Grinding, polishing, etching, cleaning and oxidizing accelerator

Abstract

The utility model relates to the technical field of cleaning oxidation accelerators, in particular to a grinding, polishing, etching and cleaning oxidation accelerator which comprises a base, a stirring barrel is installed at one end of the top of the base, and an ozone generator is installed at the position, located on one side of the stirring barrel, of the top of the base. A conveying pipe extending to the inner side of the stirring barrel is mounted at the output end of the ozone generator, a mixing and stirring mechanism is mounted on the stirring barrel and the sealing cover, and the mixing and stirring mechanism comprises a linkage assembly, a plurality of groups of stirring blades, an extension assembly, a locking assembly and a liquid supply assembly; the device is simple in structure and convenient to operate, the ozone generator is adopted to provide a concentration-controllable ozone source, ozone and a liquid chemical agent are mixed and dissolved, the liquid chemical agent mixed and dissolved with the ozone makes contact with a workpiece needing to be processed to generate an oxidation-reduction reaction, the processing quality is improved, the safety risk is reduced, multidirectional stirring is carried out, and the production efficiency is improved. The mixing effect is improved, and a worker can conveniently and quickly disassemble and assemble the stirring blades for cleaning and maintenance.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of cleaning oxidation accelerator, concretely relates to a kind of grinding polishing etching cleaning oxidation accelerator. BACKGROUND

[0002] In the process of conventional semiconductor processing, ceramic copper-clad plate processing and metal processing, oxidation agent may be added to the corresponding chemical reagent for grinding, polishing, etching or cleaning to accelerate the production process and improve the processing effect. Commonly used oxidation agents include hydrogen peroxide, potassium permanganate, chromium trioxide, sulfuric acid and nitric acid. The use of these oxidation agents involves many problems, such as high material cost, storage cost, environmental impact, high safety requirements, harm to personal health, easy residue, difficult to clean, etc. Moreover, when mixing, the stirring direction is single and the mixing effect is poor. The stirring blades are usually fixed by bolts or integrated with the stirring rod, which makes it inconvenient for workers to quickly replace the corroded and worn stirring blades, thereby affecting the mixing effect and work efficiency. Therefore, there is an urgent need to design a grinding polishing etching cleaning oxidation accelerator to solve the above problems. SUMMARY

[0003] The utility model aims to provide a kind of grinding polishing etching cleaning oxidation accelerator to solve the problems raised in the above background art, such as high material cost, storage cost, environmental impact, high safety requirements, harm to personal health, easy residue, difficult to clean, etc. Moreover, when mixing, the stirring direction is single and the mixing effect is poor. The stirring blades are usually fixed by bolts or integrated with the stirring rod, which makes it inconvenient for workers to quickly replace the corroded and worn stirring blades, thereby affecting the mixing effect and work efficiency.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0005] A grinding polishing etching cleaning oxidation accelerator includes a base, a stirring barrel is installed at the top of the base, an ozone generator is installed at the top of the base on one side of the stirring barrel, a delivery pipe is installed at the output end of the ozone generator and extends to the inside of the stirring barrel, a sealing cover is installed at the top end of the stirring barrel, a mixing and stirring mechanism is installed on the stirring barrel and the sealing cover, the mixing and stirring mechanism includes a linkage assembly, multiple sets of stirring blades, an extension assembly, a locking assembly and a liquid supply assembly, the linkage assembly is used to drive the stirring blades to rotate and stir, the extension assembly is used to drive the stirring blades to reciprocate in cooperation with the linkage assembly, the locking assembly is used to quickly disassemble and assemble the stirring blades, and the liquid supply assembly is used to deliver the mixed reagent to the processing site.

[0006] As the preferred scheme of the utility model, the linkage assembly includes the first stirring rod rotationally connected to one side of the sealing cover, one end of the first stirring rod is rotationally connected with the adjusting sleeve, the other end of the inside of the adjusting sleeve is rotationally connected with the second stirring rod, the second stirring rod is overlapped with the inner wall of the stirring barrel, the adjusting sleeve is installed with the connecting rod between one side and the sealing cover, the opposite ends of the first stirring rod and the second stirring rod are all installed with the first bevel gear, one side of the inner wall of the adjusting sleeve is rotationally connected with the second bevel gear, the second bevel gear is meshed with the first bevel gear, the top end of the sealing cover is installed with the motor, the driving end of the motor extends to the inside of the sealing cover and is fixedly connected with one end of the first stirring rod.

