displaced during etching, however, in the actual operation process, the installation and disassembly of the ceramic screw are relatively cumbersome, the operation efficiency is relatively low, and in the process that the operator fixes the ceramic screw by using the screwdriver, the wafer is easily scratched, so that the wafer is contaminated, and the wafer yield is seriously affected. UTILITY MODEL CONTENTS

[0004] Therefore, the utility model aims at providing a magnetic formula aluminum disc device, which aims at solving the technical problems that the etching carrier used in the ICP dry etching process in the prior art is relatively cumbersome in installation and disassembly, the operation efficiency is relatively low, and in the process that the operator fixes the ceramic screw by using the screwdriver, the wafer is easily scratched, so that the wafer is contaminated, and the wafer yield is seriously affected.

[0005] The utility model discloses a magnetic formula aluminum disc device, which comprises an aluminum disc and a cover plate matched with the aluminum disc, a plurality of grooves are arranged on the aluminum disc, a tray is arranged in each groove, and the tray is used for placing a wafer.

[0006] A plurality of first through holes are arranged on the cover plate, each first through hole corresponds to a groove, at least one second through hole is arranged between two adjacent first through holes on the cover plate, and a second magnetic connecting piece is embedded in the second through hole.

[0007] The magnetic type aluminum disc device further comprises a bearing table and a third magnetic connecting piece rotatably arranged in the middle of the bearing table, when the aluminum disc is placed on the bearing table and the cover plate is covered on the aluminum disc, the first magnetic connecting piece is arranged in the inside of the second magnetic connecting piece, and the magnetic pole directions of the third magnetic connecting piece and the second magnetic connecting piece are consistent with the magnetic pole direction of the first magnetic connecting piece in the radial direction of the second through hole, so that the aluminum disc and the cover plate are adsorbed and connected to form an integrated body.

[0008] Compared with the prior art, the magnetic type aluminum disc device has the beneficial effects that the fixing between the cover plate and the aluminum disc in the application is realized by the magnetic force adsorption, specifically, the first magnetic connecting piece is arranged on the aluminum disc, the second magnetic connecting piece is arranged on the cover plate, and the strong adsorption or easy separation between the aluminum disc and the cover plate is realized by using the bearing table with the rotatable third magnetic connecting piece arranged in the middle, the operation process is very convenient and efficient, manual disassembly and assembly operation by using a screwdriver and ceramic screws is not needed, the production efficiency can be greatly improved, the scratching and pollution of the wafer during the process of fixing the screws by using the screwdriver are avoided, and the production capacity and yield of the product are greatly improved.

[0009] In addition, the magnetic type aluminum disc device has the following additional technical features.

[0010] Further, the first magnetic connecting piece is a cylindrical magnet, the cylindrical magnet is a hollow structure, and one end of the cylindrical magnet is fixedly connected with the surface of the aluminum disc.

[0011] Further, the second magnetic connecting piece is a permanent magnet ring, the thickness of the permanent magnet ring is smaller than the hole depth of the second through hole, when the cover plate is covered on the aluminum disc, one end of the cylindrical magnet away from the aluminum disc is arranged in the inside of the permanent magnet ring, and the magnetic pole direction of the permanent magnet ring is consistent with the magnetic pole direction of the cylindrical magnet in the radial direction of the second through hole.

[0012] Further, the third magnetic connecting piece is a circular magnetic disc, and the circular magnetic disc is rotatably connected with the middle of the bearing table through a rotating base.

[0013] Further, the diameter of the circular magnetic disc is greater than the total length of the groove opening of the groove and smaller than the diameter of the aluminum disc.

[0014] Further, a plurality of limiting blocks are circumferentially arranged on the inner wall of one end of the first through hole in the axial direction of the first through hole, and the limiting blocks are used for limiting the wafer.

[0015] Further, a plurality of gas permeable holes for passing gas are arranged on the tray, and the gas permeable holes are arranged along the axial direction of the aluminum disc.

[0016] Further, the bearing table comprises a bearing part, two support parts symmetrically arranged at both ends of one side of the bearing part, and a plurality of limiting parts arranged at the other side of the bearing part along the circumferential direction of the bearing part, the plurality of limiting parts are arranged on the same side as the third magnetic connecting piece, and the inner side of the plurality of limiting parts and the surface of the bearing part form a containing space for placing the aluminum disc.

[0017] Further, in the axial direction of the bearing part, the surface of the side connected with the limiting part of the bearing part is higher than the surface of the third magnetic connecting piece, when the aluminum disc is placed in the containing space, the surface of the side of the aluminum disc away from the groove abuts against the surface of the bearing part.

