Exhaust device for substrate cleaning and substrate cleaning system

Abstract

The utility model provides an exhaust device for substrate cleaning and a substrate cleaning system, and belongs to the technical field of substrate cleaning devices, the exhaust device comprises an exhaust assembly, a power device and an opening assembly, the exhaust assembly is provided with a plurality of mutually independent exhaust channels, the air inlet ends of the exhaust channels are communicated with a cleaning cover, and the air outlet ends of the exhaust channels are communicated with a waste gas treatment device; the power device is connected to the exhaust assembly and used for conveying gas in the cleaning cover to a corresponding waste gas treatment device along the exhaust channel. The switch assembly is connected to the exhaust channel and used for controlling the exhaust channel to be opened or closed. The utility model provides an exhaust device for cleaning a base plate and a base plate cleaning system, and aims to solve the problems that in the prior art, after cleaning liquid generated by cleaning the base plate is mixed with air, corresponding treatment cannot be carried out on different cleaning liquid, and environmental pollution is caused.

Description

Technical Field

[0001] This utility model belongs to the technical field of substrate cleaning devices, and more specifically, it relates to an exhaust device and a substrate cleaning system for substrate cleaning. Background Technology

[0002] The substrate is the basic material for manufacturing PCBs. Generally, the substrate is a copper-clad laminate. In the manufacturing process of single-sided and double-sided PCBs, selective processing such as hole machining, chemical copper plating, electrolytic copper plating, and etching are performed on the substrate material—the copper-clad laminate—to obtain the required circuit pattern. After a period of use, the surface of the substrate will accumulate metal layers, oil, impurities, etc., which will affect subsequent processing procedures and reduce performance. Therefore, the substrate needs to be cleaned regularly.

[0003] During the substrate cleaning and drying process, acidic, alkaline, or organic cleaning solutions are required to clean both the front and back sides of the substrate. Because the substrate rotates at high speed during cleaning, some of the cleaning solution splashes and forms small droplets that remain suspended in the air when it comes into contact with the substrate. To prevent environmental pollution caused by cleaning solution splashing, a protective cover is typically installed outside the cleaning equipment to keep the substrate in a sealed environment during cleaning.

[0004] During the cleaning process, the air pressure inside the protective enclosure needs to be maintained within a normal range. Furthermore, to prevent secondary contamination of the substrate due to the accumulation of splashed cleaning fluid, a pressure regulating device is typically used to expel air from the enclosure while simultaneously injecting fresh outside air. This ensures a clean environment within the enclosure and maintains the normal air pressure. However, since different types of cleaning fluids are used to clean the substrate, simply venting the air directly from the protective enclosure may cause environmental pollution. Moreover, different cleaning fluids require different treatment methods when mixed with air, and mixed emissions cannot be specifically addressed. Utility Model Content

[0005] The purpose of this invention is to provide an exhaust device and a substrate cleaning system for substrate cleaning, which aims to solve the problem in the prior art where the cleaning fluid generated during substrate cleaning mixes with the air, making it impossible to treat different cleaning fluids accordingly, thus causing environmental pollution.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0007] In a first aspect, an exhaust device for cleaning a substrate is provided, comprising:

[0008] The exhaust assembly has multiple independent exhaust channels, the inlet end of which is connected to the cleaning hood, and the outlet end of which is connected to the waste gas treatment device.

[0009] A power unit, connected to the exhaust assembly, is used to transport the gas inside the cleaning hood along the exhaust passage to a corresponding exhaust gas treatment device; and

[0010] A switch assembly, connected to the exhaust passage, is used to control the opening or closing of the exhaust passage.

[0011] In conjunction with the first aspect, in one possible implementation, the exhaust assembly includes a main pipe and a plurality of branch pipes connected in parallel to the outlet end of the main pipe, the inlet end of the main pipe being connected to a cleaning hood, the outlet end of each branch pipe being connected to an exhaust gas treatment device, and each branch pipe being connected to the main pipe to form an exhaust passage.

