Waste gas filtering and discharging device for mechanical pump of electron microscope

Abstract

The utility model belongs to the technical field of electron microscope mechanical pump waste gas treatment devices, and particularly relates to an electron microscope mechanical pump waste gas filtering and discharging device which comprises a filtering pipe, a first base plate is fixedly connected to the upper surface of the filtering pipe, a sliding sleeve is slidably connected into the first base plate, and a second base plate is slidably connected to the outer wall of the sliding sleeve. An exhaust pipe is fixedly connected to the interior of the second base plate, a filter element is connected to the interior of the exhaust pipe in a threaded mode, a threaded shaft is connected to the interior of the sliding sleeve in a threaded mode, a rotating rod is fixedly connected to the upper end of the threaded shaft, a sliding block is slidably connected to the interior of the sliding sleeve, and a first spring is arranged in the sliding sleeve. According to the utility model, the filter element is convenient to disassemble and replace.

Description

Technical Field

[0001] This utility model belongs to the technical field of exhaust gas treatment devices for mechanical pumps of electron microscopes, specifically an exhaust gas filtration and emission device for mechanical pumps of electron microscopes. Background Technology

[0002] The electron microscope mechanical pump exhaust gas filtration and emission device is a specialized unit designed to treat the exhaust gases generated during electron microscope operation. This device primarily removes harmful gases emitted by the mechanical pump through a filtration system. It is widely used in electron microscope laboratories, materials science, semiconductor manufacturing, and nanotechnology, effectively treating exhaust gases, ensuring the health of staff and laboratory safety, and meeting environmental protection requirements.

[0003] The filter mechanism inside the existing electron microscope mechanical pump exhaust gas filtration and emission device is usually fixed, which is not convenient to disassemble and replace. Over time, a large amount of filtered impurities will remain inside the filter element, thus affecting the filtration effect. Summary of the Invention

[0004] The purpose of this invention is to provide an exhaust gas filtration and emission device for an electron microscope mechanical pump, which facilitates the disassembly and replacement of the filter element.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows: An exhaust gas filtration and emission device for an electron microscope mechanical pump is provided, comprising a filter tube, a first pad fixedly connected to the upper surface of the filter tube, a sliding sleeve slidably connected inside the first pad, a second pad fixedly connected to the outer wall of the sliding sleeve, an exhaust pipe fixedly connected inside the second pad, a filter element threadedly connected inside the exhaust pipe, a threaded shaft threadedly connected inside the sliding sleeve, a rotating rod fixedly connected to the upper end of the threaded shaft, a slider slidably connected inside the sliding sleeve, and a spring provided inside the sliding sleeve.

[0006] Optionally, one end of the spring is fixedly connected to the inside of the threaded shaft, and the other end of the spring is fixedly connected to the inside of the slider. A ball is movably connected inside the sliding sleeve, and the ball is slidably connected inside the pad.

[0007] Optionally, a sleeve is slidably connected to the outer wall of the filter tube, a sliding shaft is slidably connected to the inside of the sleeve, a clamping plate is fixedly connected to the outer wall of the sliding shaft, the clamping plate is slidably connected to the inside of the filter tube, a sliding shaft is slidably connected to the inside of the sleeve, a clamping plate is fixedly connected to the outer wall of the sliding shaft, and the clamping plate is slidably connected to the inside of the filter tube.

[0008] Optionally, a second spring is provided on the outer wall of the first card plate, one end of the second spring is fixedly connected to the inside of the first card plate, and the other end of the second spring is fixedly connected to the inside of the second card plate.

[0009] Optionally, a connecting pipe is fixedly connected to the lower surface of the housing, an outer pipe is fixedly connected to the lower surface of the connecting pipe, a pump is fixedly connected to one side of the outer wall of the outer pipe, a base is fixedly connected to the lower surface of the outer pipe, and the pump is fixedly connected to the upper surface of the base.

[0010] Optionally, the outer tube is internally threaded with a bolt, the outer wall of the bolt is threaded with a fixing plate, the fixing plate is internally fixedly connected with an air extraction pipe, and the upper end of the exhaust pipe is internally fixedly connected with an air outlet pipe.

[0011] Compared with the prior art, the present invention has the following beneficial effects:

[0012] 1. When the filter element needs to be disassembled and replaced, rotate the rotating rod to drive the threaded shaft to rotate and rise. During the process of the threaded shaft rising, the first spring is stretched, causing the slider to disengage from the bottom of the sliding sleeve. The slider also slides upward, so that the two balls slide from the inside of the first pad into the inside of the sliding sleeve. At this time, the second pad can be separated from the first pad and disassembled. Then rotate the filter element inside the exhaust pipe to disassemble and replace the filter element, and clean the inside of the exhaust pipe.

