Platform module of laser processing production line

Abstract

The utility model discloses a platform module of a laser processing production line, which comprises a processing platform on which a deviation rectifying station, a processing station and a waste absorbing station are arranged in sequence; the position detection unit is arranged above the deviation correction station and used for detecting the position of the workpiece located at the deviation correction station and judging whether the position of the workpiece deviates or not; the waste sheet storage unit is arranged on the processing platform and is used for storing workpieces with deviated positions; and the waste sheet transfer unit is arranged between the waste suction station and the waste sheet storage unit and is used for transferring the workpieces with offset positions from the waste suction station to the waste sheet storage unit. When the position of the workpiece deviates, the workpiece can be controlled to directly skip the machining station to reach the waste suction station, the waste piece transfer unit transfers the workpiece from the waste suction station to the waste piece storage unit, waste of raw materials and time caused by machining of the workpiece with the position deviating is avoided, the machining efficiency is improved, and the cost is reduced.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of laser processing technology, and specifically relates to a platform module of a laser processing production line. BACKGROUND

[0002] Silicon wafer laser edge cleaning is a method for cleaning the edge of a silicon wafer by using laser technology, and is widely used in the fields of semiconductor manufacturing and solar cell manufacturing. In a laser edge cleaning production line of a silicon wafer, the positioning accuracy of the silicon wafer has a great influence on the processing accuracy of the laser, and the waste pieces often appear after processing due to the inaccurate positioning of the silicon wafer. In addition, the product needs to be screened again, on the one hand, the waste piece processing occupies the processing station, and the subsequent screening process needs to consume time and energy, which seriously affects the processing efficiency, on the other hand, the appearance of the waste piece leads to the waste of raw materials and increases the processing cost. SUMMARY

[0003] The purpose of the present application is to provide a platform module of a laser processing production line to solve the technical problems that the waste pieces often appear after processing due to the inaccurate positioning of the silicon wafer in the prior art, which seriously affects the processing efficiency and increases the processing cost.

[0004] In order to achieve the above-mentioned purpose, the present application provides a platform module of a laser processing production line, comprising:

[0005] A processing platform, wherein a deviation correction station, a processing station and a waste piece suction station are arranged in sequence on the processing platform;

[0006] A position detection unit arranged above the deviation correction station, wherein the position detection unit is used for detecting the position of a workpiece located in the deviation correction station and judging whether the position of the workpiece is deviated or not;

[0007] A waste piece storage unit arranged on the processing platform, wherein the waste piece storage unit is used for storing the workpiece with a deviated position;

[0008] A waste piece transfer unit arranged between the waste piece suction station and the waste piece storage unit, wherein the waste piece transfer unit is used for transferring the workpiece with a deviated position from the waste piece suction station to the waste piece storage unit.

[0009] In one or more embodiments, the deviation correction station, the processing station and the waste piece suction station are arranged in a ring shape.

[0010] In one or more embodiments, the position detection unit comprises four cameras arranged in a quadrilateral shape, the shooting end of each camera is arranged to face the deviation correction station, and each camera is used for collecting the image of one corner of the workpiece.

[0011] In one or more embodiments, the platform module further comprises:

[0012] a column arranged on the machining platform;

[0013] a top plate arranged at the top end of the column, the top plate being provided with a hollow part corresponding to the position of the deviation rectifying station;

[0014] a pair of back plates oppositely arranged, one end of the back plates being fixed to the side wall of the hollow part and the other end extending towards the deviation rectifying station;

[0015] wherein four cameras are symmetrically arranged on the pair of back plates.

[0016] In one or more embodiments, the waste piece transfer unit comprises:

[0017] a displacement driving mechanism comprising a first end located above the waste piece storage unit and a second end located above the waste suction station, the displacement driving mechanism comprising a moving end capable of switching positions between the first end and the second end;

[0018] a cantilever arranged on the cantilever;

[0019] a vacuum chuck arranged on the side of the cantilever facing the machining platform, the vacuum chuck being used to adsorb and fix the workpiece.

[0020] In one or more embodiments, further comprising a column arranged on the machining platform, and the displacement driving unit is arranged on the column.

[0021] In one or more embodiments, further comprising a dust collection unit, the dust collection unit comprising:

[0022] a dust collection base arranged on the machining platform;

[0023] a dust collection cover mounted on the dust collection base, the dust collection cover being located above the machining station, the bottom surface of the dust collection cover being provided with a first opening for exposing the workpiece, the top surface of the dust collection cover being provided with a second opening for avoiding laser, and the side surface of the dust collection cover being provided with a dust collection port;

[0024] a dust collection pipe connected to the dust collection port at one end.

