Vacuum cavity with multi-cavity structure

Abstract

The utility model discloses a vacuum cavity with a multi-cavity structure, which belongs to the technical field of vacuum cavities and comprises a vacuum box body, a sealing top plate and a plurality of connecting flanges, two vacuum inner cavity bodies are symmetrically arranged in the vacuum box body, connecting pipes are arranged on the vacuum inner cavity bodies, fixing pipes are arranged in the connecting pipes, and the fixing pipes are connected with the sealing top plate. A connecting cap is arranged at one end of the fixing pipe, two guide columns are symmetrically arranged at the end, away from the fixing pipe, of the connecting cap, a sealing plate is arranged between the guide columns, a sealing block is arranged in the middle of the side, facing the fixing pipe, of the sealing plate, and a fixing plate is arranged in the end, away from the connecting cap, of the fixing pipe. A first spring is arranged between the fixing plate and the sealing plate, and sealing rings are arranged on the inner wall of the connecting cap and the outer edge of the connecting pipe. According to the utility model, the sealing plate, the sealing block and other parts are matched for use, so that the stability of the sealing block in the moving process is ensured, and the phenomenon of deviation is avoided.

Description

Technical Field

[0001] This utility model relates to the field of vacuum cavity technology, specifically a vacuum cavity with a multi-cavity structure. Background Technology

[0002] A vacuum chamber is a structure developed to reduce the number of vacuum chambers in semiconductor applications while maintaining almost the same wafer capacity. A vacuum chamber is a container that maintains an internal vacuum state; its fabrication requires consideration of volume, material, and shape. Stainless steel is currently the primary structural material for ultra-high vacuum systems. It possesses excellent corrosion resistance, low outgassing rate, non-magnetic properties, good weldability, low electrical and thermal conductivity, and the ability to operate at temperatures ranging from -270°C to 900°C, making it widely used in high and ultra-high vacuum systems.

[0003] A search revealed that patent CN 214960487 U discloses a multi-cavity vacuum chamber, including a housing with a cover plate at the top and a handle at the top. The outer walls of the housing are provided with connecting flanges on the front, back, left, and right sides, and metal gaskets are installed on the outer walls of the connecting flanges. The housing contains a vacuum inner cavity body, and a vent pipe is installed on one side of the outer wall of the vacuum inner cavity body. This design has the beneficial effects of increasing the airtightness of the vacuum inner cavity body and facilitating the inspection and maintenance of the vacuum inner cavity body.

[0004] However, existing multi-chamber vacuum chambers have the following problems during use: because the sealing ring is entirely embedded in the vent pipe, and the sealing ring lacks a guiding and limiting structure, relying solely on the tension of the spring, it is very easy for the sealing ring to tilt and enter the vent pipe during movement, thus affecting the vacuum sealing effect. Therefore, it is necessary to design corresponding technical solutions to solve the existing technical problems. Utility Model Content

[0005] The purpose of this utility model is to provide a multi-cavity vacuum chamber, which solves the technical problem that the sealing ring is embedded in the vent pipe as a whole, and the sealing ring lacks a guide and limiting structure. Relying only on the tension of the spring, the sealing ring is very likely to tilt and enter the vent pipe during movement, which affects the vacuum sealing effect and meets the actual use requirements.

[0006] To achieve the above objectives, this utility model provides the following technical solution: It includes a vacuum chamber, a sealing top plate, and several connecting flanges. Two vacuum inner cavity bodies are symmetrically arranged inside the vacuum chamber. A connecting pipe is provided on each vacuum inner cavity body. A fixing pipe is installed inside each connecting pipe. A connecting cap is provided at one end of the fixing pipe. Two guide posts are symmetrically arranged on the end of the connecting cap away from the fixing pipe. A sealing plate is provided between the guide posts. A sealing block is provided in the middle of the side of the sealing plate facing the fixing pipe. A fixing plate is provided inside the end of the fixing pipe away from the connecting cap. A spring is provided between the fixing plate and the sealing plate. Sealing rings are provided on the inner wall of the connecting cap and the outer edge of the connecting pipe.

