Pipeline device of ceramic connecting seat and thin film deposition equipment of pipeline device

Abstract

The utility model discloses a pipeline device of ceramic connecting seat and thin film deposition equipment thereof, the pipeline device of ceramic connecting seat comprises: ceramic connecting seat and pipe fitting, the ceramic connecting seat is equipped with the liquid passage, the pipe fitting is inserted in the liquid passage, and the both ends of the pipe fitting extend out of the surface of ceramic connecting seat. According to the pipeline device of the ceramic connecting seat and the thin film deposition equipment of the pipeline device, the pipe fitting is additionally arranged in the liquid path channel of the ceramic connecting seat, and the two ends of the pipe fitting extend out of the surface of the ceramic connecting seat to be connected with other parts in an inserted mode, so that the sealing performance of an internal pipeline is improved. In order to improve stress balance when the ceramic connecting seat is connected with other parts, the hinged pressing piece is additionally arranged so that the probability of damaging the ceramic connecting seat in the assembling process can be reduced. In the disassembly and maintenance process of equipment, the ceramic connecting base is more convenient to disassemble and assemble, the repeated utilization rate of the ceramic connecting base is improved, and cost is saved.

Description

TECHNICAL FIELD

[0001] The utility model relates to thin film deposition equipment technical field especially relates to a pipeline device of ceramic connecting seat and thin film deposition equipment thereof. BACKGROUND

[0002] In order to avoid the aluminum block and gas path electrification, the PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment needs to use the ceramic base of insulating material to increase the spatial distance of high and low potential, so the ceramic block is generally used as the intermetallic connecting piece. The ceramic base needs to bear three functions of support, fixation and waterway and gasway connection as the connecting piece. As a part of the waterway, there is a risk of leakage. When the ceramic base is installed and fixed, uneven stress will cause cracks, which will directly lead to circulating water leakage and eventually cause the equipment to be down. Therefore, it is urgent to improve the sealing of the connecting waterway of the ceramic base and other components to improve the safety and durability of the equipment. SUMMARY

[0003] The utility model discloses a kind of pipeline devices of ceramic connecting seat and thin film deposition equipment thereof, to solve the technical problem that the liquid path between existing ceramic base and other components is prone to leakage.

[0004] To achieve the above object, the utility model adopts the following technical scheme:

[0005] Firstly, the embodiment of the utility model provides a kind of pipeline device of ceramic connecting seat, it includes: ceramic connecting seat and pipe fitting, the liquid path passage is equipped in the ceramic connecting seat, the pipe fitting is inserted in the liquid path passage, and the both ends of the pipe fitting protrude on the surface of the ceramic connecting seat.

[0006] Wherein, the outer side wall of the pipe fitting is further provided with protruding ring, the inner wall of the liquid path passage is close to upper port and is provided with the arc-shaped groove corresponding to the protruding ring, and the protruding ring is connected in the arc-shaped groove.

[0007] Wherein, the pipe fitting is polytetrafluoroethylene pipe.

[0008] Wherein, the ceramic connecting seat includes: seat body, and upper connecting plate and lower connecting plate extended transversely by the top surface and bottom surface of the seat body, the outer side of the upper connecting plate and the lower connecting plate is equipped with protruding rib.

[0009] Wherein, the upper connecting plate and the lower connecting plate are equipped with connecting hole, and the thickness of the upper connecting plate and the lower connecting plate is not less than 15mm.

[0010] The upper connecting plate and / or the lower connecting plate are further provided with a hinged pressing sheet in position, the hinged pressing sheet comprises a first connecting part and a second connecting part bent out of the edge of the first connecting part, and the first connecting part is fixedly connected to the upper connecting plate and / or the lower connecting plate through a connecting piece.

[0011] The inner side of the second connecting part is further provided with a plurality of grooves, and the convex ribs are clamped in the grooves.

[0012] The inner side of the bending position of the first connecting part and the second connecting part is further provided with an arc-shaped groove, and the arc-shaped groove is matched with the edge corner position of the upper connecting plate and / or the lower connecting plate.

[0013] The pipeline device of the ceramic connecting seat further comprises a gas distribution block and a top cover, the gas distribution block is connected to the upper connecting plate, the top cover is connected to the lower connecting plate, and the gas distribution block, the top cover and the gas path and the liquid path inside the ceramic connecting seat are respectively communicated in position.

