Tail gas recovery device of xenon purification rectifying tower
By designing an integrated xenon purification distillation tower tail gas recovery device, the problem of ineffective tail gas recovery and utilization was solved, achieving reduced losses and tail gas reuse during the xenon purification process, and reducing liquid nitrogen loss.
Patent Information
- Application Number
- CN202423100166.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-16
- Publication Date
- 2025-10-31
- Estimated Expiration
- 2034-12-16
AI Technical Summary
In the existing technology, the recovery device for the tail gas of the xenon purification distillation column has not been effectively solved, resulting in large losses in the xenon purification process and the tail gas cannot be effectively reused.
A xenon purification and distillation column tail gas recovery device was designed, including a process pipeline purification unit, a liquid nitrogen cooling unit, an ambient temperature recovery unit, and a cryogenic recovery unit. The device achieves automated operation through an interlocking control unit, reducing human intervention and forming an integrated unit to achieve uninterrupted tail gas recovery.
It effectively reduces losses during the xenon purification process, enables the reuse of exhaust gas, reduces emissions, and saves liquid nitrogen through automated operation.
Smart Images
Figure CN223499926U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of distillation column tail gas recovery technology, and in particular to a xenon purification distillation column tail gas recovery device. Background Technology
[0002] Xenon (Xe), atomic number 54, atomic weight 131.2, boiling point -108.10℃, is a rare gas that is colorless, odorless, and tasteless, and chemically extremely inert. Xenon is used in industrial electronic chip manufacturing for plasma etching technology, and in ion engines and ion plasma propulsion systems for satellite launches. In the medical field, it is used for xenon laser therapy, tissue cutting and coagulation, and medical imaging technology. Xenon is present in extremely small amounts in air, with a volume fraction of approximately 0.0857 × 10⁻⁶. -6 Xenon, often referred to as "gold in the gaseous world," is typically purified using distillation, a highly complex process. The current process involves using air separation oxygen as raw material to produce crude krypton / xenon. This crude krypton / xenon undergoes further pre-separation via distillation to obtain higher-purity krypton and xenon. The separated xenon is then further purified through distillation to obtain a higher purity of 99.9995%. In this complex process of extracting high-purity xenon, the recovery of xenon exhaust gases emitted during distillation is particularly important and valuable.
[0003] Therefore, how to provide a xenon purification and distillation column tail gas recovery device is a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content
[0004] To solve the above-mentioned technical problems, this utility model provides a xenon purification distillation tower tail gas recovery device, which can reduce the loss in the xenon purification process and enable the recovered tail gas to be used as raw material for xenon purification again, thereby realizing the recovery and reuse of emitted xenon and reducing emission losses.
[0005] The technical solution provided by this utility model is as follows:
[0006] A xenon purification and distillation column tail gas recovery device includes a process pipeline purification unit, a liquid nitrogen cooling unit, an ambient temperature recovery unit, a cryogenic recovery unit, and an interlocking control unit for detecting and controlling the above four units. The process pipeline purification unit is connected to the tail gas emission outlet of the xenon purification and distillation column via a main pipeline. The ambient temperature recovery unit and the cryogenic recovery unit are respectively connected to the main pipeline via branch pipelines. The liquid nitrogen cooling unit is connected to the cryogenic recovery unit via a cooling pipeline. Solenoid valves are respectively installed on the main pipeline, branch pipelines, and cooling pipeline. A pressure gauge is installed on the main pipeline, and a thermometer is connected to the cryogenic recovery unit. The pressure gauge and the thermometer are effectively electrically connected to the interlocking control unit.
[0007] Preferably, the process pipeline purification unit includes three parallel low-pressure helium replacement purging lines, an exhaust line, and a vacuum line, which are connected at the ends of the pipelines.
[0008] Preferably, a solenoid valve ECV-HE-01 is installed on the pipeline connecting the low-pressure helium replacement purging line and the main pipeline, a solenoid valve ECV--VNT-01 is installed on the pipeline connecting the discharge line and the main pipeline, and a solenoid valve ECV--VAC-01 is installed on the pipeline connecting the vacuum line and the main pipeline.
