Angle adjusting device for intelligent transfer robot

Abstract

The utility model relates to the technical field of silicon wafer processing equipment, in particular to an angle adjusting device for an intelligent transfer robot. The wafer basket device comprises a bottom mounting plate, a transmission assembly arranged on the bottom mounting plate, and wafer basket tools which are mounted at the two ends of the transmission assembly respectively and driven by the transmission assembly. The piece basket tool comprises an L-shaped tool plate, side plates arranged on the two sides of the tool plate, a supporting block arranged at the front end of the bottom face of the tool plate, limiting blocks arranged on the two sides of the bottom face of the tool plate, a bottom limiting block arranged at the bottom of the side face of the tool plate and a top limiting block arranged on the upper portion of the side face of the tool plate. And inductors are arranged on the bottom limiting block and the top limiting block. Compared with the prior art, the tool has the advantages that the tool is driven through the transmission assembly, so that the tool is suitable for machining of different devices, and the tool limiting structure used in cooperation with the wafer basket is arranged, so that the wafer basket is effectively limited and rapidly positioned.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of silicon wafer processing equipment, especially to an angle adjusting device for an intelligent carrying robot. BACKGROUND

[0002] Silicon wafer process equipment is diverse, and the wafer basket placement angle of each device has two types of horizontal placement and vertical placement, which are used to cooperate with different silicon wafer positions for processing.

[0003] Prior art, application number: CN202121576313.3, a silicon wafer turnover buffer mechanism, the prior art adopts a large number of cylinders and other structures, the cost is high, the structure is complex, and the structure cannot be adapted to the silicon wafer equipment for use, due to the particularity of the wafer basket structure, accurate installation cannot be performed, and whether installation is in place cannot be guaranteed, and the angle of rotation needs to be known for cooperation with different equipment.

[0004] Therefore, an angle adjusting device for an intelligent carrying robot needs to be designed to solve the above problems. INVENTION CONTENTS

[0005] The utility model aims at providing an angle adjusting device for an intelligent carrying robot to overcome the above-mentioned deficiencies existing in the prior art.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme:

[0007] An angle adjusting device for an intelligent carrying robot comprises a bottom mounting plate, a transmission assembly arranged on the bottom mounting plate, and wafer basket tooling respectively mounted at both ends of the transmission assembly and driven by the transmission assembly, characterized in that the wafer basket tooling comprises an L-shaped tooling plate, side plates arranged on both sides of the tooling plate, a support block arranged at the front end of the bottom surface of the tooling plate, limiting blocks arranged on both sides of the bottom surface of the tooling plate, a bottom limiting block arranged on the bottom of the side surface of the tooling plate, and a top limiting block arranged on the upper part of the side surface of the tooling plate, a sensor is arranged on the bottom limiting block, and a second sensor is arranged on the top limiting block corresponding to the other side of the bottom limiting block provided with the sensor.

[0008] Preferably, the transmission assembly comprises a driving motor mounted on the bottom mounting plate, a first transmission roller arranged on the driving end of the driving motor, a transmission mounting plate arranged on the bottom mounting plate, a second transmission roller arranged on the transmission mounting plate and mounted through a rotating shaft, and a third transmission roller mounted through a rotating shaft and connected with the wafer basket tooling, the first transmission roller, the second transmission roller, and the third transmission roller are connected through a transmission belt.

[0009] Preferably, the second transmission roller is disposed between the first transmission roller and the third transmission roller.

[0010] Preferably, the bottom limiting block is provided with an L-shaped profiling groove, and the top limiting block is in L-shaped structure.

[0011] Preferably, the inductive sheet is arranged on the bottom surface and the side edge of the side surface of the tooling plate, and an angle inductor is further arranged on the bottom mounting plate.

