Electronic-grade neon purification device

Abstract

The utility model discloses an electronic grade neon gas purification device, which relates to the technical field of gas purification and comprises a box body, a bottom plate is arranged on the left side of the box body, a treatment box is arranged on the top surface of the bottom plate, a primary filtering assembly is arranged in the treatment box and is in an inverted L shape, and the primary filtering assembly comprises a filtering plate, a scraping plate, a telescopic rod, a hydraulic pump and a partition plate. The filter plate is arranged in the middle of the treatment box, the top surface of the filter plate is in contact with the bottom of the scraping plate, the two ends of the rear side of the scraping plate are connected with the telescopic rod, and the other end of the telescopic rod is connected with the hydraulic pump and penetrates through the partition plate. The hydraulic pump drives the telescopic rod to drive the scraper to move on the top surface of the filter plate, so that impurities attached to the filter plate can be regularly cleaned, the influence of blockage on the filtering effect is avoided, and the continuity and stability of the whole purification process are ensured.

Description

Technical Field

[0001] This utility model relates to the field of gas purification technology, specifically to an electronic-grade neon gas purification device. Background Technology

[0002] In today's rapidly developing electronics industry, electronic-grade neon, as a key specialty gas, plays an indispensable role in many electronic manufacturing processes. Traditional neon purification devices have gradually revealed some limitations in meeting the increasingly stringent production requirements of electronic-grade neon. On the one hand, in the initial filtration stage of neon, most devices only use simple filtration structures, which are not ideal for filtering larger particulate impurities such as dust and rust. Moreover, as the filtration process continues, the filter media is easily clogged by the adhesion of impurities, thus affecting the continuity and stability of the entire purification process. In addition, traditional devices often lack effective automatic cleaning mechanisms, requiring frequent manual cleaning and maintenance. This not only increases labor costs but may also lead to untimely or incomplete cleaning due to the uncertainty of manual operation, further affecting filtration efficiency. Furthermore, the liquid nitrogen storage tanks used to provide a low-temperature environment in some devices are in fixed positions and are difficult to adjust flexibly according to actual needs, causing difficulties for operators when changing liquid nitrogen or performing related operations.

[0003] Therefore, we propose an electronic-grade neon gas purification device. Utility Model Content

[0004] The purpose of this invention is to provide an electronic-grade neon gas purification device.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an electronic-grade neon gas purification device, comprising a housing, a bottom plate on the left side of the housing, and a processing box on the top surface of the bottom plate, which is inverted L-shaped. A primary filtration assembly is installed inside the processing box, comprising a filter plate, a scraper, a telescopic rod, a hydraulic pump, and a partition. The filter plate is located in the middle of the processing box, with its top surface contacting the bottom of the scraper. The two rear ends of the scraper are connected to the telescopic rod, and the other end of the telescopic rod is connected to the hydraulic pump and passes through the partition. A dust collection box is located at the bottom end of the telescopic rod on the rear side of the processing box. A sliding table assembly is located on the rear side inside the housing, comprising a guide rail seat, a slider, a worktable, a moving pull rod, and a motor. The left and rear sides of the guide rail seat are fixedly connected to the left and rear sides inside the housing, and its top surface is connected to the slider. The slider is located at both ends of the bottom surface of the worktable. The two sides of the worktable are fixedly connected to one end of the moving pull rod, and a liquid nitrogen storage tank is placed on the top surface of the worktable. The moving pull rod is connected to the motor.

[0006] As a further embodiment of this utility model: an air inlet pipe is provided at the upper front end of the processing box, and a conveying pipe is connected to the right side; a hydraulic pump is located at both ends of the rear side inside the processing box; the partition is located at the rear end inside the processing box; the dust collection box is located at the bottom front end of the partition, and a waste outlet is provided at the bottom.

[0007] As a further embodiment of this utility model: the top surface of the guide rail seat is provided with two sets of sliding grooves, the sliding grooves are connected to the slider, the top surface of the worktable is provided with a placement groove, the placement groove is in contact with the top of the liquid nitrogen storage tank, the movable pull rod is L-shaped and one end of the side is provided with a thread, the thread is connected to the motor drive end, and the motor is located at both ends of the top surface of the guide rail seat.

