Plating solution recovery device for electroplating of wafer cutting blade

Abstract

The utility model discloses a plating solution recovery device for wafer cutting blade electroplating, which relates to the technical field of wafer cutting blade electroplating, and has the technical key points that the plating solution recovery device comprises a filter box and four supporting legs fixedly arranged on the bottom surface of the filter box, and a filter mechanism and a collection mechanism are arranged in the filter box; the device has the technical effects that the filtering mechanism is composed of a fixing frame, a filter screen and a fixing part, and the device has the good effects that plating solution impurities are efficiently filtered, the filter screen is convenient to maintain and replace, and the structural stability is guaranteed. Specifically, impurities in the plating solution can be effectively filtered through the fixing frame and the filter screen, the recovery quality of the plating solution is improved, and the stability of the plating solution is guaranteed through the mounting frame and the inclined plate; structures such as a control frame, a connecting block, a movable frame, an inserting groove, a spring, a damper, an arc-shaped block, an inclined block, a wedge-shaped groove, a threaded rod and a nut of the fixing part are matched with one another, and the filter screen can be conveniently fixed and detached.

Description

Technical Field

[0001] This utility model relates to the field of electroplating technology for wafer dicing blades, specifically to a plating solution recovery device for electroplating wafer dicing blades. Background Technology

[0002] Blade cutting refers to the process of cutting wafers using diamond blades. It is a purely physical cutting method to split the wafer, and wafers with a thickness of 100um or more are generally suitable for this dicing method.

[0003] Electroplating is required during the manufacturing of wafer dicing blades. During the electroplating process, the plating solution often contains various impurities. If these impurities are not effectively filtered and recycled, they will pollute the environment and waste resources.

[0004] Existing plating solution recovery devices often have their filter screens clogged with impurities during plating solution filtration, requiring the screens to be removed and cleared. The disassembly process for existing screens is cumbersome and inconvenient. Therefore, a plating solution recovery device for electroplating wafer dicing blades is proposed. Utility Model Content

[0005] To achieve the above objectives, the present invention provides the following technical solution: a plating solution recovery device for electroplating wafer cutting blades, comprising a filter box and four support legs fixedly disposed on the bottom surface of the filter box, wherein the filter box is provided with a filtration mechanism and a collection mechanism.

[0006] The collection mechanism is located behind the filtration mechanism;

[0007] The filtration mechanism includes a filtration section and a fixing section;

[0008] The filtration unit includes a fixed frame and a filter screen, and the fixed part includes a control frame and a connecting block;

[0009] The top surface of the filter box has a through groove, and the inner wall of the groove is slidably connected to the surface of the connecting block. The top surface of the fixed frame is fixedly connected to the bottom surface of the connecting block, and the inner side of the fixed frame is fixedly connected to the side of the filter screen. Two fixed frames are fixedly installed on the left and right ends of the filter box, and two movable frames are slidably installed on the opposite side of the two fixed frames, extending to the inner side of the two fixed frames. Two slots are opened on the left and right ends of the connecting block, and the adjacent side of the two movable frames extends to the inner wall of the two slots.

[0010] Preferably, the collection mechanism includes a collection frame, a placement groove is provided on the bottom inner side of the filter box, the surface of the collection frame is slidably connected to the inner wall of the placement groove, a through groove is provided on the right side of the filter box, a pull block is slidably provided on the inner wall of the through groove, and the left side of the pull block is fixedly connected to the right side of the collection frame.

[0011] Preferably, two springs and two dampers are fixedly installed on the inner sides of the two movable frames respectively, and the sides of the two springs and two dampers that are close to each other are fixedly connected to the sides of the two fixed frames that are far from each other.

