Reaction device

Abstract

The utility model provides a reaction device which comprises a reaction furnace, the reaction furnace is used for containing a plurality of carriers, a plurality of mounting holes are formed in the reaction furnace, the mounting holes correspond to clearance spaces in the reaction furnace, the clearance spaces are formed among the carriers, each carrier is used for bearing sheet materials, and the reaction furnace is used for heating the sheet materials; the plurality of mounting pipes are arranged in the reaction furnace, the plurality of mounting pipes are in one-to-one correspondence with the plurality of mounting holes and are communicated with the plurality of mounting holes, and the plurality of mounting pipes are positioned in the clearance space; and the auxiliary heating piece is arranged in the mounting pipe, and the auxiliary heating piece is used for heating the clearance space. According to the reaction device provided by the invention, the auxiliary heating piece can heat the clearance space among the plurality of carriers so as to heat the sheet-shaped material in the clearance space, so that the efficiency of temperature rise in the clearance space can be improved, and the processing effect close to the sheet-shaped material is improved.

Description

Technical Field

[0001] This application relates to the technical field of photovoltaic and semiconductor product manufacturing, and in particular to a reaction apparatus. Background Technology

[0002] In the manufacturing process of photovoltaic and semiconductor products, sheet materials can be carried on a carrier and simultaneously enter the reactor for processing. The reactor can heat or cool the sheet materials to bring them to the required processing temperature.

[0003] Currently, heating wires can be arranged around the reactor and located on the outside of the carrier. When multiple carriers are simultaneously placed in the reactor, the heating wires can be arranged around the outside of multiple carriers, allowing heat generated by the heating wires to be transferred from the outside to the inside of the carriers to heat the sheet material on the carriers. However, because the gaps between the multiple carriers are far from the heating wires surrounding the carriers, the sheet material near the gaps between the carriers has difficulty receiving the heat generated by the heating wires, resulting in poor processing of some sheet material. Utility Model Content

[0004] In view of the above, it is necessary to provide a reaction apparatus to overcome the aforementioned deficiencies.

[0005] An embodiment of this application provides a reaction apparatus, comprising: a reactor for housing multiple carriers, the reactor having multiple mounting holes corresponding to a gap space within the reactor, wherein the gap space is formed between the multiple carriers, each carrier being used to receive sheet material, and the reactor being used to heat the sheet material; multiple mounting tubes disposed within the reactor, each mounting tube corresponding to and communicating with the multiple mounting holes, the multiple mounting tubes being located within the gap space; and an auxiliary heating element disposed within the mounting tubes, the auxiliary heating element being used to heat the gap space.

[0006] Optionally, some of the mounting pipes are connected, and the reaction apparatus further includes: an air-cooling assembly, which is disposed outside the reactor and located on the side of the reactor where multiple mounting holes are provided; the air-cooling assembly includes multiple air-cooling components, some of which are used to blow air into some of the mounting holes to blow air into some of the connected mounting pipes; and some of which are used to extract air from some of the mounting holes to extract air from some of the connected mounting pipes.

[0007] Optionally, the reaction apparatus further includes: an air inlet, which has a mounting hole and a mounting pipe, is connected to the reactor, and is used to introduce reaction gas into the gap space.

[0008] Optionally, the air intake component includes: an air intake pipe with an installation hole and an installation tube passing through it; an air intake connector installed on the reactor and located outside the reactor, the air intake connector being connected to and communicating with the air intake pipe; wherein, the air intake connector is used to connect to a gas source device to receive the reaction gas; the air intake pipe is used to transmit the reaction gas to the gap space.

[0009] Optionally, the reaction apparatus further includes: a gas extraction component, which has a mounting hole and a mounting pipe, is connected to the reaction furnace, and is used to introduce gas into the gap space.

[0010] Optionally, the extraction component includes: an extraction pipe with an installation hole and an installation tube passing through it; and an extraction connector mounted on the reactor and located outside the reactor, the extraction connector being connected to and communicating with the extraction pipe; wherein the extraction connector is used to connect to an extraction device to extract air from the gap space through the extraction pipe.

