Semiconductor coating equipment waterway system capable of prolonging service life and convenient to maintain

Abstract

The utility model discloses a semiconductor coating equipment waterway system capable of prolonging service life and convenient to maintain, which comprises a quick interface, one end of the quick interface is provided with a check valve, the output end of the check valve is fixedly connected with a water inlet pipeline, one end of the water inlet pipeline is provided with a filter, and the other end of the water inlet pipeline is provided with a water outlet. The output end of the filter is fixedly connected with a water inlet water dividing main pipe through one end of a water inlet pipeline, a water return water dividing main pipe is installed at the other end of the water inlet water dividing main pipe, a flow thermometer is installed at a water outlet of the water return water dividing main pipe, and a hand valve is installed at a water outlet of the water return water dividing main pipe. And a bracket is arranged below the water inlet water dividing main pipe. According to the semiconductor coating equipment waterway system design structure capable of prolonging the service life and convenient to maintain provided by the utility model, the aluminum-containing waterway integration and the aluminum-free waterway integration are used, and waterway arrangement of an aluminum piece and a stainless steel piece is distinguished by the two areas, so that electrochemical reaction is avoided, the stability is improved, and the service life is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor coating equipment waterway technical field, concretely is a semiconductor coating equipment waterway system that improves service life is convenient for maintenance. BACKGROUND

[0002] In the utility model discloses a mixed waterway system, including microbubble jet device, flowmeter and static mixer, microbubble jet device includes pipe body and plugging assembly, and the pipe body has the flow channel in, and the both ends of pipe body are liquid inlet end and liquid outlet end respectively, and the side of pipe body is provided with the gas inlet that communicates with flow channel, and plugging assembly is used for plugging gas inlet, flowmeter is connected in microbubble jet device, and flowmeter is used for measuring the flow of liquid through flowmeter, static mixer includes sleeve and a plurality of spiral modules, and sleeve is connected with liquid outlet end, and the inner chamber of sleeve is connected with flow channel, the mixed waterway system of the utility model discloses through setting flowmeter and measuring the flow size that enters microbubble jet device, and then can adjust the dosage of gas according to flow size, improves the mixing efficiency of gas and liquid.

[0003] The original traditional waterway all arranges complex layer layer, and pipeline interlaces vertically and horizontally, brings great trouble to installation and maintenance overhaul, and semiconductor equipment often has aluminum parts, and aluminum parts and stainless steel parts are connected in series through a waterway, can cause the point difference of two kinds of metals to occur electrochemical reaction because of the electrolyte characteristics of water, thereby causing aluminum corrosion and dissolution, and affecting equipment quality and service life. Utility model content

[0004] The utility model discloses a semiconductor coating equipment waterway system that improves service life is convenient for maintenance to solve the problem that the mutual influence between the pipe of different materials causes aluminum corrosion and dissolution, and affects equipment quality and service life in the background art.

[0005] In order to achieve the above object, the utility model provides the following technical scheme: A semiconductor coating equipment water system that improves service life and is convenient to maintain, quick interface is provided with check valve at one end, the output of check valve is fixedly connected with water inlet pipeline, one end of water inlet pipeline is installed with filter, the output of filter is fixedly connected with water inlet water distribution main pipe through one end of water inlet pipeline, the other end of water inlet water distribution main pipe is installed with backwater water distribution main pipe, the water outlet of backwater water distribution main pipe is installed with flow temperature gauge, the water outlet of backwater water distribution main pipe is installed with hand valve, the lower portion of water inlet water distribution main pipe is provided with support, the bottom of support is fixedly connected with tray, the inside of tray is installed with liquid leakage sensor, the inductive end of liquid leakage sensor is fixedly connected with liquid leakage induction wire.

[0006] Further, the input end of the backwater water distribution main pipe is fixedly connected with the backwater pipeline, and the backwater pipeline and the water inlet pipeline are arranged in parallel with each other.

[0007] Further, the backwater water distribution main pipe and the backwater pipeline are both provided with two groups, the end of the backwater pipeline is fixedly connected with another group of quick interfaces, and another check valve is installed between the backwater pipeline and the quick interface.

[0008] Further, the filter is provided with two groups, and is installed at the positions of the two water inlet water distribution main pipes, respectively, and the pipelines on both sides of the tray are divided into stainless steel pipelines and aluminum pipelines.

[0009] Further, the water inlet water distribution main pipe and the backwater water distribution main pipe are arranged in parallel, and a plurality of flow temperature gauges and hand valves are installed on the water outlets of the outer walls of the water inlet water distribution main pipe and the backwater water distribution main pipe.

[0010] Further, the inside of the tray is installed with a wire slot, and the liquid leakage induction wire penetrates through the wire slot.

[0011] Further, the liquid leakage sensor is provided with two groups, and the liquid leakage induction wire is laid in the inside of the tray.

