Ion plating arc striking device

Abstract

The utility model discloses an ion plating arc striking device, which relates to the technical field of ion plating and comprises a vacuum box, an arc striking assembly comprises a mounting frame, an adjusting push rod is fixedly mounted at the left end of the rear side of the mounting frame, and the output end of the adjusting push rod penetrates through a rear side plate of the mounting frame and is fixedly connected with a mounting block. A sliding rail is fixedly connected to the right side in the mounting frame, a T-shaped sliding groove is formed in the left end of the front side of the sliding rail, a T-shaped sliding plate is slidably connected into the T-shaped sliding groove, connecting plates are fixedly connected to the front end and the rear end of the left side of the T-shaped sliding plate, telescopic rods are fixedly connected to the centers of the inner sides of the connecting plates, and baffles are fixedly connected to the tail ends of the telescopic rods. The surface of the telescopic rod is sleeved with a spring. According to the utility model, the mounting block, the fastening bolt, the sliding rail, the T-shaped sliding groove, the T-shaped sliding plate, the fixing plate, the fixing bolt, the connecting plate, the baffle plate and the spring are arranged, so that the target material and the arc striking needle can be conveniently detached, replaced and fixed, and the time spent on replacement work is reduced.

Description

Technical Field

[0001] This utility model relates to the field of ion plating technology, specifically to an ion plating arc ignition device. Background Art

[0002] Ion plating is a vacuum evaporation coating technology that uses high-energy ions to accelerate the material in a vacuum environment through evaporation or sputtering, thereby depositing the coating material onto the surface of a substrate. This process is commonly used for thin film coatings on surfaces such as metals, ceramics, or glass to enhance their corrosion resistance, wear resistance, decorative properties, or other specific functions. Ion plating is widely used in fields such as metal surface hardening, optical coatings, decorative coatings, semiconductor manufacturing, and coatings for tools and machine parts.

[0003] In ion plating, the target and arc-starting needle need to be replaced according to the plating requirements and actual consumption. Conventional arc-starting devices are not easy to install and replace, and the installation and replacement work takes a lot of time, which greatly reduces the plating efficiency of the equipment. In general arc-starting devices, the arc-starting position and ion detachment position are not easy to adjust during operation, resulting in uneven ion deposition on the product surface, which can easily lead to inconsistent plating thickness. The thinner areas of the plating are prone to corrosion. To address the above problems, an ion plating arc-starting device is proposed to solve them. Utility Model Content

[0004] To address the aforementioned technical problems, an ion plating arc ignition device is provided. This device solves the problem that in current ion plating processes, the target and arc ignition needle need to be replaced according to plating requirements and actual consumption. Conventional arc ignition devices are not easy to install and replace, and the installation and replacement work takes a lot of time, greatly reducing the plating efficiency of the equipment. In addition, during operation, the arc ignition position and ion detachment position of conventional arc ignition devices are not easy to adjust, resulting in uneven ion deposition on the product surface, which can easily lead to inconsistent plating thickness and corrosion in areas with thinner plating thickness.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows: an ion plating arc ignition device, comprising a vacuum chamber, a door rotatably connected to the front side of the vacuum chamber via a hinge, two guide rods fixedly connected to the upper part of the interior of the vacuum chamber, a mounting plate slidably connected to the surfaces of the two guide rods, a rotating motor fixedly mounted at the center of the upper side of the mounting plate, the output end of the rotating motor penetrating the upper side of the mounting plate and provided with an arc ignition assembly, the arc ignition assembly including a mounting frame, the upper side of the mounting frame being fixedly connected to the output end of the rotating motor, an adjusting push rod fixedly mounted at the rear left end of the mounting frame, the output end of the adjusting push rod penetrating the rear side plate of the mounting frame and fixed. A mounting block is connected, and a fastening bolt is threadedly connected to the center of the front side of the mounting block. A slide rail is fixedly connected to the inside right side of the mounting bracket. A T-shaped slide groove is opened at the front left end of the slide rail. A T-shaped slide plate is slidably connected inside the T-shaped slide groove. Connecting plates are fixedly connected to both the front and rear ends of the left side of the T-shaped slide plate. A telescopic rod is fixedly connected to the center of the inner side of the connecting plate. A baffle is fixedly connected to the end of the telescopic rod. The right side of the baffle is slidably connected to the left side of the T-shaped slide plate. A spring is sleeved on the surface of the telescopic rod. The end of the spring near the connecting plate is fixedly connected to the inner side of the connecting plate. The end of the spring near the baffle is fixedly connected to the surface of the baffle.

[0006] Preferably, a sliding push rod is fixedly installed on the upper left side of the interior of the vacuum chamber, and the output end of the sliding push rod is fixedly connected to the center position of the left side of the mounting plate.

[0007] Preferably, an arc-starting pin is slidably connected to the right side of the mounting block.

[0008] Preferably, a fixing plate is rotatably connected to the front right end of the slide rail, and a fixing bolt is threadedly connected to the front left end of the fixing plate. The end of the fixing bolt passes through the front side of the fixing plate and is threadedly connected to the front side of the T-shaped slide plate.