[0012] The beneficial effects of the utility model are as follows: the technical scheme is driven by the transmission assembly, drives the rotation of the slice basket, is suitable for processing different equipment, and effectively limits and quickly positions the slice basket by arranging the tooling limiting structure matched with the slice basket; the inductor arranged on the tooling is used to determine the installation precision of the slice basket, and the inductive sheet arranged on the tooling and the inductor arranged on the mounting plate are used in combination to determine the rotation angle. BRIEF DESCRIPTION OF DRAWINGS

[0013] Fig. 1 It is a structural schematic view of the angle adjusting device for the intelligent carrying robot.

[0014] Fig. 2 It is an internal mechanism schematic view of the angle adjusting device for the intelligent carrying robot.

[0015] Fig. 3 It is a slice basket schematic view of the angle adjusting device for the intelligent carrying robot.

[0016] In the figure: 1, bottom mounting plate; 2, transmission assembly; 3, slice basket tooling; 21, driving motor; 22, first transmission roller; 23, transmission mounting plate; 24, rotating shaft; 25, second transmission roller; 26, third transmission roller; 31, tooling plate; 32, side plate; 33, supporting block; 34, limiting block; 35, bottom limiting block; 36, top limiting block; 4, slice basket; 41, bottom block; 42, convex strip; 43, strip-shaped block; 5, inductive sheet; 6, angle inductor. DETAILED DESCRIPTION

[0017] REFERENCE Figs. 1-2 An angle adjusting device for an intelligent carrying robot, which comprises a bottom mounting plate 1, a transmission assembly 2 arranged on the bottom mounting plate, and a slice basket tooling 3 respectively mounted at both ends of the transmission assembly and driven by the transmission assembly.

[0018] The transmission assembly 2 comprises a driving motor 21 mounted on the bottom mounting plate, a first transmission roller 22 arranged at the driving end of the driving motor, a transmission mounting plate 23 arranged on the bottom mounting plate, a second transmission roller 25 arranged on the transmission mounting plate and mounted through a rotating shaft 24, and a third transmission roller 26 mounted through a rotating shaft and connected with the sheet basket tooling, wherein the first transmission roller, the second transmission roller and the third transmission roller are connected through a transmission belt; the second transmission roller 25 is arranged between the first transmission roller and the third transmission roller, the driving motor drives the first transmission roller to rotate, thereby driving the transmission belt to drive the second transmission roller 25 and the third transmission roller to rotate, the sheet basket is connected with the third transmission roller, thereby driving the sheet baskets on both sides to rotate, so as to realize angle adjustment.

[0019] The sheet basket tooling 3 comprises an L-shaped tooling plate 31, side plates 32 arranged on both sides of the tooling plate, a supporting block 33 arranged at the front end of the bottom surface of the tooling plate 31, limiting blocks 34 arranged on both sides of the bottom surface of the tooling plate 31, a bottom limiting block 35 arranged at the bottom of the side surface of the tooling plate 31, and a top limiting block 36 arranged on the upper side surface of the tooling plate 31.

[0020] The bottom limiting block 35 is provided with an L-shaped profiling groove for limiting the bottom surface and the outer side surface of the strip-shaped block, and the top limiting block 36 is provided with an L-shaped structure, one side of which is used for preventing the strip-shaped block from moving outward, and the other side is used for limiting the outer side surface of the strip-shaped block, so as to cooperate with the bottom limiting block 35 to limit the two side surfaces and the bottom side of the strip-shaped block.

[0021] In order to know whether the sheet basket is installed in place, an inductor is arranged on the bottom limiting block 35, and an inductor is arranged on the corresponding top limiting block 36 on the other side of the bottom limiting block 35 provided with the inductor, and the inductors are arranged at different positions on the two sides to synchronously sense, if the sheet basket is sensed synchronously, the installation is in place, if one side or both sides cannot sense the sheet basket, the installation is not in place, and the installation position is adjusted again, so as to ensure that the sheet basket loading can be 100% accurate.

