Waste gas treatment device

Abstract

The utility model provides a waste gas treatment device, which comprises a gas extraction module, a gas purification module and a gas purification module, the gas extraction module comprises a gas inlet and at least one gas outlet, and the gas inlet of the gas extraction module is detachably connected with the gas outlet of a process cavity of a semiconductor machine table; the combustion module is detachably connected to the air exhaust module, and an air inlet of the combustion module is detachably connected with an air outlet of the air exhaust module; and the water washing module is detachably connected to the air exhaust module or the combustion module, and an air inlet of the water washing module is detachably connected with an air outlet of the air exhaust module or an air outlet of the combustion module. According to the waste gas treatment device provided by the utility model, the cost can be reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor, especially a kind of waste gas treatment device. BACKGROUND

[0002] In the semiconductor manufacturing process, wafer processing is a crucial link. In this process, various special gases are used for different process steps, such as etching, chemical vapor deposition (CVD), physical vapor deposition (PVD), etc. These gases include flammable, explosive, toxic and corrosive categories, which pose potential risks to the operating environment and personnel health and safety. In order to ensure the effectiveness and safety of the process, the gas in the process cavity of the equipment needs to be accurately controlled and processed.

[0003] In the production process, the process cavity is usually equipped with a dry pump and a tail gas treatment device. The main function of the dry pump is to maintain the vacuum state of the process cavity and remove the residual gas generated during the processing. The tail gas treatment device is responsible for treating these extracted gases to meet emission standards or for safe disposal. However, the existing tail gas treatment devices are usually large in size, with capacity specifications of 300L, 500L, 800L or even 1000L. Although these large tail gas treatment devices are suitable for certain high-yield processing needs, for process cavities with less residual gas, using such large capacity devices is actually a waste of resources. Not only does it occupy valuable factory space, increasing the complexity of equipment installation and maintenance, but it also increases initial and operating costs. Therefore, there is room for improvement. SUMMARY

[0004] The purpose of the present utility model is to provide a waste gas treatment device that can reduce costs.

[0005] To solve the above technical problems, the present utility model is realized by the following technical solutions:

[0006] The present utility model provides a waste gas treatment device, comprising:

[0007] An air extraction module, including an air inlet and at least one air outlet, the air inlet of the air extraction module is detachably connected to the air outlet of the process cavity of the semiconductor machine;

[0008] A combustion module, detachably connected to the air extraction module, the air inlet of the combustion module is detachably connected to the air outlet of the air extraction module; and

[0009] A water washing module, detachably connected to the air extraction module or the combustion module, the air inlet of the water washing module is detachably connected to the air outlet of the air extraction module or the air outlet of the combustion module.

[0010] In an embodiment of the utility model, the air extraction module, the combustion module and the water washing module are connected in sequence in the vertical direction, or the air extraction module, the combustion module and the water washing module are connected in sequence in the horizontal direction.

[0011] In an embodiment of the utility model, a lighter and a plurality of combustion nozzles are installed in the combustion module, and the combustion nozzles are in communication with the natural gas pipeline and the air pipeline of the plant.

[0012] In an embodiment of the utility model, a plurality of the combustion nozzles are installed on the inner wall of the combustion module, and the fire spraying direction of the combustion nozzles is towards the inner central position of the combustion module.

[0013] In an embodiment of the utility model, at least one cooling water pipeline is attached to the outer surface of the combustion module, and the water inlet and the water outlet of the cooling water pipeline are in communication with the cooling tower of the plant.

[0014] In an embodiment of the utility model, a plurality of spray heads are installed in the water washing module, the spraying direction of the spray heads is towards the bottom of the water washing module, and the spray heads are in communication with the tap water pipeline of the plant.

[0015] In an embodiment of the utility model, a liquid level sensor is installed in the water washing module, one side of the bottom of the water washing module is provided with a water outlet, the height of the liquid level sensor is higher than the height of the water outlet, a valve is installed on the water outlet, and the valve is electrically connected with the liquid level sensor.

[0016] In an embodiment of the utility model, one side of the top of the water washing module is provided with an air outlet.

[0017] In an embodiment of the utility model, at least one partition plate is further included, a plurality of the spray heads are arrayed in the water washing module, and the partition plate is located between two adjacent columns or rows of the spray heads.

[0018] In an embodiment of the utility model, when the number of the partition plates is plural, one of the two adjacent partition plates has a gap between the top of the inner wall and the bottom of the inner wall of the water washing module, and the other partition plate is connected with the top of the inner wall of the water washing module and has a gap between the top of the inner wall and the bottom of the inner wall.