[0011] Optionally, the reactor is vertically arranged to house four carriers. The four carriers are spaced apart in two groups in a first horizontal direction. In each group, two carriers are spaced apart in a second horizontal direction. A gap space is formed between the four carriers. The gap space includes two connected subspaces, one of which extends along the first horizontal direction and the other extends along the second horizontal direction. Multiple mounting holes are arranged in two rows on the reactor. One row of mounting holes extends along the first horizontal direction and corresponds to the subspace extending along the first horizontal direction. The other row of mounting holes extends along the second horizontal direction and corresponds to the subspace extending along the second horizontal direction.

[0012] Optionally, the reactor includes: a furnace body for containing sheet material, an installation pipe disposed within the furnace body, an installation hole at one end of the furnace body, and a furnace opening at the other end of the furnace body; and a furnace door detachably connected to the furnace body and used to cover the furnace opening.

[0013] Optionally, the reaction apparatus further includes a lifting mechanism connected to the furnace door, which is used to drive the furnace door closer to or further away from the furnace body to achieve the closing and opening of the furnace opening.

[0014] Optionally, the furnace body is provided with a heating element, which is arranged around multiple carriers and is used to generate heat to heat the sheet material; the furnace body is provided with an air inlet for introducing reaction gases; and the furnace door is provided with an exhaust port for discharging waste gases generated in the furnace body during processing.

[0015] With the reaction apparatus provided in this application, when the sheet material in the reactor needs to be processed, the auxiliary heating element can heat the gap space located between multiple carriers to heat the sheet material within the gap space. This improves the efficiency of temperature rise within the gap space and enhances the processing effect of the sheet material near the gap space and the portions of each sheet material near the gap space. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the reaction device in the embodiments of this application.

[0017] Figure 2 This is a first structural disassembly diagram of the reaction device in the embodiments of this application.

[0018] Figure 3 This is a first cross-sectional view of the reactor in an embodiment of this application.

[0019] Figure 4 This is a top view of the reactor in an embodiment of this application.

[0020] Figure 5 This is a second structural disassembled diagram of the reaction device in the embodiments of this application.

[0021] Figure 6 This is a structural disassembly perspective view of the reaction device in the embodiments of this application.

[0022] Figure 7 This is a second cross-sectional view of the reactor in an embodiment of this application.

[0023] Figure 8 This is a schematic diagram of the airflow direction in the connected installation pipe in an embodiment of this application.

[0024] Figure 9 yes Figure 3 Explosion diagram at point IV in the middle.

[0025] Figure 10 This is a schematic diagram of the air intake component in an embodiment of this application.

[0026] Figure 11 This is a schematic diagram of the air extraction component in an embodiment of this application.

[0027] Description of main component symbols:

[0028] 100. Reaction apparatus; 10. Reactor; 11. Furnace body; 111. Reaction space; 112. Furnace opening; 113. Heating element; 114. Gap space; 115. Mounting hole; 12. Furnace door; 121. Receiving platform; 20. Lifting mechanism; 30. Mounting pipe; 40. Auxiliary heating element; 50. Air-cooled assembly; 51. Air-cooled component; 60. Air inlet component; 61. Air inlet pipe; 62. Air inlet connector; 70. Extraction component; 71. Extraction pipe; 72. Extraction connector; 200. Carrier. Detailed Implementation

[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments.

[0030] The term "multiple" in this application refers to two or more. Furthermore, it should be understood that the terms "first," "second," etc., used in the description of this application are used only for descriptive purposes and should not be construed as indicating or implying relative importance, nor as indicating or implying order.

[0031] In the description of the embodiments in this application, the words "exemplary" or "for example" are used to indicate that they are examples, illustrations, or descriptions. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design options. Specifically, the use of the words "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.

[0032] Please see Figure 1 and Figure 2 , Figure 1 and Figure 2 An embodiment of the present application provides a reaction apparatus 100.

[0033] In the embodiments of this application, a reaction space 111 may be provided in the reaction apparatus 100. The reaction space 111 can accommodate multiple sheet materials and process the multiple sheet materials. The sheet materials can be loaded on carriers 200, and multiple carriers 200 can enter and be accommodated in the reaction space 111 simultaneously. Then, the reaction apparatus 100 can heat the reaction space 111, introduce reaction gas into the reaction space 111, and discharge waste gas out of the reaction space 111, thereby realizing the simultaneous processing of the sheet materials.