[0007] As the preferred scheme of the utility model, the stretching assembly includes multiple groups of fixing seats arranged and installed outside the first stirring rod and the second stirring rod, the inside of the fixing seat is provided with a stretching groove, the inside of the stretching groove is slidably connected with a stretching block, the first spring is installed between the two ends of one side of the stretching block and the inner wall of the stretching groove, the sealing ring that is attached to the outer wall of the stretching block is embeddedly installed on the inner wall of the stretching groove.

[0008] As the preferred scheme of the utility model, the locking assembly includes the butt joint seat installed at one end of the stretching block, the side of the stirring blade is installed with the clamping block, the side of the butt joint seat is provided with the clamping groove, the clamping block and the clamping groove are slidably connected, the side of the clamping groove in the inside of the butt joint seat is provided with the extrusion groove, the extrusion plate is slidably connected in the inside of the extrusion groove.

[0009] As the preferred scheme of the utility model, the second spring is installed between the two ends of one side of the extrusion plate and the inner wall of the extrusion groove, the pull rod is installed on the other side of the extrusion plate, the pull ring is rotationally connected with one end of the pull rod that extends to the outside of the butt joint seat, the opposite ends of the clamping block and the extrusion plate are all provided with the inclined surface that is attached to each other.

[0010] As the preferred scheme of the utility model, the liquid supply assembly includes the feeding cylinder embeddedly installed at one end of the top of the sealing cover, the top of the feeding cylinder is clamped with the sealing cover through the lock buckle, the top end of the ozone generator is installed with the liquid supply pump.

[0011] As the preferred scheme of the utility model, the liquid suction end of the liquid supply pump is installed with the liquid suction pipe that extends to the inside of the stirring barrel, the liquid outlet end of the liquid supply pump is installed with the liquid outlet pipe.

[0012] Compared with the prior art, the utility model has the advantages that:

[0013] The utility model discloses, through linkage assembly drive stirring vane carries out rotary stirring, stretchs out the component cooperation linkage assembly drives stirring vane to carry out reciprocating motion, locking assembly carries out quick dismounting to stirring vane, and liquid supply component transports the mixed medicine of completing to processing, simple structure, convenient operation, adopts ozone generator to provide concentration controllable ozone source, and ozone mixes and dissolves liquid chemical agent, and the liquid chemical agent that mixed and dissolved with ozone contacts the work piece that needs processing and produces oxidation reduction reaction, improves processing quality, reduces the security risk, carries out multidirectional stirring, improves mixing effect, and convenient for staff quick dismounting stirring vane and carries out cleaning and maintenance. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is whole structure schematic diagram of the utility model;

[0015] Figure 2 It is stirring barrel partial section structure schematic diagram of the utility model;

[0016] Figure 3 It is docking seat partial section structure schematic diagram of the utility model;

[0017] Figure 4 It is adjusting sleeve partial section structure schematic diagram of the utility model.

[0018] In the drawing: 1, base;2, stirring barrel;3, ozone generator;4, stirring vane;5, first stirring rod;6, adjusting sleeve;7, second bevel gear;8, fixed seat;9, stretch block;10, sealing ring;11, clamping block;12, extrusion plate;13, feed cylinder;14, pull ring;15, liquid supply pump;16, motor;17, docking seat;18, liquid suction pipe;19, liquid outlet pipe. DETAILED DESCRIPTION

[0019] The technical scheme in the embodiments of the utility model will be described below in a clear and complete manner in conjunction with the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model.

