Evaporation equipment with evaporation tank cover plate

Abstract

The embodiment of the utility model provides evaporation equipment with an evaporation tank cover plate. The evaporation equipment comprises an evaporation tank, a guide rail arranged on the side of the evaporation tank, and the evaporation tank cover plate capable of moving along the guide rail, the guide rail is horizontally arranged, the length direction of the guide rail is perpendicular to the length direction of the evaporation tank, and the length size of the guide rail is larger than the width size of the evaporation tank; and when the evaporation tank cover plate is positioned at one end of the guide rail, the evaporation tank cover plate is flatly laid above the evaporation tank. According to the technical scheme, the cover plate capable of being opened is arranged on the evaporation tank, rapid temperature rise of the evaporation tank can be effectively achieved by controlling opening and closing of the cover plate, and damage to a membrane material due to long-time heating can be avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to electroplating technical field especially, relates to a kind of evaporation deposition equipment, more specifically, to a kind of evaporation deposition equipment with evaporation groove cover plate. BACKGROUND

[0002] As a kind of rechargeable battery, lithium ion battery is widely used in mobile phone and notebook computer and other portable electronic equipment and electric vehicle and electric bicycle and other electric vehicles due to the advantages of high energy density, high power density, multiple cycle times and long storage time.The electrode member of lithium ion battery is usually made of metal material, for example, the positive electrode member is usually made of aluminum foil, and the negative electrode member is usually made of copper foil.However, in the nail penetration experiment, burrs will be generated in the penetration of the nail due to the aluminum foil (copper foil), which will directly overlap on the negative electrode member (positive electrode member), thus causing internal short circuit of the positive electrode member and the negative electrode member, resulting in fire and explosion of the lithium ion battery.

[0003] The composite current collector has a three-layer composite structure of "metal-polymer material-metal", and a nanoscale metal is formed on the surface of the polymer PET / PP film by vacuum evaporation, magnetron sputtering and other methods, and the metal layer is deposited and thickened to more than 1 μm by electroplating, replacing the traditional aluminum foil and copper foil as the positive and negative electrode materials of the battery, which has the advantages of low cost, high safety, long service life and high energy density, and thus the composite current collector has been widely used in lithium ion batteries.

[0004] In the prior art, the preparation process of the composite current collector involves an evaporation step, and the corresponding evaporation equipment includes a vacuum cavity, an unwinding assembly, an evaporation equipment and an electromagnetic heating roller.The base material is arranged on the unwinding assembly, and the unwinding assembly is used to release the base material;the winding assembly is used to wind the base material;the evaporation equipment is arranged between the unwinding assembly and the winding assembly, and is used to coat the base material;the electromagnetic heating roller is a driving roller, which is arranged between the evaporation equipment and the winding assembly, and is used to receive the base material processed by the evaporation equipment and eliminate the edge curling of the base material.In use, the film material is first wound on the unwinding and winding assembly, then vacuum is drawn and the evaporation tank is heated to a preset temperature, at which time the film material moves and starts to be coated.

[0005] In the process of realizing the utility model, the inventors found that at least the following problems exist in the prior art:

[0006] The existing evaporation tank is open at the top, so a large amount of heat is lost during heating, resulting in a long heating time and low production efficiency.Therefore, how to improve the structure of the evaporation deposition equipment to shorten the heating time and improve the working efficiency is a problem to be solved. UTILITY MODEL CONTENTS

[0007] The utility model discloses an evaporate equipment with evaporation groove cover plate to solve the problem of long heating time and low work efficiency of the existing evaporate equipment.

[0008] To achieve the above object, the utility model discloses an evaporate equipment with evaporation groove cover plate, including evaporation groove, the guide rail of setting in the side of evaporation groove and the evaporation groove cover plate of can along the guide rail removal, the length direction of guide rail is horizontally arranged, and the length direction of guide rail is perpendicular to the length direction of evaporation groove, and the length size of guide rail is greater than the width size of evaporation groove, when the evaporation groove cover plate is located in the one end of guide rail, the evaporation groove cover plate is laid on the evaporation groove.

[0009] Further, the end of the evaporation groove cover plate is connected with a guide wheel matched with the guide rail.

[0010] Further, the length size of the evaporation groove cover plate is greater than the length size of the evaporation groove, and the width size of the evaporation groove cover plate is greater than the width size of the evaporation groove; the guide rail has two, one guide rail is arranged at the front end of the evaporation groove, and the other guide rail is arranged at the rear end of the evaporation groove.