[0012] Preferably, two square plates are fixedly arranged on the front of the two movable frames respectively, and two arc-shaped blocks are fixedly arranged on the side of the two square plates that are close to each other. Two wedge-shaped grooves are opened on the left and right end faces of the filter box respectively, and two wedge blocks are slidably arranged on the inner walls of the two wedge grooves respectively. Two inclined blocks are fixedly arranged on the side of the two wedge blocks that are far from each other respectively, and the inclined surfaces of the two inclined blocks are slidably connected to the surfaces of the two arc-shaped blocks respectively.

[0013] Preferably, a fixing plate is fixedly installed on the front of the filter box, the bottom surfaces of the two inclined blocks are respectively fixedly connected to the top surface of the control frame, a threaded rod is fixedly installed on the top surface of the fixing plate, the top surface of the threaded rod extends from the bottom surface of the control frame to the top of the control frame, and a nut is rotatably installed on the top surface of the control frame through a bearing seat, the inner side of the nut is threadedly connected to the surface of the threaded rod.

[0014] Preferably, two mounting frames are fixedly provided on the left and right end faces of the inner side of the filter box, and the inner sides of the two mounting frames are slidably connected to the surface of the fixed frame.

[0015] Preferably, inclined plates are fixedly provided on one side of the two mounting frames, insertion holes are provided on the back of the pull block, a slide rail is fixedly provided on the right side of the filter box, a sliding sleeve is slidably fitted on the surface of the slide rail, an insertion rod is fixedly provided on the right side of the sliding sleeve, and the front end of the insertion rod extends to the inner wall of the slot.

[0016] Preferably, an outlet pipe is fixedly provided through the front of the filter box and extends into the interior of the filter box, and an inlet pipe is fixedly provided through the back of the filter box and extends into the interior of the filter box. Beneficial effects

[0017] Compared with the prior art, this utility model provides a plating solution recovery device for electroplating wafer dicing blades, which has the following beneficial effects:

[0018] 1. The filtration mechanism consists of a fixed frame, a filter screen, and a fixing part. It effectively filters impurities in the plating solution, facilitates maintenance and filter screen replacement, and ensures structural stability. Specifically, the fixed frame and filter screen effectively filter impurities in the plating solution, improving the quality of plating solution recovery. The mounting frame and inclined plate ensure its stability. The fixing part, with its control frame, connecting block, moving frame, slot, spring, damper, arc block, inclined block, wedge groove, threaded rod, and nut, works together to easily fix and disassemble the filter screen, improving maintenance efficiency. Simultaneously, the combination of the fixed frame, moving frame, spring, and damper ensures the stability of the filter screen during the filtration process, preventing it from shaking and affecting the filtration effect.

[0019] 2. The collection mechanism consists of components such as a collection frame, pull blocks, and through channels. The filtered plating solution flows into the collection frame for collection. The pull blocks allow the collection frame to be easily removed from the filter box, facilitating subsequent processing of the recovered plating solution. The slide rail, sliding sleeve, and insert rod design allows the pull blocks to be fixed after the collection frame is installed by inserting the insert rod into the insertion hole, further ensuring the stability of the collection frame during use. Attached Figure Description

[0020] Figure 1 This is a three-dimensional view of the left side of the present invention;

[0021] Figure 2 This is a three-dimensional view of the rear side of the present invention;

[0022] Figure 3 This is a front sectional perspective view of the present invention;

[0023] Figure 4 This is a top view of the three-dimensional cross-section of the present invention;

[0024] Figure 5 This utility model Figure 2 Enlarged 3D schematic diagram of area A in the middle;

[0025] Figure 6 This utility model Figure 4 Enlarged 3D schematic diagram of area B in the middle.

[0026] In the diagram: 1. Filter box; 2. Filtering mechanism; 21. Control frame; 22. Inclined block; 23. Arc block; 24. Connecting block; 25. Threaded rod; 26. Nut; 27. Fixing plate; 28. Fixing frame; 29. ​​Filter screen; 210. Mounting frame; 211. Moving frame; 212. Fixing frame; 213. Spring; 214. Damper; 3. Inlet pipe; 4. Support leg; 5. Outlet pipe; 6. Collection mechanism; 61. Inclined plate; 62. Collection frame; 63. Pull block; 64. Sliding sleeve; 65. Slide rail; 66. Insert rod. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example 1

[0028] like Figures 1-6 As shown, this embodiment proposes a filter box 1 and four support legs 4 fixedly installed on the bottom surface of the filter box 1. The filter box 1 is equipped with a filter mechanism 2 and a collection mechanism 6.

