Exhaust device for polishing machine
By designing an exhaust device with connecting pipes and U-shaped drain pipes, the problem of waste liquid entering the exhaust pipe in the polishing machine's exhaust system was solved, achieving gas-liquid separation, improving product yield, and reducing maintenance costs.
Patent Information
- Application Number
- CN202422926823.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-29
- Publication Date
- 2025-10-31
- Estimated Expiration
- 2034-11-29
AI Technical Summary
Existing polishing machine exhaust devices are prone to causing waste liquid to enter the exhaust pipe during the process of removing liquid-containing waste gas, resulting in pollution and blockage, affecting polishing effect and increasing cost.
An exhaust device comprising a connecting pipe, an exhaust pipe, and a U-shaped drain pipe is designed. It uses gravity to separate waste gas and waste liquid. The waste gas and waste liquid are separated through the connecting pipe. The waste gas is discharged through the exhaust pipe, and the waste liquid is discharged through the U-shaped drain pipe, forming a U-shaped water seal to prevent liquid from entering the exhaust pipe.
It achieves gas-liquid separation, prevents exhaust pipe contamination and blockage, improves product yield and uptime, and reduces maintenance costs.
Smart Images
Figure CN223492970U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of semiconductor manufacturing technology, and specifically relates to an exhaust device for a polishing machine. Background Technology
[0002] In the process of semiconductor wafer manufacturing, in order to improve the defects left on the wafer surface in the previous processing steps, and also to make the wafer surface sufficiently flat, it is necessary to polish the wafer surface. The polishing machine is the machine used for wafer polishing. The polishing machine can be divided into two parts according to the processing sequence: the mounting area and the polishing area. The mounting area is mainly used to attach the wafer to the ceramic disk with wax, which facilitates the subsequent polishing of the wafer. The waxing device in the mounting area is mainly used to apply wax and clean residual wax, while the heating device is used to dry the wax on the ceramic disk to facilitate the subsequent wafer mounting.
[0003] In the actual chip mounting process, a ceramic disk with residual wax on its surface is first placed in a wax coating device. The disk then rotates at high speed while a chemical liquid is sprayed onto its surface, and a brush is used to remove the residual wax. Finally, wax is applied to the surface. This process generates waste liquid and liquid-containing exhaust gas. After wax coating, the ceramic disk is moved to a heating device, which heats the disk to quickly dry the wax on its surface. This process also generates wax-containing exhaust gas. Because the waste liquid from the wax coating device is discharged in a timely manner through the drain pipe, the liquid-containing waste gas and the wax-containing waste gas generated during heating need to be discharged through the exhaust pipe. However, the existing exhaust pipe directly draws away the liquid-containing waste gas, and at the same time, some waste liquid is also drawn away during the exhaust process. This causes the waste liquid to enter the exhaust pipe. If it is not cleaned in time, it will cause pollution and corrosion to the exhaust pipe. Once it solidifies, it will cause the pipe to be blocked, preventing the waste gas from being discharged. The accumulation of waste gas inside the machine will cause abnormalities on the surface of the polished wafer, resulting in a loss of yield. In addition, cleaning or replacing the exhaust pipe will also increase downtime and costs.
[0004] Therefore, further improvements were made to the exhaust system to ensure that waste gas, waste liquid, and liquid-containing waste gas generated by the waxing and heating devices in the polishing machine's patch area can be separated into gas and liquid components after passing through the exhaust system. The separated waste gas is discharged through the exhaust pipe, while the waste liquid is discharged through the drain pipe. This ensures that the pipes are not contaminated or blocked, which has significant technical value for improving product yield, reducing costs, and increasing uptime. Utility Model Content
[0005] The purpose of this invention is to provide an exhaust device for a polishing machine to address the shortcomings of existing technologies.
[0006] The objective of this utility model is achieved through the following technical solution:
[0007] An exhaust device for a polishing machine includes a connecting pipe having at least a vertical section, an exhaust pipe, and a U-shaped drain pipe; the upper end of the connecting pipe is used to connect to the polishing machine, one end of the U-shaped drain pipe is connected directly below the lower end of the connecting pipe, one end of the exhaust pipe is connected to the lower end of the connecting pipe at a certain angle, and the other end of the exhaust pipe is used to connect to an air extraction device.
[0008] The other end of the U-shaped drain pipe is bent, and the height of the bend is lower than the height of the upper end of the exhaust pipe, so that the U-shaped drain pipe forms a U-shaped water seal.
[0009] Preferably, the exhaust device for the polishing machine as described above also includes a support;
[0010] The exhaust pipe and the U-shaped drain pipe are fixed to the bracket.
