Multi-chamber vacuum magnetic control coating machine

Abstract

The utility model discloses a multi-chamber vacuum magnetic control coating machine which comprises a plurality of vacuum cavities which are sequentially communicated, at least one of the vacuum cavities is used for carrying out magnetic control coating on workpieces, and partition devices are connected between the inlet ends and the outlet ends of the vacuum cavities and between the adjacent vacuum cavities. The partition device is used for opening or closing an inlet and outlet channel of a workpiece, a plurality of vacuumizing assemblies are arranged on the vacuum cavities, each vacuumizing assembly is composed of a plurality of molecular pumps, and the molecular pumps are used for vacuumizing the vacuum cavities. The multi-chamber vacuum magnetic control coating machine provided by the utility model is of a multi-vacuum cavity combined structure, and when two or more magnetic control coating cavities are arranged, a workpiece can be coated independently or simultaneously, so that the production efficiency is effectively improved; and the vacuum cavity is vacuumized by adopting a plurality of molecular pumps, so that the fluctuation of the vacuum degree is small, and the stability of vacuum coating can be effectively improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a multi-chamber vacuum magnetron coating machine. Background Technology

[0002] Existing vacuum magnetron coating equipment has a limited number of vacuum chambers, typically single or double chambers; and can only be used for vacuuming individually, not for coating workpieces simultaneously.

[0003] In addition, most existing vacuum magnetron sputtering coating equipment uses diffusion pumps to evacuate the vacuum chamber, which causes large fluctuations in vacuum level during the evacuation process, resulting in unstable coating and inconsistent quality of finished coating products with a high scrap rate.

[0004] Furthermore, existing vacuum magnetron coating equipment typically uses hinged or sliding doors for partitions, which not only results in poor structural sealing performance but also places high demands on the footprint and space required for the assembly of the entire equipment. Utility Model Content

[0005] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a multi-chamber vacuum magnetron coating machine, which is a multi-vacuum chamber combination structure. When there are two or more magnetron coating chambers, the workpiece can be coated individually or simultaneously, effectively improving production efficiency. Moreover, the vacuum chambers are evacuated by using multiple molecular pumps, resulting in small vacuum fluctuations, which can effectively improve the stability of vacuum coating.

[0006] The technical solution adopted by this utility model to solve its technical problem is:

[0007] A multi-chamber vacuum magnetron coating machine includes several vacuum chambers connected in sequence, and at least one vacuum chamber is used for magnetron coating of workpieces. Isolation devices are connected to the inlet end, outlet end and adjacent vacuum chambers of the vacuum chambers. The isolation devices are used to open or close the entry and exit channels of the workpieces. Several vacuum pumping components are provided on each vacuum chamber. The vacuum pumping components are composed of several molecular pumps and are used to evacuate the vacuum chambers.

[0008] A multi-chamber vacuum magnetron coating machine according to an embodiment of the present invention has at least the following beneficial effects:

[0009] This invention includes several vacuum chambers connected in sequence, with at least one of the vacuum chambers configured as a coating chamber for magnetron coating of workpieces. The combination of multiple vacuum chambers allows for individual or simultaneous coating of workpieces, effectively improving production efficiency. Isolation devices are connected to the inlet and outlet ends of the vacuum chambers and between adjacent vacuum chambers. These isolation devices can open or close the workpiece entry and exit channels, resulting in good structural sealing performance and a small overall footprint. Each vacuum chamber is equipped with several vacuum pumping components, which consist of several molecular pumps. This allows for vacuum evacuation of the vacuum chambers, resulting in minimal vacuum fluctuations and effectively improving the stability of vacuum coating.

[0010] According to some embodiments of this utility model, the vacuum chamber is provided with three chambers, which are, in order, a front low vacuum chamber, a magnetron coating chamber, and a rear low vacuum chamber.

[0011] The advantages are that the vacuum chambers are set up with three chambers, namely the front low vacuum chamber, the magnetron coating chamber and the rear low vacuum chamber. The workpiece is coated with magnetron in the magnetron coating chamber. The whole machine has three vacuum chambers, which makes the overall structure occupy less space and facilitates the installation and placement of the whole machine.

[0012] According to some embodiments of this utility model, four vacuum cavities are provided, which are sequentially a first vacuum cavity, a first coating cavity, a second coating cavity, and a second vacuum cavity.

[0013] The advantage is that when there are four vacuum chambers, namely the first vacuum chamber, the first coating chamber, the second coating chamber, and the second vacuum chamber, both the first and second coating chambers can perform magnetron coating on the workpiece. Thus, during the production process, the workpiece can be coated simultaneously, effectively improving the efficiency of coating the workpiece.

[0014] According to some embodiments of this utility model, vacuum pumping components are provided on both sides of the vacuum cavity.

[0015] The advantage is that vacuum pumping components are installed on both sides of the vacuum chamber, which makes the vacuum pumping components reasonably set, improving the vacuum pumping efficiency while ensuring the vacuum pumping effect.

[0016] According to some embodiments of this utility model, a plurality of molecular pumps are provided on the top of the magnetron coating cavity.