[0009] Preferably, a pressure gauge is also provided on the pipeline connecting the vacuum line and the main pipeline.
[0010] Preferably, the main pipeline is equipped with an MFC-Xe exhaust valve and a solenoid valve ECV-XE-02, the branch pipeline where the ambient temperature recovery unit is located is equipped with a solenoid valve ECV-XE-01, the branch pipeline where the cryogenic recovery unit is located is equipped with a solenoid valve ECV-XE-03, and the cooling pipeline is equipped with a solenoid valve SV-LN2-01.
[0011] Preferably, the ambient temperature recovery unit includes several ambient temperature recovery bottles arranged in parallel.
[0012] Preferably, the cryogenic recovery unit includes a cryogenic recovery bottle and a cryogenic tank, the cryogenic recovery bottle is placed inside the cryogenic tank, and the liquid nitrogen cooling unit is connected to the cryogenic tank.
[0013] Preferably, the cryogenic chamber has a sandwich structure, and the sandwich layer of the cryogenic chamber is a vacuum.
[0014] This invention has the following advantages over the prior art:
[0015] The xenon purification distillation column tail gas recovery device of this application, by setting up a process pipeline purification unit, effectively purifies the pipeline environment in the early stage of recovery preparation, eliminates tail gas pollution, and enables the recovered tail gas to be directly used at the upstream feed port. The xenon purification distillation column tail gas recovery device of this application, with its process pipeline purification unit, liquid nitrogen cooling unit, ambient temperature recovery unit, cryogenic recovery unit, and interlocking control unit for detecting and controlling the above four units, can form a small integrated unit with automatic activation logic interlocking function and one-button operation, reducing human intervention. The intermittent cryogenic recovery not only greatly saves liquid nitrogen consumption, but also achieves uninterrupted and sustainable tail gas recovery. Attached Figure Description
[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0017] Figure 1 This is a schematic diagram of the xenon purification and distillation tower tail gas recovery device in an embodiment of this utility model.
[0018] Figure label:
[0019] 1. Process pipeline purification unit; 11. Low-pressure helium replacement and purging line; 12. Discharge line; 13. Vacuum pumping line; 2. Liquid nitrogen cooling unit; 3. Ambient temperature recovery unit; 4. Cryogenic recovery unit; 5. Xenon purification and distillation column. Detailed Implementation
[0020] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0021] like Figure 1 As shown in the figure, this utility model embodiment provides a xenon purification distillation column tail gas recovery device, including a process pipeline purification unit 1, a liquid nitrogen cooling unit 2, an ambient temperature recovery unit 3, a cryogenic recovery unit 4, and an interlocking control unit (not shown in the figure) for detecting and controlling the above four units. The process pipeline purification unit 1 is connected to the tail gas emission outlet of the xenon purification distillation column 5 through a main pipeline. The ambient temperature recovery unit 3 and the cryogenic recovery unit 4 are respectively connected to the main pipeline through branch pipelines. The liquid nitrogen cooling unit 2 is connected to the cryogenic recovery unit 4 through a cooling pipeline. A pressure gauge is installed on the main pipeline, and a thermometer is connected to the cryogenic recovery unit 4. The pressure gauge and the thermometer are effectively electrically connected to the interlocking control unit.
[0022] In this embodiment, the interlocking control unit includes a power module, a CPU module, a memory, an I / O input / output module, a communication module, and functional modules. The interlocking control unit controls the opening and closing of valves through preset electrical signals, and the specific control process is the same as existing electrical control principles. When the preset conditions are met, the interlocking control unit sends a signal to open or close the valves in a preset sequence. For example, in a cryogenic recovery process, when the pressure gauge (PT-100) reaches a set value, an electrical signal is triggered and transmitted to the control valve for automatic opening and closing.