[0008] As a further embodiment of this utility model: the conveying pipe runs through the left side of the box and is connected to a low-temperature adsorption column at the other end. The low-temperature adsorption column is located inside the box and is connected to a catalytic reaction chamber at the other end. A gas separation membrane assembly is connected to the top of the catalytic reaction chamber and an outlet pipe is connected to the top of the gas separation membrane assembly.

[0009] As a further embodiment of this utility model: the air outlet pipe extends through the top surface of the box and is equipped with a purity detection device, and the delivery pipe is equipped with a flow regulating valve.

[0010] As a further embodiment of this utility model: a switch door is installed on the front side of the box, and the switch door is provided with a transparent window.

[0011] Compared with the prior art, the beneficial effects of this utility model by adopting the above technical solution are as follows:

[0012] 1. This utility model uses a pre-filtration component installed inside the processing chamber to intercept larger particulate impurities in the gas. The cleaning system, consisting of a filter plate, scraper, telescopic rod, and hydraulic pump, uses a hydraulic pump to drive the telescopic rod to move the scraper on the top surface of the filter plate, which can periodically clean the impurities attached to the filter plate, preventing blockage and affecting the filtration effect. This automatic cleaning mechanism not only maintains the high efficiency of the pre-filtration but also reduces the trouble of frequent manual cleaning, ensuring the continuity and stability of the entire purification process. In addition, the guide rail seat in the slide assembly is tightly fixed to the inside of the chamber, and the slider can drive the worktable to move smoothly on the guide rail seat, so that the liquid nitrogen storage tank placed on the worktable can be accurately adjusted as needed, making it convenient for operators to replace it.

[0013] 2. This utility model features a dust collection box located at the bottom of the telescopic rod on the rear side of the processing box to collect impurities removed by the primary filtration component. A waste outlet is also provided at the bottom for convenient periodic cleaning of the dust collection box, maintaining the cleanliness of the device's interior. Furthermore, key components such as the low-temperature adsorption column, catalytic reaction chamber, and gas separation membrane component are rationally arranged within the box. A door with a transparent window is installed on the front of the box, allowing maintenance personnel to observe the internal conditions through the window and conveniently inspect, repair, or replace components after opening the door.

[0014] Other advantages, objectives and features of this invention will be set forth in part in the description which follows, and in part will be apparent to those skilled in the art from the following examination or study, or may be taught from the practice of this invention. Attached Figure Description

[0015] Figure 1 This is a three-dimensional schematic diagram of the device in the embodiment of this utility model;

[0016] Figure 2 This is a schematic front view of the device as described in the embodiment of this utility model;

[0017] Figure 3 This is a schematic diagram of the device as a whole from the left in the embodiment of this utility model;

[0018] Figure 4 This is a partial front perspective view of the device in the embodiment of this utility model;

[0019] Figure 5 This is a partial three-dimensional view of the back of the device in an embodiment of this utility model.

[0020] In the diagram: 1. Housing; 2. Base plate; 3. Processing box; 4. Pre-filtration assembly; 401. Filter plate; 402. Scraper; 403. Telescopic rod; 404. Hydraulic pump; 405. Partition; 5. Dust collection box; 6. Slide assembly; 601. Guide rail seat; 602. Slider; 603. Worktable; 604. Moving rod; 605. Motor; 7. Liquid nitrogen storage tank; 8. Inlet pipe; 9. Delivery pipe; 10. Low-temperature adsorption column; 11. Catalytic reaction chamber; 12. Gas separation membrane assembly; 13. Outlet pipe; 14. Flow regulating valve. Detailed Implementation

[0021] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings. It should be noted that the description of these embodiments is for the purpose of helping to understand this utility model, but does not constitute a limitation on this utility model.