[0012] In conjunction with the first aspect, in one possible implementation, the switching component includes:

[0013] A switching element, rotatably disposed at the connection between the main pipe and the plurality of branch pipes about a first axis, isolates the main pipe from the plurality of branch pipes. The first axis is parallel to the axis of the main pipe. The switching element has an air guide chamber, an air inlet and a switching hole communicating with the air guide chamber. The air inlet is also connected to the main pipe for introducing gas from the main pipe into the air guide chamber. The switching element rotates about the first axis so that the switching hole communicates with one of the branch pipes.

[0014] A driving component, connected to the switching component, is used to control the switching component to rotate around the first axis.

[0015] In conjunction with the first aspect, in one possible implementation, the drive member includes a connecting portion connected to the switching member and a drive portion extending out of the main tube, the drive portion controlling the switching member to rotate about the first axis.

[0016] In conjunction with the first aspect, in one possible implementation, the drive unit further includes a controller and a driver connected to the drive unit, and a solution detector disposed within the cleaning hood, the solution detector being used to detect the composition of the cleaning solution, the solution detector and the driver being communicatively connected to the controller.

[0017] In conjunction with the first aspect, in one possible implementation, the switching component is a hollow cylindrical member, the hollow portion of the switching component forms the air guide cavity, the axis of the switching component is parallel to the axis of the main pipe, the air inlet is opened on one end face of the switching component, and the switching hole is opened on the side wall of the switching component.

[0018] In conjunction with the first aspect, in one possible implementation, the switching element is a hollow spherical component, the hollow portion of the switching element forms the air guide cavity, the axis of the switching element is parallel to the axis of the main pipe, and the air inlet and the switching hole are distributed at intervals on the switching element.

[0019] In conjunction with the first aspect, in one possible implementation, the exhaust device for substrate cleaning further includes a regulating valve connected to the exhaust assembly, the regulating valve being used to control the gas flow rate within the exhaust channel.

[0020] In conjunction with the first aspect, in one possible implementation, the exhaust device for cleaning the substrate further includes a controller and a pressure detector disposed within the cleaning hood, wherein the pressure detector and the regulating valve are respectively communicatively connected to the controller.

[0021] The beneficial effects of the exhaust device for substrate cleaning provided by this utility model are as follows: Compared with the prior art, the exhaust device for substrate cleaning of this utility model connects an exhaust assembly with multiple independent exhaust channels to the cleaning hood, and each exhaust channel is connected to a corresponding waste gas treatment device. When cleaning the substrate with cleaning solutions of different properties, the switching assembly controls the corresponding exhaust channel to open, while the other exhaust channels are closed, and the waste gas mixed with the cleaning solution in the cleaning hood is transported along the exhaust channel to the corresponding waste gas treatment device. For example, when cleaning the substrate with an acidic cleaning solution, the switching assembly controls the exhaust channel connected to the waste gas treatment device for treating acidic waste gas to open, while the other exhaust channels are closed, and the power unit pushes the acidic waste gas along the exhaust channel into the corresponding waste gas treatment device. This utility model can treat the waste gas generated during the operation of different cleaning solutions in a targeted manner, which not only avoids the problem of environmental pollution caused by direct emission of waste gas, but also effectively treats the harmful substances in the waste gas through targeted treatment, avoiding the energy waste caused by comprehensive treatment and achieving emission standards.

[0022] Secondly, embodiments of the present invention also provide a substrate cleaning system, including an exhaust device for substrate cleaning as described above.

[0023] The beneficial effects of the substrate cleaning system provided by this utility model are as follows: Compared with the prior art, it adopts the above-mentioned exhaust device for substrate cleaning, connecting an exhaust assembly with multiple independent exhaust channels to the cleaning hood, and each exhaust channel is connected to a corresponding waste gas treatment device. When cleaning the substrate with cleaning solutions of different properties, the switching assembly controls the corresponding exhaust channel to open, while the other exhaust channels are closed, and the waste gas mixed with the cleaning solution in the cleaning hood is transported along the exhaust channel to the corresponding waste gas treatment device. For example, when cleaning the substrate with an acidic cleaning solution, the switching assembly controls the exhaust channel connected to the waste gas treatment device for treating acidic waste gas to open, while the other exhaust channels are closed, and the power unit pushes the acidic waste gas along the exhaust channel into the corresponding waste gas treatment device. This utility model can specifically treat the waste gas generated during the operation of different cleaning solutions, which not only avoids the problem of environmental pollution caused by direct emission of waste gas, but also effectively treats harmful substances in the waste gas through targeted treatment, avoiding energy waste caused by comprehensive treatment and achieving emission standards. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 A schematic diagram of the structure of the exhaust device for cleaning substrates provided in this embodiment of the utility model;

[0026] Figure 2 This is a schematic diagram of the switching component used in an embodiment of the present utility model;

[0027] Figure 3 This is a schematic diagram of the switching component and branch pipe used in another embodiment of the present invention.