[0007] In a preferred embodiment of this utility model, a handle is installed in the middle of the top of the sealing top plate, a rotating column is provided between the middle of the handle and the sealing top plate, four sets of support plates are evenly arranged on the bottom of the sealing top plate, a movable column is provided between each set of support plates, a limit ring is provided on the movable column, a spring is provided on the movable column, and a guide plate is provided at one bottom end of the rotating column.

[0008] In a preferred embodiment of this utility model, the rotating column has a "T" shaped cross-section, and the rotating column is rotatably connected to the handle and the sealing top plate. The outer edge of the guide plate has four arc-shaped protrusions. One end of the movable column is partially inserted into the inner wall of the vacuum chamber, and the end of the movable column that contacts the guide plate has an arc-shaped protrusion.

[0009] In a preferred embodiment of this utility model, the number of support plates in a single set is two, the movable column is movably connected to the support plate, the limiting ring and the second spring are both located between the support plates in a single set, one end of the second spring is in contact with the limiting ring, and the other end is in contact with the support plate.

[0010] In a preferred embodiment of this utility model, the sealing top plate is located at the top of the vacuum chamber, the top of the vacuum chamber is provided with a sealing groove, the bottom of the sealing top plate is provided with a sealing protrusion, and the connecting flanges are distributed on both sides and the middle of one side of the vacuum chamber.

[0011] In a preferred embodiment of this utility model, one end of the connecting tube protrudes from the vacuum cavity body; the other end is flush with and communicates with the vacuum cavity body; the inner wall of the connecting cap is threadedly connected to the connecting tube; the cross-section of the guide post is T-shaped; the sealing plate is provided with a through hole for use with the guide post; and the sealing plate and the guide post are movably connected.

[0012] In a preferred embodiment of this utility model, the size of the sealing plate is larger than the inner wall size of the fixing plate, one end of the sealing block is in the shape of a frustum, the middle of the sealing block is provided with a mounting hole for use with the spring, and the contact side of the sealing rings at different positions is inclined.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0014] 1. By using components such as the sealing plate and guide column in conjunction, the stability of the sealing plate's movement can be effectively ensured. When the vacuum chamber body is vacuumed, the sealing plate moves, and in conjunction with the guide column, the overall movement of the sealing plate is synchronized, avoiding any deviation. At the same time, the sealing plate is located outside the fixed tube. When the sealing plate comes into contact with the connecting cap, it can effectively cover the position where the connecting cap and the fixed tube connect, ensuring the overall sealing effect. In addition, the threaded connection between the connecting cap and the connecting tube allows for easy disassembly of the fixed tube, facilitating subsequent maintenance, thus solving the problem affecting the vacuum sealing effect.

[0015] 2. The use of components such as the movable column and guide plate ensures the stability of the connection between the sealing top plate and the vacuum chamber. After the sealing top plate is placed at the top of the vacuum chamber, rotating the rotating column further drives the bottom guide plate to rotate. When the protrusion on the guide plate contacts the end of the movable column, it can push the movable column to move, thereby allowing the end to be inserted into the inner wall of the vacuum chamber. This ensures the connection between the sealing top plate and the vacuum chamber, avoids misalignment that could lead to sealing failure, and thus solves the problem affecting the vacuum sealing effect. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall design of this utility model;

[0017] Figure 2 This is a structural diagram of the connecting pipe described in this utility model;

[0018] Figure 3 This is a structural diagram of the fixed tube described in this utility model;

[0019] Figure 4 This is a structural diagram of the sealing top plate described in this utility model.