[0011] Further, the length of the guide rail is not less than 2 times the width of the evaporation groove.

[0012] Further, the end of the evaporation groove is further provided with a chain transmission assembly, the chain transmission assembly includes a driving sprocket, a driven sprocket, and a chain simultaneously engaged with the driving sprocket and the driven sprocket; the driving sprocket and the driven sprocket are arranged at intervals in the length direction of the guide rail; the moving direction of the chain is parallel to the length direction of the guide rail; the evaporation groove cover plate is connected with the chain.

[0013] Further, the chain transmission assembly further includes a driving device; the power output end of the driving device is connected with the driving sprocket.

[0014] Further, the chain transmission assembly further includes a tensioning wheel arranged between the driving sprocket and the driven sprocket.

[0015] Further, the chain transmission assembly has two sets, one set of chain transmission assembly is arranged at the front end of the evaporation groove, and the other set of chain transmission assembly is arranged at the rear end of the evaporation groove; the two driving sprockets belonging to the two sets of chain transmission assemblies are connected together through a synchronous transmission shaft.

[0016] Further, the end of the evaporation groove cover plate is fixedly connected with a clamping device, and the evaporation groove cover plate is clamped together with the chain through the clamping device.

[0017] Further, the outer surfaces of the guide rail and the guide wheel are provided with a heat-resistant coating, and the bottom surface of the evaporation groove cover plate is provided with a heat-resistant coating.

[0018] The above technical solution has the following beneficial effects:

[0019] In the technical solution, the cover plate is arranged on the evaporation tank, and the cover plate is used to shield the evaporation tank during heating, so that the heat preservation effect is good, the evaporation tank can be rapidly heated, and the working efficiency is improved.

[0020] In addition, in the evaporation equipment in the prior art, the winding system (including the unwinding assembly and the winding assembly) works during normal work, the film material is always advancing, and therefore the heating time between the film material at a position and the evaporation tank is relatively short. When the evaporation tank is initially heated, the winding system is in a stopped state, and the front end of the film material is equivalent to be roasted under the evaporation tank for a long time. Therefore, due to the long heating time, the continuous high heat can easily cause damage to the front end of the film material. After the technical solution is adopted, the opening and closing of the cover plate can be accurately controlled, the heating time can be greatly shortened, and damage to the film material caused by excessive heat dissipation can be avoided. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed in the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0022] Figure 1 is a structural schematic view of the evaporation tank cover plate of the evaporation equipment according to an embodiment of the present application (when the evaporation tank cover plate is opened);

[0023] Figure 2 is a structural schematic view of the evaporation tank cover plate of the evaporation equipment according to an embodiment of the present application (when the evaporation tank cover plate is closed);

[0024] LIST OF REFERENCE NUMERALS

[0025] 1, first evaporation tank; 2, second evaporation tank; 3, crucible placing hole; 4, evaporation tank cover plate; 5, synchronous transmission shaft; 6, guide wheel; 7, clamping device; 8, driving sprocket; 9, shaft coupling; 10, driving device; 11, tension pulley; 12, chain; 13, guide rail; 14, driven sprocket. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0027] As Figure 1 , Figure 2 shown, the utility model discloses a novel evaporates the equipment of evaporating groove cover plate to solve the preceding problem, in the technical scheme, in the evaporating groove (evaporating equipment can include multiple evaporating groove of connecting arrangement, for example, the first evaporating groove 1 and the second evaporating groove 2 shown in the drawing) side, be provided with guide rail 13, and be equipped with the evaporating groove cover plate 4 along guide rail 13 moves. The guide rail 13 is horizontally arranged, the length direction of the guide rail 13 is perpendicular to the length direction of the evaporating groove, and the length size of the guide rail 13 is greater than the width size of the evaporating groove. In this way, under the action of external force, the evaporating groove cover plate 4 can move along the guide rail 13 in the length direction of the evaporating groove. One end of the guide rail 13 is aligned with the side of the evaporating groove, so that when the evaporating groove cover plate 4 moves to the end close to the evaporating groove, it can be laid on the evaporating groove and cover the crucible placing hole 3 (as shown in Figure 2 ), thereby covering the evaporating groove. When heating, the evaporating groove cover plate 4 can play a heat preservation role, which is beneficial to rapid heating of the evaporating groove, and can also avoid damage to the film material caused by long-time heating. After heating is completed, the evaporating groove cover plate 4 can be moved in the opposite direction, so that the evaporating groove is exposed (as shown in Figure 1 ).

