Integrated special gas cylinder detection cabinet
By integrating the pipeline purging switch valve disc and the gas detector switch valve disc into an integrated special gas cylinder detection cabinet, and installing a detector at the exhaust port, the problem of leakage during special gas detection is solved, and safe gas detection is achieved.
Patent Information
- Application Number
- CN202422702188.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-06
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-11-06
AI Technical Summary
Existing technologies cannot effectively prevent leaks from the pipeline purging switch valve disc and the gas detector switch valve disc during special gas detection processes, which could lead to potential hazardous events.
The pipeline purging switch valve disc and the gas detector switch valve disc are integrated into an integrated special gas cylinder detection cabinet, and a special gas detector is installed at the exhaust port for real-time monitoring of leaks.
It effectively prevents leaks during the detection of special gases, avoids potential hazards, and ensures gas safety.
Smart Images
Figure CN223526320U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a safety detection system for special gas analysis, in particular to an integrated special gas cylinder detection cabinet. BACKGROUND
[0002] Special gases have played an important role in semiconductor processes, such as dry etching, oxidation, ion implantation, thin film deposition, etc. A considerable amount of special gases must be used. However, the special gases are corrosive, flammable, or even toxic, and must be used with caution. These special gases are almost always supplied in steel cylinders.
[0003] During use, general visual inspection cannot determine the purity of the special gas in the gas cylinder. The gas cylinder may contain impurities, insufficient purity, or incomplete cleaning, which may mix with one or more other special gases. If not tested, direct use may cause problems due to the purity of the special gas, resulting in major problems in the entire semiconductor process (causing significant losses). Therefore, a purity detection system for special gas cylinders has been developed.
[0004] In semiconductor manufacturing plants, a large amount of different special gases are required, and some of these special gases are corrosive or toxic, which are highly hazardous to the human body. Therefore, in the purity detection system for special gas cylinders, it is necessary to monitor whether the special gas leaks during the detection process to prevent harm to the human body and cause industrial safety incidents.
[0005] The purity detection system of the special gas cylinder has several parts of known technology: gas pipeline, including two parts, one is the special gas detection and blowing pipeline, and the other is the waste gas discharge pipeline; the blowing gas cylinder cabinet is loaded with blowing gas cylinder, which is generally nitrogen; the special gas cylinder cabinet is sealed and has an exhaust port connected to the outside (a negative pressure generated by the external exhaust system allows the special gas cylinder cabinet to exhaust gas to the exhaust port), the exhaust port has a special gas detector, which can detect the leakage of the special gas cylinder cabinet; the pipeline blowing switch valve disc, that is, the gas in the pipeline is first removed to the waste gas treatment system, and then the blowing gas cylinder is opened to clean the residual special gas in the special gas detection and blowing pipeline with nitrogen; the gas detector switch valve disc is used to control the special gas cylinder to open, and then the special gas is transported to the gas detection analyzer through the special gas detection pipeline; the gas detection analyzer usually has multiple gas detection analyzers to analyze the impurity content / moisture / purity of the special gas. The gas detector switch valve disc can open and close the related switch valve in the process of pipeline blowing (pre-blowing, post-blowing), special gas detection, waste gas discharge, and post-detection pipeline blowing; the blowing gas cylinder cabinet, the special gas cylinder cabinet, the pipeline blowing control valve disc, the gas detector switch valve disc, and the gas detection analyzer are connected in series by the gas pipeline, and the opening and closing of the switch valves of the pipeline blowing switch valve disc and the gas detector switch valve disc are used to control the process of pipeline blowing (pre-blowing, post-blowing), special gas detection, waste gas discharge, and post-detection pipeline blowing. The above control mode is the content of the known technology, which will not be described here.
[0006] The above known special gas cylinder purity detection system integrates the blowing gas cylinder cabinet and the special gas cylinder cabinet, which are provided by the same gas supplier, and the pipeline blowing switch valve disc and the gas detector switch valve disc are provided by another switch valve manufacturer. As mentioned earlier, the special gas cylinder cabinet that may leak has a special gas detector on the exhaust port that can detect the leakage and discharge it to the external waste gas treatment system. In other words, the special gas cylinder cabinet itself has a hazard control means. The pipeline blowing switch valve disc and the gas detector switch valve disc have many gas switch valves, which may have quality problems, aging, and other situations that may cause leakage. Currently, when the pipeline blowing switch valve disc and the gas detector switch valve disc leak, a vacuum degree measuring instrument is used to measure whether there is a leakage situation. That is, by using a pump, the gas pipeline is brought to a near-vacuum state; when the vacuum degree measuring instrument detects an abnormal result, it means that there is a switch valve leakage situation. If leakage is found, the switch valves in the pipeline blowing switch valve disc and the gas detector switch valve disc can be checked one by one manually.
