Positive and negative pressure switching control loop

Abstract

The utility model relates to the field of semiconductors, in particular to a positive and negative pressure switching control loop, which comprises a sucker, a controller, a filtering tank, a first electromagnetic valve and a second electromagnetic valve, the filtering tank, the first electromagnetic valve and the second electromagnetic valve are respectively connected with the controller, the filtering tank is communicated with the sucker, and the first electromagnetic valve is provided with a first air outlet, a negative pressure inlet and a first positive pressure inlet. The first air outlet is communicated with the filtering tank, the negative pressure inlet is used for being communicated with a negative pressure air source, and a first on-off valve connected with the controller is arranged on the negative pressure inlet; a second air outlet and a second positive pressure inlet are formed in the second electromagnetic valve, the second air outlet is communicated with the first positive pressure inlet through a pipeline, and the second positive pressure inlet is used for being communicated with a positive pressure air source; when the first on-off valve is closed and the second electromagnetic valve is opened, the suction cup is in a positive pressure state; when the first on-off valve is opened and the second electromagnetic valve is closed, the suction cup is in a negative pressure state, and by means of the technical scheme, the problems that positive pressure and negative pressure cannot be freely switched, and the failure rate is high are solved.

Description

Technical Field

[0001] This utility model relates to a pressure control circuit, specifically a positive and negative pressure switching control circuit. Background Technology

[0002] During the operation of semiconductor wafer cutting equipment, negative pressure is first used to help the suction cup to pick up the sample wafer. Since water is involved in the cutting process, the suction cup will suck in some sewage. If the sewage enters the control circuit, it will damage the solenoid valve and control equipment, resulting in a high equipment failure rate and high maintenance and repair costs.

[0003] After the sample is cut, it needs to be placed in the initial position. The sample needs to be detached by compressed air blowing into the suction cup. The compressed air blows the sample off the suction cup. However, the existing control circuit cannot achieve automatic switching between positive and negative pressure, which affects production efficiency.

[0004] Therefore, designing a control loop that can freely switch between positive and negative pressure has become an urgent problem to be solved. Utility Model Content

[0005] In order to solve the problems in related technologies, this utility model provides a positive and negative pressure switching control circuit, which solves the problems of the inability to freely switch between positive and negative pressure and the high failure rate.

[0006] To solve the above problems, the following technical solutions are provided:

[0007] A positive and negative pressure switching control circuit includes a suction cup and a controller. It is characterized by further including a filter canister, a first solenoid valve and a second solenoid valve, which are respectively connected to the controller. The filter canister is connected to the suction cup. The first solenoid valve has a first air outlet, a negative pressure inlet and a first positive pressure inlet. The first air outlet is connected to the filter canister. The negative pressure inlet is used to connect to a negative pressure air source. A first on / off valve connected to the controller is provided on the negative pressure inlet.

[0008] The second solenoid valve has a second air outlet and a second positive pressure inlet. The second air outlet and the first positive pressure inlet are connected by a pipe. The second positive pressure inlet is used to connect to a positive pressure air source.

[0009] When the first air outlet, the first positive pressure inlet, the second air outlet, and the second positive pressure inlet are in a connected state, and the negative pressure inlet is not connected to the first air outlet and the first positive pressure inlet, the suction cup is in a positive pressure state.

[0010] When the first air outlet, the negative pressure inlet, and the first on / off valve are connected, and the first positive pressure inlet, the second air outlet, and the second positive pressure inlet are all disconnected, the suction cup is in a negative pressure state.

[0011] Through the above technical solution, by setting the first solenoid valve and the second solenoid valve, the positive and negative pressure of the suction cup can be switched by controlling the on and off states of the first solenoid valve and the second solenoid valve according to production needs, thereby realizing the free switching of positive and negative pressure and improving production efficiency.

[0012] By using a filter canister, when the suction cup is under negative pressure to adsorb samples, the filter canister will filter the wastewater sucked in by the suction cup. This can prevent wastewater from entering the first or second solenoid valve, thereby reducing the probability of the device malfunctioning and thus reducing maintenance frequency and costs.

[0013] Furthermore, a drain pipe is connected to the filter tank, and a second on / off valve is installed on the drain pipe, which is connected to the controller.

[0014] Through the above technical solution, by setting the second on-off valve, the sewage in the suction cup can be discharged periodically after the second on-off valve is opened periodically, and then the discharged sewage can be centrally treated, thereby reducing maintenance costs.

[0015] Furthermore, the negative pressure inlet is connected to a first vent pipe, the other end of which is used to connect to a negative pressure gas source, and the first on / off valve is installed on the first vent pipe.

[0016] Furthermore, the first solenoid valve is a three-way valve, and the second solenoid valve is a five-way valve; the three-way valve is a two-position three-way valve, and the five-way valve is a three-position five-way valve.

[0017] Furthermore, the controller is a PLC controller.