[0029] The collection mechanism 6 is located behind the filtration mechanism 2;

[0030] Filter mechanism 2 includes a filter section and a fixing section;

[0031] The filter section includes a fixed frame 28 and a filter screen 29, and the fixed section includes a control frame 21 and a connecting block 24;

[0032] A sliding groove is provided through the top surface of the filter box 1. The inner wall of the sliding groove is slidably connected to the surface of the connecting block 24. The top surface of the fixed frame 28 is fixedly connected to the bottom surface of the connecting block 24. The inner side of the fixed frame 28 is fixedly connected to the side of the filter screen 29. Two fixed frames 212 are fixedly installed on the left and right ends of the filter box 1, respectively. Two movable frames 211 are slidably provided through the sides of the two fixed frames 212, extending into the inner side of the two fixed frames 212. Two slots are provided on the left and right ends of the connecting block 24, respectively. The sides of the two movable frames 211 extend into the inner walls of the two slots, respectively. Two springs 213 and two dampers 214 are fixedly installed on the inner sides of the two movable frames 211, respectively. The sides of the two springs 213 and two dampers 214 are fixedly connected to the sides of the two fixed frames 212, respectively. Two square plates are fixedly installed on the front of the two movable frames 211, respectively. Two arc-shaped blocks 23 are fixedly installed on the sides of the two square plates, respectively. The left side of the filter box 1... Two wedge-shaped grooves are respectively opened on the right end face. Two wedge-shaped blocks are slidably arranged on the inner wall of the two wedge-shaped grooves. Two inclined blocks 22 are fixedly arranged on the opposite side of the two wedge blocks. The inclined surfaces of the two inclined blocks 22 are slidably connected to the surfaces of the two arc-shaped blocks 23. A fixing plate 27 is fixedly arranged on the front of the filter box 1. The bottom surfaces of the two inclined blocks 22 are fixedly connected to the top surface of the control frame 21. A threaded rod 25 is fixedly arranged on the top surface of the fixing plate 27. The top surface of the threaded rod 25 extends from the bottom surface of the control frame 21 to the top of the control frame 21. A nut 26 is rotatably arranged on the top surface of the control frame 21 through a bearing seat. The inner side of the nut 26 is threadedly connected to the surface of the threaded rod 25. Two mounting frames 210 are fixedly arranged on the left and right end faces of the inner side of the filter box 1. The inner sides of the two mounting frames 210 are slidably connected to the surface of the fixing frame 28. An outlet pipe 5 is fixedly arranged through the front of the filter box 1 and extends into the interior of the filter box 1. An inlet pipe 3 is fixedly arranged through the back of the filter box 1 and extends into the interior of the filter box 1.

[0033] In this embodiment, the filtration mechanism 2 consists of a fixed frame 28, a filter screen 29, and a fixing part. It has the advantages of efficient filtration of plating solution impurities, convenient maintenance and replacement of the filter screen 29, and ensuring structural stability. Specifically, the fixed frame 28 and the filter screen 29 can effectively filter impurities in the plating solution, improving the recovery quality of the plating solution. The mounting frame 210 and the inclined plate 61 ensure its stability. The control frame 21, connecting block 24, moving frame 211, slot, spring 213, damper 214, arc block 23, inclined block 22, wedge groove, threaded rod 25, and nut 26 of the fixing part cooperate with each other to easily fix and disassemble the filter screen 29, improving maintenance efficiency. At the same time, the combination of the fixed frame 212, moving frame 211, spring 213, and damper 214 ensures the stability of the filter screen 29 during the filtration process, preventing it from shaking and affecting the filtration effect. Example 2