[0014] In the second aspect, the embodiment of the utility model provides a thin film deposition equipment, the thin film deposition equipment includes the pipeline device of the ceramic connecting seat described in any one of the above.

[0015] The pipeline device of the ceramic connecting seat and the thin film deposition equipment thereof, by increasing the pipe fitting in the liquid path channel of the ceramic connecting seat, the both ends of the pipe fitting are stretched out of the surface of the ceramic connecting seat to be inserted with other components, so that the sealing property of the internal pipeline is improved. In order to improve the force balance when the ceramic connecting seat is connected with other components, the hinged pressing sheet is additionally arranged so as to reduce the probability of damaging the ceramic connecting seat and the sealing property in the assembling process.

[0016] The above description is only a summary of the technical scheme of the utility model, in order to more clearly understand the technical means of the utility model, can be implemented according to the content of the specification, and in order to let the above and other purposes, characteristics and advantages of the utility model can be more obvious and easy to understand, the following preferred embodiments are described in detail as follows. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is the whole structure schematic view of the pipeline device of the ceramic connecting seat of the embodiment of the utility model.

[0018] Figure 2 It is the explosion drawing of the pipeline device of the ceramic connecting seat of the embodiment of the utility model.

[0019] Figure 3 It is the longitudinal sectional view of the pipeline device of the ceramic connecting seat of the embodiment of the utility model.

[0020] Figure 4 As Figure 3 The partial A enlarged structure schematic view is shown.

[0021] Figure 5 The ceramic connecting seat and bottom cover part structure schematic view of the pipeline device of the ceramic connecting seat of the embodiment of the utility model.

[0022] Figure 6 The ceramic connecting seat part structure schematic view of the pipeline device of the ceramic connecting seat of the embodiment of the utility model.

[0023] Figure 7 The ceramic connecting seat side view of the pipeline device of the ceramic connecting seat of the embodiment of the utility model.

[0024] Figure 8 The hinged pressing piece part structure schematic view of the pipeline device of the ceramic connecting seat of the embodiment of the utility model.

[0025] Figure 9 The hinged pressing piece side view of the pipeline device of the ceramic connecting seat of the embodiment of the utility model.

[0026] Figure 10 The hinged pressing piece connecting assembly state schematic view of the ceramic connecting seat and top cover of the pipeline device of the ceramic connecting seat of the embodiment of the utility model.

[0027] Figure 11 As Figure 10 The partial B enlarged structure schematic view is shown.

[0028] Mark explanation:

[0029] The pipeline device 100 of the ceramic connecting seat, the ceramic connecting seat 1, the seat body 10, the liquid inlet channel 11, the liquid outlet channel 12, the arc-shaped groove 121, the upper connecting plate 13, the lower connecting plate 14, the convex rib 131 (141), the connecting hole 132 (142), the gas distribution block 2, the liquid inlet hole 21, the liquid outlet hole 22, the top cover 3, the pipe fitting 4, the convex annular ring 41, the hinged pressing piece 5, the first connecting part 52, the second connecting part 51, the connecting piece 521 (522, 523), the arc-shaped groove 511, the recess 512, the connecting through hole 5211, the sealing ring 7, the connecting piece 8. Specific implementation

[0030] In order to make the purpose, technical scheme and advantages of the utility model more clear and obvious, the utility model is further explained in detail below by combining with the drawings and specific implementation.

[0031] Clearly and completely describe the technical scheme in the embodiments of the utility model with the drawings in the embodiments of the utility model, obviously, the described embodiments are only some embodiments of the utility model, not all embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without making creative efforts belong to the scope of protection of the utility model.

[0032] In the description of the utility model, it is understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like are the orientation or positional relationship described based on the drawings, and are only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model.

[0033] In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the utility model, the meaning of "multiple" is two or more, unless otherwise explicitly specified and limited.

[0034] In the utility model, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication or interaction relationship between two elements. For the person skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific situation.

