Weak absorption instrument convenient for film sample test

Abstract

The utility model discloses a weak absorption instrument convenient for thin film sample test, which comprises a vertically mounted laser system, a sample detection system and a detection system, and light beams emitted by the laser system are vertically transmitted to the sample detection system and the detection system from top to bottom. According to the utility model, a vertically designed light path is adopted, and equipment is divided into three parts, namely a laser system, a sample measurement system and a detection system; original plane installation is adjusted to be vertical installation, the occupied space is greatly reduced, workers cannot make contact with an optical path system in the sample measuring process, personal safety guarantee is improved, meanwhile, the influence of the workers on the optical path system in the testing process is greatly reduced, and the testing efficiency is improved. And when any part of the three systems has a problem, the problem can be timely and intuitively found, so that a worker can conveniently carry out maintenance, no great influence is generated in the operation process, and the part replacement is simpler and more convenient.

Description

Technical Field

[0001] This utility model relates to the field of optoelectronic product measurement technology, specifically a weak absorber that facilitates the testing of thin film samples. Background Technology

[0002] Weak absorber instruments for thin film sample testing are commonly used to measure the weak absorption coefficients of optical materials or thin films. This is crucial for studying the laser damage threshold of materials, thermal lensing effects, and improving the performance of laser systems. In practice, we have found that existing traditional weak absorber instruments for thin film sample testing have the following problems: 1. The components are too concentrated during installation; when one part malfunctions, a large number of parts need to be disassembled for repair, making maintenance inconvenient; 2. Existing equipment needs to be mounted on an optical plate, occupying too much space; 3. During the measurement of optical and thin film samples, the optical path system is easily affected by interference.

[0003] To address the aforementioned problems, this invention proposes a weak absorber that facilitates testing of thin film samples. Utility Model Content

[0004] The purpose of this invention is to provide a weak absorber that facilitates the testing of thin film samples, thereby solving the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a weak absorber for facilitating thin film sample testing, comprising a vertically mounted laser system, a sample detection system, and a probe system, wherein the laser beam emitted by the laser system is vertically transmitted from top to bottom to the sample detection system and the probe system.

[0006] Preferably, the laser system includes a first beam output section and a second beam output section, wherein the first beam output section includes a pump laser, a chopper, a first reflector, and a focusing adjustment frame arranged according to a path;

[0007] The focusing adjustment frame consists of two directional adjustment knobs and a 75mm focusing lens;

[0008] The second beam output section includes a probe laser, a first reflector, and a first reflector prism arranged according to the path.

[0009] Preferably, after the first beam is adjusted by the focusing adjustment frame, it is perpendicularly struck on the sample in the sample detection system and finally strikes the power meter. The sample can be adjusted and moved on the XYZ axis.

[0010] The second beam of light, adjusted by the first reflecting prism, strikes the sample at an angle and then exits at an angle after passing through the sample.

[0011] Preferably, the second beam of light passing through the sample is obliquely incident into the second reflecting prism and the second reflecting mirror, so that the second beam of light is reflected and finally hits the detector.

[0012] Preferably, a focusing adjustment frame is provided between the second reflecting prism and the second reflecting mirror to adjust the optical path of the second beam.

[0013] Preferably, the focal points of the first beam and the second beam on the sample overlap.

[0014] Preferably, the sample is placed on a sample stage, which is detachably mounted on a three-dimensional XYZ axis stepper motor.

[0015] Preferably, the equipment in the laser system, sample detection system, and detection system is electrically connected to an external signal receiving platform.

[0016] Preferably, the signal receiving platform is located below the detection system.

[0017] Preferably, the laser system, sample detection system, detection system, and signal receiving platform are arranged together in a vertical three-layer frame, wherein the laser system is located on the top layer, the sample detection system and detection system are located on the second layer, and the signal receiving platform is located on the bottom layer.

[0018] Preferably, the detection system includes the power meter, the second reflecting prism, the second reflecting mirror, and the detector.

