Cooling system of annealing furnace

Abstract

The annealing furnace cooling system comprises a machine body; the heat dissipation mechanism is provided with an air inlet window and an air outlet which are communicated with the inner cavity of the machine body; the cooling mechanism is provided with a water inlet and a water outlet, and the water inlet is connected with the single side of the air inlet window through a pipeline and then communicated with the water outlet; the air inlet window is arranged on one side of the machine body, and the air outlet is arranged on the side face, different from the air inlet window, in the machine body. Cold water enters through the water inlet, penetrates through the single side face of the machine body through a pipeline, stretches across the width of the machine body, passes through the air inlet window and rotates to the water outlet in the height direction of the air inlet window to be discharged. A cooling system in an existing vertical annealing furnace is optimized, the structure is simple, the design is reasonable, the heat dissipation mechanism and the cooling mechanism are improved, the overall heat dissipation effect is improved, the cooling time is shortened, the annealing quality stability is good, the consistency is high, and the machining efficiency is improved.

Description

Technical Field

[0001] This application belongs to the technical field of semiconductor silicon wafer annealing furnace equipment, and in particular relates to an annealing furnace cooling system. Background Technology

[0002] In existing vertical annealing furnaces, due to defects in their structural design, the cooling rate of the product after the boat is lowered is relatively slow. Not only is the cooling time too long, but the cooling effect is also not ideal, making it difficult to meet the processing requirements of resistivity of 80-100, which greatly limits both output and quality. Summary of the Invention

[0003] This application provides a cooling system for an annealing furnace, particularly suitable for vertical annealing furnaces, to solve the technical problems of slow cooling speed and poor cooling effect caused by unreasonable existing structural design.

[0004] To solve at least one of the above-mentioned technical problems, the technical solution adopted in this application is:

[0005] An annealing furnace cooling system, comprising:

[0006] Organism;

[0007] A heat dissipation mechanism is provided, which is equipped with an air inlet and an air outlet that communicate with the internal cavity of the machine body;

[0008] The cooling mechanism is configured with a water inlet and a water outlet. The water inlet is connected to one side of the air inlet window via a pipe and then connected to the water outlet.

[0009] The air inlet is located on one side of the body, and the air outlet is located on a different side of the body from the air inlet.

[0010] Cold water enters through the inlet, passes through a pipe across one side of the machine body, spans the width of the machine body, then passes through the air inlet window and turns back along its height to the outlet for discharge.

[0011] Furthermore, the exhaust vent, the water inlet, and the water outlet are configured on the same side of the body;

[0012] The air inlet is located on the side of the body.

[0013] Furthermore, the exhaust vent is configured on the back of the unit, including an exhaust vent located in the middle of the back and an exhaust vent located on the side of the back, wherein the side of the exhaust vent located on the back is configured on the side of the back away from the air inlet window.

[0014] Furthermore, an observation window is constructed at the center of the back of the machine body, and the exhaust vents are positioned above and below the observation window.

[0015] Furthermore, the number of exhaust vents located above the observation window is the same as the number of exhaust vents located below it, and they are configured to correspond to each other.

[0016] Furthermore, the exhaust vents located on the rear side are all spaced vertically along the height of the body and are configured in the lower section of the body.

[0017] Furthermore, the water inlet and the water outlet are arranged side by side, on the same side as the exhaust vent located on the rear side, and below the lowest exhaust vent.

[0018] Furthermore, the cooling mechanism also includes a finned tube interconnected with the water inlet, the finned tube being configured in the body on the side opposite to the air inlet window.

[0019] Furthermore, the finned tube is connected to the air inlet window via a pipe, and the pipe connected to the air inlet window is located on the side of the air inlet window away from the exhaust port.

[0020] Furthermore, the finned tubes have at least two rows and are arranged through the side.

[0021] The annealing furnace cooling system designed in this application optimizes the existing cooling system in vertical annealing furnaces. It has a simple structure and reasonable design. The improved heat dissipation and cooling mechanisms enhance the overall heat dissipation effect, shortening the cooling time and improving the stability and consistency of annealing quality. It can also reduce the temperature to below 80℃, meeting the processing requirements of 80-100 resistivity, and reducing the processing time from the current 40 minutes to 20 minutes, thus improving processing efficiency. Attached Figure Description

[0022] Figure 1 This is a perspective view of an annealing furnace cooling system according to this application;

[0023] Figure 2 This is a perspective view of the cooling mechanism in this application.