[0017] The advantage is that several molecular pumps are also installed at the top of the magnetron coating chamber, which ensures that there are enough molecular pumps to meet the vacuum requirements, thereby reducing vacuum fluctuations and improving the stability of vacuum coating.

[0018] According to some embodiments of this utility model, molecular pumps are respectively arranged at the corners of the top of the magnetron coating cavity.

[0019] The advantage is that by placing the molecular pump at the corner of the top of the magnetron coating chamber, the molecular pump is reasonably positioned and fully distributed, which can meet the vacuum requirements of the magnetron coating chamber and ensure the vacuum effect of the magnetron coating chamber.

[0020] According to some embodiments of this utility model, the molecular pump is a high-speed molecular pump.

[0021] The advantages are that high-speed molecular pumps are small in size and consume less energy. Compared with diffusion pumps, high-speed molecular pumps cause less contamination to the vacuum chamber, thus making the vacuuming process energy-saving and environmentally friendly.

[0022] According to some embodiments of this utility model, the isolation device is a vacuum slide valve.

[0023] The advantages are that the isolation device is a vacuum slide valve, and the workpiece entry and exit channels are opened or closed pneumatically, which makes the vacuum chamber have good sealing performance, small space occupation, and easy installation and use.

[0024] According to some embodiments of the present invention, a frame is also included for supporting the vacuum chamber.

[0025] The advantage is that by setting up a frame, the vacuum chamber can be installed and supported, which can make the vacuum chamber installation stable and ensure the stability and smoothness of the vacuum magnetron coating process.

[0026] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0027] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0028] Figure 1 This is a schematic diagram of the structure of an embodiment of the present utility model;

[0029] Figure 2 This is a schematic diagram of the structure of the first embodiment of the present utility model;

[0030] Figure 3 This is a schematic diagram of the structure of the second embodiment of the present utility model;

[0031] Figure 4 This is a schematic diagram of the structure of the vacuum slide valve according to an embodiment of the present invention.

[0032] Reference numerals: Vacuum chamber 100, Isolation device 110, Vacuum pumping assembly 120, Molecular pump 130, Front low vacuum chamber 140, Magnetron coating chamber 150, Rear low vacuum chamber 160, First vacuum chamber 170, First coating chamber 180, Second coating chamber 190, Second vacuum chamber 200, Vacuum gate valve 210, Valve body 220, Valve 230, Channel port 240, Drive cylinder 250, Frame 260. Detailed Implementation

[0033] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0034] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0035] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. If "first" or "second" is used in the description, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0036] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0037] The following is for reference. Figures 1-4 A multi-chamber vacuum magnetron coating machine is described in detail with reference to a specific embodiment. It is to be understood that the following description is merely illustrative and not intended to limit the scope of the invention.

[0038] like Figure 1As shown, a multi-chamber vacuum magnetron coating machine includes several vacuum chambers 100 connected in sequence, and at least one vacuum chamber 100 is used for magnetron coating of workpieces. Isolation devices 110 are connected to the inlet end, outlet end and adjacent vacuum chambers 100 of the vacuum chamber 100. Isolation devices 110 are used to open or close the inlet and outlet channels of workpieces. Several vacuum pumping components 120 are provided on each vacuum chamber 100. The vacuum pumping components 120 are composed of several molecular pumps 130. The molecular pumps 130 are used to evacuate the vacuum chamber 100.

[0039] This utility model includes several vacuum chambers 100 connected in sequence, and at least one of the vacuum chambers 100 is configured as a coating chamber for magnetron coating of workpieces. The structure of multiple vacuum chambers 100 combined allows for individual or simultaneous coating of workpieces, effectively improving production efficiency. Isolation devices 110 are connected to the inlet and outlet ends of the vacuum chambers 100 and between adjacent vacuum chambers 100. Isolation devices 110 can open or close the entry and exit channels of workpieces, thereby resulting in good structural sealing performance and small overall space occupation. Several vacuum pumping components 120 are provided on each vacuum chamber 100, and the vacuum pumping components 120 are composed of several molecular pumps 130, thereby allowing vacuum pumping of the vacuum chambers 100, resulting in small vacuum fluctuations and effectively improving the stability of vacuum coating.

[0040] In the first specific embodiment of this utility model, specific reference is made. Figure 1 and Figure 2 The vacuum chamber 100 is provided with three chambers, namely the front low vacuum chamber 140, the magnetron coating chamber 150, and the rear low vacuum chamber 160100.

[0041] The vacuum chamber 100 is configured with three chambers, namely the front low vacuum chamber 140, the magnetron coating chamber 150, and the rear low vacuum chamber 160. The workpiece is magnetron coated in the magnetron coating chamber 150. The whole machine consists of three vacuum chambers 100, which makes the overall structure occupy less space and facilitates the installation and placement of the whole machine.

[0042] In the second specific embodiment of this utility model, referring to Figure 3 The vacuum chamber 100 is provided with four chambers, which are, in order, the first vacuum chamber 170, the first coating chamber 180, the second coating chamber 190, and the second vacuum chamber 200.