[0018] Further, a plurality of lightening holes are arranged on the bearing part along the axial direction of the bearing part, the lightening holes are communicated with the air holes when the aluminum disc is placed in the containing space. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a three-dimensional structure diagram of the magnetic type aluminum disc device of the utility model;

[0020] Figure 2 It is an explosion schematic view of the magnetic type aluminum disc device of the utility model;

[0021] Figure 3 It is a structure schematic view of the aluminum disc in the magnetic type aluminum disc device of the utility model;

[0022] Figure 4 It is Figure 3 It is a structure enlarged view of A in the middle;

[0023] Figure 5 It is a structure schematic view of the cover plate in the magnetic type aluminum disc device of the utility model;

[0024] Figure 6 It is Figure 5 It is a structure enlarged view of B in the middle;

[0025] Figure 7 It is a structure schematic view of the bearing table in the magnetic type aluminum disc device of the utility model under a certain visual angle;

[0026] Figure 8 It is a kind of working principle schematic view of the magnetic type aluminum disc device of the utility model.

[0027] Wherein, the above-mentioned drawings include the following reference signs: 10-aluminum disc; 11-tray; 12-first magnetic connecting piece; 101-groove; 102-vent hole; 20-cover plate; 21-limiting block; 22-second magnetic connecting piece; 201-first through hole; 202-second through hole; 30-bearing table; 31-bearing part; 32-supporting part; 33-limiting part; 301-weight-reducing hole; 41-third magnetic connecting piece; 42-rotary base.

[0028] The following specific embodiments will further illustrate the present application in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0029] In order to facilitate the understanding of the present application, the present application will be described more fully below with reference to the accompanying drawings. The drawings show several embodiments of the present application. However, the present application can be realized in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0030] It should be noted that when an element is referred to as being "fixedly attached" to another element, it can be directly on the other element or there can be an intervening element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements can be present. The terms "vertical", "horizontal", "left", "right", and the like as used herein are for purposes of illustration only.

[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0032] Please refer to Figures 1 to 8The utility model provides a kind of magnetic suction type aluminium disc 10 device shown in the utility model, including aluminium disc 10, and the cover plate 20 compatible with aluminium disc 10, aluminium disc 10 is equipped with several grooves 101, tray 11 is equipped in groove 101, tray 11 is used to place wafer, in the embodiment, the shape of tray 11 and groove 101 is correspondingly set, the upper surface of tray 11 is below the surface of aluminium disc 10, more specifically, tray 11 is equipped with multiple gas-permeable holes 102 for passing into gas, gas-permeable hole 102 is along the axial direction of aluminium disc 10 setting.The surface of aluminium disc 10 between the adjacent two grooves 101 is equipped with at least one first magnetic connector 12, as a specific example, in the embodiment, first magnetic connector 12 is cylindrical magnet, cylindrical magnet is hollow structure, one end of cylindrical magnet is fixedly connected with the surface of aluminium disc 10.

[0033] As an example, cover plate 20 is equipped with several first through holes 201, first through hole 201 is one-to-one corresponding with groove 101, more specifically, the cover plate 20 in the embodiment is quartz cover plate, in the axial direction of first through hole 201, the inner wall of one end of first through hole 201 is circumferentially spaced and provided with multiple limit blocks 21, limit block 21 is used to limit wafer.Located between the adjacent two first through holes 201 on cover plate 20 is equipped with at least one second through hole 202, second through hole 202 is embedded with second magnetic connector 22, as a specific example, in the embodiment, second magnetic connector 22 is permanent magnet ring, the thickness of permanent magnet ring is less than the hole depth of second through hole 202, the inner diameter of permanent magnet ring is greater than or equal to the outer diameter of cylindrical magnet, when cover plate 20 is covered on aluminium disc 10, one end of cylindrical magnet away from aluminium disc 10 is arranged in the inside of permanent magnet ring.Further, in the radial direction of second through hole 202, the magnetic pole direction of permanent magnet ring is consistent with the magnetic pole direction of cylindrical magnet.