[0018] The above scheme has the following advantages for the positive and negative pressure switching control loop:

[0019] 1. By setting the first and second solenoid valves, the positive and negative pressure of the suction cup can be switched according to the production needs by controlling the on and off states of the first and second solenoid valves, thereby achieving free switching between positive and negative pressure and improving production efficiency; by setting the filter tank, when the suction cup is in a negative pressure state to adsorb samples, the filter tank will filter the wastewater sucked in by the suction cup, which can prevent wastewater from entering the first or second solenoid valve, thereby reducing the probability of the device malfunctioning, and thus reducing the maintenance frequency and maintenance costs.

[0020] 2. By setting the second on / off valve, the sewage in the suction cup can be discharged periodically after the second on / off valve is opened periodically, and the discharged sewage can be centrally treated, thereby reducing maintenance costs. Attached Figure Description

[0021] To make the content of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings, wherein:

[0022] Figure 1 This is a schematic diagram of the positive and negative pressure switching control loop;

[0023] Figure 2 This is a schematic diagram showing the suction cup in a negative pressure state in the positive and negative pressure switching control loop;

[0024] Figure 3 This is a schematic diagram showing the suction cup in a positive pressure state in the positive and negative pressure switching control loop;

[0025] Figure 4 This is a schematic diagram showing the second on / off valve in the positive / negative pressure switching control loop in the open state.

[0026] Explanation of reference numerals in the attached diagram: 1. Suction cup; 2. Filter canister; 3. Three-way valve; 4. Five-way valve; 5. First air outlet; 6. Negative pressure inlet; 7. First positive pressure inlet; 8. First shut-off valve; 9. Second air outlet; 10. Second positive pressure inlet; 11. Drain pipe; 12. Second shut-off valve; 13. First vent pipe. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0028] In specific embodiment 1, such as Figure 1-2 and Figure 4 As shown, the positive and negative pressure switching control circuit includes a suction cup 1 and a controller, which is a PLC controller. The positive and negative pressure switching control circuit also includes a filter tank 2, a first solenoid valve and a second solenoid valve, which are respectively connected to the controller. The filter tank 2 and the suction cup 1 are connected. The first solenoid valve is a three-way valve 3, which is a two-position three-way valve. The second solenoid valve is a five-way valve 4, which is a three-position five-way valve.

[0029] The first solenoid valve has a first air outlet 5, a negative pressure inlet 6 and a first positive pressure inlet 7. The first air outlet 5 is connected to the filter tank 2. The negative pressure inlet 6 is used to connect to the negative pressure air source, and a first on / off valve 8 connected to the controller is provided on the negative pressure inlet 6.

[0030] When the first air outlet 5, the first positive pressure inlet 7, the second air outlet 9, and the second positive pressure inlet 10 are in a connected state, and the negative pressure inlet 6 is not connected to both the first air outlet 5 and the first positive pressure inlet 7, the suction cup 1 is in a positive pressure state.

[0031] When the first air outlet 5, the negative pressure inlet 6, and the first on / off valve 8 are connected, and the first positive pressure inlet 7, the second air outlet 9, and the second positive pressure inlet 10 are all disconnected, the suction cup 1 is in a negative pressure state.

[0032] The positive and negative pressure of suction cup 1 can be switched by controlling the on / off state of three-way valve 3 and five-way valve 4 according to production needs, thereby achieving free switching between positive and negative pressure and improving production efficiency.

[0033] When the suction cup 1 is under negative pressure to adsorb the sample, the filter canister 2 will filter the wastewater sucked in by the suction cup 1. This can prevent the wastewater from entering the three-way valve 3 or the five-way valve 4, thereby reducing the probability of the device malfunctioning, and thus reducing the maintenance frequency and maintenance cost.

[0034] Both two-position three-way valves and three-position five-way valves are existing technologies. The selection of models for these valves should be sufficient to achieve the technical effects described in this application, and will not be elaborated upon further here. In this application, the three-position five-way valve uses only one inlet and one outlet; the other three ports are not used and will not be described in detail.

[0035] The filter tank 2 is used to filter sewage. The filter tank 2 includes an installation mechanism and a filter layer. The filter layer can be selected to remove impurities from the sewage. It will not be described in detail here. The installation mechanism is used to connect the filter layer that filters impurities and the suction cup 1. The specific structure of the installation mechanism and the connection method between the installation mechanism and the suction cup 1 are all existing technologies. The model of the installation mechanism can be selected to allow for quick installation and removal within the suction cup 1. It will not be described in detail here.

[0036] In specific embodiment 1, such as Figure 2 As shown, at this time, the first on / off valve 8 is in the open state, the second on / off valve 12 is in the closed state, and the three-position five-way valve is in the closed state. Therefore, only the negative pressure air source will suck away the air around the suction cup 1. At this time, the suction cup 1 is in a negative pressure state, so that the sample can be adsorbed.