[0023] In this embodiment, the process pipeline purification unit 1 includes three parallel low-pressure helium replacement purging lines 11, 12, and 13 (including an Edwards vacuum pump), which are connected at the ends of the pipelines.
[0024] In this embodiment, a solenoid valve ECV-HE-01 is installed on the pipeline connecting the low-pressure helium replacement purging line 11 to the main pipeline, a solenoid valve ECV--VNT-01 is installed on the pipeline connecting the discharge line 12 to the main pipeline, a solenoid valve ECV--VAC-01 is installed on the pipeline connecting the vacuum line 13 to the main pipeline, and a pressure gauge is also installed on the pipeline connecting the vacuum line 13 to the main pipeline.
[0025] In this embodiment, solenoid valves are installed on the main pipeline, branch pipelines, and cooling pipelines respectively. Specifically, the main pipeline is equipped with an MFC-Xe exhaust valve and a solenoid valve ECV-XE-02, the branch pipeline where the ambient temperature recovery unit 3 is located is equipped with a solenoid valve ECV-XE-01, the branch pipeline where the cryogenic recovery unit 4 is located is equipped with a solenoid valve ECV-XE-03, and the cooling pipeline is equipped with a solenoid valve SV-LN2-01.
[0026] In this embodiment, the ambient temperature recovery unit 3 includes several ambient temperature recovery bottles arranged in parallel.
[0027] In this embodiment, the cryogenic recovery unit 4 includes a cryogenic recovery bottle and a cryogenic tank. The cryogenic recovery bottle is placed inside the cryogenic tank, and the liquid nitrogen cooling unit is connected to the cryogenic tank. The cryogenic tank has a sandwich structure, and the sandwich space of the cryogenic tank is a vacuum.
[0028] In this embodiment, normal-temperature recovery bottles and cryogenic recovery bottles are usually made of 40L aluminum alloy gas cylinders. After washing the bottles, heating the gas cylinders to evacuate the air and performing analysis procedures, the vacuum degree of the recovery bottles is qualified and the analysis of impurity components such as water, nitrogen, oxygen, carbon dioxide, and oil is qualified, ensuring the cleanliness of the recovery gas cylinders. When connecting the normal-temperature recovery bottle and the cryogenic recovery bottle to the process pipeline purification unit, open the low-pressure helium valve ECV-HE-01 for positive and low-pressure purging to prevent impurities such as air and moisture from entering the device. After the two recovery bottles are connected, first open the discharge valve ECV-VNT-01 to depressurize the system, and then open the Edwards vacuum pump valve ECV-VAC-01 to evacuate the entire recovery device until the vacuum is less than 30 mTorr, which is considered qualified.
[0029] In this embodiment, the liquid nitrogen cooling unit 2 is used as the liquid nitrogen cold source for the xenon purification distillation column and is controlled by the solenoid valve SV-LN2-01. When the system is running, interlock control is put into use, and the opening and closing of SV-LN2-01 are controlled by the PT-100 pressure gauge and the TE-100 thermometer. The interlock switch design reduces human operation intervention. The cryogenic recovery bottle is placed in a cryogenic barrel, and the cryogenic barrel adopts a double-layer vacuum design. When liquid nitrogen is introduced, the temperature inside the cryogenic barrel can quickly drop and be conducted to the aluminum alloy cryogenic recovery bottle to achieve the purpose of cryogenic recovery.