[0043] When four vacuum chambers 100 are set, they are, in sequence, the first vacuum chamber 170, the first coating chamber 180, the second coating chamber 190, and the second vacuum chamber 200. Both the first coating chamber 180 and the second coating chamber 190 can perform magnetron coating on the workpiece. Thus, during the production process, the workpiece can be coated simultaneously, effectively improving the efficiency of coating the workpiece.

[0044] Specifically, vacuum pumping components 120 are provided on both sides of the vacuum chamber 100.

[0045] Vacuum pumping components 120 are provided on both sides of the vacuum chamber 100, thereby making the vacuum pumping components 120 reasonably positioned, improving the vacuum pumping efficiency while ensuring the vacuum pumping effect.

[0046] In some specific embodiments of this utility model, a plurality of molecular pumps 130 are provided on the top of the magnetron coating cavity 150.

[0047] Several molecular pumps 130 are also installed at the top of the magnetron coating chamber, thus ensuring that there are enough molecular pumps 130 to meet the vacuum requirements, thereby reducing vacuum fluctuations and improving the stability of vacuum coating.

[0048] Furthermore, the molecular pumps 130 are respectively located at the corners of the top of the magnetron coating cavity 150.

[0049] By placing the molecular pump 130 at the corner of the top of the magnetron coating cavity 150, the molecular pump 130 is reasonably positioned and fully distributed, which can meet the vacuuming requirements of the magnetron coating cavity 150 and ensure the vacuuming effect of the magnetron coating cavity 150.

[0050] Preferably, the molecular pump 130 is a high-speed molecular pump 130.

[0051] The high-speed molecular pump 130 is characterized by its small size and low energy consumption. Compared with the diffusion pump, the high-speed molecular pump 130 causes less contamination to the vacuum chamber 100, thereby making the vacuuming process energy-saving and environmentally friendly.

[0052] Reference Figure 4 The isolation device 110 is a vacuum slide valve 210.

[0053] It should be noted that the vacuum slide valve 210 includes a valve body 220, a valve 230, and a drive mechanism. The valve body 220 has a workpiece passage 240. The valve 230 is located at the passage 240 and can isolate and seal adjacent vacuum chambers 100. The drive mechanism includes drive cylinders 250 respectively located on both sides of the passage 240. The drive cylinders 250 can drive the valve 230 to rise and fall to open or close the workpiece entry and exit passage.

[0054] The isolation device 110 is a vacuum slide valve 210, which opens or closes the workpiece entry and exit channel by means of pneumatic means, thereby making the vacuum chamber 100 have good sealing performance, occupy little space, and be easy to install and use.

[0055] Preferably, it also includes a frame 260 for supporting the vacuum chamber 100.

[0056] By setting up the frame 260, the vacuum chamber 100 can be installed and supported, which can make the vacuum chamber 100 installed stably and ensure the stability and smoothness of the vacuum magnetron coating process.

[0057] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A multi-chamber vacuum magnetron coating machine, characterized in that, include: A plurality of sequentially connected vacuum chambers (100), and at least one of the vacuum chambers (100) is used for magnetron coating of workpieces. Isolation devices (110) are connected to the inlet end, outlet end and adjacent vacuum chambers (100) of the vacuum chambers (100). The isolation devices (110) are used to open or close the entry and exit channels of the workpieces. A plurality of vacuum pumping components (120) are provided on each vacuum chamber (100). The vacuum pumping components (120) are composed of a plurality of molecular pumps (130). The molecular pumps (130) are used to evacuate the vacuum chambers (100).

2. The multi-chamber vacuum magnetron coating machine according to claim 1, characterized in that, The vacuum chamber (100) is provided in three parts, namely, a front low vacuum chamber (140), a magnetron coating chamber (150), and a rear low vacuum chamber (160).

3. The multi-chamber vacuum magnetron coating machine according to claim 1, characterized in that, The vacuum chamber (100) is provided in four parts, which are, in order, the first vacuum chamber (170), the first coating chamber (180), the second coating chamber (190), and the second vacuum chamber (200).

4. The multi-chamber vacuum magnetron coating machine according to claim 1, characterized in that, The vacuum chamber (100) is provided with vacuum pumping components (120) on both sides.

5. A multi-chamber vacuum magnetron coating machine according to claim 2, characterized in that, A plurality of molecular pumps (130) are provided on the top of the magnetron coating cavity (150).

6. A multi-chamber vacuum magnetron coating machine according to claim 5, characterized in that, The molecular pumps (130) are respectively located at the corners of the top of the magnetron coating cavity (150).

7. A multi-chamber vacuum magnetron coating machine according to claim 1, characterized in that, The molecular pump (130) is a high-speed molecular pump (130).

8. A multi-chamber vacuum magnetron coating machine according to claim 1, characterized in that, The isolation device (110) is a vacuum slide valve (210).

9. A multi-chamber vacuum magnetron coating machine according to claim 1, characterized in that, It also includes a frame (260) for supporting the vacuum chamber (100).

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