Purifying device for carbonyl fluoride

Abstract

The utility model relates to the technical field of carbonyl fluoride purification devices, and discloses a carbonyl fluoride purification device which comprises a box body, an air inlet pipe is fixedly assembled on the outer wall of the box body, an air outlet pipe is fixedly assembled on the outer wall of the box body, a driving oil cylinder is fixedly assembled on the inner wall of the box body, and a compression plate is movably connected with an inner cavity of the box body in a sleeved mode. According to the carbonyl fluoride purification device, the fixing seat and the supporting seat are arranged in the inner cavity of the box body, the pulling plate is supported and fixed under the action of the fixing seat and the supporting seat, and when an adsorbent in the inner cavity of the pulling plate needs to be replaced, only the pulling plate needs to be moved out of the inner cavity of the box body, so that the replacement is convenient. According to the technical scheme, the locking rod is moved out of the inner cavity of the fixing base, the pulling plate is moved outwards, the supporting wheel is retracted into the inner cavity of the supporting cylinder, and therefore the pulling plate can be moved out of the inner cavity of the box body more conveniently, and an adsorbent in the inner cavity of the pulling plate can be replaced more conveniently.

Description

TECHNICAL FIELD

[0001] The utility model relates to carbon fluoride purification device technical field, specifically is a kind of carbon fluoride's purification device. BACKGROUND

[0002] Carbon fluoride, also known as carbon-based fluorine, fluorine light gas, is a kind of irritating, non-flammable colorless toxic gas at room temperature, is used for the cleaning gas and etching gas of semiconductor manufacturing device, fluorination gas and raw material of organic compound and intermediate, fluorination agent of organic synthesis, as the cleaning gas of semiconductor manufacturing device, high-purity carbon fluoride is needed.

[0003] Traditional carbon fluoride purification device when using, often adopt the way of adsorbent adsorption to carbon fluoride is purified, need to place adsorbent into purification equipment, and need to replace adsorbent after a period of adsorption, traditional purifying agent is replaced, need to be removed from the inner cavity of equipment and replace, need to disassemble many bolts, it is more laborious, cannot very conveniently realize the replacement of purifying agent. UTILITY MODEL CONTENT

[0004] In view of the deficiencies of prior art, the utility model provides a kind of carbon fluoride's purification device, with The advantages of good fixing effect, it is easy to replace adsorbent, solve the problems raised in the above background art.

[0005] The utility model provides the following technical scheme: a kind of carbon fluoride's purification device, including box, the outer wall of the box is fixedly equipped with inlet pipe, the outer wall of the box is fixedly equipped with outlet pipe, the inner wall of the box is fixedly equipped with drive cylinder, the inner cavity of the box is movably sleeved with compression plate, the outer wall of the compression plate is rotatably connected with rotating plate, the outer wall of the compression plate is fixedly equipped with limit rod, the inner wall of the box is fixedly equipped with fixed seat, the inner wall of the box is fixedly equipped with support seat, the inner cavity of the box is movably sleeved with pull plate, the inner wall of the pull plate is fixedly equipped with support plate, the top of the support plate is movably sleeved with moving plate, the inner cavity of the pull plate is movably sleeved with locking rod, the inner wall of the pull plate is fixedly equipped with drive motor, the power output shaft of the drive motor is fixedly equipped with drive screw, the inner wall of the pull plate is fixedly equipped with support rod, the inner wall of the pull plate is fixedly equipped with support cylinder, the inner cavity of the support cylinder is movably sleeved with support wheel, the inner cavity of the support cylinder is installed with support spring, the inner cavity of the pull plate is installed with adsorption plate.

[0006] As a preferred technical scheme of the utility model: the outer wall of the compression plate is equipped with inlet window, the outer wall shape of the rotating plate is greater than the outer wall shape of gas-permeable window.

[0007] As a preferred technical scheme of the utility model: the power output shaft of the drive oil cylinder is connected with the outer wall of the compression plate, the outer wall shape of the moving plate is matched with the outer wall shape of the bottom of the locking rod.

[0008] As a preferred technical scheme of the utility model: the inner wall of the moving plate is threadedly connected with the outer wall of the drive screw, and the outer wall of the supporting rod passes through the inner cavity of the moving plate.