[0022] Furthermore, the technical features involved in the various embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0023] Please see the appendix Figure 1 -Appendix Figure 5 This utility model discloses an electronic-grade neon gas purification device. A base plate 2 is located on the left side of the housing 1. A processing box 3, shaped like an inverted L, is located on the top surface of the base plate 2. A primary filtration assembly 4 is installed inside the processing box 3. The primary filtration assembly 4 includes a filter plate 401, a scraper 402, a telescopic rod 403, a hydraulic pump 404, and a partition 405. The filter plate 401 is located in the middle of the processing box 3, and its top surface contacts the bottom of the scraper 402. The scraper 402 plays a role in the automatic cleaning mechanism of the entire primary filtration assembly 4. 2. The two ends of the rear side are connected to the telescopic rod 403, and the other end of the telescopic rod 403 is connected to the hydraulic pump 404 and passes through the partition 405, thus forming a complete and orderly transmission link, providing a reliable power transmission path for subsequent cleaning operations. A dust collection box 5 is opened at the bottom of the telescopic rod 403 on the rear side of the treatment box 3. Its function is to collect various impurities scraped off by the scraper 402 from the top surface of the filter plate 401 during the operation of the primary filter component 4, ensuring a relatively clean internal environment of the treatment box 3. To prevent impurities from accumulating inside the chamber and negatively impacting subsequent purification processes, a sliding table assembly 6 is located on the rear side of the chamber 1. The sliding table assembly 6 includes a guide rail 601, a slider 602, a worktable 603, a moving rod 604, and a motor 605. The left and rear sides of the guide rail 601 are fixedly connected to the left and rear sides of the chamber 1, and its top surface is connected to the slider 602. The slider 602 is located at both ends of the bottom surface of the worktable 603. Both sides of the worktable 603 are fixedly connected to one end of the moving rod 604, and a liquid nitrogen storage tank 7 is placed on the top surface of the worktable 603. The moving rod 604 is connected to the motor 605, which serves as a power source. Through its connection with the moving rod 604, the motor 605 provides the necessary power for the movement of the worktable 603 on the guide rail 601, enabling precise adjustment of the position of the liquid nitrogen storage tank 7 according to actual needs. This greatly facilitates the replacement and maintenance of the liquid nitrogen storage tank 7 by operators during subsequent use.

[0024] In the first embodiment, an air inlet pipe 8 is provided at the upper front side of the treatment box 3, and a conveying pipe 9 is connected to the right side. The hydraulic pump 404 is located at both ends of the rear side inside the treatment box 3. The partition 405 is located at the rear end inside the treatment box 3. The dust collection box 5 is located at the bottom front side of the partition 405, and a waste outlet is provided at the bottom. Two sets of sliding grooves are opened on the top surface of the guide rail seat 601. The sliding grooves are connected to the slider 602. The top surface of the workbench 603 is provided with a placement groove, which contacts the top of the liquid nitrogen storage tank 7. The moving pull rod 604 is L-shaped, and one end of the side is provided with a thread. The thread is connected to the drive end of the motor 605. The motor 605 is located at both ends of the top surface of the guide rail seat 601.

[0025] Specifically, the conveying pipe 9 can smoothly transport the treated or transferred gas in the processing box 3 to other related equipment. The partition 405 can reasonably divide the internal space of the processing box 3, so that different processing links or substances of different properties can be operated or stored in relatively independent spaces. The dust collection box 5 is mainly used to collect various dust, impurities and other waste generated during the processing, ensuring the cleanliness of the processing box 3, and also facilitating the unified cleaning and treatment of these wastes in the future. When the slider 602 is embedded in the slide groove, it can slide smoothly in the slide groove, thereby driving other connected parts to perform corresponding movement operations, providing a reliable movement mechanism for the dynamic operation of the entire equipment. When the motor 605 starts and runs, the drive end of the motor 605 engages with the thread on the side of one end of the moving rod 604, thereby driving the moving rod 604 to perform corresponding movement operations, thereby realizing the displacement change of other connected parts.

[0026] In Example 2, the conveying pipe 9 passes through the left side of the box 1, and the other end is connected to a low-temperature adsorption column 10. The low-temperature adsorption column 10 is located inside the box 1, and the other end is connected to a catalytic reaction chamber 11. A gas separation membrane assembly 12 is connected to the top of the catalytic reaction chamber 11, and an outlet pipe 13 is connected to the top of the gas separation membrane assembly 12. The outlet pipe 13 passes through the top surface of the box 1 and is equipped with a purity detection device. A flow regulating valve is installed on the conveying pipe 9, and a switch door is installed on the front side of the box 1. The switch door has a transparent window.