[0035] In the utility model, unless otherwise explicitly specified and limited, the "upper" or "lower" of the first feature to the second feature can include that the first and second features are in direct contact, or the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the "upper", "upper" and "upper" of the first feature to the second feature include that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The "below", "below" and "below" of the first feature to the second feature include that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0036] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms should not be understood as necessarily referring to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0037] In order to avoid the charging of the gas distribution aluminum block and the gas path, the PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment needs to use an insulating material ceramic base to increase the spatial distance of high and low potential, so a ceramic block is generally used as an intermetallic connector. The ceramic base as a connector needs to bear three functions of support, fixation and communication of water path and gas path; among which, as part of the water path, there is a risk of leakage. When the ceramic base is installed and fixed, uneven stress occurs, and cracks will directly cause the leakage of circulating water, eventually leading to equipment downtime. Therefore, it is urgent to improve the sealing of the water path connected with the ceramic base and other components to improve the safety and durability of the equipment. In order to solve the above problems, the embodiment discloses a pipe device 100 of a ceramic connector seat.

[0038] Please refer to Figures 1 to 11 In this embodiment, the pipe device 100 of the ceramic connector seat disclosed by the embodiment is applied to the thin film deposition process of a semiconductor equipment, specifically, the pipe device 100 of the ceramic connector seat is used to connect the mechanism between the external gas source and the top cover of the process chamber, which is used to provide process gas and cooling circuit for the process chamber.

[0039] The pipe device 100 of the ceramic connector seat comprises a ceramic connector seat 1 and a pipe 4, the ceramic connector seat 1 is provided with a liquid path channel, the pipe 4 is inserted into the liquid path channel, and both ends of the pipe 4 protrude out of the surface of the ceramic connector seat 1. The ceramic connector seat 1 is used to fixedly connect the gas distribution block 2 and the top cover 3 of the process chamber, and the ceramic connector seat 1 can increase the physical distance between the gas distribution block 2 and the top cover 3, thereby reducing the potential between them, reducing the charging of the gas distribution block 2 and the process gas, and reducing the influence on the uniformity of the process gas.

[0040] In the embodiment, the pipe 4 is added in the liquid passage in the ceramic connector 1. Since the pipe 4 can be made of other materials, it has better plasticity and compatibility compared with the ceramic connector 1 made of ceramic material, thereby avoiding the insufficient sealing of the ceramic connector 1 made of ceramic material and other components, and reducing the risk of liquid or gas leakage. When the ceramic connector 1 is assembled with the gas distribution block 2 and the top cover 3, the two ends of the pipe 4 embedded in the ceramic connector 1 extend out of the surface of the ceramic connector 1. Therefore, the part extending out of the surface of the ceramic connector 1 can be inserted into the corresponding passage of the gas distribution block 2 or the top cover 3, so that the internal liquid or gas passage of the ceramic connector 1 has high sealing performance after being assembled with the gas distribution block 2 and the top cover 3, and the risk of liquid or gas leakage is reduced.

[0041] It can be understood that, in order to improve the sealing performance of the gas passage between the gas distribution block 2 and the ceramic connector 1, the pipe 4 can also be added in the gas passage in the ceramic connector 1.

[0042] The outer side wall of the pipe 4 is further provided with a protruding ring 41, the inner wall of the liquid passage is provided with an arc-shaped groove 121 corresponding to the protruding ring 41 near the upper port, and the protruding ring 41 is connected in the arc-shaped groove 121. The protruding ring 41 can improve the sealing performance of the ceramic connector 1 assembled therewith, and the pipe 4 can be hung on the ceramic connector 1 through the protruding ring.

[0043] As shown in Figure 4 and Figure 6 In the embodiment, the liquid passage includes a liquid inlet passage 11 and a liquid outlet passage 12 opened in the ceramic connector 1. The liquid inlet passage 11 and the liquid outlet passage 12 longitudinally penetrate the ceramic connector 1. The liquid passage is used to transport circulating cooling liquid into the top cover 3, and is used to cool the top cover 3 and other components.

[0044] It can be understood that, in the embodiment, only the liquid inlet passage 11 and the liquid outlet passage 12 are taken as examples to describe the connection mode of the ceramic connector 1 and the pipe 4. In other embodiments, more other liquid passages or gas passages can be arranged in the ceramic connector 1. Correspondingly, the liquid passages and the gas passages can be improved in sealing performance of the connection passage between the gas distribution block 2 or the top cover 3 by adding the pipe 4.