[0020] In the diagram: Vacuum chamber-1, connecting flange-2, sealing top plate-3, vacuum inner cavity body-4, rotating column-5, handle-6, connecting pipe-7, fixing pipe-8, sealing ring-9, sealing plate-10, sealing block-11, guide column-12, connecting cap-13, spring one-14, fixing plate-15, guide plate-16, limit ring-17, movable column-18, support plate-19, spring two-20. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figure 1-4 This utility model provides a technical solution: a multi-cavity vacuum chamber, including: a vacuum box 1, a sealing top plate 3 and several connecting flanges 2. Two vacuum inner cavity bodies 4 are symmetrically arranged inside the vacuum box 1. A connecting pipe 7 is provided on the vacuum inner cavity body 4. A fixing pipe 8 is provided inside the connecting pipe 7. A connecting cap 13 is provided on one end of the fixing pipe 8. Two guide posts 12 are symmetrically arranged on the end of the connecting cap 13 away from the fixing pipe 8. A sealing plate 10 is provided between the guide posts 12. A sealing block 11 is provided in the middle of the side of the sealing plate 10 facing the fixing pipe 8. A fixing plate 15 is provided in the end of the fixing pipe 8 away from the connecting cap 13. A spring 14 is provided between the fixing plate 15 and the sealing plate 10. A sealing ring 9 is provided on the inner wall of the connecting cap 13 and the outer edge of the connecting pipe 7.

[0023] Further improvements include a handle 6 installed in the middle of the top of the sealing top plate 3, a rotating column 5 between the middle of the handle 6 and the sealing top plate 3, four sets of support plates 19 evenly arranged on the bottom of the sealing top plate 3, a movable column 18 between each set of support plates 19, a limit ring 17 on the movable column 18, a spring 20 on the movable column 18, and a guide plate 16 on one bottom end of the rotating column 5.

[0024] Further improvements include a T-shaped cross-section for the rotating column 5, with rotatable connections between the rotating column 5, handle 6, and sealing top plate 3. The guide plate 16 has four arc-shaped protrusions on its outer edge. Specifically, for example… Figure 4The structure of the guide plate 16 shown is such that when its arc-shaped protrusions contact the movable column 18, it can push the movable column 18 to move. When the position between the arc-shaped protrusions contacts the movable column 18, the guide plate 16 loses its pushing force on the movable column 18. With the help of the spring 20, the movable column 18 can be moved back, that is, separated from the vacuum chamber 1, so that the sealing top plate 3 can be removed from the vacuum chamber 1. One end of the movable column 18 is inserted into the inner wall of the vacuum chamber 1. Specifically, the inner wall of the vacuum chamber 1 has slots for use with the movable column 18. The number and position of the slots correspond one-to-one with the movable column 18. The end of the movable column 18 that contacts the guide plate 16 has an arc-shaped protrusion structure.

[0025] In a further improvement, the number of single support plates 19 is two, the movable column 18 is movably connected to the support plate 19, the limiting ring 17 and the second spring 20 are both located between the single support plates 19, one end of the second spring 20 is in contact with the limiting ring 17; the other end is in contact with the support plate 19.

[0026] Further improvements include a sealing top plate 3 located at the top of the vacuum chamber 1, a sealing groove on the top of the vacuum chamber 1, a sealing protrusion on the bottom of the sealing top plate 3, and connecting flanges 2 distributed on both sides and the middle of one side of the vacuum chamber 1.

[0027] Further improvements include a connecting tube 7 with one end protruding from the vacuum cavity body 4 and the other end being flush with and communicating with the vacuum cavity body 4; the inner wall of the connecting cap 13 being threadedly connected to the connecting tube 7; the guide post 12 having a "T" shaped cross-section; the sealing plate 10 having a through hole for use with the guide post 12; and the sealing plate 10 being movably connected to the guide post 12.

[0028] Further improvements include a sealing plate 10 with dimensions larger than the inner wall of the fixing plate 8, a frustum-shaped structure at one end of the sealing block 11, a mounting hole in the middle of the sealing block 11 for use with the spring 14, and an inclined structure on the contact side of the sealing rings 9 at different positions.