[0034] like Figures 1-6As shown, based on the same concept as Embodiment 1 above, this embodiment also proposes that the collection mechanism 6 includes a collection frame 62, a placement groove is provided on the bottom inner side of the filter box 1, the surface of the collection frame 62 is slidably connected to the inner wall of the placement groove, a through groove is provided on the right side of the filter box 1, a pull block 63 is slidably provided on the inner wall of the through groove, the left side of the pull block 63 is fixedly connected to the right side of the collection frame 62, an inclined plate 61 is fixedly provided on one side of the two mounting frames 210, an insertion hole is provided on the back of the pull block 63, a slide rail 65 is fixedly provided on the right side of the filter box 1, a sliding sleeve 64 is slidably fitted on the surface of the slide rail 65, an insertion rod 66 is fixedly provided on the right side of the sliding sleeve 64, and the front end of the insertion rod 66 extends to the inner wall of the slot.

[0035] In this embodiment, the collection mechanism 6 includes components such as a collection frame 62, a pull block 63, and a through groove. The filtered plating solution flows into the collection frame 62 for collection. The pull block 63 allows the collection frame 62 to be easily removed from the filter box 1, facilitating subsequent processing of the recovered plating solution. The slide rail 65, sliding sleeve 64, and insert rod 66 allow the pull block 63 to be fixed after the collection frame 62 is installed, by inserting the insert rod 66 into the insertion hole, thereby further ensuring the stability of the collection frame during use.

[0036] In use, wastewater is transported to the filter box 1 through the inlet pipe 3. The wastewater is then filtered by passing through the filter screen 29. If the filter screen 29 becomes clogged, the nut 26 is manually rotated. When the nut 26 rotates, the control frame 21 moves up and down via the threaded rod 25. When the control frame 21 moves upward, it drives the two inclined blocks 22 to move synchronously. When the two inclined blocks 22 move upward, they can squeeze the two arc-shaped blocks 23. When the two arc-shaped blocks 23 are squeezed, the two moving frames 211 can move to the left and right sides respectively. When the two moving frames 211 move to the left and right sides respectively, it can... The two movable brackets 211 are disengaged from the two slots. After disengagement, the filter screen 29 can be removed by pulling it upward to the connecting block 24. After cleaning it, it is inserted into the filter box 1. During insertion, it can be limited by the two mounting frames 210. The two inclined blocks 22 can be moved downward by manually controlling the nut 26 to reverse. When the two inclined blocks 22 move downward, the two movable brackets 211 can be inserted into the inner wall of the two slots by the two springs 213 and the two dampers 214, thereby fixing the filter screen 29. The filtered plating solution can be discharged through the outlet pipe 5.

[0037] Impurities generated during filtration can fall into the collection frame 62 through the inclined plate 61. When the collection frame 62 is full, it can be pulled out. When pulling it out, manually control the sliding sleeve 64 to move backward, so that the insertion rod 66 disengages from the insertion hole, and then the collection frame 62 can be taken out. When installation is required, manually insert it through the through groove into the placement groove. Then manually control the insertion rod 66 to move forward to insert the insertion rod 66 into the slot, thereby fixing the collection frame 62.

[0038] The above are merely specific embodiments of this utility model, but the technical features of this utility model are not limited thereto. Any simple changes, equivalent substitutions, or modifications made based on this utility model to solve essentially the same technical problems and achieve essentially the same technical effects are all covered within the protection scope of this utility model.