[0019] Compared with the prior art, the beneficial effects of this utility model are: compared with the prior art, this solution adopts a vertically designed optical path, which divides the equipment into three main parts: laser system, sample measurement system and detection system;

[0020] The original planar installation was changed to a vertical installation, which greatly reduced the space occupied and ensured that the staff would not come into contact with the optical system during the sample measurement process. This not only increased personal safety, but also greatly reduced the impact of the staff on the optical system during the test.

[0021] Compared to traditional clamp fixation, this solution adds an adapted sample stage and a three-dimensional XYZ axis stepper motor, eliminating the need for traditional clamp fixation of the sample to be tested. The sample can be placed directly on the sample stage, allowing the light path to pass through the sample from top to bottom, effectively reducing the stress on the sample to be tested by the clamp, and making the process of placing and removing the sample more convenient and faster.

[0022] The vertical installation method allows for timely and intuitive detection of any problem in any of the three systems, facilitating maintenance by staff and minimizing disruption during operation, while also simplifying component replacement. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of a weak absorber for facilitating thin film sample testing according to the present invention;

[0024] Figure 2 This is a three-dimensional connection view of the present invention during its application.

[0025] In the picture:

[0026] 100 laser system, 200 sample detection system, 300 detection system;

[0027] 1 Pump laser, 2 Chopper, 3 First reflector, 4 Focusing adjustment frame, 5 First reflector prism, 6 Probe laser, 7 Sample, 8 Sample stage, 9 Three-dimensional XYZ axis stepper motor, 10 Second reflector prism, 11 Second reflector, 12 Detector, 13 Power meter. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Therefore, the following detailed description of the embodiments of this utility model provided in the drawings is not intended to limit the scope of the claimed utility model, but merely to illustrate selected embodiments of the utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0030] Please see Figure 1-2The first embodiment of this utility model provides a weak absorption instrument for facilitating thin film sample testing, comprising a vertically mounted laser system 100, a sample detection system 200, and a detection system 300. The devices in the laser system 100, sample detection system 200, and detection system 300 are electrically connected to an external signal receiving platform. The light beam emitted by the laser system 100 is vertically transmitted from top to bottom to the sample detection system 200 and detection system 300. The laser system 100 includes a first beam output section and a second beam output section. The first beam output section includes a pump laser 1, a chopper 2, a first reflector 3, and a focusing adjustment frame arranged according to a path. The focusing adjustment frame 4 consists of two direction adjustment knobs and a 75mm focusing lens. The second beam output section includes a probe laser 6, a first reflector 3, and a first reflecting prism 5 arranged according to a path.

[0031] like Figure 1 As shown, the sample detection system 200 includes a three-dimensional XYZ axis stepper motor 9 and a sample stage 8 detachably mounted on the three-dimensional XYZ axis stepper motor 9. During the detection process, a sample 7 is placed on the sample stage 8. It should be noted that the sample stage 8 can be customized according to the specifications of the sample 7.

[0032] like Figure 1 As shown, the detection system 300 includes a focusing adjustment frame 4, a second reflecting prism 10, a second reflecting mirror 11, a detector 12, and a power meter 13;

[0033] like Figure 2 As shown, the signal receiving platform includes a display terminal; the signal receiving platform is located below the detection system 300, and specifically, the laser system 100, sample detection system 200, detection system 300 and signal receiving platform are all arranged in a vertical three-layer frame, wherein the laser system 100 is located on the top layer, the sample detection system 200 and detection system 300 are located on the second layer, and the signal receiving platform is located on the bottom layer;

[0034] Specifically, after the optical path is adjusted by the focusing adjustment frame 4, the first beam is vertically struck on the sample 7 in the sample detection system 200 and finally strikes the power meter 13. The second beam is obliquely struck on the sample 7 under the adjustment of the first reflecting prism 5. The second beam passes through the sample 7 and exits obliquely, then enters the second reflecting prism 10, the focusing adjustment frame 4, and the second reflecting mirror 11, so that the second beam is reflected and finally strikes the detector 12. When the beam is struck into the sample 7, the focal positions of the first beam and the second beam on the sample 7 overlap. In actual operation, the sample 7 can be adjusted and moved on the XYZ axis so that the two beams can overlap better on the sample.