[0034] In the embodiments of this application, the type of sheet material is not specifically limited. For example, the sheet material may be, but is not limited to, a silicon wafer, a silicon carbide wafer, or a crystal wafer, and the carrier 200 may be a quartz boat or a graphite boat.

[0035] In the embodiments of this application, the processing type and principle of the reaction apparatus 100 for sheet materials are not specifically limited. For example, the reaction apparatus 100 can perform film coating processing on sheet materials using the principle of low-pressure chemical vapor deposition (LPCVD).

[0036] In embodiments of this application, the height direction of the reaction device 100 can be defined as the vertical direction, the length direction as the first horizontal direction, and the width direction as the second horizontal direction. For example, as Figure 1 and Figure 2 As shown, the vertical direction can be Figure 1 and Figure 2 The Z-direction shown can be the first horizontal direction. Figure 1 and Figure 2 The X direction shown can be the second horizontal direction. Figure 1 and Figure 2 Y direction shown.

[0037] In one embodiment, the reaction apparatus 100 may include a reactor 10 and a lifting mechanism 20. The reactor 10 is a vertical furnace, which may include a furnace body 11 and a furnace door 12. A furnace opening 112 may be formed at the bottom of the furnace body 11 in the vertical direction. A reaction space 111 is formed within the furnace body 11, and the furnace opening 112 is connected to the reaction space 111. The furnace door 12 is detachably connected to the furnace body 11 in the vertical direction and is located on the side where the furnace opening 112 is formed. The furnace door 12 may cover the furnace opening 112, and the furnace opening 112 can be closed and opened by moving closer to or further away from it.

[0038] The lifting mechanism 20 can be fixedly connected to the furnace door 12. The lifting mechanism 20 can drive the furnace door 12 to reciprocate in the vertical direction. And the lifting mechanism 20 can remain relatively fixed to the furnace body 11.

[0039] It is understandable that the furnace body 11 and the lifting mechanism 20 can be fixedly installed on the corresponding machine or workstation to maintain relative stability.

[0040] It is understood that the lifting mechanism 20 can be an electric or pneumatic mechanism with linear motion drive function. In the embodiments of this application, the type of lifting mechanism 20 is not specifically limited. For example, the lifting mechanism 20 can be, but is not limited to, a linear motor, a cylinder, etc.

[0041] It is understood that after the furnace door 12 comes into contact with the furnace body 11 and closes the furnace opening 112, the staff or automated equipment can operate the locking mechanism (not shown) to lock the furnace door 12.

[0042] It is understood that a receiving platform 121 can be provided on the side of the furnace door 12 facing the reaction space 111, and the receiving platform 121 can connect to multiple vertically arranged and spaced carriers 200. When the reactor 10 and the receiving platform 121 are vertically arranged, the height direction of both the reactor 10 and the receiving platform 121 coincides with the vertical direction.

[0043] In some embodiments, a heating element 113 may be disposed within the reaction space 111, and the heating element 113 may be fixedly connected to the inner wall of the reaction space 111. When multiple carriers 200 are located within the reaction space 111, the heating element 113 surrounds the outer side of all carriers 200. The heating element 113 can heat the sheet material within the reaction space 111.

[0044] An air inlet (not shown) can be provided on the side of the reactor 10, and the air inlet can be located on the side of the reactor 10 near the top of the reactor 10. The air inlet can communicate with the reaction space 111. An exhaust port (not shown) can be provided on the furnace door 12, and the exhaust port can communicate with the reaction space 111.

[0045] In the embodiments of this application, the type of heating element 113 is not specifically limited. For example, the heating element 113 may be an electric heating wire, and the heating element 113 may be arranged in a spiral shape within the reaction space 111.

[0046] It is understood that the air inlet can be connected to a gas source device (not shown), and the exhaust port can be connected to a suction device (not shown). The gas source device can transmit reactive gas to the reaction space 111 through the air inlet. The sheet material in the reaction space 111 comes into contact with the reactive gas under the pressure and temperature conditions required for processing, which can realize the coating processing of the sheet material.