[0013] 2. When it is necessary to clean the inside of the filter tube, press slide shaft one and slide shaft two at the same time. Slide shaft one and slide shaft two will simultaneously drive clamping plate one and clamping plate two to slide towards the middle of the filter tube and compress spring two. At this time, clamping plate one and clamping plate two will slide out from the inside of the filter tube, so that the filter tube can be slid upward and disassembled, and the inside of the filter tube can be cleaned. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0016] Figure 2 This is a schematic diagram of the structure of the filter tube of this utility model;

[0017] Figure 3 for Figure 2 Enlarged structural diagram at point A;

[0018] Figure 4 This is a schematic diagram of the structure of the casing of this utility model.

[0019] In the diagram: 1. Filter tube; 2. Pad 1; 3. Pad 2; 4. Exhaust pipe; 5. Sliding sleeve; 6. Threaded shaft; 7. Rotating rod; 8. Slider; 9. Spring 1; 10. Ball bearing; 11. Filter element; 12. Housing; 13. Sliding shaft 1; 14. Clamping plate 1; 15. Sliding shaft 2; 16. Clamping plate 2; 17. Spring 2; 18. Connecting pipe; 19. Outer pipe; 20. Pump; 21. Base; 22. Fixing plate; 23. Bolt; 24. Suction pipe; 25. Exhaust pipe. Detailed Implementation

[0020] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0021] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0022] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0023] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0024] The present invention will now describe an electron microscope mechanical pump exhaust gas filtration and emission device provided in an embodiment of the present invention. An exhaust gas filtration and emission device for an electron microscope mechanical pump includes a filter tube 1. A pad 2 is fixedly connected to the upper surface of the filter tube 1. A sliding sleeve 5 is slidably connected inside the pad 2. A second pad 3 is fixedly connected to the outer wall of the sliding sleeve 5. The sliding sleeve 5 passes through the second pad 3 and the first pad 2. An exhaust pipe 4 is fixedly connected inside the second pad 3. A filter element 11 is threadedly connected inside the exhaust pipe 4. The threaded connection facilitates the removal of the filter element 11 from the exhaust pipe 4. A threaded shaft 6 is threadedly connected inside the sliding sleeve 5. A rotating rod 7 is fixedly connected to the upper end of the threaded shaft 6. The rotating rod 7 can drive the threaded shaft 6 to rotate. A slider 8 is slidably connected inside the sliding sleeve 5. A spring 9 is installed inside the sliding sleeve 5. One end of the spring 9 is fixedly connected to the inside of the threaded shaft 6, and the other end of the spring 9 is fixedly connected to the inside of the slider 8. The spring 9 connects the threaded shaft 6 and the slider 8. A ball bearing 10 is movably connected inside the sliding sleeve 5. The ball bearing 10 is slidably connected inside the pad 2. The ball bearing 10 facilitates the locking of the sliding sleeve 5 inside the pad 2.

[0025] The present invention provides an exhaust gas filtration and emission device for an electron microscope mechanical pump, which, compared with the prior art, facilitates the disassembly and replacement of the filter element 11.

[0026] Please refer to another embodiment of this utility model as well. Figures 2 to 4 A housing 12 is slidably connected to the outer wall of the filter tube 1. A sliding shaft 13 is slidably connected to the inside of the housing 12. A clamping plate 14 is fixedly connected to the outer wall of the sliding shaft 13. The clamping plate 14 is slidably connected to the inside of the filter tube 1 and limits and fixes the inside of the filter tube 1. A sliding shaft 2 15 is slidably connected to the inside of the housing 12. A clamping plate 2 16 is fixedly connected to the outer wall of the sliding shaft 2 15 and slidably connected to the inside of the filter tube 1. The clamping plate 2 16 limits and fixes the inside of the filter tube 1. A spring 2 17 is provided on the outer wall of the clamping plate 14. One end of the spring 2 17 is fixedly connected to the inside of the clamping plate 14, and the other end of the spring 2 17 is fixedly connected to the inside of the clamping plate 2 16. By connecting the clamping plate 14 and the clamping plate 2 16 with the spring 2 17, automatic reset can be achieved.

[0027] In another embodiment of this utility model, please refer to Figure 1 and Figure 2A connecting pipe 18 is fixedly connected to the lower surface of the casing 12, and an outer pipe 19 is fixedly connected to the lower surface of the connecting pipe 18. A pump 20 is fixedly connected to one side of the outer wall of the outer pipe 19, and a base 21 is fixedly connected to the lower surface of the outer pipe 19. The pump 20 is fixedly connected to the upper surface of the base 21. A bolt 23 is threaded inside the outer pipe 19, and a fixing plate 22 is threaded on the outer wall of the bolt 23. An air extraction pipe 24 is fixedly connected inside the fixing plate 22. The fixing plate 22 is fixed to the outer wall of the outer pipe 19 by the bolt 23. An air outlet pipe 25 is fixedly connected to the upper end of the exhaust pipe 4. The air outlet pipe 25 is used to discharge the filtered gas.