[0007] The above manner cannot exclude the situation that the switch valve in the pipeline blowing switch valve disc and the gas detector switch valve disc suddenly leaks during the special gas detection process. In other words, the known technology still has the possibility of producing a harmful event during the special gas detection process.
[0008] Therefore, how to prevent the special gas leakage that may occur during the special gas detection process of the pipeline blowing switch valve disc and the gas detector switch valve disc from producing harm in the purity detection system of the special gas cylinder becomes an important technical development focus in the technical field. Practical new type content
[0009] In order to solve the problems and defects of the known technology, the utility model discloses an integrated special gas cylinder detection cabinet, by integrating the pipeline blowing switch valve disc and the gas detector switch valve disc into the integrated special gas cylinder detection cabinet, using the special gas detector in the exhaust hole in the special gas cylinder detection cabinet as a tool for detecting whether the switch valve in the pipeline blowing switch valve disc and the gas detector switch valve disc leaks, the possible leakage problem in the detection that the previous technology cannot solve can be effectively solved, and the special technical effect of preventing the external leakage harm that may occur during the special gas detection process is achieved.
[0010] To achieve the above purpose, the utility model provides an integrated special gas cylinder detection cabinet, include: a first cabinet body is equipped with a blowout cylinder, and is connected a main gas pipeline, and is equipped with a first control panel, this first control panel is used to control the blowout cylinder a gas's discharge and stop discharging action, a second cabinet body is airtight and is equipped with a to be measured cylinder area, the to be measured cylinder area is equipped with at least one to be measured cylinder, the second cabinet body is equipped with connecting a waste gas treatment system a first exhaust hole, the first exhaust hole is equipped with a special gas detector, the second cabinet body is also equipped with a second control panel, the second control panel is used to control the to be measured cylinder a special gas's discharge and stop discharging action, a third cabinet body is airtight and is equipped with a pipeline blowout switch valve disc area, the pipeline blowout switch valve disc area is equipped with a plurality of electromagnetic switch valves, the third cabinet body is equipped with connecting the waste gas treatment system a second exhaust hole, the second exhaust hole is also equipped with the special gas detector, and a fourth cabinet body is airtight and is equipped with a gas detector switch valve disc area, the gas detector switch valve disc area is also equipped with a plurality of electromagnetic switch valves, the fourth cabinet body is equipped with connecting the waste gas treatment system a third exhaust hole, the third exhaust hole is also equipped with the special gas detector, wherein, part of the electromagnetic switch valve of the gas detector switch valve disc area is connected a gas detection analyzer cabinet, wherein, the blowout cylinder, the to be measured cylinder, a part of the plurality of electromagnetic switch valves of the pipeline blowout switch valve disc area and a part of the plurality of electromagnetic switch valves of the gas detector switch valve disc area are connected the main gas pipeline, and another part of the plurality of electromagnetic switch valves of the pipeline blowout switch valve disc area and still another part of the plurality of electromagnetic switch valves of the gas detector switch valve disc area are connected a waste gas discharge pipeline.
[0011] The detailed features and advantages of the utility model are described in the following embodiments in detail, and the contents are sufficient to make any person skilled in the relevant art understand the technical content of the utility model and implement it, and according to the contents disclosed in the specification, the patent application range and the drawing, any person skilled in the relevant art can easily understand the related purposes and advantages of the utility model. BRIEF DESCRIPTION OF DRAWINGS
[0012] Figure 1 It is an embodiment system architecture diagram of the integrated special gas cylinder detection cabinet of the utility model.
[0013] Figure 2 It is another embodiment system architecture diagram of the integrated special gas cylinder detection cabinet of the utility model.
[0014] Figure 3 It is another embodiment system architecture diagram of the integrated special gas cylinder detection cabinet of the utility model.
[0015] Figure 4The integrated special gas cylinder detection cabinet of the utility model is applied to the gas purity detection system of a special steel cylinder. DETAILED DESCRIPTION
[0016] In order to make other characteristic contents and advantages of the utility model and effects achieved more apparent, the utility model is described in detail in combination with the drawings, and the following embodiments are further used to illustrate the utility model, but the utility model is not limited by any view.