[0025] In one or more embodiments, the waste piece storage unit comprises:

[0026] a support arranged on the machining platform;

[0027] a tray arranged at the top end of the support, the peripheral surface of the tray being provided with a ring of baffles.

[0028] In one or more embodiments, the outer edge of the tray is provided with a recess.

[0029] In one or more embodiments, a surface light source is further included, which is arranged below the position detection unit and disposed opposite to the position detection unit.

[0030] Compared with the prior art, the application has the following beneficial effects:

[0031] In the platform module of the application, the workpiece can first be collected by the position detection unit at the deviation correction station, and the position of the workpiece is judged based on the image whether there is deviation; when the position of the workpiece deviates, the workpiece can be directly controlled to skip the machining station to the waste suction station, and the waste piece transfer unit transfers the workpiece from the waste suction station to the waste piece storage unit, so as to avoid that the workpiece with position deviation is machined to cause waste of raw materials and time, improve the machining efficiency and reduce the cost. BRIEF DESCRIPTION OF DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0033] Figure 1 is a structural schematic view of an embodiment of the platform module of the laser processing production line of the application;

[0034] Figure 2 is a structural schematic view of another view of an embodiment of the platform module of the laser processing production line of the application;

[0035] Figure 3 is a structural schematic view of an embodiment of the waste piece transfer unit of the application;

[0036] Figure 4 is a structural schematic view of an embodiment of the dust collecting unit of the application.

[0037] In the drawings:

[0038] Processing platform 100; deviation correction station 101; machining station 102; suction station 103;

[0039] Position detection unit 200; camera 201; surface light source 202;

[0040] Waste piece storage unit 300; support 301; tray 302; baffle 303; recess 304;

[0041] Waste piece transfer unit 400; displacement driving mechanism 401; first end 4011; second end 4012; moving end 4013; cantilever 402; vacuum chuck 403;

[0042] a column 500;

[0043] a top plate 600; a hollow part 601;

[0044] a back plate 700;

[0045] a dust collecting unit 800; a dust collecting base 801; a dust collecting cover 802; a first opening 8021; a second opening 8022; a dust collecting opening 8023; a dust collecting pipe 803. DETAILED DESCRIPTION

[0046] In order to make the person skilled in the art better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be described clearly and completely in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all. Based on the embodiments in the present application, all other embodiments obtained by the person skilled in the art without creative labor shall belong to the scope of protection of the present application.

[0047] At present, in the laser processing process, the position of the silicon wafer is not accurately positioned, which leads to the appearance of waste pieces after processing, and the product needs to be screened again. On the one hand, the waste piece processing occupies the processing station, and the subsequent screening process also needs time and effort, which seriously affects the processing efficiency. On the other hand, the appearance of waste pieces leads to the waste of raw materials and increases the processing cost.

[0048] In order to solve the above problems, the applicant develops a platform module of a laser processing production line. When the workpiece position is offset, the workpiece can be avoided from being processed and can be collected and reused, thereby avoiding the waste of raw materials on the one hand, improving the processing efficiency on the other hand, and avoiding the subsequent screening process.

[0049] Specifically, please refer to Figure 1 and Figure 2 , Figure 1 is a structural schematic diagram of an embodiment of the platform module of the laser processing production line of the present application, Figure 2 is a structural schematic diagram of another view of an embodiment of the platform module of the laser processing production line of the present application.

[0050] As shown in Figure 1 and Figure 2 , the platform module comprises a processing platform 100, and the processing platform 100 is sequentially arranged with a deviation rectifying station 101, a processing station 102 and a waste suction station.

[0051] The workpiece can be sequentially conveyed by the conveying unit through the deviation rectifying station 101, the processing station 102 and the suction station 103.

[0052] In this embodiment, in order to optimize the structure layout and improve the processing efficiency, the deviation correction station 101, the processing station 102 and the waste suction station are arranged in a ring shape. In other embodiments, the deviation correction station 101, the processing station 102 and the waste suction station can also be arranged in other manners, which can also achieve the effects of this embodiment.

[0053] The position detection unit 200 is arranged above the deviation correction station 101, and is used to detect the position of the workpiece located in the deviation correction station 101 and determine whether the position of the workpiece is deviated.

[0054] Specifically, in this embodiment, the position detection unit 200 includes four cameras 201 arranged in a quadrilateral shape, and the shooting ends of the cameras 201 are arranged towards the deviation correction station 101, and each camera 201 is used to collect the image of one corner of the workpiece.