[0028] In addition, a gap of 5-50mm should be left between the bottom of the evaporating groove cover plate 4 and the top of the groove body, which can effectively ensure the smooth opening and closing of the baffle and also play a good heat preservation role.

[0029] Further, a guide wheel 6 is connected to the end of the evaporating groove cover plate 4, which matches the guide rail 13. Through the cooperation of the guide wheel 6 and the guide rail 13, the friction of the evaporating groove cover plate 4 during movement can be effectively reduced.

[0030] Further, in order to completely cover the evaporating groove during heating, the length size of the evaporating groove cover plate 4 should be greater than the length size of the evaporating groove, and the width size of the evaporating groove cover plate 4 should be greater than the width size of the evaporating groove. At the same time, in order to stabilize the structure and keep the evaporating groove cover plate 4 running smoothly, two guide rails 13 can be arranged at the front and rear ends of the evaporating groove, and the two guide rails 13 also constitute the limit of the evaporating groove cover plate 4 in the length direction of the evaporating groove.

[0031] Further, the length of the guide rail 13 is not less than twice the width of the evaporating groove, which can ensure that the evaporating groove cover plate 4 can completely expose the evaporating groove after being opened, without causing interference to normal operation.

[0032] Further, although directly pushing the evaporation tank cover plate 4 can achieve its opening or closing, in order to make the movement of the evaporation tank cover plate 4 stable and reliable, a chain transmission assembly can be arranged at the end of the evaporation tank, the chain transmission assembly comprising a driving sprocket 8, a driven sprocket 14, and a chain 12 simultaneously engaged with the driving sprocket 8 and the driven sprocket 14, the driving sprocket 8 and the driven sprocket 14 being arranged at intervals along the length direction of the guide rail 13, the moving direction of the chain 12 being parallel to the length direction of the guide rail 13, and the evaporation tank cover plate 4 being connected with the chain 12. When the driving sprocket 8 is driven to rotate by external force, the chain 12 will drag the evaporation tank cover plate 4 to move together, thereby realizing the translation of the evaporation tank cover plate 4.

[0033] Further, in order to improve the automation level and make the evaporation tank cover plate 4 automatically open or close, the chain transmission assembly further comprises a driving device 10, the power output end of the driving device 10 being connected with the driving sprocket 8. Under the instruction of the control system (not shown in the figure), the driving device 10 (preferably a motor with a reducer) acts, thereby dragging the driving sprocket 8 to rotate, and further making the chain 12 move under control.

[0034] Further, the chain transmission assembly further comprises a tensioning wheel 11 arranged between the driving sprocket 8 and the driven sprocket 14. Through the tensioning action of the tensioning wheel 11, the problems such as tooth skipping and falling off of the chain 12 during operation can be avoided, and the reliable operation of the equipment is ensured.

[0035] Further, in order to make the evaporation tank cover plate 4 bear force uniformly and keep the operation stable, the chain transmission assembly has two sets, and the two sets of chain transmission assemblies are arranged at the front and rear ends of the evaporation tank respectively. In order to make the two sets of chain transmission assemblies act synchronously, the two driving sprockets 8 belonging to the two sets of chain transmission assemblies are connected together through a synchronous transmission shaft 5, the power output end of the driving device 10 is connected with the synchronous transmission shaft 5 through a shaft coupling 9, and the driving sprocket 8 is fixedly connected with the synchronous transmission shaft 5.

[0036] Further, the end of the evaporation tank cover plate 4 is fixedly connected with a clamping device 7 (such as a lock), and the evaporation tank cover plate 4 is clamped together with the chain 12 through the clamping device 7. The clamping device 7 can disconnect the evaporation tank cover plate 4 and the chain 12 when needed, which is convenient for the maintenance of the equipment.

[0037] Further, the outer surfaces of the guide rail 13 and the guide wheel 6 are provided with a heat-resistant coating, and the bottom surface of the evaporation tank cover plate 4 is provided with a heat-resistant coating. The guide rail 13, the guide wheel 6, the evaporation tank cover plate 4, etc. should be made of metal materials with high melting point, and the heat-resistant coating should be coated on the heated surface as much as possible.