[0047] The processing of sheet materials generates waste gas, which can be extracted from the reaction space 111 through the exhaust port by the exhaust device. In this way, the reaction space 111 can achieve the introduction of reaction gases and the discharge of waste gases while remaining isolated from the atmospheric environment.

[0048] In some embodiments, a heat insulation layer (not shown) may be provided between the peripheral wall of the furnace body 11 and the inner wall of the reaction space 111. The heat insulation layer can block heat, thereby reducing the heat loss in the reaction space 111.

[0049] In the embodiments of this application, the material of the insulation layer is not specifically limited. For example, the material of the insulation layer can be, but is not limited to, calcium silicate.

[0050] Please also refer to Figure 3In the embodiments of this application, when multiple vehicles 200 are housed in the reaction space 111, the gaps between the multiple vehicles 200 form a gap space 114, which can extend along a first horizontal direction and / or a second horizontal direction. The embodiments of this application do not specifically limit the shape of the gap space 114. For example, in some scenarios, the reaction space 111 can house four vehicles 200, which can be spaced in two groups along the first horizontal direction, and two vehicles 200 in each group can be spaced apart along the second horizontal direction. Thus, a gap space 114 with a vertical projection of a cross shape can be formed between the four vehicles 200; the gap space 114 can include a connected first subspace and a second subspace, the first subspace extending along the first horizontal direction and the second subspace extending along the second horizontal direction, with the first subspace and the second subspace connected at the middle of the first and second subspaces.

[0051] The following embodiments are illustrated based on the case where the reaction space 111 can accommodate four vehicles 200, and the four vehicles 200 can form a gap space 114 including a first subspace and a second subspace.

[0052] Please also refer to Figure 4 and Figure 5 In some embodiments, the furnace body 11 may have multiple mounting holes 115 at its top in the vertical direction, and all of the mounting holes 115 are connected to the reaction space 111. The multiple mounting holes 115 may be correspondingly arranged with respect to the gap space 114 and arranged according to the extension direction of the gap space 114.

[0053] For example, the multiple mounting holes 115 can be divided into two groups of mounting holes 115. The two groups of mounting holes 115 can be arranged along a first horizontal direction and a second horizontal direction, respectively, and the holes in the middle of the two rows of mounting holes 115 overlap. Specifically, the row of mounting holes 115 arranged along the first horizontal direction corresponds to the first subspace, that is, the vertical projection of the row of mounting holes 115 arranged along the first horizontal direction coincides with the vertical projection of the first subspace; the row of mounting holes 115 arranged along the second horizontal direction corresponds to the second subspace, that is, the vertical projection of the row of mounting holes 115 arranged along the second horizontal direction coincides with the vertical projection of the second subspace.

[0054] Please also refer to Figure 6 and Figure 7In some embodiments, the reaction apparatus 100 may further include a plurality of mounting tubes 30 and auxiliary heating elements 40. The plurality of mounting tubes 30 are all located within the reaction space 111 and are fixedly connected to the top wall of the reaction space 111. Each of the plurality of mounting tubes 30 corresponds one-to-one with a plurality of mounting holes 115, and each mounting tube 30 can communicate with its corresponding mounting hole 115. The plurality of mounting tubes 30 can be arranged according to the arrangement direction and shape of the plurality of mounting holes 115. Thus, the plurality of mounting tubes 30 can enter the gap space 114.

[0055] The number of auxiliary heating elements 40 is less than the number of mounting tubes 30. The auxiliary heating elements 40 can be housed within their respective mounting tubes 30 and fixed relative to them. Of the multiple mounting tubes 30, the end of the mounting tube 30 used to house the auxiliary heating element 40 facing the furnace opening 112 is closed. The auxiliary heating elements 40 can generate heat to heat the gap space 114.

[0056] It is understood that the heating element 113 can heat the sheet material carried by the carrier 200 from the outside of the entire carrier 200, and the auxiliary heating element 40 can heat the sheet material carried by the carrier 200 from the inside of the entire carrier 200. This improves the uniformity of heating of the sheet material on the carrier 200, and also improves the heating efficiency of the portion or multiple sheets of sheet material near the gap space 114; it can improve the efficiency of sheet material processing and enhance the processing effect of the sheet material.

