500cc high-capacity high-temperature beam source structure

Abstract

The utility model belongs to the technical field of vacuum coating, and particularly provides a 500cc high-capacity high-temperature beam source structure, which comprises a crucible, a plurality of groups of insulating sheets arranged around the crucible are arranged outside the crucible, and a heating wire I and a heating wire II which are arranged up and down in the vertical direction are arranged among the plurality of groups of insulating sheets; corresponding detection ends of the thermocouple I and the thermocouple II are respectively arranged outside the heating wire I and the heating wire II; the first electrode and the second electrode are arranged on the sealing flange, and the first electrode and the second electrode are electrically connected with the first heating wire and the second heating wire respectively; according to the feedback of the two groups of thermocouples, the power of the power supplies of the upper and lower heating wires is adjusted in real time, the upper and lower temperatures are ensured to be consistent, and the influence of inaccurate monitored temperature on the film forming rate, uniformity and later cleaning is avoided.

Description

Technical Field

[0001] This utility model mainly relates to the field of vacuum coating technology, specifically to the structure of a 500cc high-capacity high-temperature beam source. Background Technology

[0002] Vacuum coating equipment mainly refers to a type of substrate that is coated under high vacuum conditions. It includes many types such as vacuum ion evaporation, magnetron sputtering and laser sputtering deposition. It is mainly divided into two types: chemical vapor deposition and physical vapor deposition. Vacuum coating equipment requires a vacuum chamber, and various components are installed inside the vacuum chamber to work in a high vacuum environment.

[0003] The 500cc high-temperature beam source is used in evaporation coating equipment. It can heat materials in a vacuum environment and evaporate inorganic substances and small organic molecules. It is used for process research, testing and verification in industries such as OLED, organic photovoltaics, and perovskite photovoltaics.

[0004] Traditional 500cc high-capacity high-temperature beam sources use a single wound heating wire and only one thermocouple, which leads to inaccurate temperature monitoring. This results in a high temperature at the bottom and a low temperature at the beam source opening during material evaporation. After prolonged operation, this causes material to condense at the beam source opening, affecting the rate and uniformity of film formation and also hindering subsequent cleaning. Based on this, and in order to meet the diversified development of the market, a new structure for a 500cc high-capacity high-temperature beam source is proposed. Utility Model Content

[0005] 1. The technical problem to be solved by the utility model:

[0006] This invention provides a structure for a 500cc high-capacity high-temperature beam source to solve the technical problems existing in the background art.

[0007] 2. Technical Solution:

[0008] To achieve the above objectives, the technical solution of this utility model is as follows:

[0009] A structure for a 500cc high-capacity high-temperature beam source, the structure comprising:

[0010] The crucible is surrounded by multiple sets of insulating sheets, and heating wires one and two are installed between the sets of insulating sheets in a vertically aligned manner.

[0011] Thermocouple 1 and thermocouple 2 have their corresponding detection ends located outside heating wire 1 and heating wire 2, respectively.

[0012] Electrode 1 and electrode 2 are mounted on the sealing flange, and electrode 1 and electrode 2 are electrically connected to heating wire 1 and heating wire 2, respectively.

[0013] Based on feedback from the two sets of thermocouples, the power supply to the upper and lower heating wires is adjusted in real time to ensure that the upper and lower temperatures are consistent.

[0014] A further improvement is that the heating wire one and the heating wire two are arranged in a serpentine manner on the outer ring of the crucible in the vertical direction.

[0015] A further improvement is that the heating wire one and heating wire two are made of tantalum material and are cut and wound from tantalum sheets.

[0016] A further improvement is that multiple insulating sheets are supported by several support rods.

[0017] A further improvement is that the insulating sheet has a waist-shaped hole.

[0018] A further improvement is that the insulating sheet is preferably a ceramic spacer.

[0019] A further improvement is that: the insulating sheet is provided with a heat-gathering cover on the outside, the heat-gathering cover is provided with a water-cooled inner wall on the outside, and the water-cooled outer wall is provided with a water-cooled outer wall on the outside.

[0020] A further improvement is that: the bottom surface of the multiple sets of insulating sheets is provided with an insulating base for mounting the crucible, the bottom surface of the insulating base is provided with a fixing seat for mounting the heat-gathering cover, and the bottom surface of the fixing seat is provided with a beam source base for mounting the water-cooled outer wall and the water-cooled inner wall.

[0021] A further improvement is that the sealing flange and the beam source base are supported by multiple sets of pillars.

[0022] A further improvement is that it also includes a beam source cover located on the top surface of the crucible.