[0028] In the diagram: 1. Cleaning hood; 2. Exhaust assembly; 201. Main pipe; 202. Branch pipe; 3. Waste gas treatment device; 4. Switch assembly; 401. Switching component; 4011. Air inlet; 4012. Switching hole; 5. Regulating valve; 6. Air pressure detector; 7. Solution detector; 8. Power unit. Detailed Implementation

[0029] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0030] In the claims, description, and accompanying drawings of this utility model, unless otherwise expressly defined, the terms "first," "second," or "third," etc., are used to distinguish different objects, not to describe a specific order. Unless otherwise stated, other directional terms, such as "vertical," "clockwise," and "counterclockwise," indicate orientation or positional relationships based on the orientation and positional relationships shown in the accompanying drawings, and are only for the convenience of describing the utility model and simplifying the description, not to indicate or imply that the referred device or element must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the specific scope of protection of this utility model. In the claims, description, and accompanying drawings of this utility model, unless otherwise expressly defined, the terms "fixed connection" or "fixed connection" should be interpreted broadly, that is, any connection method in which there is no displacement relationship or relative rotation relationship between the two, that is, including non-removable fixed connection, detachable fixed connection, integral connection, and fixed connection through other devices or elements. In the claims, description, and accompanying drawings of this utility model, the terms "comprising," "having," and their variations are intended to mean "including but not limited to."

[0031] Please see Figure 1 The present invention will now describe the exhaust device and substrate cleaning system for substrate cleaning. The exhaust device for substrate cleaning includes an exhaust assembly 2, a power unit 8, and a switch assembly 4. The exhaust assembly 2 has multiple independent exhaust channels. The inlet end of the exhaust channel is connected to the cleaning hood 1, and the outlet end is connected to the waste gas treatment device 3. The power unit 8 is connected to the exhaust assembly 2 and is used to transport the gas in the cleaning hood 1 along the exhaust channel to the corresponding waste gas treatment device 3. The switch assembly 4 is connected to the exhaust channel and is used to control the opening or closing of the exhaust channel.

[0032] Compared with the prior art, the exhaust device for substrate cleaning provided by this utility model connects an exhaust assembly 2 with multiple independent exhaust channels to a cleaning hood 1, and each exhaust channel is connected to a corresponding waste gas treatment device 3. When cleaning the substrate with cleaning solutions of different properties, the switch assembly 4 controls the corresponding exhaust channel to open, while the other exhaust channels are closed, and the waste gas mixed with the cleaning solution in the cleaning hood 1 is transported along the exhaust channel to the corresponding waste gas treatment device 3. For example, when cleaning the substrate with an acidic cleaning solution, the switch assembly 4 controls the exhaust channel connected to the waste gas treatment device 3 for treating acidic waste gas to open, while the other exhaust channels are closed, and the power unit 8 pushes the acidic waste gas along the exhaust channel into the corresponding waste gas treatment device 3. This utility model can specifically treat the waste gas generated during the operation of different cleaning solutions, which not only avoids the environmental pollution caused by direct emission of waste gas, but also effectively treats harmful substances in the waste gas, avoiding energy waste caused by comprehensive treatment and achieving emission standards.

[0033] It should be noted that while some existing technologies employ dedicated waste gas treatment equipment to treat the cleaned waste gas, purchasing such equipment separately is not only costly but also occupies a significant amount of space within the factory premises. In this application, the exhaust channel is connected to the existing waste gas treatment device 3 within the factory premises (since other production lines also generate waste gas, the factory already has its own waste gas treatment device 3), eliminating the need for separate equipment purchases and saving costs.