[0057] In the embodiments of this application, the fixing method during fixed connection and fixed installation is not specifically limited. For example, the fixing method may be, but is not limited to, bolt fixing, screw fixing, welding fixing, integral molding fixing, etc.

[0058] In the embodiments of this application, the type of auxiliary heating element 40 is not specifically limited. For example, the auxiliary heating element 40 may be, but is not limited to, an electric heating wire.

[0059] Please also refer to Figure 8 In some embodiments, the end of a portion of the mounting tube 30 furthest from the mounting hole 115 can be connected to other mounting tubes 30, thus forming a connecting space within the interconnected mounting tubes 30. The mounting hole 115, connected to the connecting space, can serve as an air inlet or outlet for the connecting space. The connecting space is not connected to the reaction space 111.

[0060] The reaction apparatus 100 may also include an air-cooling assembly 50. The air-cooling assembly 50 is located at the top of the furnace body 11 in the vertical direction, that is, at the end of the furnace body 11 where the mounting hole 115 is opened. The air-cooling assembly 50 is spaced apart from the furnace body 11 and fixed relative to the furnace body 11.

[0061] The air-cooled assembly 50 may include multiple air-cooled components 51. Some of the multiple air-cooled components 51 are spaced apart in a first horizontal direction, while the remaining air-cooled components 51 are spaced apart in a second horizontal direction. Some of the multiple air-cooled components 51 can blow air into a portion of the connected mounting pipes 30 through corresponding mounting holes 115; some of the air-cooled components 51 can also blow air into other mounting pipes 30 in a connected plurality of mounting pipes 30 through corresponding mounting holes 115. Thus, the gas blown by the air-cooled assembly 50 toward the furnace body 11 can enter the connected space formed by the connected plurality of mounting pipes 30 from a portion of the connected mounting pipes 30, and then exit the connected space through the mounting pipe 30 corresponding to the air-cooled component 51 that is drawing air.

[0062] It is understandable that after the internal temperature of the reaction device 100 rises, the heat will be conducted to the mounting tube 30. When the processing of the sheet material is completed and cooling is required in the reaction space 111, both the heating element 113 and the auxiliary heating element 40 will stop working, such as... Figure 8 As shown, the airflow blown out by the air-cooling component 50 enters a mounting tube 30, absorbs the heat from the mounting tube 30, and is then extracted through another mounting tube 30 connected to the first mounting tube 30, thus carrying the heat away from the mounting tube 30. In this way, the airflow blown out by the air-cooling component 50 can achieve air cooling of the mounting tube 30 without entering the reaction space 111, thereby improving the cooling efficiency within the reaction space 111 and improving the cooling efficiency of the sheet material.

[0063] In the embodiments of this application, the type of air-cooled component 51 is not specifically limited. For example, air-cooled component 51 may be, but is not limited to, a fan, a blower, etc.

[0064] Please also refer to Figure 9 In some embodiments, the reaction apparatus 100 may further include an air inlet 60 and an air extraction component 70. The air inlet 60 may pass through a mounting hole 115 and a mounting tube 30. The air extraction component 70 may pass through a mounting hole 115 and a mounting tube 30. The number of air inlets 60 is less than the number of mounting tubes 30, and the number of air extraction components 70 is less than the number of mounting tubes 30.

[0065] Please also refer to Figure 10 Each air inlet component 60 may include an air inlet pipe 61 and an air inlet connector 62. The air inlet pipe 61 may have a mounting hole 115 and a mounting pipe 30 extending vertically, and communicate with the reaction space 111. The air inlet connector 62 may be fixedly mounted on the top of the air inlet pipe 61 and communicate with the air inlet pipe 61. The air inlet connector 62 is located outside the reaction space 111 and is fixedly connected to the top of the furnace body 11. The air inlet connector 62 may be connected to and communicate with a gas source device.