[0030] In this embodiment, before the xenon purification distillation column 5 runs, four normal-temperature recovery bottles and cryogenic recovery bottles are connected to the distillation column tail gas recovery device of this embodiment as required, and the distillation column tail gas recovery device of this embodiment is put into use. First, open the normal-temperature recovery bottle valve and ECV-XE-01 for tail gas recovery, and monitor the recovery pressure of the PT-100 pressure gauge in real time. When the normal-temperature recovery pressure PT-100 reaches the specified pressure (for example: 15 PSI), the interlock logic control will open SV-LN2-01, and liquid nitrogen will be introduced into the cryogenic barrel for precooling. When the TE-100 thermometer of the cryogenic recovery bottle drops to -160 °C, the interlock logic control will open ECV-XE-02 and ECV-XE-03. After the xenon is extremely cooled in the cryogenic bottle, the xenon will quickly liquefy and generate suction to suck the xenon in the normal-temperature recovery bottle and the recovery pipeline (main pipeline and branch pipelines) into the cryogenic recovery bottle. During the absorption and liquefaction process, the PT-100 pressure will also drop accordingly. When the PT-100 pressure drops to a negative pressure (for example: -10 PSI), the interlock logic control will close ECV-XE-02, ECV-XE-03, and SV-LN2-01, stop the cryogenic bottle recovery and liquid nitrogen cooling supply, and switch to the normal-temperature bottle recovery, and so on. If the cryogenic recovery bottle has been filled with tail gas, after confirming that ECV-XE-02 is closed, the cryogenic recovery bottle can be replaced online, and the process pipeline purification unit 1 is put into use, thereby achieving uninterrupted and sustainable tail gas recovery.
[0031] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A xenon purification and distillation column tail gas recovery device, characterized in that, The system includes a process pipeline purification unit, a liquid nitrogen cooling unit, an ambient temperature recovery unit, a cryogenic recovery unit, and an interlocking control unit for detecting and controlling the above four units. The process pipeline purification unit is connected to the tail gas emission outlet of the xenon purification distillation tower via a main pipeline. The ambient temperature recovery unit and the cryogenic recovery unit are connected to the main pipeline via branch pipelines. The liquid nitrogen cooling unit is connected to the cryogenic recovery unit via a cooling pipeline. Solenoid valves are installed on the main pipeline, branch pipelines, and cooling pipeline. A pressure gauge is installed on the main pipeline, and a thermometer is connected to the cryogenic recovery unit. The pressure gauge and thermometer are effectively electrically connected to the interlocking control unit.
2. The xenon purification and distillation column tail gas recovery device according to claim 1, characterized in that, The process pipeline purification unit includes three parallel low-pressure helium replacement purging lines, an exhaust line, and a vacuum line, which are connected at the ends of the pipelines.
3. The xenon purification and distillation column tail gas recovery device according to claim 2, characterized in that, A solenoid valve ECV-HE-01 is installed on the pipeline connecting the low-pressure helium replacement purging line and the main pipeline; a solenoid valve ECV--VNT-01 is installed on the pipeline connecting the discharge line and the main pipeline; and a solenoid valve ECV--VAC-01 is installed on the pipeline connecting the vacuum line and the main pipeline.
4. The xenon purification and distillation column tail gas recovery device according to claim 3, characterized in that, A pressure gauge is also installed on the pipeline that connects the vacuum line to the main pipeline.
5. The xenon purification and distillation column tail gas recovery device according to any one of claims 1-4, characterized in that, The main pipeline is equipped with an MFC-Xe exhaust valve and a solenoid valve ECV-XE-02. The branch pipeline where the ambient temperature recovery unit is located is equipped with a solenoid valve ECV-XE-01. The branch pipeline where the cryogenic recovery unit is located is equipped with a solenoid valve ECV-XE-03. The cooling pipeline is equipped with a solenoid valve SV-LN2-01.
6. The xenon purification and distillation column tail gas recovery device according to any one of claims 1-4, characterized in that, The ambient temperature recovery unit includes several ambient temperature recovery bottles arranged in parallel.
7. The xenon purification and distillation column tail gas recovery device according to any one of claims 1-4, characterized in that, The cryogenic recovery unit includes a cryogenic recovery bottle and a cryogenic tank. The cryogenic recovery bottle is placed inside the cryogenic tank, and the liquid nitrogen cooling unit is connected to the cryogenic tank.
8. The xenon purification and distillation column tail gas recovery device according to claim 7, characterized in that, The cryogenic barrel has a sandwich structure, and the sandwich is a vacuum.