[0020] Embodiment:

[0021] Please refer to Figures 1-4 The utility model provides a technical scheme:

[0022] The application discloses a polishing etching cleaning oxidation accelerator, which comprises a base 1, a stirring barrel 2 is arranged at one end of the top of the base 1, an ozone generator 3 is arranged at one side of the top of the base 1, an output end of the ozone generator 3 is provided with a conveying pipe extending to the inside of the stirring barrel 2, a sealing cover is arranged at the top end of the stirring barrel 2, and a mixing and stirring mechanism is arranged on the stirring barrel 2 and the sealing cover; the mixing and stirring mechanism comprises a linkage assembly, a plurality of stirring blades 4, an extension assembly, a locking assembly and a liquid supply assembly; the linkage assembly is used for driving the stirring blades 4 to rotate and stir; the extension assembly is used for driving the stirring blades 4 to move back and forth in cooperation with the linkage assembly; the locking assembly is used for quickly disassembling and assembling the stirring blades 4; and the liquid supply assembly is used for conveying the mixed medicament to a processing position. When the polishing etching cleaning oxidation accelerator is used, the linkage assembly drives the stirring blades 4 to rotate and stir, the extension assembly drives the stirring blades 4 to move back and forth in cooperation with the linkage assembly, the locking assembly quickly disassembles and assembles the stirring blades 4, and the liquid supply assembly conveys the mixed medicament to the processing position. The polishing etching cleaning oxidation accelerator has the advantages of simple structure, convenient operation, controllable ozone source provided by the ozone generator 3, mixed and dissolved ozone and liquid chemical agent, contact between the mixed and dissolved liquid chemical agent with ozone and a workpiece to be processed to generate an oxidation-reduction reaction, improved processing quality, reduced safety risk, multi-directional stirring, improved mixing effect, and convenience of quick disassembly and assembly of the stirring blades 4 for cleaning and maintenance.

[0023] In the embodiment, as shown in Figure 1 and Figure 2 , a liquid suction pipe 18 extending to the inside of the stirring barrel 2 is arranged at a liquid suction end of the liquid supply pump 15, and a liquid outlet pipe 19 is arranged at a liquid outlet end of the liquid supply pump 15. Firstly, the ozone is used to oxidize the surface of a processing material, so that other chemical oxidants are replaced to improve the processing speed and processing effect. The ozone generator 3 is used to conveniently and quickly produce the ozone with adjustable concentration at low cost, the ozone gas is mixed and dissolved in the chemical agent, and then the liquid supply pump 15 is used to convey the mixed and dissolved liquid to a processing machine, so that the surface of the processed workpiece is contacted to generate an oxidation-reduction reaction, the processing process is accelerated, and the processing effect is improved.

[0024] In the embodiment, as shown in Figure 2 and Figure 4As shown, linkage assembly includes a first stirring rod 5 rotatably connected to one side of the sealing cover, one end of the first stirring rod 5 is rotatably connected with an adjusting sleeve 6, the other end of the inner side of the adjusting sleeve 6 is rotatably connected with a second stirring rod, the second stirring rod is lapped with the inner wall of the stirring barrel 2, a connecting rod is installed between one side of the adjusting sleeve 6 and the sealing cover, the opposite ends of the first stirring rod 5 and the second stirring rod are both installed with first bevel gears, a second bevel gear 7 is rotatably connected with one side of the inner wall of the adjusting sleeve 6, the second bevel gear 7 is meshingly connected with the first bevel gears, a motor 16 is installed at the top end of the sealing cover, the driving end of the motor 16 extends to the inside of the sealing cover and is fixedly connected with one end of the first stirring rod 5, then, starting the motor 16 drives the first stirring rod 5 to rotate inside the adjusting sleeve 6, cooperating with the second bevel gear 7 and the two groups of first bevel gears to drive the second stirring rod to rotate reversely, so that the stirring blades 4 at the upper and lower ends are reversely stirred and mixed.

[0025] In this embodiment, as shown in Figure 2 and Figure 4 , the stretching assembly includes a plurality of groups of fixed seats 8 arranged and installed outside the first stirring rod 5 and the second stirring rod, the fixed seat 8 is internally provided with a stretching groove, a stretching block 9 is slidably connected inside the stretching groove, a first spring is installed between the two ends of one side of the stretching block 9 and the inner wall of the stretching groove, a sealing ring 10 is embeddedly installed on the outer wall of the stretching block 9, further, by increasing the rotating speed of the motor 16, the stretching block 9 is swung to press the two groups of second springs, and then the stirring blades 4 are pushed out, and then the rotating speed is reduced to drive the stirring blades 4 to retract again close to the center, further enhancing the stirring and mixing effect.