[0012] Compared with the prior art, the utility model has the advantages that the semiconductor coating equipment water system that improves service life and is convenient to maintain is reasonable, and has the following advantages:

[0013] (1) the design structure of the waterway system is arranged in pairs and symmetrically, which greatly improves the complexity of pipeline arrangement, is easy to install and maintain, and is arranged in two groups of pipes, so that the aluminum-containing waterway integration and the aluminum-free waterway integration are used, two areas are used to distinguish the waterway arrangement of aluminum parts and stainless steel parts, so as to prevent electrochemical reaction and improve stability and service life. In the semiconductor manufacturing process, the quality of ultrapure water is very important, and the water pipes of different materials can reduce the influence of water pipes on water quality, ensure that the delivered ultrapure water is not polluted, and reduce the maintenance and replacement cost caused by pipe damage or pollution, improve the stability of the system, and reduce the maintenance cost in the later period;

[0014] (2) The liquid leakage sensing line and the liquid leakage sensor laid on the tray can feedback and alarm the water leakage in time. By laying a large range of liquid leakage sensing lines, the reaction time is reduced under the condition of small liquid leakage flow, and the sensitivity of liquid leakage sensing is increased. Each branch pipe of the water return main pipe is provided with a flow thermometer and a hand valve, so that the waterway condition of each unit can be monitored in real time and closed and repaired separately. The bottom has a tray to prevent water from flowing to the ground, and the safety of water leakage is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a connection structure diagram of the water inlet and water return main pipes of the utility model;

[0016] Figure 2 It is a top view of the utility model;

[0017] Figure 3 It is a connection structure diagram of the flow thermometer and the hand valve of the utility model;

[0018] Figure 4 It is a structure diagram of the tray and the liquid leakage sensing line of the utility model.

[0019] In the drawing: 1, quick connector; 2, check valve; 3, water inlet pipeline; 4, water return pipeline; 5, filter; 6, water inlet and water return main pipe; 7, flow thermometer; 9, hand valve; 10, bracket; 11, tray; 12, liquid leakage sensor; 13, liquid leakage sensing line; 14, wire slot. DETAILED DESCRIPTION

[0020] The technical scheme in the embodiments of the utility model will be described clearly and completely in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the utility model.

[0021] Referring to Figures 1-4 The utility model provides a technical scheme:

[0022] Embodiment 1:

[0023] A kind of semiconductor coating equipment waterway system of improving service life and being easy to maintain, including quick connector 1, one end of quick connector 1 is provided with check valve 2, the output end of check valve 2 is fixedly connected with water inlet pipeline 3, one end of water inlet pipeline 3 is installed with filter 5, the output end of filter 5 is fixedly connected with water inlet and water main pipe 6 by one end of water inlet pipeline 3, the other end of water inlet and water main pipe 6 is installed with backwater and water main pipe 7, the water outlet of backwater and water main pipe 7 is installed with flow temperature meter 8, the water outlet of backwater and water main pipe 7 is installed with hand valve 9, the lower portion of water inlet and water main pipe 6 is provided with bracket 10, the bottom of bracket 10 is fixedly connected with tray 11, the inside of tray 11 is installed with liquid leakage sensor 12, the sensing end of liquid leakage sensor 12 is fixedly connected with liquid leakage sensing line 13.

[0024] The above structure is arranged by two groups of material pipes, so that the aluminum-containing waterway integration and the aluminum-free waterway integration are used, and the waterway arrangement of the aluminum parts and the stainless steel parts in two regions is distinguished, so as to prevent the occurrence of electrochemical reaction, thereby improving the stability and service life.

[0025] Further, the input end of backwater and water main pipe 7 is fixedly connected with backwater pipeline 4, and backwater pipeline 4 and water inlet pipeline 3 are arranged in parallel with each other, backwater and water main pipe 7 and backwater pipeline 4 are both provided with two groups, the distal end of backwater pipeline 4 is fixedly connected with another group of quick connector 1, and another check valve 2 is installed between backwater pipeline 4 and quick connector 1.

[0026] The above structure arranges the waterway backflow by designing multiple groups of different pipes, and the arrangement is more orderly.

[0027] Further, the filter 5 is provided as two groups and is installed at the positions of the water inlet and water main pipes 6 on both sides, the pipes on both sides of the tray 11 are divided into stainless steel pipes and aluminum pipes, the water inlet and water main pipes 6 and the backwater and water main pipes 7 are arranged in parallel, and a plurality of flow temperature meters 8 and hand valves 9 are installed on the outer walls of the water outlets of the water inlet and water main pipes 6 and the backwater and water main pipes 7.

[0028] The above structure is designed with flow temperature meters 8 and hand valves 9 on each branch pipe of backwater and water main pipe 7, so as to ensure that the waterway conditions of each unit can be monitored in real time and closed for maintenance individually.

[0029] Further, a wire slot 14 is installed in the tray 11, the liquid leakage sensing line 13 penetrates through the wire slot 14, the liquid leakage sensor 12 is provided as two groups, and the liquid leakage sensing line 13 is laid in the inside of the tray 11.

[0030] The above structure can feed back and warn in time through the liquid leakage sensing line 13 and the liquid leakage sensor 12 laid on the tray 11, and the reaction time can be reduced under the condition that the liquid leakage flow is small through the wide laying of the liquid leakage sensing line 13.