[0028] Working principle: In use, the fixing plate 22 and the suction pipe 24 are fixed to the outer wall of the outer pipe 19 with multiple bolts 23. The pump 20 is started, and the generated exhaust gas is sucked into the interior of the outer pipe 19 through the suction pipe 24. It is then discharged upward through the connecting pipe 18 for filtration. When the gas passes through the interior of the filter pipe 1, it is filtered by the filter element 11. The filtered gas is discharged towards the exhaust pipe 4 and discharged through the outlet pipe 25. When the filter element 11 needs to be disassembled and replaced, the two sets of rotating rods 7 are rotated, which drives the threaded shaft 6 to rotate. During the rotation of the threaded shaft 6, it moves upward and stretches the spring 9, while simultaneously driving the slider 8 to slide upward. During the upward sliding of the slider 8, the ball 10 inside the sliding sleeve 5 slides from the inside of the pad 2 into the inside of the sliding sleeve 5. When the ball 10 slides out from the inside of the pad 2, The sliding sleeve 5 is no longer limited and stuck inside the pad 2. At this time, the pad 3 moves upward. During the upward movement of the pad 3, the sliding sleeve 5 can be disengaged from the inside of the pad 2. As the pad 3 moves upward, it drives the exhaust pipe 4 and the filter element 11 to slide upward. Rotate the filter element 11 to disassemble it from the inside of the exhaust pipe 4. The filter element 11 can be replaced and the inside of the exhaust pipe 4 can be cleaned. At the same time, press the sliding shaft 13 and the sliding shaft 2 15 into the inside of the housing 12. The sliding shaft 13 and the sliding shaft 2 15 slide into the inside of the housing 12. At the same time, they drive the clamping plate 14 and the clamping plate 2 16 to slide closer to the center and compress the spring 2 17. This causes the clamping plate 14 and the clamping plate 2 16 to slide out from the inside of the filter tube 1. Then the filter tube 1 can be slid upward and taken out for cleaning.

[0029] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An exhaust gas filtration and emission device for an electron microscope mechanical pump, comprising a filter tube (1), characterized in that: A pad (2) is fixedly connected to the upper surface of the filter tube (1). A sliding sleeve (5) is slidably connected inside the pad (2). A pad (3) is fixedly connected to the outer wall of the sliding sleeve (5). An exhaust pipe (4) is fixedly connected inside the pad (3). A filter element (11) is threadedly connected inside the exhaust pipe (4). A threaded shaft (6) is threadedly connected inside the sliding sleeve (5). A rotating rod (7) is fixedly connected to the upper end of the threaded shaft (6). A slider (8) is slidably connected inside the sliding sleeve (5). A spring (9) is installed inside the sliding sleeve (5).

2. The electron microscope mechanical pump exhaust gas filtration and emission device as described in claim 1, characterized in that: One end of the spring (9) is fixedly connected to the inside of the threaded shaft (6), and the other end of the spring (9) is fixedly connected to the inside of the slider (8). A ball (10) is movably connected inside the sleeve (5), and the ball (10) is slidably connected inside the pad (2).

3. The electron microscope mechanical pump exhaust gas filtration and emission device as described in claim 1, characterized in that: The outer wall of the filter tube (1) is slidably connected to a sleeve (12), the inside of the sleeve (12) is slidably connected to a sliding shaft (13), the outer wall of the sliding shaft (13) is fixedly connected to a clamping plate (14), the clamping plate (14) is slidably connected to the inside of the filter tube (1), the inside of the sleeve (12) is slidably connected to a sliding shaft (15), the outer wall of the sliding shaft (15) is fixedly connected to a clamping plate (16), the clamping plate (16) is slidably connected to the inside of the filter tube (1).

4. The electron microscope mechanical pump exhaust gas filtration and emission device as described in claim 3, characterized in that: The outer wall of the first card plate (14) is provided with a second spring (17). One end of the second spring (17) is fixedly connected to the inside of the first card plate (14), and the other end of the second spring (17) is fixedly connected to the inside of the second card plate (16).

5. The electron microscope mechanical pump exhaust gas filtration and emission device as described in claim 3, characterized in that: A connecting pipe (18) is fixedly connected to the lower surface of the casing (12), an outer pipe (19) is fixedly connected to the lower surface of the connecting pipe (18), a pump (20) is fixedly connected to one side of the outer wall of the outer pipe (19), a base (21) is fixedly connected to the lower surface of the outer pipe (19), and the pump (20) is fixedly connected to the upper surface of the base (21).

6. The electron microscope mechanical pump exhaust gas filtration and emission device as described in claim 5, characterized in that: The outer tube (19) is internally threaded with a bolt (23), the outer wall of the bolt (23) is threaded with a fixing plate (22), the inside of the fixing plate (22) is fixedly connected with an air extraction pipe (24), and the upper end of the exhaust pipe (4) is fixedly connected with an air outlet pipe (25).

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