[0026] In this embodiment, as shown in Figure 2 and Figure 3 , the locking assembly includes a butt joint seat 17 installed at one end of the stretching block 9, a clamping block 11 is installed on one side of the stirring blade 4, a clamping groove is formed on one side of the butt joint seat 17, the clamping block 11 is slidably connected with the clamping groove, an extrusion groove is formed on one side of the clamping groove inside the butt joint seat 17, an extrusion plate 12 is slidably connected inside the extrusion groove, further, after cleaning and maintenance are completed, the corresponding stirring blade 4 can be lapped with the butt joint seat 17, the clamping block 11 is allowed to enter the inside of the clamping groove and contact with the extrusion plate 12, the inclined surfaces on the two are extruded with each other, forcing the extrusion plate 12 to retract to the inside of the extrusion groove, and the second spring is retracted, after the clamping block 11 is completely pushed into the inside of the clamping groove, the extrusion plate 12 is popped out by the second spring, and it is allowed to abut against the protruding end of the clamping block 11, locking the position of the stirring blade 4.

[0027] In this embodiment, as shown in Figure 2 and Figure 3As shown, the two ends of one side of the extrusion plate 12 and the inner wall of the extrusion groove are both provided with second springs, the other side of the extrusion plate 12 is provided with a pull rod, one end of the pull rod extending to the outside of the butt joint seat 17 is rotatably connected with a pull ring 14, the opposite ends of the clamping block 11 and the extrusion plate 12 are both provided with mutually abutting inclined surfaces, further, after the sealing cover is removed, the first stirring rod 5 and the second stirring rod and the plurality of stirring blades 4 can be pulled out together, the pull ring 14 is buckled to drive the pull rod to lift, the extrusion plate 12 is pressed to compress the two groups of second springs to retract, so that the second springs no longer abut against the protruding end of the clamping block 11, at this time the stirring blades 4 can be removed for cleaning or maintenance.

[0028] In the embodiment, as shown in Figure 1 and Figure 2 shown, the liquid supply assembly includes a feeding cylinder 13 embeddedly installed at one end of the top of the sealing cover, the top end of the feeding cylinder 13 is buckled with the sealing cover through a lock buckle, one end of the top of the ozone generator 3 is provided with a liquid supply pump 15, further, after the lock buckle is unlocked and the sealing cover is removed, the required raw materials of the medicament can be poured into the inside of the stirring barrel 2 through the feeding cylinder 13, waiting for mixing operation.

[0029] The implementation principle of the polishing and etching cleaning oxidation accelerator of the embodiment is as follows: the motor 16 is started to drive the first stirring rod 5 to rotate, the second bevel gear 7 and the two groups of first bevel gears are cooperated to drive the second stirring rod to rotate reversely, so that the stirring blades 4 at the upper and lower ends are reversely stirred and mixed, the rotation speed of the motor 16 is increased to utilize the centrifugal force to swing the stretching block 9 to extrude the two groups of second springs, then the stirring blades 4 are pushed out, the rotation speed is reduced to drive the stirring blades 4 to retract close to the center again, the stirring and mixing effect is further enhanced, after the sealing cover is removed, the first stirring rod 5 and the second stirring rod and the plurality of stirring blades 4 can be pulled out together, the pull ring 14 is buckled to drive the pull rod to lift, the extrusion plate 12 is pressed to compress the two groups of second springs to retract, so that the second springs no longer abut against the protruding end of the clamping block 11, at this time the stirring blades 4 can be removed for cleaning or maintenance, after the cleaning and maintenance are completed, the corresponding stirring blades 4 are overlapped with the butt joint seat 17, the clamping block 11 enters the inside of the clamping groove and contacts the extrusion plate 12, the inclined surfaces on the two are extruded with each other, the extrusion plate 12 is forced to retract to the inside of the extrusion groove, the second spring is compressed to retract, after the clamping block 11 is completely pushed into the inside of the clamping groove, the extrusion plate 12 is popped out by the second spring to abut against the protruding end of the clamping block 11, the position of the stirring blades 4 is locked, the motor 16 is started to drive the adjusting plate 15 to move together, the top cover 17 is pressed on the top end of the stirring cylinder 3, so that the stirring blades 4 are inserted into the inside of the stirring cylinder 3, then the lock buckle is unlocked and the sealing cover is removed, the raw materials can be poured into the inside of the stirring cylinder 3 through the feeding cylinder 13.