[0027] Specifically, the low-temperature adsorption column 10 effectively adsorbs the substances transmitted through the conveying pipe 9, adsorbing specific components or impurities. A purity detection device is installed on the outlet pipe 13, which can detect the purity of the gas discharged through the outlet pipe 13 in real time and accurately, so that operators can understand the quality of the gas after the entire treatment process. Based on the detection results, the operating parameters of the equipment or the treatment process can be adjusted and optimized accordingly. The flow regulating valve can precisely regulate and control the flow rate of the substances transmitted through the conveying pipe 9 according to the actual treatment needs and the overall operating status of the equipment, ensuring that the flow rate of the substances entering each subsequent treatment stage meets the treatment requirements without affecting the normal operation and treatment effect of the entire equipment due to excessive or insufficient flow. The transparent window allows operators to clearly observe the operating status of some equipment inside the box 1 without opening the door, providing great convenience for operators.

[0028] This utility model also provides a method for using an electronic-grade neon gas purification device, including the following steps:

[0029] S1. First, the neon gas to be purified enters the inlet pipe 8 and then enters the processing chamber 3. After preliminary filtration, it enters the low-temperature adsorption column 10 through the delivery pipe 9 on the right side of the processing chamber 3. At the same time, the valve of the liquid nitrogen storage tank 7 is opened, and liquid nitrogen is delivered to the low-temperature adsorption column 10 through relevant pipelines, so that the low-temperature adsorption column 10 reaches a suitable low temperature state, so that some impurities are adsorbed by the adsorbent in the low-temperature adsorption column 10, achieving further purification. The neon gas purified by the low-temperature adsorption column 10 then enters the catalytic reaction chamber 11. Under the action of the catalyst in the catalytic reaction chamber 11, some impurities in the neon gas undergo chemical reaction, and then continue to the next stage with the generated water and other products. The gas coming out of the catalytic reaction chamber 11 then enters the gas separation membrane assembly 12. Through the selective permeation characteristics of the gas separation membrane assembly 12, the neon gas preferentially permeates through the separation membrane, further separating the impurity gas. Finally, the purified neon gas is collected through the outlet pipe 13.

[0030] S2. By starting the hydraulic pump 404, the telescopic rod 403 drives the scraper 402 to move on the top surface of the filter plate 401, scraping off the impurities attached to the filter plate 401. The scraped impurities will be collected through the dust collection box 5 located at the bottom of the telescopic rod 403 on the rear side of the processing box 3. After cleaning, the hydraulic pump 404 is turned off, and then the waste outlet at the bottom of the dust collection box 5 is opened to clean the collected impurities and close the waste outlet.

[0031] S3. The slider 602 on the bottom surface of the workbench 603 is slidably connected to the groove of the guide rail seat 601. The liquid nitrogen storage tank 7 is placed on the top surface of the workbench 603. By starting the motor 605, the moving rod 604 drives the liquid nitrogen storage tank 7 to move horizontally on the top surface of the guide rail seat 601.

[0032] Working principle:

[0033] First, the neon gas to be purified enters through the inlet pipe 8 at the upper front of the processing chamber 3. Inside the processing chamber 3, the filter plate 401 in the primary filtration assembly 4 performs preliminary filtration of the neon gas, intercepting large particles of impurities such as dust and rust. At the same time, the hydraulic pump 404 drives the telescopic rod 403 to move the scraper 402 to clean the filter plate 401. The scraped impurities fall into the dust collection box 5, which can be cleaned periodically through the waste outlet. The neon gas that has undergone preliminary filtration enters the low-temperature adsorption column 10 through the delivery pipe 9. The liquid nitrogen storage tank 7 on the slide assembly 6, which can be moved and adjusted, provides a low-temperature environment, allowing the adsorbent in the adsorption column to adsorb water. Impurities such as vapor and carbon dioxide are removed, and then neon gas enters the catalytic reaction chamber 11. Under the action of the catalyst, trace amounts of impurities such as oxygen and hydrogen undergo chemical reactions. The products enter the gas separation membrane assembly 12 with the neon gas. The neon gas preferentially passes through the separation membrane for further purification. The purified neon gas is discharged through the gas outlet pipe 13. The purity detection device on the gas outlet pipe 13 monitors the purity in real time. If the purity meets the standard, it can be used for relevant production. If the purity does not meet the standard, the device needs to be checked and adjusted. The switch door with a transparent window on the front of the box 1 facilitates maintenance and operation, ensuring that the device continues to operate stably to efficiently complete the neon gas purification task. At this point, the entire workflow is completed.