[0019] As described above, the utility model provides a waste gas treatment device, through integration combustion module and water washing module, can choose integration one or two modules according to demand, has provided great flexibility and adaptability. Can directly handle small amount of residual gas, reduces the dependence on external tail gas treatment device, thereby simplifies system configuration. Since there is no need to configure tail gas treatment device alone, the overall land space is smaller, reduces equipment installation and operating cost. Integrated design makes the maintenance and module replacement of equipment more convenient, reduces downtime, improves production efficiency. By integrating the processing function into a single device, the complexity and failure points of the system are reduced, and the overall reliability of the system is enhanced.

[0020] Of course, implementing any product of the utility model does not necessarily need to achieve all the advantages described above at the same time. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical scheme of the embodiments of the utility model, the following will be briefly introduced the drawings needed to be used for the embodiment description, obviously, the drawings in the following description only some embodiments of the utility model, for those skilled in the art, under the premise of not paying creative labor, can also obtain other drawings according to these drawings.

[0022] Figure 1 It is a schematic view of the waste gas treatment device in an embodiment of the utility model;

[0023] Figure 2 It is another schematic view of the waste gas treatment device in an embodiment of the utility model;

[0024] Figure 3 It is still another schematic view of the waste gas treatment device in an embodiment of the utility model;

[0025] Figure 4 It is a schematic view of the waste gas treatment device in an embodiment of the utility model;

[0026] Figure 5 It is a schematic view of the waste gas treatment device in an embodiment of the utility model.

[0027] In the drawing: 10, air extraction module;20, combustion module;21, igniter;22, combustion spray head;30, water washing module;31, spray head;32, partition. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present application will be clearly and completely described with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0029] Please refer to Figure 1 The utility model discloses a kind of waste gas treatment devices, it can be applied to wafer's process technology, the steps of process technology can include etching, chemical vapor deposition (CVD), physical vapor deposition (PVD) etc. When processing, waste gas treatment device can handle the waste gas in equipment process cavity, to prevent pollution environment. Waste gas treatment device can include suction module 10, combustion module 20 and water washing module 30. Among them, the capacity of combustion module 20 and water washing module 30 can not be limited, for example, can be 5 / 10 / 20 / 50L etc.

[0030] In one embodiment, suction module 10 can be used to effectively extract the waste gas in the process cavity of semiconductor machine, to facilitate subsequent processing. The suction module 10 can have various structural forms, including claw type, Roots type, screw type and scroll type, or combination and multi-stage combination of these structures.

[0031] In one embodiment, suction module 10 can have at least one gas inlet and at least one exhaust port. The gas inlet of suction module 10 is detachably connected with the exhaust port of the process cavity of semiconductor machine. The exhaust port of suction module 10 can be detachably connected with the gas inlet of other module. Through this design, suction module 10 can be flexibly combined with different types of semiconductor equipment to meet various process requirements. Suction module 10 can have multi-stage structure, the front stage can adopt claw type structure to realize efficient initial gas capture and discharge; the middle stage can adopt Roots type structure to improve the conveying speed of gas; the final stage can adopt scroll type structure to ensure the smooth discharge of gas and reduce noise.

[0032] In one embodiment, the combined structure of suction module 10 supports seamless cooperation between different types of pumps. Suction module 10 can not only handle conventional gas, but also adapt to the needs of handling corrosive gas, while having good airtightness and durability, ensuring that suction module 10 can provide continuous and reliable waste gas extraction service in complex and variable semiconductor manufacturing environment.

[0033] In one embodiment, the combustion module 20 is designed to be detachably connected to the exhaust module 10. The gas inlet of the combustion module 20 can be flexibly connected and disconnected with the gas outlet of the exhaust module 10 for quick installation and maintenance when needed. The design of the combustion module 20 ensures efficient sealing and safety in connection with the exhaust module 10, which can adapt to the strict requirements of industrial environment and ensure the stable operation of the whole system. Such modular design not only facilitates maintenance and replacement, but also can adapt to different process requirements by flexibly adjusting the combustion conditions, improving the waste gas treatment effect in the semiconductor manufacturing process.