[0030] The control mode of the utility model is controlled through the controller, the control circuit of the controller can be realized through simple programming of the person skilled in the art, the provision of the power supply also belongs to the public knowledge in the art, and the utility model is used to protect the mechanical device, so the utility model will not explain the control mode and the circuit connection in detail.

[0031] Although the embodiments of the utility model have been shown and described, it can be understood by those of ordinary skill in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A polishing etching cleaning oxidation accelerator comprising a base (1), characterized in that: The top end of the base (1) is provided with a stirring barrel (2), and the top of the base (1) is provided with an ozone generator (3) on one side of the stirring barrel (2). An output end of the ozone generator (3) is provided with a conveying pipe extending to the inside of the stirring barrel (2). The top end of the stirring barrel (2) is provided with a sealing cover. A mixing and stirring mechanism is installed on the stirring barrel (2) and the sealing cover. The mixing and stirring mechanism comprises a linkage assembly, a plurality of stirring blades (4), an extension assembly, a locking assembly and a liquid supply assembly. The linkage assembly is used to drive the stirring blades (4) to rotate and stir. The extension assembly is used to drive the stirring blades (4) to reciprocate in cooperation with the linkage assembly. The locking assembly is used to quickly disassemble and assemble the stirring blades (4). The liquid supply assembly is used to deliver the mixed and stirred medicament to a processing site.

2. The abrasive polishing etch cleaning oxidation accelerator of claim 1, wherein: The linkage assembly comprises a first stirring rod (5) rotatably connected to one side of the sealing cover. One end of the first stirring rod (5) is rotatably connected with an adjusting sleeve (6). The other end of the inside of the adjusting sleeve (6) is rotatably connected with a second stirring rod. The second stirring rod is lapped with the inner wall of the stirring barrel (2). A connecting rod is installed between one side of the adjusting sleeve (6) and the sealing cover. The opposite ends of the first stirring rod (5) and the second stirring rod are both provided with first bevel gears. One side of the inner wall of the adjusting sleeve (6) is rotatably connected with a second bevel gear (7). The second bevel gear (7) is in meshing connection with the first bevel gear. The top end of the sealing cover is provided with a motor (16). The driving end of the motor (16) extends into the inside of the sealing cover and is fixedly connected with one end of the first stirring rod (5).

3. The abrasive polishing etch cleaning oxidation accelerator of claim 2, wherein: The extension assembly comprises a plurality of fixed seats (8) arranged and installed on the outside of the first stirring rod (5) and the second stirring rod. The inside of the fixed seat (8) is provided with an extension groove. The inside of the extension groove is slidably connected with an extension block (9). The first springs are installed between the two ends of one side of the extension block (9) and the inner wall of the extension groove. The sealing ring (10) is embeddedly installed on the outer wall of the extension block (9).

4. The abrasive polishing etch cleaning oxidation accelerator of claim 3, wherein: The locking assembly comprises a butt joint seat (17) installed on one end of the extension block (9). One side of the stirring blade (4) is provided with a clamping block (11). One side of the butt joint seat (17) is provided with a clamping groove. The clamping block (11) is in sliding connection with the clamping groove. The inside of the butt joint seat (17) is provided with an extrusion groove on one side of the clamping groove. The extrusion groove is slidably connected with an extrusion plate (12).

5. The abrasive polishing etch cleaning oxidation accelerator of claim 4, wherein: The second springs are installed between the two ends of one side of the extrusion plate (12) and the inner wall of the extrusion groove. The other side of the extrusion plate (12) is provided with a pull rod. One end of the pull rod extending to the outside of the butt joint seat (17) is rotatably connected with a pull ring (14). The opposite ends of the clamping block (11) and the extrusion plate (12) are both provided with inclined surfaces which are in close contact with each other.

6. The abrasive polishing etch cleaning oxidation accelerator of claim 5, wherein: The liquid supply assembly comprises a feeding cylinder (13) embeddedly installed on one end of the top of the sealing cover. The top end of the feeding cylinder (13) is clamped with the sealing cover through a lock. The top end of the ozone generator (3) is provided with a liquid supply pump (15).

7. The abrasive polishing etch cleaning oxidation accelerator of claim 6, wherein: The suction end of the liquid supply pump (15) is provided with a suction pipe (18) extending to the inside of the stirring barrel (2), and the discharge end of the liquid supply pump (15) is provided with a discharge pipe (19).

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