[0029] In use: After the sealing top plate 3 of this utility model is placed at the top of the vacuum chamber 1, the rotating column 5 is rotated, which further drives the bottom guide plate 16 to rotate. When the protrusion on the guide plate contacts the end of the movable column 18, it can push the movable column 18 to move, so that the end is inserted into the inner wall of the vacuum chamber 1, ensuring a stable connection between the sealing top plate 3 and the vacuum chamber 1. Then, the air pump is connected to the connecting flange 2, and air is sucked into the vacuum inner cavity body 4. The sealing plate 10 moves, and with the cooperation of the guide column 12, the synchronicity of the overall movement of the sealing plate 10 can be ensured, avoiding the phenomenon of movement deviation. At the same time, the threaded connection between the connecting cap 13 and the connecting pipe 7 can facilitate the overall disassembly of the fixed pipe 8, which is convenient for subsequent maintenance.

[0030] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A vacuum cavity with a multi-cavity structure, characterized in that: The device includes a vacuum chamber (1), a sealing top plate (3), and several connecting flanges (2). The vacuum chamber (1) has two symmetrically arranged vacuum inner cavity bodies (4). A connecting pipe (7) is provided on the vacuum inner cavity body (4). A fixing pipe (8) is provided inside the connecting pipe (7). A connecting cap (13) is provided on one end of the fixing pipe (8). Two guide posts (12) are symmetrically arranged on the end of the connecting cap (13) away from the fixing pipe (8). A sealing plate (10) is provided between the guide posts (12). A sealing block (11) is provided in the middle of the side of the sealing plate (10) facing the fixing pipe (8). A fixing plate (15) is provided inside the end of the fixing pipe (8) away from the connecting cap (13). A spring (14) is provided between the fixing plate (15) and the sealing plate (10). A sealing ring (9) is provided on the inner wall of the connecting cap (13) and on the outer edge of the connecting pipe (7).

2. The multi-cavity vacuum cavity according to claim 1, characterized in that: A handle (6) is installed in the middle of the top of the sealing top plate (3). A rotating column (5) is provided between the middle of the handle (6) and the sealing top plate (3). Four sets of support plates (19) are evenly arranged on the bottom of the sealing top plate (3). A movable column (18) is provided between each set of support plates (19). A limit ring (17) is provided on the movable column (18). A spring (20) is provided on the movable column (18). A guide plate (16) is provided at one bottom end of the rotating column (5).

3. A multi-cavity vacuum cavity according to claim 2, characterized in that: The rotating column (5) has a "T" shaped cross-section. The rotating column (5) is rotatably connected to the handle (6) and the sealing top plate (3). The guide plate (16) has four arc-shaped protrusions on its outer edge. One end of the movable column (18) is partially inserted into the inner wall of the vacuum chamber (1). The end of the movable column (18) that contacts the guide plate (16) has an arc-shaped protrusion.

4. A multi-cavity vacuum cavity according to claim 2, characterized in that: The number of support plates (19) in a single set is two. The movable column (18) is movably connected to the support plate (19). The limiting ring (17) and the second spring (20) are both located between the support plates (19) in a single set. One end of the second spring (20) is in contact with the limiting ring (17), and the other end is in contact with the support plate (19).

5. A multi-cavity vacuum cavity according to claim 1, characterized in that: The sealing top plate (3) is located at the top of the vacuum chamber (1). The top of the vacuum chamber (1) is provided with a sealing groove, and the bottom of the sealing top plate (3) is provided with a sealing protrusion. The connecting flange (2) is distributed on both sides and the middle of one side of the vacuum chamber (1).

6. A multi-cavity vacuum cavity according to claim 1, characterized in that: One end of the connecting tube (7) protrudes from the vacuum cavity body (4); the other end is flush with and communicates with the vacuum cavity body (4). The inner wall of the connecting cap (13) is threadedly connected to the connecting tube (7). The cross-section of the guide post (12) is "T" shaped. The sealing plate (10) is provided with a through hole for use with the guide post (12). The sealing plate (10) and the guide post (12) are movably connected.

7. A multi-cavity vacuum cavity according to claim 1, characterized in that: The size of the sealing plate (10) is larger than the inner wall size of the fixing plate (8). One end of the sealing block (11) is in the shape of a frustum. The middle part of the sealing block (11) is provided with a mounting hole for use with the spring (14). The contact side of the sealing rings (9) at different positions is in an inclined structure.

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