[0045] In the embodiment, the pipe 4 is a polytetrafluoroethylene pipe. In other embodiments, the pipe can also be made of other materials, which have the characteristics of high temperature resistance, corrosion resistance, oxidation resistance, etc.

[0046] Please refer to Figure 6 and Figure 7, the ceramic connecting seat 1 comprises a seat body 10, and upper and lower connecting plates 13 and 14 extending laterally from the top and bottom surfaces of the seat body 10, and the outer surfaces of the upper and lower connecting plates 13 and 14 are provided with raised ribs 131 (141).

[0047] The raised ribs 131 (141) provided on the outer surfaces of the upper and lower connecting plates 13 and 14 are a plurality of parallel strip-shaped arch structures, which can improve the strength of the upper and lower connecting plates 13 and 14 and prevent the ceramic connecting seat 1 from being damaged during assembly.

[0048] The upper and lower connecting plates 13 and 14 are provided with connecting holes 132 (142), and the thickness of the upper and lower connecting plates 13 and 14 is not less than 15 mm. The connecting member 8 is arranged in the connecting holes 132 (142) to connect and assemble the gas distribution block 2 or the top cover 3 with the ceramic connecting seat 1 through the connecting member 8. In this embodiment, the connecting member 8 is a screw, and the corresponding positions of the gas distribution block 2 and the top cover 3 are provided with threaded holes.

[0049] Please refer again to Figures 8 to 11 The upper and lower connecting plates 13 and 14 are also provided with a hinge pressing piece 5, which comprises a first connecting part 52 and a second connecting part 51 bent from the edge of the first connecting part 52, and the first connecting part 52 is fixedly connected to the upper and lower connecting plates 13 and 14 by the connecting member 8. Specifically, when the ceramic connecting seat 1 is connected to the gas distribution block 2, the hinge pressing piece 5 is connected to the upper connecting plate 13, and when the ceramic connecting seat 1 is connected to the top cover 3, the hinge pressing piece 5 is connected to the lower connecting plate 14. The hinge pressing piece 5 is added to the upper and lower connecting plates 13 and 14 of the ceramic connecting seat 1, and when the ceramic connecting seat 1 is connected to the gas distribution block 2 and the top cover 3 by the connecting member 8 such as a screw, the screw is pressed against the hinge pressing piece 5 and then screwed to the gas distribution block 2 or the top cover 3. At this time, the hinge pressing piece 5 can share the contact surface pressure generated by the screw connection, thereby reducing the risk of damage to the ceramic connecting seat 1, and can make the force on the connecting surface of the ceramic connecting seat 1 balanced, so that the sealing performance of the connection and assembly is better.

[0050] The inner surface of the second connecting part 51 is also provided with a plurality of grooves 512, and the raised ribs 131 (141) are clamped in the grooves 512. The clamping and matching structure of the raised ribs 131 (141) and the grooves 512 can improve the stability and reliability of the connection between the ceramic connecting seat 1 and other components, and can also generate tension on the screw to avoid vibration and loosening.

[0051] As shown in Figure 8 The first connecting part 52 comprises a plurality of parallel connecting pieces 521 (522, 523), each of which is provided with a connecting through hole 5211, and the connecting piece 8 is threaded into the connecting through hole 5211 and then threaded into the corresponding gas distribution block 2 or the top cover 3 through the upper connecting plate 13 or the lower connecting plate 14.

[0052] The inner side of the bending position of the first connecting part 52 and the second connecting part 51 is further provided with an arc-shaped groove 511, which is fitted to the edge corner position of the upper connecting plate 13 and / or the lower connecting plate 14.

[0053] The hinged pressing piece 5 is connected to the ceramic connecting seat 1, and the first connecting part 52 and the second connecting part 51 form an acute angle, and when assembled to the ceramic connecting seat 1, the first connecting part 52 and the second connecting part 51 are opened from the arc-shaped groove 511, the angle is increased, and the top surface and the side surface of the upper connecting plate 13 or the lower connecting plate 14 are fitted.

[0054] Please refer again to Figures 1 to 3 The pipeline device 100 of the ceramic connecting seat further comprises a gas distribution block 2 and a top cover 3, the gas distribution block 2 is connected to the upper connecting plate 13, the top cover 3 is connected to the lower connecting plate 14, and the gas distribution block 2, the top cover 3 and the gas path and liquid path inside the ceramic connecting seat 1 are respectively aligned and communicated. For example, the liquid inlet hole 21 in the gas distribution block 2 is aligned and communicated with the liquid inlet channel 11 on the ceramic connecting seat 1, and the liquid outlet hole 22 is aligned and communicated with the liquid outlet channel 12.