[0009] Preferably, a target groove is provided at the center of the left side of the T-shaped slide plate.

[0010] Preferably, an air inlet pipe is fixedly connected to the upper right side of the vacuum chamber, and an exhaust pipe is fixedly connected to the lower right side of the vacuum chamber.

[0011] Preferably, an observation window is provided at the center of the front side of the box door, and a handle is fixedly connected to the right end of the front side of the box door.

[0012] Compared with the prior art, the advantages of this utility model are as follows: By setting up an installation block, fastening bolts, slide rail, T-shaped slide groove, T-shaped slide plate, fixing plate, fixing bolts, connecting plate, baffle and spring, the target material and arc-starting needle can be easily installed and replaced, reducing the time spent on installation and replacement work and effectively improving the coating efficiency of the equipment. By setting up a guide rod, installation plate, sliding push rod, rotating motor, mounting frame and adjusting push rod, the arc-starting position and ion detachment position can be effectively adjusted, preventing uneven ion deposition on the product surface, ensuring consistent coating thickness and avoiding corrosion in areas with thinner coating thickness. Attached Figure Description

[0013] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0014] Figure 2 This is a schematic diagram of the internal structure of the present invention;

[0015] Figure 3 This is a schematic diagram of the arc-starting component in this utility model.

[0016] The numbers on the map are:

[0017] 1. Vacuum chamber; 2. Inlet pipe; 3. Exhaust pipe; 4. Chamber door; 5. Observation window; 6. Handle; 7. Guide rod; 8. Mounting plate; 9. Sliding push rod; 10. Rotating motor; 11. Arc ignition assembly; 1101. Mounting bracket; 1102. Adjusting push rod; 1103. Mounting block; 1104. Arc ignition pin; 1105. Fastening bolt; 1106. Slide rail; 1107. T-shaped slide groove; 1108. T-shaped slide plate; 1109. Fixing plate; 1110. Fixing bolt; 1111. Target groove; 1112. Connecting plate; 1113. Telescopic rod; 1114. Baffle; 1115. Spring. DETAILED DESCRIPTION

[0018] The following description is intended to disclose the present invention so that those skilled in the art can implement it. The preferred embodiments described below are merely examples, and other obvious variations will occur to those skilled in the art.

[0019] Reference Figure 1-3 As shown, an ion plating arc ignition device includes a vacuum chamber 1. An air inlet pipe 2 is fixedly connected to the upper right side of the vacuum chamber 1, and an exhaust pipe 3 is fixedly connected to the lower right side of the vacuum chamber 1. Protective gas can be input through the air inlet pipe 2, and air can be discharged through the exhaust pipe 3. A chamber door 4 is rotatably connected to the front side of the vacuum chamber 1 via a hinge. An observation window 5 is provided at the center of the front side of the chamber door 4, and a handle 6 is fixedly connected to the right side of the front side of the chamber door 4.

[0020] Specifically, two guide rods 7 are fixedly connected to the upper part of the vacuum chamber 1, and a mounting plate 8 is slidably connected to the surface of the two guide rods 7. A sliding push rod 9 is fixedly installed on the upper left side of the vacuum chamber 1. The output end of the sliding push rod 9 is fixedly connected to the center position of the left side of the mounting plate 8. A rotating motor 10 is fixedly installed at the center position of the upper side of the mounting plate 8, which effectively changes the position of the arc-initiating component 11, so that ions can fall evenly on the product surface. The output end of the rotating motor 10 passes through the upper side of the mounting plate 8 and is equipped with the arc-initiating component 11. The arc-initiating assembly 11 includes a mounting bracket 1101. The upper side of the mounting bracket 1101 is fixedly connected to the output end of the rotating motor 10. An adjusting push rod 1102 is fixedly installed on the rear left end of the mounting bracket 1101. The output end of the adjusting push rod 1102 passes through the rear plate of the mounting bracket 1101 and is fixedly connected to a mounting block 1103. An arc-initiating pin 1104 is slidably connected to the right side of the mounting block 1103. A fastening bolt 1105 is threadedly connected to the center position of the front side of the mounting block 1103 to facilitate the installation and replacement of the arc-initiating pin 1104.

[0021] Specifically, a slide rail 1106 is fixedly connected to the inside right side of the mounting bracket 1101. A T-shaped groove 1107 is provided at the front left end of the slide rail 1106. A T-shaped slide plate 1108 is slidably connected inside the T-shaped groove 1107. A fixing plate 1109 is rotatably connected to the front right end of the slide rail 1106. A fixing bolt 1110 is threadedly connected to the front left end of the fixing plate 1109. The end of the fixing bolt 1110 passes through the front side of the fixing plate 1109 and is threadedly connected to the front side of the T-shaped slide plate 1108, effectively fixing the T-shaped slide plate 1108 and facilitating the installation of the target material. A target is provided at the center of the left side of the T-shaped slide plate 1108. The material trough 1111 and the T-shaped slide plate 1108 are both fixedly connected to the front and rear ends of the left side with connecting plates 1112. A telescopic rod 1113 is fixedly connected to the center of the inner side of the connecting plate 1112. A baffle 1114 is fixedly connected to the right side of the telescopic rod 1113. A spring 1115 is sleeved on the surface of the telescopic rod 1113. The end of the spring 1115 near the connecting plate 1112 is fixedly connected to the inner side of the connecting plate 1112. The end of the spring 1115 near the baffle 1114 is fixedly connected to the surface of the baffle 1114, which facilitates the installation and replacement of the target material.