[0017] Please refer to Figure 1 The integrated special gas cylinder detection cabinet 10 of the utility model can be applied to the gas purity detection system of a special steel cylinder. Figure 1 The embodiment of the utility model integrates the to-be-detected steel cylinder area 12, the pipeline blowing and cleaning switch valve disc area 13 and the gas detector switch valve disc area 14 into the same airtight cabinet body, and shares one exhaust hole 17, and the special gas detector arranged in the exhaust hole 17 is used to detect whether there is a special gas leakage situation in the integrated airtight cabinet body. Figure 1 The embodiment of the utility model discloses that the integrated special gas cylinder detection cabinet 10 comprises two cabinet bodies, the first cabinet body with the blowing and cleaning steel cylinder area 11, and the second cabinet body composed of the to-be-detected steel cylinder area 12, the pipeline blowing and cleaning switch valve disc area 13 and the gas detector switch valve disc area 14.
[0018] Figure 1Similar to known technologies, the main gas pipeline 20 and the exhaust gas pipeline 90 are connected to: purge cylinder 30 (purge cylinder area 11), test cylinder 40 (test cylinder area 12), switch valves 13-4, 13-5, and 13-6 in the pipeline purge switch valve panel 13, switch valves 14-5, 14-6, 14-7, and 14-8 in the gas detector switch valve panel 14, switch valve 52 in the gas detector analyzer cabinet 50, and switch valves 61, 62, 63, 64, 65, and 81, etc. The pump 60 and vacuum measuring instrument 80 are used to perform the vacuum operations required in the processes of pre-pipeline purging (pre-purge, post-purge), special gas detection, exhaust gas emission, and post-detection pipeline purging. These are known technologies and will not be described in detail here. The gas detection and analysis unit 51 represents one of the multiple gas detection and analysis units in the gas detection and analysis cabinet 50. In practice, there are multiple (4-5) gas detection and analysis units in the gas detection and analysis cabinet 50. This is also a part of known technology, so it will not be described in detail here.
[0019] Unlike known technologies, the switching valves 13-4, 13-5, 13-6, 14-5, 14-6, 14-7, and 14-8 used in this utility model are all electromagnetic switching valves. Furthermore, a third control panel 16-1 and a fourth control panel 16-2 are added to the pipeline purging switching valve panel 13 and the gas detector switching valve panel 14, respectively, to control the opening or closing of each electromagnetic switching valve.
[0020] The aforementioned processes, including pre-pipeline purging (pre-purge and post-purge), special gas detection, exhaust gas emission, and post-detection pipeline purging, are set and executed by the first control panel 15 and the second control panel 16. These are known technologies and will not be elaborated upon here. The first control panel controls the emission and cessation of emission of a gas from the purging cylinder; the second control panel controls the emission and cessation of emission of a special gas from the cylinder under test.
[0021] in, Figure 1 In the test cylinder area 12, only one test cylinder 40 is drawn, and the switch valves in the other areas are only drawn in a basic number. This is used to illustrate the overall nature of this utility model and is not intended to limit the number of related components of this utility model.
[0022] Figure 2 This discloses yet another embodiment of the present invention, compared to Figure 1 , Figure 2 The embodiments will Figure 1The third control panel 16-1 and the fourth control panel 16-2 are integrated into a fifth control panel 16-3. Similarly, this utility model can also be extended to integrate the functions of the control valves 13-4, 13-5, 13-6, 14-5, 14-6, 14-7, and 14-8 of the third control panel 16-1 and the fourth control panel 16-2 into the second control panel 16, which will then control them uniformly.
[0023] Figure 3 Another embodiment of this utility model is disclosed, compared to Figure 2 , Figure 3 The embodiments will also Figure 1 The third control panel 16-1 and the fourth control panel 16-2 are integrated into a fifth control panel 16-3. Similarly, this invention can also be extended to integrate the functions of the control valves 13-4, 13-5, 13-6, 14-5, 14-6, 14-7, and 14-8 of the third control panel 16-1 and the fourth control panel 16-2 into the second control panel 16, which then controls them uniformly. However, compared to... Figure 2 The implementation is different, Figure 3 In this embodiment, the sub-cabinet 12A of the gas cylinder area to be tested is treated as a separate airtight cabinet, and the pipeline purging switch valve panel area 13A and the gas detector switch valve panel area 14A are integrated into one sub-cabinet. In other words, Figure 3 The embodiment includes three cabinets: a first cabinet with a gas cylinder purging area 11, a second cabinet with a gas cylinder testing area sub-cabinet 12A, and a third cabinet that integrates the pipeline purging switch valve panel area 13A and the gas detector switch valve panel area 14A into a single sub-cabinet. Additionally, another vent 18 is provided on the third cabinet, with the same design as vent 17, and also contains a special gas detector.