[0066] Please also refer to Figure 11Each extraction component 70 may include an extraction pipe 71 and an extraction connector 72. The extraction pipe 71 may have a mounting hole 115 and a mounting tube 30 extending vertically and communicate with the reaction space 111. The extraction connector 72 may be fixedly installed on the top of the extraction pipe 71 and communicate with the extraction pipe 71. The extraction connector 72 is located outside the reaction space 111 and is fixedly connected to the top of the furnace body 11. The extraction connector 72 may be connected to and communicate with an extraction device.

[0067] It is understood that the gas source device can supply reactant gas to the gap space 114 through the gas inlet 60, thereby improving the gas intake efficiency of the gap space 114; the exhaust device can extract waste gas from the gap space 114 through the exhaust device 70, thereby improving the waste gas emission efficiency of the gap space 114. In this way, the insufficient contact of reactant gas between the sheet material near the gap space 114 or the portion of the sheet material near the gap space 114 can be reduced, thus improving the processing effect of the sheet material.

[0068] In some cases, the air intake component 60, the air extraction component 70, and the auxiliary heating component 40 are each individually housed within their respective mounting tubes 30, and at least two of the mounting tubes 30 are connected at their bottoms to cooperate with the air-cooling assembly 50 to achieve air-cooling of the reaction space 111. In this case, the mounting tubes 30 housing the air intake component 60 and the air extraction component 70 are open at their bottoms, and the air intake connector 62 and the air extraction connector 72 are sealed to the corresponding mounting hole 115; the mounting tube 30 housing the auxiliary heating component 40 is closed at its bottom. Furthermore, the total number of air intake components 60, air extraction components 70, and auxiliary heating components 40 is less than the number of mounting tubes 30.

[0069] In other cases, the air intake component 60 and the auxiliary heating component 40 can be housed together in the same mounting tube 30, with the auxiliary heating component 40 arranged around the air intake component 60. Similarly, the exhaust component 70 and the auxiliary heating component 40 can be housed in the same mounting tube 30, with the auxiliary heating component 40 arranged around the exhaust component. At least two of the multiple mounting tubes 30 are connected at their bottoms to cooperate with the air-cooling assembly 50 to achieve air-cooling of the reaction space 111. In this case, the mounting tube 30 used to simultaneously house the air intake component 60 and the auxiliary heating component 40 has an open bottom, and the air intake connector 62 is sealed to the corresponding mounting hole 115; the mounting tube 30 used to simultaneously house the exhaust component 70 and the auxiliary heating component 40 also has an open bottom, and the exhaust connector 72 is sealed to the corresponding mounting hole 115. Furthermore, the total number of air intake components 60, exhaust components 70, and auxiliary heating components 40 is less than twice the number of mounting tubes 30.

[0070] In the embodiments of this application, the arrangement of the mounting pipes 30 used to house the air inlet 60, the air extraction component 70, and the auxiliary heating component 40, as well as the bottom-connected mounting pipes 30, is not specifically limited. Operators can adjust the position of each mounting pipe 30 based on test results of the processing efficiency of the reaction device 100.

[0071] According to the embodiment of this application, when the sheet material in the reaction space 111 needs to be processed, the heating element 113 and the auxiliary heating element 40 work synchronously to heat the sheet material simultaneously from the outside of all carriers 200 and in the gap space 114 between the multiple carriers 200. Simultaneously, the gas source device simultaneously inputs reaction gas into the reaction space 111 through the air inlet and the air inlet element 60, and the exhaust device simultaneously exhausts gas from the reaction space 111 through the exhaust port and the exhaust element 70. The air inlet element 60 and the exhaust element 70 can respectively achieve air intake and exhaust in the gap space 114. This improves the efficiency of temperature rise and gas flow within the gap space 114, and enhances the processing effect of the sheet material near the gap space 114 and the portions of each sheet material near the gap space 114.

[0072] After the processing of the sheet material is completed, the heating element 113, auxiliary heating element 40, air source device and exhaust device stop working, and the blowing assembly starts working, thereby blowing airflow into part of the connected mounting pipe 30 and extracting airflow through other mounting pipes 30 in the connected mounting pipe 30 to cool the mounting pipe 30, thereby improving the efficiency of temperature reduction in the reaction space 111.