[0034] In one embodiment, the igniter 21 and a plurality of combustion nozzles 22 are installed in the combustion module 20, which are respectively connected with the natural gas and air systems of the factory through pipes, so as to ensure that the exhaust gas is fully combusted when entering the combustion module 20. The combustion nozzles 22 can be installed on the inner wall of the combustion module 20 and designed to direct the flame towards the center of the interior of the combustion module 20, so as to optimize the combustion efficiency and uniformity. This design can promote the mixing and combustion reaction between the exhaust gas and natural gas, oxygen (or clean dry air), improve the purification efficiency of the combustion module 20 and reduce the emission of harmful gases. The igniter 21 can ignite the gas mixture ejected from the combustion nozzles 22 in time, ensuring the continuity and stability of the combustion reaction.

[0035] In one embodiment, at least one cooling water pipeline is attached to the outer surface of the combustion module 20 to effectively control the temperature of the combustion module 20 and prevent the shell from overheating. Different cooling water pipelines are designed to be attached to different parts of the outer surface of the combustion module 20 to optimize the cooling effect. The water inlet and outlet of these cooling water pipelines are connected with the cooling tower of the factory, which can introduce process cooling water (PCW) from the factory system.

[0036] In one embodiment, the shape of the cooling water pipeline can be unrestricted, for example, it can adopt the form of a serpentine pipe to increase the contact area with the outer surface of the combustion module, thereby improving the heat exchange efficiency. Through such configuration, the cooling water flowing in the pipeline can effectively take away the excess heat generated in the combustion process, keeping the combustion module 20 operating within a safe temperature range.

[0037] In one embodiment, the water washing module 30 is designed to be detachably connected to the air extraction module 10 or the combustion module 20, depending on the requirements of the exhaust gas treatment. The air inlet of the water washing module 30 can be flexibly detachably connected to the air outlet of the air extraction module 10 or the air outlet of the combustion module 20, so as to adapt to different types of exhaust gas treatment. For example, when the exhaust gas in the process chamber is relatively simple, such as all the exhaust gas can be combusted or all the exhaust gas can be treated by hydrolysis, the combustion module 20 or the water washing module 30 can be integrated on the air extraction module 10 to achieve the optimal treatment effect.

[0038] Please refer to Figure 2 , Figure 3 , Figure 4 and Figure 5 In one embodiment, the arrangement order of the air extraction module 10, the combustion module 20 and the water washing module 30 is not limited, and they can be flexibly connected in the vertical direction or the horizontal direction according to the space and process requirements. For example, the air extraction module 10 can be first connected to the combustion module 20, and then connected to the water washing module 30 in the vertical direction or the horizontal direction; or the air extraction module 10 can be directly connected to the combustion module 20 or the water washing module 30 to simplify the treatment process. Such modular and customizable design enables the system to flexibly adapt to different exhaust gas treatment requirements, improving the overall efficiency and practicability.

[0039] In one embodiment, a plurality of spray heads 31 are installed inside the water washing module 30, and the spray direction of the spray heads 31 can be directed to the bottom of the water washing module 30. These spray heads 31 can be connected to the water pipe of the factory to effectively introduce tap water for treatment. The spray heads 31 spray tap water, so that the residual gas that cannot be treated in the combustion module 20 but can be treated by hydrolysis and the solid dust particles carried therein quickly dissolve in water and collect in the water tank at the bottom of the water washing module 30.

[0040] In one embodiment, an air outlet is provided on one side of the top of the water washing module 30 for discharging the treated and purified gas, so as to ensure that the residual gas can be fully washed by water to effectively remove the pollutants. Through such configuration, the water washing module 30 can efficiently treat the exhaust gas that cannot be combusted but can be hydrolyzed.

[0041] In one embodiment, in order to further improve the washing effect, at least one partition plate 32 is arranged in the water washing module 30. A plurality of spray heads 31 are arrayed in the water washing module 30 to ensure that the exhaust gas can flow uniformly in the entire water washing module 30. The partition plate 32 can be designed to be located between two adjacent columns or rows of spray heads 31, thereby enhancing the contact efficiency of the gas and water.

[0042] In one embodiment, when the number of partitions 32 is multiple, two adjacent partitions 32 have different installation manners. One of the partitions 32 is left with a gap between the top and bottom of the inner wall of the water washing module 30, which allows the gas and liquid part to flow; and the other partition 32 is connected to the top of the inner wall of the water washing module 30, while maintaining a gap with the bottom of the inner wall. The staggered configuration of the partition 32 design enhances the disturbance of the fluid, improves the contact and mixing effect between the gas, liquid and solid particles, thereby enhancing the efficiency and effect of the waste gas treatment.