[0024] In another embodiment of this utility model, Figure 3 The embodiments can be extended and integrated. Figure 1 In one embodiment, a third control panel 16-1 and a fourth control panel 16-2 are respectively installed in the pipeline purging switch valve panel area 13A and the gas detector switch valve panel area 14A.
[0025] Figure 4 This invention discloses another specific embodiment, in which the gas cylinder testing area cabinet 12A is treated as a separate airtight cabinet, and the pipeline purging switch valve panel cabinet 13B and the gas detector switch valve panel cabinet 14B are each separately configured as an airtight sub-cabinet. In other words, Figure 4The embodiment includes four cabinets: a first cabinet with a purged cylinder area 11, a second cabinet with a cylinder testing sub-cabinet 12A, a third cabinet with a pipeline purging switch valve panel 13B, and a fourth cabinet with a gas detector switch valve panel 14B. Additionally, an additional vent 18 is provided on the third cabinet, and an vent 19 is provided on the fourth cabinet, with the same design as vent 17, which also contains a special gas detector.
[0026] Compared to Figure 3 Implementation examples, Figure 4 This embodiment allows for monitoring of any special gas leaks in the cylinder area sub-cabinet 12A via vent 17, monitoring of the pipeline purging valve panel 13B via the special gas detector in vent 18, and monitoring of any special gas leaks in the gas detector valve panel 14B via the special gas detector in vent 19. In other words, this embodiment allows on-site operators to identify which sub-cabinet's valve is leaking, enabling faster troubleshooting of leaking valves.
[0027] In addition, due to Figure 4 The implementation uses a four-sub-cabinet technology, therefore, the control panel must also be independent. Figure 4 The control panel is with Figure 1 The same mode is used, with the third control panel 16-1 installed in the pipeline purging switch valve panel cabinet 13B, and the fourth control panel 16-2 installed in the gas detector switch valve panel cabinet 14B. The rest is as described above and will not be repeated.
[0028] Although the technical content of this utility model has been disclosed above with reference to preferred embodiments, it is not intended to limit this utility model. Any modifications and refinements made by those skilled in the art without departing from the spirit of this utility model should be included within the scope of this utility model. Therefore, the scope of protection of this utility model shall be determined by the appended claims.
Claims
1. An integrated special gas cylinder detection cabinet, characterized in that, Comprising: a first cabinet configured with a purging cylinder, and connected with a main gas pipeline, and configured with a first control panel for controlling the discharging and stopping of the discharging of a gas in the purging cylinder; a second cabinet which is airtight and configured with a testing cylinder area, the testing cylinder area is configured with at least one testing cylinder, the second cabinet is configured with a first exhaust hole connected with a waste gas treatment system, the first exhaust hole is configured with a special gas detector, the second cabinet is also configured with a second control panel for controlling the discharging and stopping of the discharging of a special gas in the testing cylinder; a third cabinet which is airtight and configured with a pipeline purging switch valve plate area, the pipeline purging switch valve plate area is configured with a plurality of electromagnetic switch valves, the third cabinet is configured with a second exhaust hole connected with the waste gas treatment system, the second exhaust hole is also configured with the special gas detector; and a fourth cabinet which is airtight and configured with a gas detector switch valve plate area, the gas detector switch valve plate area is also configured with a plurality of electromagnetic switch valves, the fourth cabinet is configured with a third exhaust hole connected with the waste gas treatment system, the third exhaust hole is also configured with the special gas detector, wherein part of the electromagnetic switch valves in the gas detector switch valve plate area are connected with a gas detection analyzer cabinet; wherein the purging cylinder, the testing cylinder, part of the plurality of electromagnetic switch valves in the pipeline purging switch valve plate area and part of the plurality of electromagnetic switch valves in the gas detector switch valve plate area are connected with the main gas pipeline, and another part of the plurality of electromagnetic switch valves in the pipeline purging switch valve plate area and another part of the plurality of electromagnetic switch valves in the gas detector switch valve plate area are connected with a waste gas discharge pipeline.
2. The integrated special gas cylinder detection cabinet according to claim 1, characterized in that, Further comprising: a third control panel configured in the pipeline purging switch valve plate area for controlling the opening and closing of the plurality of electromagnetic switch valves in the pipeline purging switch valve plate area; and a fourth control panel configured in the gas detector switch valve plate area for controlling the opening and closing of the plurality of electromagnetic switch valves in the gas detector switch valve plate area.