[0073] It will be apparent to those skilled in the art that this application is not limited to the details of the exemplary embodiments described above, and that this application can be implemented in other specific forms without departing from the spirit or essential characteristics of this application. Therefore, the embodiments described above should be considered exemplary and non-limiting in all respects, and the scope of this application is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this application.

Claims

1. A reaction apparatus, characterized in that, include: A reactor is provided to house multiple carriers. The reactor has multiple mounting holes, which are corresponding to gap spaces within the reactor. The gap spaces are formed between the multiple carriers. Each carrier is used to receive sheet material, and the reactor is used to heat the sheet material. Multiple mounting tubes are disposed inside the reactor, and each mounting tube corresponds to and communicates with a plurality of mounting holes. The multiple mounting tubes are located in the gap space. An auxiliary heating element is disposed inside the mounting tube and is used to heat the gap space.

2. The reaction apparatus as described in claim 1, characterized in that, In a plurality of the mounting tubes, some of the mounting tubes are connected, and the reaction apparatus further includes: An air-cooled assembly is disposed outside the reactor and located on the side of the reactor where the plurality of mounting holes are provided; The air-cooling assembly includes multiple air-cooling components. Among the multiple air-cooling components, some of the air-cooling components are used to blow air into some of the mounting holes to blow air into some of the connected mounting tubes; some of the air-cooling components are used to extract air from some of the mounting holes to extract air from some of the connected mounting tubes.

3. The reaction apparatus as described in claim 1, characterized in that, The reaction apparatus further includes: An air inlet is provided, which passes through the mounting hole and the mounting pipe, and is connected to the reactor. The air inlet is used to introduce reaction gas into the gap space.

4. The reaction apparatus as described in claim 3, characterized in that, The air intake component includes: An air intake pipe, wherein the air intake pipe passes through the mounting hole and the mounting pipe; An air inlet connector is installed on the reactor and located outside the reactor. The air inlet connector is connected to and communicates with the air inlet pipe. The air inlet connector is used to connect to a gas source device to receive the reaction gas; the air inlet pipe is used to transmit the reaction gas to the gap space.

5. The reaction apparatus as described in claim 1, characterized in that, The reaction apparatus further includes: An air extraction component is provided, which passes through the mounting hole and the mounting pipe, and is connected to the reactor. The air extraction component is used to extract air from the gap space.

6. The reaction apparatus as described in claim 5, characterized in that, The air extraction component includes: An extraction pipe, wherein the extraction pipe passes through the mounting hole and the mounting pipe; A vacuum connector is installed on the reactor and located outside the reactor. The vacuum connector is connected to and communicates with the vacuum pipe. The air extraction connector is used to connect to an air extraction device to extract air from the gap space through the air extraction pipe.

7. The reaction apparatus as described in claim 1, characterized in that, The reactor is vertically arranged and is used to house four carriers. The four carriers are spaced apart in two groups in a first horizontal direction. In each group of carriers, two carriers are spaced apart in a second horizontal direction. The four carriers form a gap space, which includes two connected subspaces. One subspace extends along the first horizontal direction, and the other subspace extends along the second horizontal direction. The plurality of mounting holes are arranged in two rows on the reactor, wherein one row of mounting holes extends along the first horizontal direction and corresponds to the subspace extending along the first horizontal direction; the other row of mounting holes extends along the second horizontal direction and corresponds to the subspace extending along the second horizontal direction.

8. The reaction apparatus as described in claim 1, characterized in that, The reactor includes: A furnace body for containing the sheet material, a mounting tube disposed within the furnace body, a mounting hole opened at one end of the furnace body, and a furnace opening opened at the other end of the furnace body; A furnace door, which is detachably connected to the furnace body and is used to cover the furnace opening.

9. The reaction apparatus as described in claim 8, characterized in that, The reaction apparatus further includes: A lifting mechanism is connected to the furnace door and is used to drive the furnace door closer to or further away from the furnace body to achieve the closing and opening of the furnace opening.

10. The reaction apparatus as described in claim 8, characterized in that, The furnace body is provided with a heating element, which is arranged around the plurality of carriers and is used to generate heat to heat the sheet material; the furnace body is provided with an air inlet for introducing reaction gas. The furnace door is provided with an exhaust port, which is used to discharge the waste gas generated in the furnace during processing.

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