[0009] As a preferred technical scheme of the utility model: the inner wall of the supporting seat is provided with a sliding groove, the outer wall of the supporting spring is respectively in contact with the inner wall of the supporting cylinder and the top of the supporting wheel, and the inner cavity of the adsorption plate is filled with rich ultra-microporous carbon adsorbent.

[0010] As a preferred technical scheme of the utility model: the inner cavity of the fixing seat is provided with a locking groove, and the inner wall shape and size of the locking groove are matched with the outer wall shape and size of the locking rod.

[0011] Compared with the prior art, the utility model has the following beneficial effects:

[0012] 1、The carbon oxyfluoride purification device, through the fixing seat and the supporting seat arranged in the inner cavity of the box, realizes the support and fixation of the pull plate under the action of the fixing seat and the supporting seat, and when it is necessary to replace the adsorbent in the inner cavity of the pull plate, only the pull plate needs to be moved out of the inner cavity of the box, the locking rod is moved out of the inner cavity of the fixing seat, and the supporting wheel is moved into the inner cavity of the supporting cylinder, so that the pull plate is more conveniently moved out of the inner cavity of the box, and the adsorbent in the inner cavity of the pull plate is more conveniently replaced.

[0013] 2、The carbon oxyfluoride purification device, through the compression plate arranged in the inner cavity of the box, moves the compression plate under the action of the drive oil cylinder, and then realizes the compression of the air in the inner cavity of the box in the moving process of the compression plate, and when the air is introduced into the box, the rotating plate can be rotated, and in the compression process, the rotating plate is attached to the outer wall of the compression plate, so that the pressure of the carbon oxyfluoride gas is better applied, and the carbon oxyfluoride gas passes through the inner cavity of the adsorption plate better, and the carbon oxyfluoride gas is purified under the action of the adsorbent. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a three-dimensional structure schematic view of the utility model;

[0015] Figure 2 It is a box section structure schematic view of the utility model;

[0016] Figure 3 It is a pull plate structure schematic view of the utility model;

[0017] Figure 4It is the schematic diagram of the profile structure of the pulling plate of the utility model.

[0018] Figure 5 It is the schematic diagram of the profile structure of the pulling plate of the utility model.

[0019] Figure 6 It is the schematic diagram of the profile structure of the pulling plate of the utility model.

[0020] In the figure: 1, box; 2, air inlet pipe; 3, air outlet pipe; 4, drive cylinder; 5, compression plate; 6, rotating plate; 7, limiting rod; 8, fixed seat; 9, pulling plate; 10, support plate; 11, moving plate; 12, locking rod; 13, drive motor; 14, drive screw; 15, support rod; 16, support seat; 17, support cylinder; 18, support spring; 19, support wheel; 20, adsorption plate. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the utility model.

[0022] Please refer to Figure 1 - Figure 6 A kind of purification device of carbonyl fluoride, including box 1, air inlet pipe 2 is fixedly equipped with the outer wall of box 1, air outlet pipe 3 is fixedly equipped with the outer wall of box 1, drive cylinder 4 is fixedly equipped with the inner wall of box 1, compression plate 5 is movably sleeved in the inner cavity of box 1, rotating plate 6 is rotatably connected to the outer wall of compression plate 5, limiting rod 7 is fixedly equipped with the outer wall of compression plate 5, fixed seat 8 is fixedly equipped with the inner wall of box 1, support seat 16 is fixedly equipped with the inner wall of box 1, pulling plate 9 is movably sleeved in the inner cavity of box 1, support plate 10 is fixedly equipped with the inner wall of pulling plate 9, moving plate 11 is movably sleeved in the top of support plate 10, locking rod 12 is movably sleeved in the inner cavity of pulling plate 9, drive motor 13 is fixedly equipped with the inner wall of pulling plate 9, drive screw 14 is fixedly equipped with the power output shaft of drive motor 13, support rod 15 is fixedly equipped with the inner wall of pulling plate 9, support cylinder 17 is fixedly equipped with the inner wall of pulling plate 9, support wheel 19 is movably sleeved in the inner cavity of support cylinder 17, support spring 18 is installed in the inner cavity of support cylinder 17, adsorption plate 20 is installed in the inner cavity of pulling plate 9.

[0023] In the structure, the driving oil cylinder 4 arranged in the inner cavity of the box body 1, and the compression plate 5 arranged in the inner cavity of the box body 1, the compression plate 5 can be driven under the action of the driving oil cylinder 4, so that the compression plate 5 can move along the inner wall of the box body 1, and the carbon fluoride gas is compressed in the moving process, so that it can pass through the adsorption plate 20 and be purified under the action of the adsorbent in the inner cavity of the adsorption plate 20.