[0011] Preferably, the connection angle between one end of the exhaust pipe and the lower end of the connecting pipe is 90°;
[0012] The other end of the U-shaped drain pipe is bent at a 90° angle.
[0013] Preferably, the U-shaped drain pipe includes two vertical sections on both sides and a horizontal connecting section in the middle located between the two vertical sections; wherein the first vertical section is connected to the lower end of the connecting pipe, and the upper end of the second vertical section is bent.
[0014] Preferably, one end of the middle horizontal connecting part and the lower end of the second side vertical part are connected to a second drain pipe for draining the water in the U-shaped water seal;
[0015] A second valve is installed on the second drain pipe.
[0016] Preferably, the lower end of the connecting pipe is connected to one end of the exhaust pipe and one end of the U-shaped drain pipe via a first tee.
[0017] The middle horizontal connecting part, the second side vertical part, and the second drain pipe are connected by a second tee.
[0018] Preferably, the U-shaped drain pipe includes a third drain pipe, a fourth drain pipe, and a fifth drain pipe;
[0019] The third drain pipe is vertically arranged; the fourth and fifth drain pipes are bent, the fourth drain pipe includes a horizontal section and a vertically bent section connected to one end of the horizontal section; the fifth drain pipe includes a vertical section and a horizontally bent section connected to the upper end of the vertical section.
[0020] The upper end of the third drain pipe is connected to the lower end of the connecting pipe, and the lower end is connected to the upper end of the vertical bend section of the fourth drain pipe; the other end of the horizontal section of the fourth drain pipe is connected to the lower end of the vertical section of the fifth drain pipe.
[0021] The vertical bends of the third and fourth drain pipes form the first side vertical section; the horizontal section of the fourth drain pipe forms the middle horizontal connecting section; and the fifth drain pipe forms the second side vertical section.
[0022] Preferably, the other end of the horizontal bend of the fifth drain pipe is also bent downwards, so that the fifth drain pipe is also U-shaped.
[0023] Preferably, the end of the fifth drain pipe furthest from the fourth drain pipe is connected to a vertically arranged first drain pipe;
[0024] The fifth drain pipe is equipped with a first valve.
[0025] Preferably, the fifth drain pipe is connected to the first drain pipe via a first connector;
[0026] The third drain pipe and the fourth drain pipe are connected by a second joint.
[0027] This application further improves the exhaust device of the polishing machine, enabling the separation of waste gas, waste liquid, and liquid-containing waste gas generated by the wax coating device and heating device in the polishing machine's mounting area after passing through the exhaust device. The separated waste gas is discharged through the exhaust pipe, while the waste liquid is discharged through the drain pipe. This ensures that the exhaust pipe is not contaminated or blocked, effectively improving product yield, reducing costs, and increasing uptime. Therefore, the exhaust device provided in this application has good practical value and technological improvement significance in semiconductor wafer processing and manufacturing processes. Attached Figure Description
[0028] Figure 1 This is an overall schematic diagram of the exhaust device provided in this application;
[0029] Figure 2 This is a schematic diagram of the right side of the exhaust device provided in this application;
[0030] Figure 3 This is a schematic diagram of the rear side of the exhaust device provided in this application;
[0031] Figure 4 This is a front view of the exhaust device piping section provided in this application;
[0032] Figure 5 This is a rear view of the exhaust device piping section provided in this application.
[0033] Explanation of reference numerals in the attached figures:
[0034] 1-Connecting pipe; 2-Snap fastener; 3-Exhaust pipe; 4-First drain pipe; 5-First tee; 6-First valve; 7-Second valve; 8-Second drain pipe; 9-Bracket; 10-First connector; 11-Second connector; 12-Third drain pipe; 13-Fourth drain pipe; 14-Fifth drain pipe; 15-Second tee. Detailed Implementation
[0035] The exhaust device for the polishing machine provided in this application, such as Figures 1-5 As shown, the system includes a connecting pipe 1 with a vertical section, an exhaust pipe 3, and a U-shaped drain pipe. The upper end of the connecting pipe connects to a polishing machine, specifically to the exhaust pipe of the waxing and heating device on the polishing machine. One end of the U-shaped drain pipe connects directly below the lower end of the connecting pipe 1. One end of the exhaust pipe 3 connects at an angle to the lower end of the connecting pipe 1, creating different directions for liquid and gas discharge, facilitating gas-liquid separation. The other end of the exhaust pipe connects to an extraction device, such as an existing plant exhaust system.
