Chip surface defect detection device

Abstract

The utility model provides a chip surface defect detection device, which comprises a support frame, a detection unit, a detection unit and a control unit, and is characterized in that the support frame is provided with a transmission unit; the rotating disc is rotationally arranged on the supporting frame and matched with the transmission unit, and clamping grooves are formed in the rotating disc in a circumferential array mode; the detection unit is arranged on the supporting frame; the clamping unit comprises a supporting block, an air cylinder and a clamping block arranged at the output end of the air cylinder. According to the chip surface defect detection device provided by the utility model, the chips are placed in the detection groove one by one, the chips are positioned through the clamping blocks, the transmission unit controls the turntable to rotate on the support frame, the chips are transferred to the position under the camera, and the camera takes a picture and compares the picture with a standard pattern; and when the chip is not qualified, the air cylinder outputs to remove the chip, and if the chip is qualified, the chip is discharged from the other outlet, so that the detection efficiency of the chip is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip production technical field, concretely related to a chip surface defect detection device. BACKGROUND

[0002] Semiconductor chip is the etching, wiring on semiconductor sheet, with this to make smaller microchip, in the process of chip production, need to detect the surface of the chip defect, to ensure the function and performance of the chip, improve the excellent nature of the chip factory.

[0003] Chip surface defect detection is often by camera, through the camera, compare the photo with standard pattern on the feature, to detect whether the semiconductor chip surface has defect.

[0004] But in the chip detection process, often install multiple chips to the clamping plate, place the clamping plate in the camera directly below and take a photo, if the chip has surface defect, then need manual according to the photo to find the defective chip on the clamping plate and remove, and in large quantities chip detection, this operation greatly reduces the detection efficiency, and further affects the production efficiency of the chip. UTILITY MODEL CONTENTS

[0005] The utility model aims at solving the above problems existing in prior art.

[0006] In order to realize the above object, the utility model can realize through the following technical scheme: a chip surface defect detection device, comprising:

[0007] Support frame, transmission unit is arranged on the support frame;

[0008] Turntable, the turntable is rotationally arranged on the support frame, and is matched with the transmission unit, and the turntable is circularly arrayed with clamping groove;

[0009] Detection unit, the detection unit is arranged on the support frame, and the detection unit includes the camera towards the clamping groove;

[0010] Clamping unit, the clamping unit is arranged in the clamping groove, and the clamping unit includes support block, cylinder and clamping block arranged on the output end of the cylinder, the detection slot is formed in the support block, and the cylinder operates to control the clamping block to slide in the detection slot.

[0011] In the utility model embodiment, the support block is symmetrically provided with the clamping plate, the spring is arranged between the clamping plate and the support block, the spring pushes the clamping plate to slide towards the detection slot, and the clamping plate is matched with the clamping block.

[0012] The utility model discloses an embodiment, the clamping plate is provided with the triangular convex part that is engaged with the clamping block.

[0013] An embodiment of the utility model discloses an embodiment, the clamping plate is provided with the contact block, and the contact block is rubber block.

[0014] An embodiment of the utility model discloses an embodiment, the detection unit still includes the base and the support plate of setting on the base, the support plate is provided with camera and spotlight cover in proper order, and the spotlight cover is matched with the camera.

[0015] An embodiment of the utility model discloses an embodiment, the spotlight cover is provided with the rotating rod, and the rotating rod is provided with the worm part on the symmetry.

[0016] The spotlight cover is provided with the locking block of sliding, and the locking block is provided with the light bar, and the light bar is provided with the worm wheel that is engaged with the worm part.

[0017] An embodiment of the utility model discloses an embodiment, the spotlight cover is provided with the chute, and the locking block is located in the chute and slides.

[0018] An embodiment of the utility model discloses an embodiment, the spotlight cover is provided with the inclined part, and the light bar is set at the inclined part.

[0019] An embodiment of the utility model discloses an embodiment, the transmission unit includes the internal gear, motor and the driving wheel of setting in the motor output, and the driving wheel is engaged with the internal gear, and the motor is set on the support frame, and the internal gear is set on the rotating disc.

[0020] An embodiment of the utility model discloses an embodiment, the support frame is provided with the bearing that is matched with the rotating disc.

[0021] Compared with prior art, the chip is placed in the detection groove one by one, the chip is positioned by the clamping block, the rotating disc is rotated on the support frame by the transmission unit, the chip is transferred to the front of the camera, the camera is photographed and compared with the standard pattern, the unqualified cylinder is removed, and if qualified, the chip is discharged from another outlet, so that the detection efficiency of the chip is improved. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is the overall structure schematic diagram;

[0023] Figure 2 It is the internal part explosion structure schematic diagram of the clamping unit split;

[0024] Figure 3 It is the spotlight cover local section internal part structure schematic diagram in the detection unit;

[0025] Figure 4is a schematic view of a connection structure of a transmission unit on a support frame and a rotary disc;

[0026] Figure 5 is a general plane schematic view.