[0055] The outer side of the gas distribution block 2 is further connected with a liquid inlet pipe 6. The abutting surface of the ceramic connecting seat 1 and the gas distribution block 2, and the abutting surface of the ceramic connecting seat 1 and the top cover 3 are all provided with a sealing ring 7, which is used to improve the sealing performance of the abutting surface.

[0056] In the second aspect, the embodiment of the utility model provides a thin film deposition equipment, the thin film deposition equipment includes the pipeline device 100 of the ceramic connecting seat as any one of the above.

[0057] The pipeline device of the ceramic connecting seat and the thin film deposition equipment thereof improve the sealing performance of the internal pipeline by adding a pipe in the liquid path channel of the ceramic connecting seat, and the two ends of the pipe are extended out of the surface of the ceramic connecting seat to be inserted with other components. In order to balance the stress when the ceramic connecting seat is connected with other components, a hinged pressing piece is added to reduce the probability of damaging the ceramic connecting seat during assembly. During the disassembly and maintenance of the equipment, the ceramic connecting seat is also more convenient to disassemble and assemble, which improves its reusability and saves cost.

[0058] The above only further illustrates the technical content of the utility model with examples, so that the reader can more easily understand, but does not represent that the embodiment of the utility model is limited to this, and any technical extension or re-creation made according to the utility model is protected by the utility model. The protection scope of the utility model is subject to the patent claim.

Claims

1. A piping device of a ceramic connector, characterized by comprising: The application relates to a ceramic connecting seat and a pipe, wherein the ceramic connecting seat is internally provided with a liquid channel, and the pipe is inserted into the liquid channel and extends out of the surface of the ceramic connecting seat. The outer wall of the pipe is further provided with a convex ring, the inner wall of the liquid channel is provided with an arc-shaped groove corresponding to the convex ring near the upper port, and the convex ring is connected into the arc-shaped groove.

2. The plumbing arrangement of a ceramic header according to claim 1, characterized in that The pipe is a polytetrafluoroethylene pipe.

3. The plumbing arrangement of a ceramic header according to claim 2, characterized in that, The ceramic connecting seat comprises a seat body, an upper connecting plate and a lower connecting plate which are transversely extended from the top surface and the bottom surface of the seat body, and the outer side surfaces of the upper connecting plate and the lower connecting plate are both provided with convex ribs.

4. The piping arrangement of a ceramic header according to any one of claims 1 to 3, characterized in that The upper connecting plate and the lower connecting plate are both provided with connecting holes, and the thickness of the upper connecting plate and the lower connecting plate is not less than 15 mm.

5. The ceramic header plumbing apparatus of claim 4, wherein, The upper connecting plate and / or the lower connecting plate are further provided with a hinged pressing piece in position, the hinged pressing piece comprises a first connecting part and a second connecting part which is bent out of the edge of the first connecting part, and the first connecting part is fixedly connected to the upper connecting plate and / or the lower connecting plate through a connecting piece.

6. The plumbing arrangement of a ceramic header according to claim 4, characterized in that, The inner side surface of the second connecting part is further provided with a plurality of grooves, and the convex ribs are clamped into the grooves.

7. The plumbing arrangement of a ceramic header according to claim 6, characterized in that The inner side surface of the bending position of the first connecting part and the second connecting part is further provided with an arc-shaped groove which is fitted to the edge corner position of the upper connecting plate and / or the lower connecting plate.

8. The plumbing arrangement of a ceramic header according to claim 6, characterized in that, The pipe device of the ceramic connecting seat further comprises a gas distribution block and a top cover, the gas distribution block is connected to the upper connecting plate, the top cover is connected to the lower connecting plate, and the gas distribution block, the top cover and the gas channel and the liquid channel inside the ceramic connecting seat are respectively communicated in position.

9. The plumbing arrangement of a ceramic header according to claim 6, characterized in that, The thin film deposition equipment comprises the pipe device of the ceramic connecting seat as claimed in any one of claims 1 to 9.

10. A thin film deposition apparatus, characterized by, ​

Images