[0055] It can be understood that the position detection unit 200 further includes a control mechanism, which is used to compare the image of the workpiece with a preset image, and evaluate whether the position of the workpiece is deviated based on the comparison result.

[0056] The control mechanism can be any component that can realize the image comparison function in the art, such as a single-chip microcomputer, and the like, which will not be described here.

[0057] In order to realize the installation of the position detection unit 200, a pair of columns 500 is arranged on the processing platform 100, and a top plate 600 is arranged at the top end of the pair of columns 500, and the top plate 600 is arranged with a hollow part 601 corresponding to the position of the deviation correction station 101, and the hollow part 601 is installed with a pair of back plates 700 arranged oppositely, one end of the back plate 700 is fixed to the side wall of the hollow part 601, and the other end extends towards the direction of the deviation correction station 101, and the four cameras 201 are symmetrically arranged on the pair of back plates 700.

[0058] It can be understood that the four cameras 201 can respectively collect the images of the four corners of the workpiece, so as to obtain the position of the workpiece, and by comparing the position of the workpiece with the preset position, it can be determined whether the position of the workpiece is deviated relative to the preset position.

[0059] In order to ensure the overall processing precision, the processing platform 100, the column 500 and the top plate 600 can be made of natural marble.

[0060] In order to ensure the image collection effect, in this embodiment, the position detection unit 200 further includes a surface light source 202 arranged below the camera 201, and the surface light source 202 is arranged opposite to the camera 201 to provide backlight for the camera 201, so as to ensure the image collection effect.

[0061] The processing platform 100 is provided with a scrap piece storage unit 300, which is used to store the workpiece with position offset.

[0062] The platform module further comprises a scrap piece transfer unit 400, which is arranged between the scrap suction station and the scrap piece storage unit 300, and is used to transfer the workpiece with position offset from the scrap suction station to the scrap piece storage unit 300.

[0063] It can be understood that when the camera 201 captures the image of the workpiece and determines that the position of the workpiece is offset based on the image, the workpiece can be directly transmitted to the scrap suction station without being processed, and the workpiece with position offset can be transferred by the scrap piece transfer unit 400 to the scrap piece storage unit 300 in the scrap suction station, which can avoid the waste of raw materials caused by processing the workpiece with position offset and can be reused, and can avoid the waste of raw materials, and can avoid processing the workpiece with position offset, thereby improving the processing efficiency and avoiding the subsequent screening process.

[0064] Specifically, please refer to Figure 3 , Figure 3 is a structural schematic diagram of an embodiment of the scrap piece transfer unit and the scrap piece storage unit of the present application.

[0065] In the embodiment, the scrap piece transfer unit 400 comprises a displacement driving mechanism 401 arranged on a column 500, the displacement driving mechanism 401 comprises a first end 4011 located at the scrap piece storage unit 300 and a second end 4012 located above the scrap suction station, and the displacement driving mechanism 401 comprises a moving end 4013 capable of switching positions between the first end 4011 and the second end 4012.

[0066] The moving end 4013 is provided with a cantilever 402, and the cantilever 402 faces a vacuum suction cup 403 on one side of the processing platform 100, and the vacuum suction cup 403 is used to adsorb and fix the workpiece.

[0067] It can be understood that when it is determined that the position of the workpiece is offset, the workpiece can be adsorbed and fixed by the vacuum suction cup 403 when it reaches the scrap suction station, and then the workpiece can be transferred to the scrap piece storage unit 300 under the action of the displacement driving mechanism 401, and then the vacuum suction cup 403 releases the workpiece to complete the storage of the scrap piece, and the stored workpiece can be reused.

[0068] In the embodiment, the displacement driving mechanism 401 is a magnetic coupling rodless cylinder, and in other embodiments, the displacement driving mechanism 401 can also adopt any linear displacement mechanism commonly used in the art, which can achieve the effect of the embodiment.

[0069] In the embodiment, the waste sheet storage unit 300 comprises a support 301 and a tray 302, the support 301 is arranged on the machining platform 100, and the tray 302 is arranged at the top end of the support 301, and a ring of baffles 303 is arranged on the circumferential surface of the tray 302.

[0070] In order to facilitate the transfer of the workpiece from the tray 302, a recess 304 is arranged at the outer edge of the tray 302.

[0071] In order to avoid the dust generated during laser processing from overflowing and adhering to the surface of the laser processing head, the platform module in the embodiment further comprises a dust collection unit 800, please refer to Figure 4 , Figure 4 is a structural schematic view of an embodiment of the dust collection unit of the application.