[0024] In a preferred embodiment: the outer wall of the compression plate 5 is provided with an air inlet window, and the outer wall shape of the rotating plate 6 is larger than that of the air permeable window.

[0025] In the structure, the air permeable window arranged in the inner cavity of the compression plate 5, and the rotating plate 6 arranged on the outer wall of the compression plate 5, when the carbon fluoride gas is introduced, the rotating plate 6 can be pushed to rotate under the action of the gas, so that the gas can smoothly pass through the compression plate 5 and enter the inner cavity of the box body 1.

[0026] In a preferred embodiment: the power output shaft of the driving oil cylinder 4 is connected with the outer wall of the compression plate 5, and the outer wall shape of the moving plate 11 matches the outer wall shape of the bottom of the locking rod 12.

[0027] In the structure, the driving oil cylinder 4 arranged on the inner wall of the box body 1, the compression plate 5 can be driven under the action of the driving oil cylinder 4, so that the compression plate 5 moves along the inner wall of the box body 1, so as to compress the gas, the moving plate 11 arranged in the inner cavity of the pull plate 9, the driving motor 13 and the driving screw 14 drive the moving plate 11, and then the moving plate 11 can push the locking rod 12 upward, so that the locking rod 12 enters the inner cavity of the fixed seat 8, and the pull plate 9 is fixed.

[0028] In a preferred embodiment: the inner wall of the moving plate 11 is threadedly connected with the outer wall of the driving screw 14, and the outer wall of the supporting rod 15 passes through the inner cavity of the moving plate 11.

[0029] In the structure, the driving motor 13 and the driving screw 14 are arranged in the inner cavity of the pull plate 9, the outer wall of the driving screw 14 is engaged with the inner wall of the moving plate 11, and the driving motor 13 drives the driving screw 14, so that the moving plate 11 slides on the top of the supporting plate 10 under the action of the driving screw 14, and then the locking rod 12 is lifted.

[0030] In a preferred embodiment: the inner wall of the supporting seat 16 is provided with a sliding groove, the outer wall of the supporting spring 18 is in contact with the inner wall of the supporting cylinder 17 and the top of the supporting wheel 19 at both ends, and the inner cavity of the adsorption plate 20 is filled with rich ultra-microporous carbon adsorbent.

[0031] In the structure, the support wheel 19 can contact the inner wall of the support base 16 under the action of the support spring 18, and the bottom of the support wheel 19 can roll along the inner wall of the support base 16 when the pull plate 9 is pulled outward, so that the pull plate 9 can be moved out of the top of the support base 16.

[0032] In a preferred embodiment: the inner cavity of the fixing seat 8 is provided with a locking groove, and the inner wall of the locking groove is matched in size and shape with the outer wall of the locking rod 12.

[0033] In the structure, the moving plate 11 and the locking rod 12 arranged in the inner cavity of the pull plate 9 can drive the locking rod 12 during the movement of the moving plate 11, so that the pull plate 9 can be locked under the action of the support wheel 19 and the locking rod 12, and the pull plate 9 can be stably installed in the inner cavity of the box body 1, so that the carbonyl fluoride gas can smoothly pass through the inner cavity of the pull plate 9, and the impurities in the carbonyl fluoride gas can be adsorbed under the action of the microporous carbon adsorbent in the adsorption plate 20.