[0023] 3. Beneficial effects:

[0024] Compared with the prior art, the technical solution provided by this utility model has the following advantages:

[0025] This invention employs two thermocouples and two heating wires to simultaneously monitor the upper and lower temperatures. Based on the feedback from the thermocouples, the power supply to the two heating wires is adjusted in real time to ensure consistent upper and lower temperatures. Furthermore, the heating wires are sheet-shaped and made of tantalum, cut and wound from tantalum sheets. This avoids inaccurate temperature monitoring affecting the film formation rate and uniformity, as well as subsequent cleaning. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the overall structure of the utility model;

[0027] Figure 2 This is a schematic diagram of the beam source cover in the open state of this utility model;

[0028] Figure 3 For this utility model Figure 1 Internal structure diagram;

[0029] Figure 4 This is a schematic diagram showing the insulating sheet and heating wire of this utility model in their disassembled state.

[0030] Figure label:

[0031] 1-Crucible; 2-Insulating sheet; 201-Oval hole; 3-Heating wire one; 4-Heating wire two; 5-Thermocouple one; 6-Thermocouple two; 7-Electrode one; 8-Electrode two; 9-Sealing flange; 10-Support rod; 11-Heat-concentrating cover; 12-Water-cooled inner wall; 13-Water-cooled outer wall; 14-Insulating base; 15-Fixing base; 16-Beam source base; 17-Support column; 18-Beam source cover. Detailed Implementation

[0032] To facilitate understanding of this utility model, a more comprehensive description of the utility model will be given below with reference to the accompanying drawings, which show several embodiments of the utility model. However, the utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of the utility model will be more thorough and complete.

[0033] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," "fixing," and "equipped with" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0034] It should be noted that the structures not described in this utility model do not involve the design points and improvement directions of this utility model and all adopt existing technologies.

[0035] Reference Figure 1-4 The structure of a 500cc high-capacity high-temperature beam source includes...

[0036] The crucible 1 has multiple sets of insulating sheets 2 surrounding it, and heating wires 3 and 4 arranged vertically between the multiple sets of insulating sheets 2.

[0037] Thermocouple 5 and thermocouple 6 have their corresponding detection ends set outside heating wire 3 and heating wire 4, respectively. Thermocouple 5 and thermocouple 6 pass through the insulating sheet 2 through the corresponding thermocouple double-hole ceramic rod and are set at the position to be detected.

[0038] Electrode 7 and electrode 8 are mounted on sealing flange 9, and electrode 7 and electrode 8 are electrically connected to heating wire 3 and heating wire 4, respectively.

[0039] Based on feedback from the two sets of thermocouples, the power supply to the upper and lower heating wires is adjusted in real time to ensure that the upper and lower temperatures are consistent.

[0040] This invention employs two thermocouples and two heating wires to simultaneously monitor the upper and lower temperatures. Based on the feedback from the thermocouples, the power supply to the two heating wires is adjusted in real time to ensure consistent upper and lower temperatures. Furthermore, the heating wires are sheet-shaped and made of tantalum, cut and wound from tantalum sheets. This avoids inaccurate temperature monitoring affecting the film formation rate and uniformity, as well as subsequent cleaning.

[0041] In a preferred embodiment, the heating wire 3 and the heating wire 4 are arranged in a serpentine manner on the outer ring of the crucible 1 in the vertical direction.

[0042] In a preferred embodiment, the heating wire 3 and the heating wire 4 are made of tantalum material and are cut and wound from tantalum sheets.

[0043] In a preferred embodiment, a plurality of insulating sheets 2 are supported by a plurality of support rods 10, which are preferably made of ceramic material.

[0044] In a preferred embodiment, the insulating sheet 2 is provided with an oblong hole 201 for installing heating wire 3 or heating wire 4, which facilitates the installation of heating wire 3 or heating wire 4 in the corresponding insulating sheet 2 and close to the crucible 1, thereby achieving a better heating effect.

[0045] In a preferred embodiment, the insulating sheet 2 is preferably a ceramic spacer. The ceramic spacer has extremely high heat resistance and thermal conductivity, and can maintain its performance and shape in high-temperature environments. At the same time, it has good electrical insulation to prevent arcing and short circuits.

[0046] In a preferred embodiment, the insulating sheet 2 is provided with a heat-gathering cover 11 on the outside, the heat-gathering cover 11 is provided with a water-cooled inner wall 12 on the outside, and the water-cooled outer wall 12 is provided with a water-cooled outer wall 13 on the outside. The heat-gathering cover 11 is made of tantalum material to isolate the internal and external temperatures and ensure the temperature inside the high-temperature beam source.

[0047] The water-cooled outer wall 12 and the water-cooled inner wall 13 are provided with an inlet pipe and an outlet pipe for cooling water as needed.