[0034] The terms "front," "back," "left," "right," "top," and "bottom" all refer to the figures in the accompanying drawings. Figure 1 Based on the perspective of the observer, the side of the device facing the observer is defined as the front, the left side of the observer is defined as the left, and so on.

[0035] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this utility model.

[0036] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments.

[0037] For those skilled in the art, various changes, modifications, substitutions, and alterations to these embodiments without departing from the principles and spirit of this utility model will still fall within the protection scope of this utility model.

Claims

1. An electronic-grade neon gas purification device, comprising a housing (1), wherein a bottom plate (2) is provided on the left side of the housing (1), characterized in that: The bottom plate (2) has a processing box (3) on its top surface, which is inverted L-shaped. The processing box (3) is equipped with a primary filter assembly (4). The primary filter assembly (4) includes a filter plate (401), a scraper (402), a telescopic rod (403), a hydraulic pump (404), and a partition (405). The filter plate (401) is located in the middle of the processing box (3), and its top surface is in contact with the bottom of the scraper (402). The two ends of the rear side of the scraper (402) are connected to the telescopic rod (403). The other end of the telescopic rod (403) is connected to the hydraulic pump (404) and passes through the partition (405). A dust collection box (5) is opened at the bottom end of the telescopic rod (403) on the rear side of the processing box (3). The box (1) has a slide assembly (6) on the rear side inside. The slide assembly (6) includes a guide rail seat (601), a slider (602), a worktable (603), a moving rod (604), and a motor (605). The left and rear sides of the guide rail seat (601) are fixedly connected to the left and rear sides inside the box (1), and the top surface is connected to the slider (602). The slider (602) is located at both ends of the bottom surface of the worktable (603). The two sides of the worktable (603) are fixedly connected to one end of the moving rod (604), and a liquid nitrogen storage tank (7) is placed on the top surface of the worktable (603). The moving rod (604) is connected to the motor (605).

2. The electronic-grade neon gas purification device according to claim 1, characterized in that: The processing box (3) has an air inlet pipe (8) at the upper front end and a conveying pipe (9) connected to the right side. The hydraulic pump (404) is located at both ends of the rear side inside the processing box (3). The partition (405) is located at the rear end inside the processing box (3). The dust collection box (5) is located at the bottom front side of the partition (405) and has a waste outlet at the bottom.

3. The electronic-grade neon gas purification device according to claim 1, characterized in that: The top surface of the guide rail base (601) is provided with two sets of sliding grooves, which are connected to the slider (602). The top surface of the worktable (603) is provided with a placement groove, which is in contact with the top of the liquid nitrogen storage tank (7). The movable pull rod (604) is L-shaped and has a thread on one side. The thread is connected to the drive end of the motor (605), which is located at both ends of the top surface of the guide rail base (601).

4. The electronic-grade neon gas purification device according to claim 2, characterized in that: The delivery pipe (9) runs through the left side of the box (1) and is connected to a low-temperature adsorption column (10) at the other end. The low-temperature adsorption column (10) is located inside the box (1) and is connected to a catalytic reaction chamber (11) at the other end. A gas separation membrane assembly (12) is connected to the top of the catalytic reaction chamber (11) and an outlet pipe (13) is connected to the top of the gas separation membrane assembly (12).

5. The electronic-grade neon gas purification device according to claim 4, characterized in that: The air outlet pipe (13) runs through the top surface of the box (1) and is equipped with a purity detection device. The delivery pipe (9) is equipped with a flow regulating valve (14).

6. The electronic-grade neon gas purification device according to claim 1, characterized in that: The front of the box (1) is equipped with a switch door, which has a transparent window.

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