[0037] The filter tank 2 is connected to a drain pipe 11, and a second on / off valve 12 is installed on the drain pipe 11. The second on / off valve 12 is connected to the controller. The sewage in the suction cup 1 can be discharged periodically by opening the second on / off valve 1, so that the discharged sewage can be centrally treated, thereby reducing maintenance costs.

[0038] The negative pressure inlet 6 is connected to the first vent pipe 13, and the other end of the first vent pipe 13 is used to connect to the negative pressure air source. The first on / off valve 8 is installed on the first vent pipe 13.

[0039] In this specific embodiment 1, as Figure 4 As shown, with the long-term use of the filter tank 2, the second on / off valve 12 is in the open state, and at this time the sewage can be discharged through the drain pipe 11.

[0040] Specific Implementation Example 2: As shown in the example Figure 1 and Figure 3 As shown, the difference between this specific embodiment 2 and embodiment 1 is that the first on / off valve 8 is in the closed state, the second on / off valve 12 is in the closed state, and the three-position five-way valve is in the open state. Therefore, only the positive pressure air source can enter the suction cup 1 through the two-position three-way valve. At this time, the suction cup 1 is in a positive pressure state, which can make the sample fall off the suction cup 1.

[0041] Operation process: When the suction cup 1 is in the initial state, the first on-off valve 8 and the second on-off valve 12 are both in the closed state, and the three-way valve 3 and the five-way valve 4 are both in the closed state;

[0042] When it is necessary to adsorb the sample, that is, the suction cup 1 needs to be in a negative pressure state. At this time, the first shut-off valve 8 is opened, allowing the air around the suction cup 1 to enter the three-way valve 3 and enter the five-way valve 4 from the first air outlet 5 of the three-way valve 3. At this time, the suction cup 1 can adsorb the sample. When the sample is processed and needs to be put back, that is, the suction cup 1 needs to be in a positive pressure state. At this time, the first shut-off valve 8 is closed and the five-way valve 4 is opened. The positive pressure air source enters the first positive pressure inlet 7 of the three-way valve 3 through the second air outlet 9 of the five-way valve 4 and enters the suction cup 1 from the first air outlet 5 of the three-way valve 3. At this time, the sample on the suction cup 1 will fall off.

[0043] With the long-term use of suction cup 1, the second shut-off valve 12 can be opened periodically to allow sewage to flow out from drain pipe 11.

[0044] In the description of this utility model, it should be understood that the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, unless otherwise specified and limited, it should be noted that the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to mechanical or electrical connections, or internal connections between two components, and can be direct connections or indirect connections through an intermediate medium. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0045] Obviously, the above embodiments are merely examples for clear illustration and are not intended to limit the implementation. For those skilled in the art, other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all implementation methods here, and any obvious variations or modifications derived therefrom are still within the protection scope of this utility model.

Claims

1. A positive and negative pressure switching control circuit, comprising a suction cup (1) and a controller, characterized in that, It also includes a filter canister (2), a first solenoid valve and a second solenoid valve, which are respectively connected to the controller. The filter canister (2) is connected to the suction cup (1). The first solenoid valve has a first air outlet (5), a negative pressure inlet (6) and a first positive pressure inlet (7). The first air outlet (5) is connected to the filter canister (2). The negative pressure inlet (6) is used to connect to a negative pressure air source. The negative pressure inlet (6) is provided with a first on / off valve (8) connected to the controller. The second solenoid valve has a second air outlet (9) and a second positive pressure inlet (10). The second air outlet (9) and the first positive pressure inlet (7) are connected by a pipe. The second positive pressure inlet (10) is used to connect to a positive pressure air source. When the first air outlet (5), the first positive pressure inlet (7), the second air outlet (9) and the second positive pressure inlet (10) are in a connected state, and the negative pressure inlet (6) is not connected to the first air outlet (5) and the first positive pressure inlet (7), the suction cup (1) is in a positive pressure state. When the first air outlet (5), the negative pressure inlet (6) and the first on / off valve (8) are in a connected state, and the first positive pressure inlet (7), the second air outlet (9) and the second positive pressure inlet (10) are both in a closed state, the suction cup (1) is in a negative pressure state.

2. The positive and negative pressure switching control loop as described in claim 1, characterized in that, The filter tank (2) is connected to a drain pipe (11), and a second on / off valve (12) is installed on the drain pipe (11), and the second on / off valve (12) is connected to the controller.

3. The positive and negative pressure switching control loop as described in claim 1, characterized in that, The negative pressure inlet (6) is connected to a first vent pipe (13), the other end of which is used to connect to a negative pressure gas source, and the first on / off valve (8) is installed on the first vent pipe (13).

4. The positive and negative pressure switching control loop as described in claim 1, characterized in that, The first solenoid valve is a three-way valve (3), and the second solenoid valve is a five-way valve (4).

5. The positive and negative pressure switching control loop as described in claim 1, characterized in that, The controller is a PLC controller.

6. The positive and negative pressure switching control loop as described in claim 4, characterized in that, The three-way valve (3) is a two-position three-way valve, and the five-way valve (4) is a three-position five-way valve.

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