[0035] This invention employs surface thermal lensing technology for the measurement of thin film samples. It primarily utilizes the photothermal co-path interferometry method based on this technology. This method leverages the photothermal effect of optical materials or thin films under strong laser irradiation, resulting in film distortion, i.e., photothermal deformation. This deformation can be approximated as a lens surface. A standard probe beam, after passing through this surface, will produce a coupling diffraction effect. By testing this diffraction effect, the deformation of the film surface can be inferred, thus obtaining many optical properties (including weak absorption characteristics) of the optical thin film and material. Under the action of the pump laser, the sample under test undergoes a refractive index gradient distribution, and the probe... The light beam is distorted when passing through the refractive index gradient region of the sample. The absorption of the sample is determined by measuring the degree of distortion of the probe light. In this invention, the beam is set to be vertically incident and the internal system is set to be vertical, which reduces the floor space occupied when the detection equipment is placed, facilitates the replacement and maintenance of some parts by the staff, and reduces the mutual influence between parts and the safety threat to the staff. Furthermore, by placing the sample on a three-dimensional XYZ axis stepper motor that can move along the XYZ direction, the influence of the fixture on the measurement results of the sample is avoided while achieving effective position adjustment.

[0036] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

Claims

1. A weak absorber for easy testing of thin film samples, characterized in that, It includes a vertically mounted laser system, a sample detection system, and a detection system, wherein the laser beam emitted by the laser system is vertically transmitted from top to bottom to the sample detection system and the detection system.

2. The weak absorber for facilitating thin film sample testing according to claim 1, characterized in that: The laser system includes a first beam output section and a second beam output section. The first beam output section includes a pump laser, a chopper, a first reflector, and a focusing adjustment frame arranged according to the path. The focusing adjustment frame consists of two directional adjustment knobs and a 75mm focusing lens. The second beam output section includes a probe laser, a first reflector, and a first reflector prism arranged according to the path.

3. The weak absorber for testing thin film samples according to claim 2, characterized in that: After the first beam is adjusted by the focusing adjustment frame, it is perpendicularly struck on the sample in the sample detection system and finally on the power meter. The sample can be adjusted and moved on the XYZ axis. The second beam of light, adjusted by the first reflecting prism, strikes the sample at an angle and then exits at an angle after passing through the sample.

4. A weak absorber for facilitating thin film sample testing according to claim 3, characterized in that: The detection system includes the power meter, the second reflecting prism, the second reflecting mirror, and the detector; The second beam of light passing through the sample is obliquely incident into the second reflecting prism and the second reflecting mirror, causing the second beam of light to be reflected and finally hit the detector.

5. A weak absorber for facilitating thin film sample testing according to claim 4, characterized in that: A focusing adjustment frame is also provided between the second reflecting prism and the second reflecting mirror to adjust the optical path of the second beam.

6. A weak absorber for testing thin film samples according to any one of claims 2-5, characterized in that: The focal points of the first and second beams on the sample overlap.

7. A weak absorber for facilitating thin film sample testing according to claim 6, characterized in that: The sample is placed on a sample stage, which is detachably mounted on a three-dimensional XYZ axis stepper motor.

8. A weak absorber for facilitating thin film sample testing according to claim 7, characterized in that: The equipment in the laser system, sample detection system, and probe system is electrically connected to an external signal receiving platform.

9. A weak absorber for facilitating thin film sample testing according to claim 8, characterized in that: The signal receiving platform is located below the detection system.

10. A weak absorber for facilitating thin film sample testing according to claim 9, characterized in that: The laser system, sample detection system, detection system, and signal receiving platform are all arranged in a vertical three-layer frame, with the laser system located on the top layer, the sample detection system and detection system located on the second layer, and the signal receiving platform located on the bottom layer.

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