[0022] Working principle: The coated product is placed inside the vacuum chamber 1. First, the two baffles 1114 are pushed, and the spring 1115 is compressed. After the target material is placed inside the target material groove 1111, the baffles 1114 slide inward under the action of the elastic force to limit and fix the target material. After the target material is installed, the T-shaped slide plate 1108 is inserted into the T-shaped slide groove 1107. The fixing plate 1109 is rotated and the position of the T-shaped slide plate 1108 is fixed by the fixing bolts 1110, thus completing the installation of the target material. When installing the arc-initiating needle 1104, the arc-initiating needle 1104 is installed on the right side of the mounting block 1103. The fastening bolt 1105 is rotated, and the end of the fastening bolt 1105 is provided with a protective pad that abuts against the front left end of the arc-starting pin 1104 and fixes the arc-starting pin 1104. During the coating process, the front and rear positions of the arc-starting pin 1104 can be changed by adjusting the push rod 1102, which effectively changes the arc-starting position and uniformly consumes the target material. At the same time, the sliding push rod 9 drives the mounting plate 8 to move, and the rotating motor 10 controls the mounting bracket 1101 to rotate, which effectively changes the position of the arc-starting assembly 11 and thus changes the ion detachment position, so that the ions can fall evenly on the product surface and ensure that the coating thickness is consistent.

[0023] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. An ion plating arc ignition device, comprising a vacuum chamber (1), characterized in that: The front of the vacuum chamber (1) is rotatably connected to a door (4) via a hinge. Two guide rods (7) are fixedly connected to the upper interior of the vacuum chamber (1). A mounting plate (8) is slidably connected to the surfaces of the two guide rods (7). A rotating motor (10) is fixedly installed at the center of the upper side of the mounting plate (8). The output end of the rotating motor (10) passes through the upper side of the mounting plate (8) and is equipped with an arc-starting assembly (11). The arc-starting assembly (11) includes a mounting... The mounting bracket (1101) is fixedly connected to the output end of the rotating motor (10) on its upper side. An adjusting push rod (1102) is fixedly installed on the rear left end of the mounting bracket (1101). The output end of the adjusting push rod (1102) passes through the rear plate of the mounting bracket (1101) and is fixedly connected to a mounting block (1103). A fastening bolt (1105) is threadedly connected to the center position of the front side of the mounting block (1103). A slide rail (1106) is fixedly connected to the right side of the interior of 1101. A T-shaped groove (1107) is provided at the front left end of the slide rail (1106). A T-shaped slide plate (1108) is slidably connected inside the T-shaped groove (1107). A connecting plate (1112) is fixedly connected to both the front and rear ends of the left side of the T-shaped slide plate (1108). A telescopic rod (1113) is fixedly connected to the center of the inner side of the connecting plate (1112). A baffle (1114) is fixedly connected to the end of the telescopic rod (1113). The right side of the baffle (1114) is slidably connected to the left side of the T-shaped slide plate (1108). A spring (1115) is sleeved on the surface of the telescopic rod (1113). The end of the spring (1115) near the connecting plate (1112) is fixedly connected to the inner side of the connecting plate (1112). The end of the spring (1115) near the baffle (1114) is fixedly connected to the surface of the baffle (1114).

2. The ion plating arc ignition device according to claim 1, characterized in that: A sliding push rod (9) is fixedly installed on the upper left side of the vacuum chamber (1), and the output end of the sliding push rod (9) is fixedly connected to the center position on the left side of the mounting plate (8).

3. The arc-starting device for ion plating according to claim 1, characterized in that: An arc-inducing pin (1104) is slidably connected to the right side of the mounting block (1103).

4. The ion plating arc ignition device according to claim 1, characterized in that: The right front end of the slide rail (1106) is rotatably connected to a fixing plate (1109), and the left front end of the fixing plate (1109) is threadedly connected to a fixing bolt (1110). The end of the fixing bolt (1110) passes through the front side of the fixing plate (1109) and is threadedly connected to the front side of the T-shaped slide plate (1108).

5. The ion plating arc ignition device according to claim 1, characterized in that: A target groove (1111) is provided at the center of the left side of the T-shaped slide plate (1108).

6. The ion plating arc ignition device according to claim 1, characterized in that: An air inlet pipe (2) is fixedly connected to the upper right side of the vacuum box (1), and an exhaust pipe (3) is fixedly connected to the lower right side of the vacuum box (1).

7. The ion plating arc ignition device according to claim 1, characterized in that: An observation window (5) is provided at the center of the front side of the box door (4), and a handle (6) is fixedly connected to the right side of the front side of the box door (4).

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