[0027] Explanation of reference signs:

[0028] 1, support frame; 2, transmission unit; 21, internal gear; 22, driving wheel; 23, motor; 3, clamping unit; 31, support block; 311, detection groove; 32, clamping block; 33, air cylinder; 34, spring; 35, clamping plate; 351, contact block; 36, triangular protruding part; 4, detection unit; 41, base; 42, camera; 43, light shield; 431, inclined part; 44, rotating rod; 45, locking block; 46, worm part; 47, worm wheel; 48, light bar; 49, support plate; 5, rotary disc; 51, clamping groove. DETAILED DESCRIPTION

[0029] The following is a specific embodiment of the present application and further describes the technical solution of the present application in combination with the drawings.

[0030] As shown in Figures 1-5 , a chip surface defect detection device comprises:

[0031] The support frame 1 is provided with the transmission unit 2;

[0032] The rotary disc 5 is rotationally arranged on the support frame 1 and cooperates with the transmission unit 2, and the rotary disc 5 is provided with the clamping grooves 51 in a circumferential array;

[0033] The detection unit 4 is arranged on the support frame 1, and the detection unit 4 comprises the camera 42 facing the clamping grooves 51;

[0034] The clamping unit 3 is arranged in the clamping groove 51, and the clamping unit 3 comprises the support block 31, the air cylinder 33, and the clamping block 32 arranged at the output end of the air cylinder 33, the support block 31 is provided with the detection groove 311, and the air cylinder 33 operates to control the clamping block 32 to slide in the detection groove 311.

[0035] Specifically, the bottom of the support frame 1 is provided with a plurality of mounting holes, the device is fixed through the mounting holes, and the stability during detection is improved, the rotary disc 5 is provided with a through hole at the center, the through hole cooperates with the support frame 1, the rotary disc 5 rotates on the support frame 1, and the rotary disc 5 has the E end and the F end (as Figure 1The E end is the outlet of unqualified products, and the F end is the inlet, and the outlet of qualified products is between the F end and the E end. During the detection process, the transmission unit 2 controls the rotating disc 5 to rotate clockwise on the support frame 1, and the chip is installed from the F end into the detection groove 311. With the continuous rotation of the rotating disc 5, the chip is rotated to the camera 42 for shooting. The photo is compared with the standard plate to determine whether the chip surface has defects. When there is a defect, the cylinder 33 drives the clamping block 32 to push the chip out of the E end. When it is qualified, it is discharged between the E end and the F end, so as to improve the detection efficiency and effect of the chip.

[0036] As a further provided embodiment of the utility model, the support block 31 is symmetrically provided with a sliding clamping plate 35, and a spring 34 is arranged between the clamping plate 35 and the support block 31. The spring 34 pushes the clamping plate 35 to slide towards the detection groove 311. The clamping plate 35 cooperates with the clamping block 32 to slide towards the detection groove 311 under the elastic action of the spring 34 until the contact block 351 contacts the chip, so that the chip is fixed in the detection groove 311. When the chip is unqualified, the cylinder 33 outputs to control the clamping block 32 to push the chip out of the detection groove 311. During the sliding process of the clamping block 32, the contact block 351 is away from the chip along the triangular protruding part 36 to release the clamping of the chip.

[0037] As a further provided embodiment of the utility model, the clamping plate 35 is provided with a triangular protruding part 36 engaged with the clamping block 32. The triangular protruding part 36 has a limiting effect, that is, it limits the position of the chip, so that the clamping position of each chip is consistent, that is, the light focusing position of the light bar 48, so as to improve the detection effect of the chip.

[0038] As a further provided embodiment of the utility model, the clamping plate 35 is provided with a contact block 351 which is a rubber block. The rubber material makes the clamping of the chip in the detection groove 311 more stable, so as to reduce the damage to the clamping surface of the chip.

[0039] As a further provided embodiment of the utility model, the detection unit 4 further comprises a base 41 and a support plate 49 arranged on the base 41. The support plate 49 is sequentially provided with a camera 42 and a spotlight cover 43. The spotlight cover 43 cooperates with the camera 42. The support plate 49 is provided with a bolt, which can fix the support plate 49 to the base 41. The support plate 49 can slide on the base 41 to adjust the distance between the camera 42 and the detection groove 311, and improve the shooting effect of the camera 42.

[0040] As a further provided embodiment of the utility model, the light cover 43 is provided with a rotating rod 44, the rotating rod 44 is provided with a worm part 46 part in symmetry, the light cover 43 is provided with a locking block 45 in sliding mode, the locking block 45 is provided with a light bar 48, the light bar 48 is provided with a worm wheel 47 meshing with the worm part 46 part, one end of the rotating rod 44 is provided with a knob, so as to control the rotation of the rotating rod 44, the worm part 46 part on the rotating rod 44 is used to drive the rotation of the worm wheel 47, that is, the relative or opposite rotation of the two light bars 48 is controlled, so that the light is irradiated towards the detection groove 311, the irradiation angle of the light bar 48 is adjusted to improve the shooting effect of the camera 42, and different specifications of chips can be adapted in this way.

[0041] As a further provided embodiment of the utility model, a sliding groove is formed in the light cover 43, and the locking block 45 is located in the sliding groove and slides in the sliding groove, the locking block 45 can be manually driven to slide in the sliding groove, so as to adjust the distance between the two light bars 48 and improve the irradiation effect of the light bar 48.