[0034] Working principle: the above-mentioned equipment in the process of using, when need to purify carbonyl fluoride gas, can be purified by adsorption of carbonyl fluoride gas through adsorbent, the carbonyl fluoride gas to be purified from the inlet pipe 2 into the inner chamber of the box 1, under the action of gas, can push away the rotating plate 6 on the outer wall of the compression plate 5, so that the rotating plate 6 can only rotate into the inner chamber of the box 1, and under the block of limiting rod 7, the rotating angle of rotating plate 6 is limited, but the gas can enter the inner chamber of the box 1 smoothly, and through the start of drive cylinder 4, under the driving of drive cylinder 4, the compression plate 5 is driven, so that the compression plate 5 moves along the inner wall of the box 1, at this time, in the process of moving the compression plate 5, the rotating plate 6 is buckled on the outer wall of the compression plate 5 by the gas, the inner cavity of the compression plate 5 is blocked, and the movement of the compression plate 5 is continuously pushed under the action of the drive cylinder 4, the gas in the inner chamber of the box 1 is continuously compressed under the action of the compression plate 5, so that the gas can pass through the adsorption plate 20, so that the gas is purified under the action of the rich ultra-microporous carbon adsorbent in the inner cavity of the adsorption plate 20, and when the rich ultra-microporous carbon adsorbent in the inner cavity of the adsorption plate 20 needs to be replaced, the pull plate 9 needs to be pulled out from the inner chamber of the box 1, the drive motor 13 is started, the rotation of the drive screw 14 is driven under the action of the drive motor 13, so that the moving plate 11 moves along the outer wall of the drive screw 14, and then the moving plate 11 stops supporting the locking rod 12, so that the locking rod 12 is separated from the inner chamber of the fixed seat 8 under the action of gravity, then the pull plate 9 can be pulled out from the inner chamber of the box 1, in the process of moving the pull plate 9, the bottom of the supporting wheel 19 can move away from the inner wall of the supporting seat 16, so that the pull plate 9 can be removed from the inner chamber of the box 1 more conveniently, so that the adsorption plate 20 in the inner cavity of the pull plate 9 can be replaced more conveniently, and the rich ultra-microporous carbon adsorbent in the adsorption plate 20 can be replaced more conveniently.

[0035] Although the embodiments of the present application have been shown and described, it should be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A purification device of carbonyl fluoride comprising a box (1), characterized in that: The outer wall of the box (1) is fixedly provided with an air inlet pipe (2), the outer wall of the box (1) is fixedly provided with an air outlet pipe (3), the inner wall of the box (1) is fixedly provided with a drive oil cylinder (4), the inner cavity of the box (1) is movably sleeved with a compression plate (5), the outer wall of the compression plate (5) is rotatably connected with a rotating plate (6), the outer wall of the compression plate (5) is fixedly provided with a limiting rod (7), the inner wall of the box (1) is fixedly provided with a fixed seat (8), the inner wall of the box (1) is fixedly provided with a support seat (16), the inner cavity of the box (1) is movably sleeved with a pull plate (9), the inner wall of the pull plate (9) is fixedly provided with a support plate (10), the top of the support plate (10) is movably sleeved with a moving plate (11), the inner cavity of the pull plate (9) is movably sleeved with a locking rod (12), the inner wall of the pull plate (9) is fixedly provided with a drive motor (13), the power output shaft of the drive motor (13) is fixedly provided with a drive screw (14), the inner wall of the pull plate (9) is fixedly provided with a support rod (15), the inner wall of the pull plate (9) is fixedly provided with a support cylinder (17), the inner cavity of the support cylinder (17) is movably sleeved with a support wheel (19), the inner cavity of the support cylinder (17) is mounted with a support spring (18), and the inner cavity of the pull plate (9) is mounted with an adsorption plate (20).

2. A purification apparatus for carbonyl fluoride according to claim 1, characterized in that: The outer wall of the compression plate (5) is provided with an air inlet window, and the outer wall shape of the rotating plate (6) is larger than that of the air permeable window.

3. A purification apparatus for carbonyl fluoride according to claim 2, characterized in that: The power output shaft of the drive oil cylinder (4) is connected with the outer wall of the compression plate (5), and the outer wall shape of the moving plate (11) matches the outer wall shape of the bottom of the locking rod (12).

4. A purification apparatus for carbonyl fluoride according to claim 1, characterized in that: The inner wall of the moving plate (11) is threadedly connected with the outer wall of the drive screw (14), and the outer wall of the support rod (15) penetrates through the inner cavity of the moving plate (11).

5. A purification apparatus for carbonyl fluoride according to claim 4, characterized in that: The inner wall of the support seat (16) is provided with a sliding groove, the outer walls of the two ends of the support spring (18) are respectively in contact with the inner wall of the support cylinder (17) and the top of the support wheel (19), and the inner cavity of the adsorption plate (20) is filled with a rich ultra-microporous carbon adsorbent.

6. A purification apparatus for carbonyl fluoride according to claim 1, characterized in that: The inner cavity of the fixed seat (8) is provided with a locking groove, and the inner wall shape and size of the locking groove match the outer wall shape and size of the locking rod (12).

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