Claims

1. A plating solution recovery device for electroplating wafer dicing blades, comprising a filter box (1) and four support legs (4) fixedly disposed on the bottom surface of the filter box (1), characterized in that: The filter box (1) is equipped with a filter mechanism (2) and a collection mechanism (6). The collection mechanism (6) is located behind the filtration mechanism (2); The filtration mechanism (2) includes a filtration section and a fixing section; The filter section includes a fixed frame (28) and a filter screen (29), and the fixed section includes a control frame (21) and a connecting block (24). The top surface of the filter box (1) is provided with a sliding groove, the inner wall of the sliding groove is slidably connected to the surface of the connecting block (24), the top surface of the fixed frame (28) is fixedly connected to the bottom surface of the connecting block (24), the inner side of the fixed frame (28) is fixedly connected to the side of the filter screen (29), two fixed frames (212) are fixedly provided on the left and right ends of the filter box (1), and two movable frames (211) are slidably provided on the opposite side of the two fixed frames (212) extending to the inner side of the two fixed frames (212). Two slots are provided on the left and right ends of the connecting block (24), and the opposite side of the two movable frames (211) extends to the inner wall of the two slots.

2. The plating solution recovery device for wafer dicing blade electroplating according to claim 1, characterized in that: The collection mechanism (6) includes a collection frame (62), a placement groove is provided on the inner bottom surface of the filter box (1), the surface of the collection frame (62) is slidably connected to the inner wall of the placement groove, a through groove is provided on the right side of the filter box (1), a pull block (63) is slidably provided on the inner wall of the through groove, and the left side of the pull block (63) is fixedly connected to the right side of the collection frame (62).

3. The plating solution recovery device for wafer dicing blade electroplating according to claim 1, characterized in that: Two springs (213) and two dampers (214) are fixedly installed on the inner sides of the two movable frames (211), and the sides of the two springs (213) and the two dampers (214) that are close to each other are fixedly connected to the sides of the two fixed frames (212) that are far from each other.

4. The plating solution recovery device for wafer dicing blade electroplating according to claim 3, characterized in that: Two square plates are fixedly installed on the front of the two movable frames (211), and two arc-shaped blocks (23) are fixedly installed on the side of the two square plates that are close to each other. Two wedge-shaped grooves are opened on the left and right end faces of the filter box (1), and two wedge blocks are slidably installed on the inner walls of the two wedge grooves. Two inclined blocks (22) are fixedly installed on the side of the two wedge blocks that are far from each other. The inclined surfaces of the two inclined blocks (22) are slidably connected to the surfaces of the two arc-shaped blocks (23).

5. A plating solution recovery device for electroplating wafer dicing blades according to claim 4, characterized in that: The filter box (1) is fixedly provided with a fixing plate (27) on the front. The bottom surfaces of the two inclined blocks (22) are fixedly connected to the top surface of the control frame (21). The top surface of the fixing plate (27) is fixedly provided with a threaded rod (25). The top surface of the threaded rod (25) extends from the bottom surface of the control frame (21) to the top of the control frame (21). The top surface of the control frame (21) is rotatably provided with a nut (26) through a bearing seat. The inner side of the nut (26) is threadedly connected to the surface of the threaded rod (25).

6. The plating solution recovery device for wafer dicing blade electroplating according to claim 2, characterized in that: Two mounting frames (210) are fixedly installed on the left and right end faces of the inner side of the filter box (1), and the inner sides of the two mounting frames (210) are slidably connected to the surface of the fixed frame (28).

7. A plating solution recovery device for electroplating wafer dicing blades according to claim 6, characterized in that: An inclined plate (61) is fixedly provided on one side of the two mounting frames (210). An insertion hole is provided on the back of the pull block (63). A slide rail (65) is fixedly provided on the right side of the filter box (1). A sliding sleeve (64) is slidably sleeved on the surface of the slide rail (65). An insertion rod (66) is fixedly provided on the right side of the sliding sleeve (64). The front end of the insertion rod (66) extends to the inner wall of the slot.

8. The plating solution recovery device for wafer dicing blade electroplating according to claim 1, characterized in that: The filter box (1) has a liquid outlet pipe (5) fixedly installed through the front and extends into the filter box (1), and the filter box (1) has a liquid inlet pipe (3) fixedly installed through the back and extends into the filter box (1).

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