[0036] The liquid-containing waste gas generated by the waxing device and heating device first passes through the connecting pipe. Since the density of water is greater than that of gas, the waste water naturally sinks down the pipe under the action of gravity and flows to the U-shaped drain pipe. The waste gas, which has a lower density, does not sink but is drawn away by the exhaust pipe, thus achieving gas-liquid separation.
[0037] Since the exhaust pipe of the polishing machine is generally located on the side, the connecting pipe is preferably a bent pipe with a bending angle of 90°, including a horizontal section and a vertical section, connecting to the side exhaust pipe via the horizontal section. Simultaneously, since the factory's exhaust system is generally located below the polishing machine, the exhaust pipe is also preferably a bent pipe with a downward-facing end, with a bending angle of 90°, thereby directing the exhaust gas to the lower exhaust system. As those skilled in the art will understand, the shapes of the connecting pipe and exhaust pipe can be adjusted accordingly based on the actual location of the polishing machine's exhaust pipe and extraction device.
[0038] The other end of the U-shaped drain pipe is bent, with the bend lower than the top of the exhaust pipe, forming a U-shaped water seal. Waste liquid is temporarily stored here. The liquid stored in the U-shaped drain pipe prevents air in the subsequent pipe from being drawn into the exhaust pipe 3. Without this U-shaped water seal, the drain pipe would be directly connected to the exhaust pipe 3, resulting in insufficient air extraction capacity of the exhaust pipe 3, which would not be able to remove all the waste gas from the patch area in time. At the same time, the bend of the U-shaped drain pipe is lower than the top of the exhaust pipe 3, ensuring that the waste liquid in the U-shaped drain pipe will be discharged directly through the drain pipe after it is full, and will not enter the exhaust pipe 3.
[0039] This application further improves the exhaust device of the polishing machine, enabling the separation of waste gas, waste liquid, and liquid-containing waste gas generated by the wax coating device and heating device in the polishing machine's mounting area after passing through the exhaust device. The separated waste gas is discharged through the exhaust pipe, while the waste liquid is discharged through the drain pipe. This ensures that the exhaust pipe is not contaminated or blocked, effectively improving product yield, reducing costs, and increasing uptime. Therefore, the exhaust device provided in this application has good practical value and technological improvement significance in semiconductor wafer processing and manufacturing processes.
[0040] Preferably, the exhaust device provided in this application further includes a bracket 9; the exhaust pipe 3 and the U-shaped drain pipe are fixed on the bracket 9 to prevent the pipes from moving. Preferably, they are fixed on the bracket 9 by a snap-fit 2.
[0041] Preferably, the connection angle between the upper end of the exhaust pipe and the lower end of the connecting pipe is 90°; the bending angle of the other end of the U-shaped drain pipe is 90°.
[0042] Preferably, the U-shaped drain pipe includes two vertical sections on both sides and a horizontal connecting section in the middle between the two vertical sections; wherein the first vertical section is connected to the lower end of the connecting pipe 1, and the upper end of the second vertical section is bent.
[0043] Furthermore, a second drain pipe 8 is connected to one end of the middle horizontal connecting part and the lower end of the second side vertical part. A second valve 7 is provided on the second drain pipe 8. When it is necessary to drain all the waste liquid in the U-shaped drain pipe and clean the pipeline, the second valve 7 can be opened to allow the liquid in the U-shaped drain pipe to drain away along the second drain pipe 8.
[0044] Preferably, the lower end of the connecting pipe 1 is connected to the upper end of the exhaust pipe 3 and one end of the U-shaped drain pipe via the first tee 5; the middle horizontal connecting part, the second side vertical part, and the second drain pipe 8 are connected via the second tee 15.
[0045] Preferably, the U-shaped drain pipe includes a third drain pipe 12, a fourth drain pipe 13, and a fifth drain pipe 14.
[0046] The third drain pipe 12 is vertically arranged; the fourth drain pipe 13 and the fifth drain pipe 14 are bent. The fourth drain pipe 13 includes a horizontal section and a vertically bent section connected to one end of the horizontal section; the fifth drain pipe 14 includes a vertical section and a horizontally bent section connected to the upper end of the vertical section; the upper end of the third drain pipe 12 is connected to the lower end of the connecting pipe 1, and the lower end is connected to the upper end of the vertically bent section of the fourth drain pipe 13; the other end of the horizontal section of the fourth drain pipe 13 is connected to the lower end of the vertical section of the fifth drain pipe 14; the vertically bent sections of the third drain pipe 12 and the fourth drain pipe 13 form a first side vertical part; the horizontal section of the fourth drain pipe 13 forms an intermediate horizontal connecting part; and the fifth drain pipe 14 forms a second side vertical part.