[0038] The specific use method and process of the equipment are as follows:

[0039]

[0039] The film material is wound on the winding and unwinding roller, the evaporation material is added into the evaporation tank (in this embodiment, the crucible is specifically arranged in the evaporation tank, and actually copper or aluminum is added into the crucible), the vacuum cabin of the evaporation equipment is closed, vacuumizing is carried out, after the vacuumizing is completed, the heating device of the evaporation tank is started, and the cover plate 4 of the evaporation tank is moved to the closed state, that is, it is shielded above the evaporation tank, after being heated to at least the melting point temperature of the evaporation material, the baffle can be opened, and the winding system is started to carry out the evaporation work.

[0040] In the above detailed description, various features are combined in a single embodiment for simplicity. This disclosure does not reflect the intention that the claimed subject matter requires more features than are expressly set forth in each claim. Rather, as the appended claims reflect, inventive subject matter lies in less than all features of a single disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate preferred embodiment.

[0041] In order for any person skilled in the art to be able to implement or use the present application, the above discloses the disclosed embodiments. For those skilled in the art, various modifications of these embodiments are obvious, and the general principles defined herein can also be applied to other embodiments without departing from the spirit and protection scope of the present disclosure. Therefore, the present disclosure is not limited to the embodiments given herein, but is consistent with the broadest scope of the principles and novel features disclosed in the present application.

[0042] The above detailed description further explains the purpose, technical scheme and beneficial effects of the present application. It should be understood that the above is only a specific embodiment of the present application and is not used to limit the protection scope of the present application. Any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. An evaporation apparatus with an evaporation slot cover plate, characterized in that The evaporation tank, guide rail (13) arranged at the side of the evaporation tank and evaporation tank cover plate (4) capable of moving along the guide rail (13) are included. The guide rail (13) is horizontally arranged, the length direction of the guide rail (13) is perpendicular to the length direction of the evaporation tank, and the length dimension of the guide rail (13) is greater than the width dimension of the evaporation tank. When the evaporation tank cover plate (4) is located at one end of the guide rail (13), the evaporation tank cover plate (4) is located above the evaporation tank.

2. The evaporation cell cover plate-equipped vapor deposition apparatus according to claim 1, wherein The end of the evaporation tank cover plate (4) is connected with a guide wheel (6) matched with the guide rail (13).

3. The evaporation cell cover plate-equipped vapor deposition apparatus according to claim 1 or 2, wherein The length dimension of the evaporation tank cover plate (4) is greater than the length dimension of the evaporation tank, and the width dimension of the evaporation tank cover plate (4) is greater than the width dimension of the evaporation tank.

4. The evaporation cell cover plate-equipped vapor deposition apparatus according to claim 1, wherein The guide rail (13) is not less than 2 times the width of the evaporation tank.

5. The evaporation cell cover plate-equipped vapor deposition apparatus according to any one of claims 1, 2, or 4, wherein The end of the evaporation tank is also provided with a chain transmission assembly, which includes a driving sprocket (8), a driven sprocket (14) and a chain (12) simultaneously engaged with the driving sprocket (8) and the driven sprocket (14). The driving sprocket (8) and the driven sprocket (14) are arranged in the length direction of the guide rail (13). The moving direction of the chain (12) is parallel to the length direction of the guide rail (13). The evaporation tank cover plate (4) is connected with the chain (12).

6. The evaporation cell cover plate-equipped vapor deposition apparatus according to claim 5, wherein The chain transmission assembly further includes a driving device (10), and the power output end of the driving device (10) is connected with the driving sprocket (8).

7. The evaporation cell cover plate-equipped vapor deposition apparatus according to claim 6, wherein The chain transmission assembly further includes a tensioning wheel (11) arranged between the driving sprocket (8) and the driven sprocket (14).

8. The evaporation cell cover plate-equipped vapor deposition apparatus according to claim 5, wherein The chain transmission assembly includes two sets, one set of the chain transmission assembly is arranged at the front end of the evaporation tank, and the other set of the chain transmission assembly is arranged at the rear end of the evaporation tank.

9. The evaporation cell cover plate-equipped vapor deposition apparatus according to claim 5, wherein The end of the evaporation tank cover plate (4) is fixedly connected with a clamping device (7), and the evaporation tank cover plate (4) is clamped and connected with the chain (12) through the clamping device (7).

10. The evaporation cell cover plate-equipped vapor deposition apparatus according to claim 2, wherein The outer surfaces of the guide rail (13) and the guide wheel (6) are provided with a heat-resistant coating, and the bottom surface of the evaporation tank cover plate (4) is provided with a heat-resistant coating.

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