[0034] Optionally, the exhaust channels are configured in a one-to-one correspondence with the waste gas treatment device 3. For example, the exhaust channel for conveying acidic waste gas is connected to the waste gas treatment device 3 for treating acidic waste gas, the exhaust channel for conveying alkaline waste gas is connected to the waste gas treatment device 3 for treating alkaline waste gas, and the exhaust channel for conveying organic waste gas is connected to the waste gas treatment device 3 for treating organic waste gas.

[0035] Optionally, the power unit 8 is a fan or blower that transports the air inside the cleaning hood 1 along the exhaust channel to the corresponding exhaust gas treatment device 3. The power unit 8 can be a fan or blower free in the exhaust gas treatment device 3, or it can be separately installed on the exhaust channel, for example, each exhaust channel is equipped with a power unit 8.

[0036] Optionally, the exhaust assembly 2 includes multiple independent exhaust pipes forming an exhaust channel. The inlet end of each exhaust pipe is connected to the cleaning hood 1, and the outlet end is connected to the corresponding exhaust gas treatment device. The switch assembly 4 includes multiple opening valves, with each valve corresponding to one of the exhaust pipes.

[0037] In some embodiments, please refer to Figure 1The exhaust assembly 2 includes a main pipe 201 and multiple branch pipes 202 connected in parallel to the outlet end of the main pipe 201. The inlet end of the main pipe 201 is connected to the cleaning hood 1, and the outlet end of each branch pipe 202 is connected to an exhaust gas treatment device 3. Each branch pipe 202 is connected to the main pipe 201 to form an exhaust channel.

[0038] In this embodiment, multiple branch pipes 202 are connected in parallel to the main pipe 201, and then the main pipe 201 is connected to the cleaning hood 1 to discharge the exhaust gas into the corresponding exhaust gas treatment device 3 for treatment. Compared with the scheme where each branch pipe 202 is connected to the cleaning hood 1, the number of holes to be drilled in the cleaning hood 1 is reduced. This not only reduces the workload and avoids damage to the cleaning hood 1 during drilling, but also improves the sealing performance of the cleaning hood 1, preventing the exhaust gas after the cleaning fluid and air are mixed from leaking out due to too many holes.

[0039] Optionally, the switching assembly 4 includes multiple switching valves, each corresponding to an exhaust pipe.

[0040] In some embodiments, please refer to Figures 1 to 3 The switch assembly 4 includes a switching element 401 and a driving element. The switching element 401 is rotatably disposed at the connection between the main pipe 201 and multiple branch pipes 202 around a first axis, and isolates the main pipe 201 from the multiple branch pipes 202. The first axis is parallel to the axis of the main pipe 201. The switching element 401 has an air guide cavity, and also has an air inlet 4011 and a switching hole 4012 connected to the air guide cavity. The air inlet 4011 is also connected to the main pipe 201 and is used to introduce gas in the main pipe 201 into the air guide cavity. The switching element 401 rotates around the first axis so that the switching hole 4012 is connected to one of the branch pipes 202. The driving element is connected to the switching element 401 and is used to control the rotation of the switching element 401 around the first axis.

[0041] A switching element 401 is located at the connection between the main pipe 201 and multiple branch pipes 202. Rotating the switching element 401 connects the switching hole 4012 to the corresponding branch pipe 202. Under the action of the power unit 8, the exhaust gas enters the air guide chamber through the main pipe 201 and the air inlet 4011, then enters the corresponding branch pipe 202 through the switching hole 4012, and finally flows into the corresponding exhaust gas treatment device 3. In this embodiment, the corresponding exhaust passage can be opened and other exhaust passages can be closed by rotating the switching valve. It is not necessary to set a switching valve on each branch pipe 202, which not only saves costs but also avoids closing other switching valves one by one, simplifying the operation steps.

[0042] In some embodiments, not shown in the figures, the drive member includes a connecting portion connected to the switching member 401 and a drive portion extending out of the main tube 201, the drive portion controlling the switching member 401 to rotate about a first axis.

[0043] The operator can rotate the connecting part to drive the switching part 401 to rotate by rotating the drive unit, which is convenient.