[0047] The other end of the horizontal bend in the fifth drain pipe 14 is also bent, making the fifth drain pipe U-shaped as well, meaning the outlet end of the fifth drain pipe also faces downwards. Since the plant drainage system is generally located below the polishing machine, the exhaust device is positioned so that the waste liquid can be introduced into the drainage system below.
[0048] The end of the fifth drain pipe 14 furthest from the fourth drain pipe 13 is connected to a vertically arranged first drain pipe 4 via a first connector 10; the third drain pipe 12 and the fourth drain pipe 13 are connected via a second connector 11. The U-shaped water seal can be easily removed for cleaning by using the first connector 10 and the second connector 11.
[0049] The fifth drain pipe and the first drain pipe can form a second U-shaped drain pipe, which better prevents air in the rear pipe from being drawn into the exhaust pipe 3.
[0050] The fifth drain pipe 14 is equipped with a first valve 6. The first valve 6 is used to close the fifth drain pipe 14. The first valve 6 needs to be closed when cleaning or replacing the first drain pipe 4.
[0051] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the present invention. Clearly, those skilled in the art can make various alterations and modifications to the present invention without departing from its spirit and scope. Thus, if such modifications and modifications fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include such modifications and modifications.
Claims
1. An exhaust device for a polishing machine, characterized in that, It includes a connecting pipe with at least a vertical section, an exhaust pipe, and a U-shaped drain pipe; the upper end of the connecting pipe is used to connect to a polishing machine, one end of the U-shaped drain pipe is connected directly below the lower end of the connecting pipe, one end of the exhaust pipe is connected to the lower end of the connecting pipe at a certain angle, and the other end of the exhaust pipe is used to connect to an air extraction device. The other end of the U-shaped drain pipe is bent, and the height of the bend is lower than the height of the upper end of the exhaust pipe, so that the U-shaped drain pipe forms a U-shaped water seal.
2. The exhaust device for a polishing machine as described in claim 1, characterized in that, It also includes a support frame; The exhaust pipe and the U-shaped drain pipe are fixed to the bracket.
3. The exhaust device for a polishing machine as described in claim 1, characterized in that, The connection angle between one end of the exhaust pipe and the lower end of the connecting pipe is 90°; The other end of the U-shaped drain pipe is bent at a 90° angle.
4. The exhaust device for a polishing machine as described in claim 1, characterized in that, The U-shaped drain pipe includes two vertical sections on both sides and a horizontal connecting section in the middle between the two vertical sections; wherein the first vertical section is connected to the lower end of the connecting pipe, and the upper end of the second vertical section is bent.
5. The exhaust device for a polishing machine as described in claim 4, characterized in that, A second drain pipe is connected to one end of the middle horizontal connecting part and the lower end of the second side vertical part for draining the water in the U-shaped water seal. A second valve is installed on the second drain pipe.
6. The exhaust device for a polishing machine as described in claim 5, characterized in that, The lower end of the connecting pipe is connected to one end of the exhaust pipe and one end of the U-shaped drain pipe via a first tee. The middle horizontal connecting part, the second side vertical part, and the second drain pipe are connected by a second tee.
7. The exhaust device for a polishing machine as described in claim 4, characterized in that, The U-shaped drain pipe includes a third drain pipe, a fourth drain pipe, and a fifth drain pipe; The third drain pipe is vertically arranged; the fourth and fifth drain pipes are bent, the fourth drain pipe includes a horizontal section and a vertically bent section connected to one end of the horizontal section; the fifth drain pipe includes a vertical section and a horizontally bent section connected to the upper end of the vertical section. The upper end of the third drain pipe is connected to the lower end of the connecting pipe, and the lower end is connected to the upper end of the vertical bend section of the fourth drain pipe; the other end of the horizontal section of the fourth drain pipe is connected to the lower end of the vertical section of the fifth drain pipe. The vertical bends of the third and fourth drain pipes form the first side vertical section; the horizontal section of the fourth drain pipe forms the middle horizontal connecting section; and the fifth drain pipe forms the second side vertical section.
8. The exhaust device for a polishing machine as described in claim 7, characterized in that, The other end of the horizontal bend of the fifth drain pipe is also bent downwards, making the fifth drain pipe U-shaped as well.
9. The exhaust device for a polishing machine as described in claim 8, characterized in that, The end of the fifth drain pipe that is furthest from the fourth drain pipe is connected to a vertically arranged first drain pipe. The fifth drain pipe is equipped with a first valve.
10. The exhaust device for a polishing machine as described in claim 9, characterized in that, The fifth drain pipe is connected to the first drain pipe via a first joint; The third drain pipe and the fourth drain pipe are connected by a second joint.