[0031] Working principle: in use, first, the factory water is connected through the quick interface 1, and is input into the water inlet pipeline 3; the quick interface 1 is designed to be more convenient for docking the factory water; a check valve 2 and a filter 5 are arranged during the process to prevent back pressure and water circulation filtering; finally, the water inlet and water distribution main pipe 6 is connected with the hose to flow to each demand unit, and then flows back to the water return pipeline 4 through the water return distribution main pipe 7, and flows to the factory for circulation; the water return distribution main pipe 7 is provided with a flow temperature meter 8 and a hand valve 9 at each branch pipe to ensure that the waterway condition of each unit can be monitored in real time and closed for maintenance; an independent fixed support 10 is arranged to ensure convenient disassembly and assembly; and the bottom is provided with a liquid leakage tray 11 to prevent water from flowing to the ground.

[0032] Secondly, the design structure of the waterway system is arranged in pairs and symmetrically, which greatly improves the complexity of pipeline arrangement, is easy to install and maintain, and is arranged in two groups of material pipes, so that the aluminum-containing waterway integration and the aluminum-free waterway integration are used, two areas are divided into aluminum parts and stainless steel parts, so as to prevent electrochemical reaction and improve stability and service life; in the semiconductor manufacturing process, the quality of ultrapure water is very important, the water pipes of different materials are separated, the influence of the water pipes on the water quality is reduced, the transported ultrapure water is not polluted, the water pipes suitable for specific media are used, the maintenance and replacement costs caused by damage or pollution of the water pipes are reduced, the stability of the system is improved, and the maintenance cost is reduced in the later period;

[0033] Finally, through the liquid leakage sensing line 13 and the liquid leakage sensor 12 laid on the tray 11, the leakage situation can be fed back and warned in time, the reaction time is reduced under the condition that the liquid leakage flow is small through the wide laying of the liquid leakage sensing line 13, and the sensitivity of the liquid leakage sensing is increased.

[0034] It is obvious for those skilled in the art that the utility model is not limited to the details of the above exemplary embodiments, and can be realized in other specific forms without departing from the spirit or basic characteristics of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-limiting, the scope of the utility model is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the utility model. Any reference signs in the claims should not be regarded as limiting the claims involved.

Claims

1. A semiconductor coating equipment waterway system with improved service life and easy maintenance, comprising a quick connector (1), characterized in that: One end of the quick connector (1) is provided with a check valve (2), the output end of the check valve (2) is fixedly connected with a water inlet pipeline (3), one end of the water inlet pipeline (3) is provided with a filter (5), the output end of the filter (5) is fixedly connected with a water inlet and outlet main pipe (6) through one end of the water inlet pipeline (3), the other end of the water inlet and outlet main pipe (6) is provided with a water return and outlet main pipe (7), the water outlet of the water return and outlet main pipe (7) is provided with a flow temperature meter (8), the water outlet of the water return and outlet main pipe (7) is provided with a hand valve (9), the lower portion of the water inlet and outlet main pipe (6) is provided with a support (10), the bottom of the support (10) is fixedly connected with a tray (11), the inside of the tray (11) is provided with a liquid leakage sensor (12), the sensing end of the liquid leakage sensor (12) is fixedly connected with a liquid leakage sensing line (13). ​ 2. The waterway system of the semiconductor coating equipment with long service life and easy maintenance according to claim 1, wherein: The input end of the water return and outlet main pipe (7) is fixedly connected with a water return pipeline (4), and the water return pipeline (4) and the water inlet pipeline (3) are arranged in parallel with each other.

3. The waterway system of the semiconductor coating equipment with long service life and easy maintenance according to claim 2, characterized in that: The water return and outlet main pipe (7) and the water return pipeline (4) are both provided with two groups, the tail end of the water return pipeline (4) is fixedly connected with another group of quick connectors (1), and the water return pipeline (4) and the quick connector (1) are provided with another check valve (2) therebetween.

4. The waterway system of the semiconductor coating equipment with long service life and easy maintenance according to claim 1, characterized in that: The filter (5) is provided with two groups and is arranged at the positions of the water inlet and outlet main pipes (6) on both sides respectively, and the pipelines on both sides of the tray (11) are stainless steel pipelines and aluminum pipelines.

5. The waterway system of the semiconductor coating equipment with long service life and easy maintenance according to claim 1, characterized in that: The water inlet and outlet main pipes (6) and the water return and outlet main pipes (7) are arranged in parallel with each other, and the outer wall water outlets of the water inlet and outlet main pipes (6) and the water return and outlet main pipes (7) are provided with multiple groups of flow temperature meters (8) and hand valves (9).

6. The waterway system of the semiconductor coating equipment with long service life and convenient maintenance according to claim 1, characterized in that: The inside of the tray (11) is provided with a wire slot (14), and the liquid leakage sensing line (13) penetrates through the wire slot (14).

7. The waterway system of the semiconductor coating equipment with long service life and easy maintenance according to claim 1, characterized in that: The liquid leakage sensor (12) is provided with two groups, and the liquid leakage sensing line (13) is laid in the inside of the tray (11).

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