[0024] In the picture:

[0025] 10. Body; 11. Observation window; 20. Heat dissipation mechanism

[0026] 21. Air inlet window; 22. Air outlet; 30. Cooling mechanism

[0027] 31. Inlet 32. Outlet 33. Finned tube Detailed Implementation

[0028] The present application will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0029] This embodiment proposes a cooling system for an annealing furnace, such as... Figure 1 As shown, the furnace includes a body 10, a heat dissipation mechanism 20, and a cooling mechanism 30. The heat dissipation mechanism 10 is equipped with an air inlet 21 and an air outlet 22 that communicate with the inner cavity of the body 10. The cooling mechanism 30 is located inside the body 10 and is equipped with a water inlet 31 and a water outlet 32 ​​that are connected to the body 10. The water inlet 31 is cooled by a pipe through a finned tube 33, flows through one side of the air inlet 21, and is connected to one side of the air inlet 21, and then communicates with the water outlet 32.

[0030] An air inlet 21 is located on one side of the body 10, and an exhaust vent 22 is located on a different side of the body 10 than the air inlet 21. Cold water enters through the inlet 31, passes through a pipe across one side of the body 10, spans the width of the body 10, then passes through the air inlet 21 and returns along its height to the outlet 32 ​​for discharge. This cooling system optimizes the existing cooling system in vertical annealing furnaces. It features a simple and rational design, improving the heat dissipation mechanism 20 and the cooling mechanism 30 to significantly enhance overall heat dissipation. This not only shortens cooling time but also improves the stability and consistency of annealing quality. Furthermore, it can lower the temperature to below 80°C, meeting the processing requirements of 80-100 ohms resistivity, and reducing the processing time from the current 40 minutes to 20 minutes, thus improving processing efficiency.

[0031] In this embodiment, all exhaust vents 22 are mounted on the wall of the body 10, and an exhaust fan is installed on each exhaust vent 22 inside the body 10 (see attached figure omitted).

[0032] like Figure 1-2 As shown, all exhaust vents 22, water inlets 31, and water outlets 32 are located on the same side of the body 10, i.e., the back of the body 10. The air inlet vent 21 is located on the right side of the body 10. Since the front of the body 10 is primarily used for placing and removing silicon wafers from the flatboat, the air inlet vent 21 of this annealing furnace is located on the right side of the body 10, while the exhaust vents 22 are all located on the back of the body 10. The air inlet vent 21 is a copper mesh window that provides both air filtration and cooling; its air inlet area is determined based on the maximum power of the annealing furnace, which is standard practice in this field.

[0033] All exhaust vents 22 are located on the rear of the body 10, including several exhaust vents 22 located in the center of the rear and several exhaust vents 22 located on the sides of the rear. An observation window 11 is also constructed in the center of the rear of the body 10, positioned at the midpoint of the body 10's height and slightly upwards. Two exhaust vents 22 are located above and below the observation window 11. This structure allows for more exhaust vents 22 to be installed at the height of the furnace chamber where the boat is located. While maintaining the structural integrity of the observation window 11, the number of exhaust vents 22 is increased, thereby improving the exhaust velocity at this location.

[0034] Furthermore, the number of exhaust vents 22 located above the observation window 11 is the same as the number of exhaust vents 22 located below it, and they are configured correspondingly to each other to improve the uniformity and consistency of the upper and lower exhaust speeds. In this embodiment, there are two exhaust vents 22 both above and below the observation window 11, but the number can be set according to actual conditions.

[0035] Several exhaust vents 22 located on the rear side are spaced vertically along the height of the body 10, and their sides are positioned on the rear side away from the air inlet 21. Furthermore, all exhaust vents 22 located on the rear side are positioned in the lower section of the body 10. This separate arrangement of exhaust vents 22 not only increases the exhaust area but also spans the height and width of the body 10, allowing air entering from the right side of the body 10 to circumvent the height and width of the body 10 before being exhausted by the exhaust vents 22 on the rear, thus increasing the heat dissipation area.

[0036] The furnace slab enters through the furnace opening on the front of the furnace body 10, descends along the furnace cavity, and heats up the furnace. All exhaust fans are activated, drawing air from the furnace body and expelling it through the exhaust vent 22, creating a negative pressure inside the furnace. Due to this negative pressure, cold air is drawn in through the air inlet vent 21 on the right side of the furnace body; this cold air absorbs heat and is then drawn away by the exhaust fans, creating a circulation. This circulation structure greatly increases the airflow rate inside the furnace cavity, improving heat dissipation.