[0072] As Figure 4 shown, the dust collection unit 800 comprises a dust collection base 801, a dust collection cover 802 and a dust collection pipe 803.

[0073] The dust collection base 801 is arranged on the machining platform 100, the dust collection cover 802 is installed on the dust collection base 801, and the dust collection cover 802 is located above the machining station 102, and the bottom surface of the dust collection cover 802 is arranged with a first opening 8021 for exposing the workpiece, the top surface is arranged with a second opening 8022 for avoiding the laser, and the side surface is arranged with a dust collection port 8023, and one end of the dust collection pipe 803 is connected with the dust collection port 8023, so as to suck away and collect the dust generated during processing.

[0074] Based on the platform module of the above-mentioned embodiments, the workpiece can first be collected by the position detection unit 200 in the correction station 101, and the position of the workpiece is judged based on the image; when the position of the workpiece is offset, the workpiece can be directly controlled to skip the machining station 102 and reach the waste suction station, the waste sheet transfer unit 400 transfers the workpiece from the waste suction station to the waste sheet storage unit 300, so as to avoid the waste of raw materials and time caused by the machining of the workpiece with position offset, improve the machining efficiency and reduce the cost.

[0075] It is obvious for those skilled in the art that the present application is not limited to the details of the above-mentioned exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present application. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-limiting, the scope of the present application is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be regarded as limiting the claims involved.

[0076] Furthermore, it should be understood that although the specification is described in terms of embodiments, not every embodiment includes every feature or implementation described herein. The specification can include implicit combinations of explicitly mentioned features and / or implicit combinations of implicitly mentioned features. Such combinations are also expressly included within the scope of the specification and an embodiment.

Claims

1. A platform module for a laser processing production line, characterized in that, include: A processing platform, wherein a correction station, a processing station, and a waste suction station are arranged sequentially on the processing platform; A position detection unit is arranged above the correction station. The position detection unit is used to detect the position of the workpiece located at the correction station and determine whether the workpiece position is offset. A waste piece storage unit is arranged on the processing platform, and the waste piece storage unit is used to store workpieces whose positions are offset; A waste transfer unit is arranged between the waste suction station and the waste storage unit. The waste transfer unit is used to transfer workpieces with offset positions from the waste suction station to the waste storage unit.

2. The platform module according to claim 1, characterized in that, The correction station, processing station, and waste removal station are arranged in a ring.

3. The platform module according to claim 1, characterized in that, The position detection unit includes four cameras arranged at the four corners, with the camera's shooting end pointing towards the correction station, and each camera is used to capture an image of one corner of the workpiece.

4. The platform module according to claim 3, characterized in that, The position detection unit also includes a surface light source, which is arranged below the camera and opposite to the camera.

5. The platform module according to claim 3, characterized in that, Also includes: The columns are arranged on the processing platform; A top plate is arranged at the top of the column, and the top plate has a hollow part corresponding to the position of the correction station. A pair of back plates are arranged opposite each other, with one end of the back plate fixed to the side wall of the hollow part and the other end extending toward the direction of the correction station. The four cameras are symmetrically arranged on a pair of backplates.

6. The platform module according to claim 1, characterized in that, The waste film transfer unit includes: The displacement driving mechanism includes a first end located above the waste film storage unit and a second end located above the waste suction station. The displacement driving mechanism includes a movable end that can switch positions between the first end and the second end. Cantilever, arranged in the cantilever; A vacuum suction cup is arranged on the side of the cantilever facing the processing platform, and the vacuum suction cup is used to adsorb and fix the workpiece.

7. The platform module according to claim 6, characterized in that, It also includes a column, which is arranged on the processing platform, and the displacement driving mechanism is arranged on the column.

8. The platform module according to claim 1, characterized in that, It also includes a dust collection unit, which comprises: A dust collection base is arranged on the processing platform; A dust collection hood is installed on the dust collection base. The dust collection hood is located above the processing station. The bottom surface of the dust collection hood has a first opening for exposing the workpiece, the top surface has a second opening for avoiding the laser, and the side surface has a dust collection port. The dust collection pipe is connected at one end to the dust collection port.

9. The platform module according to claim 1, characterized in that, The waste film storage unit includes: A support frame is arranged on the processing platform; A tray is placed at the top of the support, and a baffle is arranged around the perimeter of the tray.

10. The platform module according to claim 9, characterized in that, The outer edge of the tray has a recessed portion.

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