[0044] Optionally, the drive unit includes a connecting rod and a hand crank arranged at an angle. The connecting rod and the connecting part are coaxially arranged. Rotating the hand crank can realize the rotation of the connecting rod and the connecting part, thereby achieving the purpose of saving effort.

[0045] In some embodiments, the drive unit further includes a controller and a driver connected to the drive unit, and a solution detector 7 disposed inside the cleaning hood 1. The solution detector 7 is used to detect the composition of the cleaning fluid, and the solution detector 7 and the driver are respectively communicatively connected to the controller.

[0046] The solution detector 7 can detect the composition of the cleaning solution used, such as whether it is an acidic, alkaline, or organic cleaning solution, and then generate a corresponding detection signal. The controller, based on the detection signal, controls the driver to start, causing the drive unit to rotate. This aligns the switching hole 4012 of the switching element 401 with the corresponding branch pipe 202, thereby opening the corresponding exhaust channel and closing other exhaust channels. The solution in this embodiment can automatically control the opening and closing of the corresponding exhaust channels without manual operation, simplifying the production process.

[0047] Optionally, the power unit 8 is also connected to the controller, which controls the power unit 8 to start according to the detection signal, and transports the exhaust gas to the exhaust gas treatment device 3 along the corresponding exhaust channel.

[0048] In some embodiments, please refer to Figure 2 The switching component 401 is a hollow columnar component. The hollow part of the switching component 401 forms an air guide cavity. The axis of the switching component 401 is parallel to the axis of the main pipe 201. The air inlet 4011 is opened on one end face of the switching component 401, and the switching hole 4012 is opened on the side wall of the switching component 401.

[0049] When the switching component 401 rotates around its own axis (first axis), the air inlet 4011 is always connected to the main pipe 201, and as the switching component 401 rotates, the switching hole 4012 is connected to the corresponding branch pipe 202. The solution in this embodiment can be connected to multiple branch pipes 202 at the same time, and the structure is simple, reducing manufacturing costs.

[0050] In some embodiments, please refer to Figure 3 The switching component 401 is a hollow spherical component. The hollow part of the switching component 401 forms an air guide cavity. The axis of the switching component 401 is parallel to the axis of the main pipe 201, and the air inlet 4011 and the switching hole 4012 are distributed at intervals on the switching component 401.

[0051] The spherical component can rotate flexibly. When the switching component 401 rotates around its own axis (first axis), the air inlet 4011 is always connected to the main pipe 201. As the switching component 401 rotates, the switching hole 4012 is connected to the corresponding branch pipe 202. The solution in this embodiment can be connected to multiple branch pipes 202 at the same time, and the structure is simple, reducing manufacturing costs.

[0052] In some embodiments, please refer to Figure 1 The exhaust device for substrate cleaning also includes a regulating valve 5 connected to the exhaust assembly 2, which is used to control the gas flow rate in the exhaust channel.

[0053] Because the supply volume of cleaning fluid varies, and the flow rate of gas introduced into the cleaning hood 1 by the gas supply device also varies, the gas flow rate in the exhaust channel is adjusted by the regulating valve 5 according to the gas pressure inside the cleaning hood 1, thereby maintaining the gas pressure inside the cleaning hood 1 within a preset range. Additionally, the gas flow rate in the exhaust channel can also be controlled according to the treatment status of the waste gas treatment device 3 to prevent the waste gas from being insufficiently treated.

[0054] Optionally, the regulating valve 5 can be a solenoid valve or other existing valve body.

[0055] Optionally, the regulating valve 5 is provided on the main pipe 201, or each branch pipe 202 is provided with a regulating valve 5.

[0056] In some embodiments, please refer to Figure 1 The exhaust device for substrate cleaning also includes a controller and a pressure detector 6 located inside the cleaning hood. The pressure detector 6 and the regulating valve 5 are respectively connected to the controller in communication.

[0057] The air pressure detector 6 detects the air pressure inside the cleaning hood 1 and generates an air pressure signal. The controller controls the opening of the regulating valve 5 according to the air pressure signal, so that the air pressure inside the cleaning hood 1 is maintained within a preset range.

[0058] Based on the same inventive concept, this utility model also provides a substrate cleaning system. The substrate cleaning system includes the exhaust device for substrate cleaning as described above.