[0034] As an example, the magnetic suction type aluminium disc 10 device of the application further includes a bearing table 30 and a third magnetic connector 41 rotatably arranged in the middle of the bearing table 30, when the aluminium disc 10 is placed on the bearing table 30 and the cover plate 20 is covered on the aluminium disc 10, the first magnetic connector 12 is arranged in the inside of the second magnetic connector 22, in the radial direction of the second through hole 202, the magnetic pole directions of the third magnetic connector 41 and the second magnetic connector 22 are respectively consistent with the magnetic pole direction of the first magnetic connector 12, so that the aluminium disc 10 and the cover plate 20 are mutually adsorbed and connected to form an integral body. In the embodiment, the third magnetic connector 41 is a circular disk, and the circular disk is rotatably connected to the middle of the bearing table 30 through a rotating base 42. More specifically, the diameter of the circular disk is greater than the total length of the groove of the groove 101 and less than the diameter of the aluminium disc 10.

[0035] Further, the bearing table 30 comprises a bearing part 31, two support parts 32 symmetrically arranged at both ends of one side of the bearing part 31, and a plurality of limiting parts 33 arranged at the other side of the bearing part 31 in a circumferential direction of the bearing part 31, the plurality of limiting parts 33 are arranged on the same side as the third magnetic connecting part 41, and the inner side of the plurality of limiting parts 33 and the surface of the bearing part 31 form a containing space for placing the aluminum disc 10. A plurality of lightening holes 301 are arranged on the bearing part 31 in an axial direction of the bearing part 31, and the lightening holes 301 are communicated with the air holes 102 when the aluminum disc 10 is placed in the containing space. Further, in the axial direction of the bearing part 31, the surface of the side where the bearing part 31 is connected with the limiting part 33 is higher than the surface of the third magnetic connecting part 41, and the surface of the side of the aluminum disc 10 away from the groove 101 abuts against the surface of the bearing part 31 when the aluminum disc 10 is placed in the containing space. As a specific example, in the embodiment, the bearing part 31 is a circular ring structure with a cross-shaped connecting support arranged inside, the middle part of the cross-shaped connecting support is rotationally connected with the third magnetic connecting part 41 through the rotating base 42, and three limiting parts 33 are arranged on the surface of one side of the circular ring structure in a circumferential direction, and the thickness of the limiting part 33 is smaller than the ring thickness of the circular ring in a radial direction of the circular ring structure, so that the inner side of the three limiting parts 33 and the surface of the circular ring structure form the containing space, the containing space is matched with the aluminum disc 10, and the bearing table 30 can bear the aluminum disc 10.

[0036] In actual use, the working principle of the magnetic aluminum disc 10 device in the utility model can be that the aluminum disc 10 is placed on the bearing table 30, and then the cover plate 20 is arranged on the aluminum disc 10 in a front surface manner, so that the limiting block 21 on the cover plate 20 can limit the wafer on the tray 11, at this time, as shown in the left drawing of FIG. Figure 8 In the radial direction of the second through hole 202 on the cover plate 20, the magnetic pole directions of the S pole and the N pole of the second magnetic connecting part 22, i.e. the permanent ring, are consistent with the magnetic pole directions of the S pole and the N pole of the first magnetic connecting part 12, i.e. the cylindrical magnet, at the same time, the magnetic pole directions of the S pole and the N pole on the third magnetic connecting part 41, i.e. the circular disc, are rotated to be consistent with the magnetic pole directions of the first magnetic connecting part 12 through the rotating base 42, in this way, the magnetic force loops are formed between the first magnetic connecting part 12, i.e. the permanent ring, and the second magnetic connecting part 22, i.e. the cylindrical magnet, and the magnetic force loops are also formed between the third magnetic connecting part 41, i.e. the circular disc, and the first magnetic connecting part 12, i.e. the cylindrical magnet, at this time, the magnetic field in the magnetic force loops is conducted from the upper layer to the lower layer, so that a strong adsorption force is formed between the cover plate 20 and the aluminum disc 10, and the purpose of the mutual adsorption of the cover plate 20 and the aluminum disc 10 to form an integrated body is achieved, and the ceramic screw and the screwdriver for fixing the cover plate 20 on the aluminum disc 10 are no longer needed, and the aluminum disc 10 and the cover plate 20 fixed by the magnetic attraction can be directly conveyed into the etching machine cavity for etching process.

[0037] When the etching process is completed, the aluminum disc 10 with strong adsorption force can be placed on the bearing table 30, and the third magnetic connecting piece 41 is horizontally rotated by 180 degrees through the rotating base 42, so that the magnetic pole direction of the third magnetic connecting piece 41, that is, the circular magnetic disc, is turned over. Figure 8 As shown in the left drawing of FIG. 4, the magnetic pole direction of the third magnetic connecting piece 41, that is, the circular magnetic disc, is turned over from the S pole and the N pole from left to right to the N pole and the S pole from left to right. Figure 8 Figure 8 As shown in the right drawing of FIG. 4, the magnetic pole direction of the third magnetic connecting piece 41, that is, the circular magnetic disc, is turned over from the S pole and the N pole from left to right to the N pole and the S pole from left to right.