[0048] In a preferred embodiment, the bottom surface of the multiple sets of insulating sheets 2 is provided with an insulating base 14 for mounting the crucible 1. The bottom surface of the insulating base 14 is provided with a fixing seat 15 for mounting the heat-concentrating cover 11. The bottom surface of the fixing seat 15 is provided with a beam source base 16 for mounting the water-cooled outer wall 13 and the water-cooled inner wall 12. The insulating base 14, the fixing seat 15 or the beam source base 16 are provided with through holes for mounting electrical products (such as thermocouple 5 or thermocouple 6 or heating wire 3 or heating wire 4).

[0049] In a preferred embodiment, the sealing flange 9 and the beam source base 16 are supported by multiple sets of pillars 17. In this embodiment, three sets of pillars 17 are installed on the sealing flange 9, connecting the upper beam source base 16 and the fixing seat 15. The fixing seat 15 is connected to the insulating base 14. Heating wire 3 and heating wire 4 are fixed by insulating sheet 2. The crucible 1 is placed in the middle of the insulating sheet 2, and the crucible 1 is covered by a heat-concentrating cover 11.

[0050] This embodiment also includes a beam source cover 18 disposed on the top surface of the crucible 1.

[0051] During operation, the power supply is used to energize heating wire 3 and heating wire 4. The coating material placed inside the crucible 1 is dissolved into liquid by the high temperature. After vaporization, it floats out from the top of the beam source in the form of atoms or molecules and is deposited onto the surface of the material to be coated, forming a dense thin film.

[0052] The high-temperature beam source is cooled by water-cooled walls (water-cooled outer wall 13 and water-cooled inner wall 12). Electrode 1 7 and Electrode 2 8 introduce current, thermocouple 1 5 and Thermocouple 2 6 monitor the current and provide feedback to the corresponding power supplies of heating wire 1 3 and heating wire 2 4 to adjust the power and achieve the effect of temperature control.

[0053] The above-described embodiments are merely illustrative of certain implementations of this utility model, and their descriptions are relatively specific and detailed. However, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A structure for a 500cc high-capacity high-temperature beam source, characterized in that, The structure includes The crucible (1) has multiple sets of insulating sheets (2) arranged around it, and heating wires one (3) and two (4) arranged vertically in the vertical direction are installed between the multiple sets of insulating sheets (2). Thermocouple 1 (5) and thermocouple 2 (6) have their corresponding detection ends located outside heating wire 1 (3) and heating wire 2 (4), respectively. Electrode 1 (7) and electrode 2 (8) are disposed on sealing flange (9), and electrode 1 (7) and electrode 2 (8) are electrically connected to heating wire 1 (3) and heating wire 2 (4) respectively; Based on feedback from the two sets of thermocouples, the power supply to the upper and lower heating wires is adjusted in real time to ensure that the upper and lower temperatures are consistent.

2. The structure of a 500cc high-capacity high-temperature beam source according to claim 1, characterized in that: The heating wire one (3) and heating wire two (4) are arranged in a serpentine manner on the outer ring of the crucible (1) in the vertical direction.

3. The structure of a 500cc high-capacity high-temperature beam source according to claim 1, characterized in that: The heating wire one (3) and heating wire two (4) are made of tantalum material and are cut and wound from tantalum sheets.

4. The structure of a 500cc high-capacity high-temperature beam source according to claim 1, characterized in that: Multiple insulating sheets (2) are supported by several support rods (10).

5. The structure of a 500cc high-capacity high-temperature beam source according to claim 1, characterized in that: The insulating sheet (2) has a waist-shaped hole (201).

6. The structure of a 500cc high-capacity high-temperature beam source according to claim 1, characterized in that: The insulating sheet (2) is a ceramic separator.

7. The structure of a 500cc high-capacity high-temperature beam source according to claim 1, characterized in that: The insulating sheet (2) is provided with a heat-collecting cover (11) on the outside, the heat-collecting cover (11) is provided with a water-cooled inner wall (12) on the outside, and the water-cooled inner wall (12) is provided with a water-cooled outer wall (13) on the outside.

8. The structure of a 500cc high-capacity high-temperature beam source according to claim 7, characterized in that: The bottom surface of the multiple sets of insulating sheets (2) is provided with an insulating base (14) for mounting the crucible (1), the bottom surface of the insulating base (14) is provided with a fixing seat (15) for mounting the heat-gathering cover (11), and the bottom surface of the fixing seat (15) is provided with a beam source base (16) for mounting the water-cooled outer wall (13) and the water-cooled inner wall (12).

9. The structure of a 500cc high-capacity high-temperature beam source according to claim 8, characterized in that: The sealing flange (9) and the beam source base (16) are supported by multiple sets of pillars (17).

10. The structure of a 500cc high-capacity high-temperature beam source according to claim 1, characterized in that: It also includes a beam source cover (18) disposed on the top surface of the crucible (1).

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