[0059] The substrate cleaning system provided by this utility model adopts the aforementioned exhaust device for substrate cleaning. An exhaust assembly 2 with multiple independent exhaust channels is connected to a cleaning hood 1, and each exhaust channel is connected to a corresponding waste gas treatment device 3. When cleaning the substrate with cleaning solutions of different properties, the switch assembly 4 controls the corresponding exhaust channel to open, while the other exhaust channels are closed. The waste gas mixed with the cleaning solution in the cleaning hood 1 is then transported along the exhaust channel to the corresponding waste gas treatment device 3. For example, when cleaning the substrate with an acidic cleaning solution, the switch assembly 4 controls the exhaust channel connected to the waste gas treatment device 3 for treating acidic waste gas to open, while the other exhaust channels are closed. The power unit 8 then directs the acidic waste gas along the exhaust channel into the corresponding waste gas treatment device 3. This utility model can specifically treat the waste gas generated during the operation of different cleaning solutions. This not only avoids the environmental pollution caused by direct emission of waste gas, but also effectively treats harmful substances in the waste gas, avoiding energy waste caused by comprehensive treatment and achieving emission standards.

[0060] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An exhaust device for cleaning substrates, characterized in that, include: The exhaust assembly has multiple independent exhaust channels, the inlet end of which is connected to the cleaning hood, and the outlet end of which is connected to the waste gas treatment device. The exhaust assembly includes a main pipe and multiple branch pipes connected in parallel to the outlet end of the main pipe. The inlet end of the main pipe is connected to a cleaning hood, and the outlet end of each branch pipe is connected to an exhaust gas treatment device. Each branch pipe is connected to the main pipe to form an exhaust channel. A power unit, connected to the exhaust assembly, is used to transport the gas in the cleaning hood along the exhaust passage to the corresponding exhaust gas treatment device. as well as A switch assembly, connected to the exhaust passage, is used to control the opening or closing of the exhaust passage; The switching assembly includes: A switching component is rotatably disposed at the connection between the main pipe and the multiple branch pipes around a first axis, and isolates the main pipe from the multiple branch pipes. The first axis is parallel to the axis of the main pipe. The switching component has an air guide cavity, and also has an air inlet and a switching hole connected to the air guide cavity. The air inlet is also connected to the main pipe for introducing gas from the main pipe into the air guide cavity. The switching component rotates around the first axis so that the switching hole is connected to one of the branch pipes. as well as A driving component, connected to the switching component, is used to control the switching component to rotate around the first axis.

2. The exhaust device for substrate cleaning as described in claim 1, characterized in that, The drive unit includes a connecting portion connected to the switching member and a drive portion extending out of the main tube, the drive portion controlling the switching member to rotate around the first axis.

3. The exhaust device for substrate cleaning as described in claim 2, characterized in that, The drive unit also includes a controller and a driver connected to the drive unit, and a solution detector disposed inside the cleaning hood. The solution detector is used to detect the composition of the cleaning solution. The solution detector and the driver are respectively communicatively connected to the controller.

4. The exhaust device for substrate cleaning as described in claim 1, characterized in that, The switching component is a hollow cylindrical member. The hollow part of the switching component forms the air guide cavity. The axis of the switching component is parallel to the axis of the main pipe. The air inlet is opened on one end face of the switching component, and the switching hole is opened on the side wall of the switching component.

5. The exhaust device for substrate cleaning as described in claim 1, characterized in that, The switching component is a hollow spherical member, the hollow part of which forms the air guide cavity. The axis of the switching component is parallel to the axis of the main pipe, and the air inlet and the switching hole are distributed at intervals on the switching component.

6. The exhaust device for substrate cleaning as described in claim 1, characterized in that, The exhaust device for substrate cleaning also includes a regulating valve connected to the exhaust assembly, which is used to control the gas flow rate in the exhaust channel.

7. The exhaust device for substrate cleaning as described in claim 6, characterized in that, The exhaust device for cleaning the substrate also includes a controller and a pressure detector located inside the cleaning hood. The pressure detector and the regulating valve are respectively connected to the controller in communication.

8. A substrate cleaning system, characterized in that, An exhaust device for cleaning a substrate, as described in any one of claims 1-7.

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