[0037] like Figure 2 As shown, the cooling structure 30 also includes a finned tube 33 that communicates with the water inlet 31. The finned tube 33 is configured on the side of the body 10 opposite to the location of the air inlet 21, that is, on the left side of the body 10. The water inlet 31 and the water outlet 32 ​​are configured side by side on the back of the body 10, and are located on the same side as the exhaust vent 22 located on the back side, and are located below the lowest exhaust vent 22.

[0038] Two finned tubes 33 are arranged parallel and vertically on the left side of the body 10, and are connected to the water inlet 31 and the air inlet 11 respectively through pipes. The arrangement of the cooling finned tubes 33 not only increases the cooling contact area, but also improves the cooling speed. At the same time, the cooling pipe connected to the air inlet 21 is located on the side of the air inlet 21 away from the exhaust port 22. That is, the pipe on the side connected to the finned tubes 33 serves as the water inlet pipe connected to the pipe in the air inlet 21, and the drain pipe connected to the water outlet 32 ​​is located on the side of the air inlet 21 near the front of the body 10, and is arranged vertically in parallel.

[0039] The route of the drainage pipe connected to the outlet 32 ​​is the same as that of the finned pipe 33 connected to the inlet, and all pipes are located at the bottom or side of the body 10 in order to save installation space and not affect the normal operation of other structures.

[0040] After entering the pipe through the inlet 31, the cold water is continuously cooled by the finned tube 33 on the left side of the body 10. Then, it enters the cooling water pipe in the air inlet 21 on the right side of the body 10 through the pipe. The cold water exchanges heat with the hot air inside the furnace and is heated up. Then, it is discharged from the outlet 32, thereby achieving the cooling effect.

[0041] The annealing furnace cooling system designed in this application optimizes the existing cooling system in vertical annealing furnaces. It has a simple structure and reasonable design. The improved heat dissipation and cooling mechanisms enhance the overall heat dissipation effect, shortening the cooling time and improving the stability and consistency of annealing quality. It can also reduce the temperature to below 80℃, meeting the processing requirements of 80-100 resistivity, and reducing the processing time from the current 40 minutes to 20 minutes, thus improving processing efficiency.

[0042] The embodiments of this application have been described in detail above. These descriptions are merely preferred embodiments and should not be construed as limiting the scope of this application. All equivalent variations and modifications made within the scope of this application should still fall within the patent coverage of this application.

Claims

1. A cooling system for an annealing furnace, characterized in that, include: Organism; A heat dissipation mechanism is provided, which is equipped with an air inlet and an air outlet that communicate with the internal cavity of the machine body; The cooling mechanism is configured with a water inlet and a water outlet. The water inlet is connected to one side of the air inlet window via a pipe and then connected to the water outlet. The air inlet is located on one side of the body, and the air outlet is located on a different side of the body from the air inlet. Cold water enters through the inlet, passes through a pipe across one side of the machine body, spans the width of the machine body, then passes through the air inlet window and turns back along its height to the outlet for discharge.

2. The annealing furnace cooling system according to claim 1, characterized in that, The exhaust vent, the water inlet, and the water outlet are located on the same side of the body; The air inlet is located on the side of the body.

3. The annealing furnace cooling system according to claim 1 or 2, characterized in that, The exhaust vent is located on the back of the unit, including an exhaust vent located in the middle of the back and an exhaust vent located on the side of the back, wherein the side of the exhaust vent located on the back is located on the side of the back away from the air inlet window.

4. The annealing furnace cooling system according to claim 3, characterized in that, An observation window is also provided at the middle position on the back of the machine body, and the exhaust vents are positioned above and below the observation window.

5. The annealing furnace cooling system according to claim 4, characterized in that, The number of exhaust vents located above the observation window is the same as the number of exhaust vents located below it, and they are configured to correspond to each other.

6. The annealing furnace cooling system according to any one of claims 4-5, characterized in that, The exhaust vents located on the rear side are all spaced vertically along the height of the body and are located in the lower section of the body.

7. The annealing furnace cooling system according to claim 6, characterized in that, The water inlet and the water outlet are arranged side by side, on the same side as the exhaust vent located on the rear side, and below the lowest exhaust vent.

8. A cooling system for an annealing furnace according to any one of claims 1-2, 4-5, and 7, characterized in that, The cooling mechanism also includes a finned tube that is interconnected with the water inlet, and the finned tube is configured in the body on the side opposite to the air inlet window.

9. The annealing furnace cooling system according to claim 8, characterized in that, The finned tube is connected to the air inlet window via a pipe, and the pipe connected to the air inlet window is located on the side of the air inlet window away from the exhaust port.

10. The annealing furnace cooling system according to claim 9, characterized in that, The finned tubes have at least two rows and are arranged through the side.

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