[0038] Therefore, the magnetic force between the aluminum disc 10 and the cover plate 20 disappears, and the strong adsorption force between the aluminum disc 10 and the cover plate 20 no longer exists. At this time, the cover plate 20 can be easily removed, and the aluminum disc 10 and the cover plate 20 can be separated without disassembling the ceramic screw, which is convenient to operate and can greatly reduce the processing cost caused by the abnormal state of scratching and pollution of the wafer.

[0039] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in combination with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0040] The above-described embodiments only express several implementation manners of the present application, and the description is more specific and detailed, but it cannot be understood as a limitation on the application scope of the present application. It should be noted that, for ordinary skilled persons in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.​

Claims

1. A magnetic aluminum plate device comprising an aluminum plate and a cover plate fitted to the aluminum plate, characterized by, The aluminum disc is provided with a plurality of grooves, and a tray is arranged in each groove, the tray is used for placing a wafer, and at least one first magnetic connecting piece is arranged on the surface of the aluminum disc between two adjacent grooves; The cover plate is provided with a plurality of first through holes, each first through hole corresponds to a groove, at least one second through hole is arranged on the cover plate between two adjacent first through holes, and a second magnetic connecting piece is embedded in the second through hole; The magnetic aluminum disc device further comprises a bearing table and a third magnetic connecting piece rotatably arranged in the middle of the bearing table. When the aluminum disc is placed on the bearing table and the cover plate is arranged on the aluminum disc, the first magnetic connecting piece is arranged in the interior of the second magnetic connecting piece. In the radial direction of the second through hole, the magnetic pole directions of the third magnetic connecting piece and the second magnetic connecting piece are respectively consistent with the magnetic pole direction of the first magnetic connecting piece, so that the aluminum disc and the cover plate are mutually adsorbed and connected to form an integrated body.

2. The magnetic aluminum plate device of claim 1, wherein, The first magnetic connecting piece is a cylindrical magnet, the cylindrical magnet is a hollow structure, and one end of the cylindrical magnet is fixedly connected to the surface of the aluminum disc.

3. The magnetic aluminum plate device of claim 2, wherein, The second magnetic connecting piece is a permanent magnet ring, the thickness of the permanent magnet ring is less than the hole depth of the second through hole, and when the cover plate is arranged on the aluminum disc, one end of the cylindrical magnet away from the aluminum disc is arranged in the interior of the permanent magnet ring. In the radial direction of the second through hole, the magnetic pole direction of the permanent magnet ring is consistent with the magnetic pole direction of the cylindrical magnet.

4. The magnetic aluminum plate device of claim 1, wherein, The third magnetic connecting piece is a circular magnetic disc, and the circular magnetic disc is rotatably connected to the middle of the bearing table through a rotating base.

5. The magnetic aluminum plate device of claim 4, wherein, The diameter of the circular magnetic disc is greater than the total length of the groove opening of the groove and less than the diameter of the aluminum disc. 6.The magnetic aluminum plate device of claim 1, wherein, In the axial direction of the first through hole, a plurality of limiting blocks are arranged on the inner wall of one end of the first through hole in the circumferential direction, and the limiting blocks are used for limiting the wafer.

7. The magnetic aluminum plate device of claim 1, wherein, A plurality of gas permeable holes for passing gas are arranged on the tray in the axial direction of the aluminum disc. 8.The magnetic aluminum plate device of claim 7, wherein, The bearing table comprises a bearing part, two support parts symmetrically arranged at the two ends of one side of the bearing part, and a plurality of limiting parts arranged on the other side of the bearing part in the circumferential direction of the bearing part. The plurality of limiting parts are arranged on the same side of the third magnetic connecting piece, and the inner side of the plurality of limiting parts and the surface of the bearing part jointly form a containing space for placing the aluminum disc.

9. The magnetic aluminum plate device of claim 8, wherein, In the axial direction of the bearing part, the surface of one side of the bearing part connected with the limiting part is higher than the surface of the third magnetic connecting piece. When the aluminum disc is placed in the containing space, the surface of the side of the aluminum disc away from the groove abuts against the surface of the bearing part. 10.The magnetic aluminum plate device of claim 8, wherein, A plurality of lightening holes are arranged on the bearing part in the axial direction of the bearing part. When the aluminum disc is placed in the containing space, the lightening holes are in communication with the gas permeable holes.

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