[0043] In one embodiment, a liquid level sensor can be installed in the water washing module 30 to monitor the water level state of the bottom tank. The bottom side of the water washing module 30 can be equipped with a drain port provided with a valve control, and the height of the liquid level sensor can be higher than the height of the drain port. The valve is electrically connected to the liquid level sensor to achieve automatic control.

[0044] In one embodiment, when the water level in the tank is too high and reaches the detection height of the liquid level sensor, the liquid level sensor will send a signal to the valve to automatically open. At this time, the excess water can be discharged through the drain port to prevent the tank from overflowing. When the water level drops to a safe level, the liquid level sensor stops sending signals to the valve, and the valve is closed, and the drain port is also closed. The model of the liquid level sensor can not be limited as long as it can monitor the height of the water level, such as Omron 61F-GPN-BT.

[0045] The model of the valve can not be limited as long as it can meet the opening / closing according to the signal sent by the liquid level sensor, such as Belimo control valve series.

[0046] As can be seen, in the above scheme, by integrating the combustion module and the water washing module, one or two modules can be selected according to the needs, providing great flexibility and adaptability. It can directly handle a small amount of residual gas, reducing the dependence on external tail gas treatment devices, thereby simplifying the system configuration. Since there is no need to separately configure the tail gas treatment device, the overall land occupation is smaller, reducing the equipment installation and operation cost. The integrated design makes the maintenance and module replacement of the equipment more convenient, reduces the downtime, and improves the production efficiency. By integrating the treatment function into a single device, the complexity and failure points of the system are reduced, and the overall reliability of the system is enhanced.

[0047] The above disclosed embodiments of the utility model are only used for helping the utility model to be described. The embodiments do not describe all the details, and also do not limit the utility model to be the specific implementation mode. Apparently, according to the content of the specification, many modifications and changes can be made. The specification selects and specifically describes these embodiments, in order to better explain the principle and practical application of the utility model, so that the person skilled in the art can well understand and utilize the utility model. The utility model is limited by the claims and the whole range and equivalents.

Claims

1. An exhaust gas treatment device, characterized by, The application relates to a semiconductor manufacturing system, comprising: an air extraction module, comprising an air inlet and at least one air outlet, wherein the air inlet of the air extraction module is detachably connected to an air outlet of a process chamber of a semiconductor manufacturing machine; a combustion module, detachably connected to the air extraction module, wherein an air inlet of the combustion module is detachably connected to an air outlet of the air extraction module; and a water washing module, detachably connected to the air extraction module or the combustion module, wherein an air inlet of the water washing module is detachably connected to an air outlet of the air extraction module or the combustion module.

2. The exhaust treatment device of claim 1, wherein, The air extraction module, the combustion module and the water washing module are connected in sequence in a vertical direction or in a horizontal direction.

3. The exhaust treatment device of claim 1, wherein, A point igniter and a plurality of combustion nozzles are installed in the combustion module, and the combustion nozzles are communicated with a natural gas pipeline and an air pipeline of a factory.

4. The exhaust treatment device of claim 3, wherein, A plurality of the combustion nozzles are installed on an inner wall of the combustion module, and the combustion nozzles are directed towards a central position in the combustion module.

5. The exhaust treatment device of claim 1, wherein, At least one cooling water pipeline is attached to an outer surface of the combustion module, and an inlet and an outlet of the cooling water pipeline are communicated with a cooling tower of the factory.

6. The exhaust treatment device of claim 1, wherein, A plurality of spray heads are installed in the water washing module, and the spray heads are directed towards a bottom of the water washing module, and the spray heads are communicated with a tap water pipeline of the factory.

7. The exhaust treatment device of claim 6, wherein, A liquid level sensor is installed in the water washing module, a drain outlet is arranged on one side of the bottom of the water washing module, the height of the liquid level sensor is higher than that of the drain outlet, a valve is installed on the drain outlet, and the valve is electrically connected to the liquid level sensor.

8. The exhaust treatment device of claim 6, wherein, An air outlet is arranged on one side of the top of the water washing module.

9. The exhaust treatment device of claim 6, wherein, At least one partition plate is arranged, a plurality of the spray heads are arranged in an array in the water washing module, and the partition plate is arranged between two adjacent rows or two adjacent columns of the spray heads.

10. The exhaust treatment device of claim 9, wherein, When the number of the partition plates is plural, one of the two adjacent partition plates is arranged with a gap between a top inner wall and a bottom inner wall of the water washing module, and the other partition plate is connected to the top inner wall of the water washing module and arranged with a gap between the top inner wall and the bottom inner wall.

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