[0022] In order to know the angle of the tooling plate 31, inductors 5 are arranged on the bottom surface and the side surface of the tooling plate 31, and an angle inductor 6 is further arranged on the bottom mounting plate 1, the paths of the inductors 5 on the bottom surface and the side surface of the tooling plate 31 pass through the angle inductor 6, and the angle of rotation is known by arranging the inductors 5 at different positions, so that the structure is simple and the function is comprehensive.

[0023] Reference Fig. 3The bottom of the wafer basket 4 is uniformly provided with bottom blocks 41 in the center position, and convex strips 42 are arranged on both sides of the bottom of the wafer basket; strip blocks 43 are arranged on both sides of the side of the wafer basket, the bottom blocks 41 are arranged on the supporting blocks 33 after installation, the convex strips 42 on both sides are arranged on the limiting blocks 34 and are limited by the limiting blocks 34, the strip blocks 43 on the side are arranged on the bottom limiting blocks 35 and are arranged in the profiling grooves of the bottom limiting blocks, so that the bottom is supported and limited, and the side of the bottom is limited, the upper part of the convex block is limited by the top limiting blocks 36, the two sides of the strip blocks 43 are limited by the top limiting blocks, so that the wafer basket is limited, and the wafer basket is not loosened during rotation.

[0024] The beneficial effects of the utility model are that the technical scheme drives the wafer basket to rotate through the transmission assembly, is suitable for different equipment for processing, and effectively limits and quickly positions the wafer basket through the tool limiting structure arranged in cooperation with the wafer basket; the inductor arranged on the tool is used to determine the installation precision of the wafer basket, and the inductor arranged on the installation plate is used to determine the rotation angle.

[0025] The above is only the preferred specific implementation mode of the utility model, but the protection scope of the utility model is not limited to this, any skilled person in the art can make equivalent replacement or change according to the technical scheme and the utility model concept of the utility model within the technical range disclosed by the utility model, and all should be covered in the protection scope of the utility model.

Claims

1. An angle adjusting device for intelligent carrying robot, comprising a bottom mounting plate, a transmission assembly arranged on the bottom mounting plate, and a sheet basket tool mounted at both ends of the transmission assembly respectively and driven by the transmission assembly, characterized in that: The sheet basket tooling includes an L-shaped tooling plate, side plates arranged on both sides of the tooling plate, a support block arranged at the front end of the bottom surface of the tooling plate, limiting blocks arranged on both sides of the bottom surface of the tooling plate, a bottom limiting block arranged at the bottom of the side surface of the tooling plate, and a top limiting block arranged on the upper portion of the side surface of the tooling plate, an inductor is arranged on the bottom limiting block, and a second inductor is arranged on the top limiting block corresponding to the other side of the bottom limiting block provided with the inductor.

2. The angle adjustment device for a smart transport robot according to claim 1, characterized in that: The transmission assembly includes a driving motor mounted on the bottom mounting plate, a first transmission roller arranged at the driving end of the driving motor, a transmission mounting plate arranged on the bottom mounting plate, a second transmission roller arranged on the transmission mounting plate and mounted through a rotating shaft, and a third transmission roller mounted through a rotating shaft and connected with the sheet basket tooling, the first transmission roller, the second transmission roller, and the third transmission roller are connected through a transmission belt.

3. The angle adjustment device for a smart transport robot according to claim 2, characterized in that: The second transmission roller is arranged between the first transmission roller and the third transmission roller.

4. The angle adjustment device for a smart transport robot according to claim 1, characterized in that: The bottom limiting block is provided with an L-shaped profiling groove, and the top limiting block has an L-shaped structure.

5. The angle adjustment device for a smart transport robot according to claim 1, wherein: Induction sheets are arranged on the bottom surface and the side surface of the tooling plate, an angle inductor is further arranged on the bottom mounting plate, and the paths of the induction sheets on the bottom surface and the side surface of the tooling plate pass through the angle inductor.

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