[0042] As a further provided embodiment of the utility model, the light cover 43 is provided with an inclined part 431, and the light bar 48 is arranged at the inclined part 431, and the inclined part 431 is arranged to reduce the phenomenon that the light bar 48 blocks the shooting.

[0043] As a further provided embodiment of the utility model, the transmission unit 2 includes an internal gear 21, a motor 23 and a driving wheel 22 arranged at the output end of the motor 23, the driving wheel 22 is meshed with the internal gear 21, the motor 23 is arranged on the support frame 1, and the internal gear 21 is arranged on the rotating disc 5, the motor 23 is of the model: MHMF042L1U4-1116, and the motor 23 is fixed to one side of the support frame 1 through the motor 23 support, when the rotating disc 5 operates, the driving wheel 22 is driven to rotate by the motor 23, and at this time, the internal gear 21 is meshed with the driving wheel 22 to make the rotating disc 5 rotate on the support frame 1.

[0044] As a further provided embodiment of the utility model, the support frame 1 is provided with a bearing matched with the rotating disc 5, the inner ring of the bearing is clamped with the support frame 1, and the outer ring is clamped with the rotating disc 5, so as to improve the rotating effect of the rotating disc 5 on the support frame 1.

[0045] Working principle: first, the chip to be detected is placed in the detection slot 311 one by one with the jog rotation of the rotating disc 5, in the process of placing the chip, the chip will contact the clamping block 32 to slide in the detection slot 311, at this time the clamping block 32 will contact the triangular protruding part 36, so that the clamping plate 35 is retracted in the supporting block 31 to press the spring 34, until the triangular protruding part 36 is engaged with the clamping block 32, so that the contact block 351 contacts the chip, so that the chip is fixed in the detection slot 311, to position the position of the chip, then the motor 23 controls the internal gear 21 to rotate through the driving wheel 22, so that the rotating disc 5 rotates on the support frame 1, the chip is conveyed to the bottom of the camera 42, the photo is compared with the standard template through the camera 42, so as to judge whether the surface of the chip has defects, when the chip is qualified, it is discharged from between the F end and the E end, and the unqualified cylinder 33 outputs to make the clamping block 32 slide in the detection slot 311, so that the chip is discharged from the E end, so as to improve the detection efficiency of the chip.

[0046] The above technical scheme of the utility model, aiming at the too single technical problem of the prior art solution, provides a solution significantly different from the prior art, and the parts not involved in the technical scheme of the application are the same as or can be realized by the prior art, and will not be described again.

[0047] The technical scheme in the above embodiment has clearly and completely described the content of the utility model, obviously, the described embodiment is only a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.

Claims

1. A chip surface defect detection apparatus characterized by comprising: Include: Support frame, transmission unit is arranged on the support frame; Rotary disc, the rotary disc is rotationally arranged on the support frame and cooperates with the transmission unit, and the rotary disc is provided with clamping grooves in a circumferential array; Detection unit, the detection unit is arranged on the support frame, and the detection unit includes a camera facing the clamping groove; Clamping unit, the clamping unit is arranged in the clamping groove, the clamping unit includes a support block, a cylinder and a clamping block arranged on the output end of the cylinder, the support block is provided with a detection groove, and the cylinder operates to control the clamping block to slide in the detection groove.

2. The chip surface defect inspection apparatus according to claim 1, wherein The support block is symmetrically provided with a sliding clamping plate, a spring is arranged between the clamping plate and the support block, the spring pushes the clamping plate to slide towards the detection groove, and the clamping plate cooperates with the clamping block.

3. The chip surface defect inspection apparatus according to claim 2, wherein The clamping plate is provided with a triangular protruding part engaged with the clamping block.

4. The chip surface defect inspection apparatus according to claim 2, wherein The clamping plate is provided with a contact block, which is a rubber block.

5. The chip surface defect inspection apparatus according to claim 1, wherein The detection unit further includes a base and a support plate arranged on the base, the support plate is provided with a camera and a spotlight cover in sequence, and the spotlight cover cooperates with the camera.

6. The chip surface defect inspection apparatus according to claim 5, wherein The spotlight cover is provided with a rotating rod, and the rotating rod is symmetrically provided with a worm part; The spotlight cover is provided with a locking block, the locking block is provided with a light bar, and the light bar is provided with a worm wheel engaged with the worm part.

7. The chip surface defect inspection apparatus according to claim 6, wherein The spotlight cover is provided with a sliding groove, and the locking block slides in the sliding groove.

8. The chip surface defect inspection apparatus according to claim 6, wherein The spotlight cover is provided with an inclined part, and the light bar is arranged at the inclined part.

9. The chip surface defect inspection apparatus according to claim 1, wherein The transmission unit includes an internal gear, a motor and a driving wheel arranged on the output end of the motor, the driving wheel is engaged with the internal gear, the motor is arranged on the support frame, and the internal gear is arranged on the rotary disc.

10. The chip surface defect inspection apparatus according to claim 9, wherein The support frame is provided with a bearing cooperating with the rotary disc.

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