Integrated special gas cylinder detection cabinet
By integrating the pipeline purging switch valve disc and the gas detector switch valve disc into an integrated special gas cylinder testing cabinet, and utilizing the detector in the exhaust port, the problem of leakage during special gas testing is solved, thereby improving safety and reliability.
Patent Information
- Application Number
- CN202422702560.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-06
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-11-06
AI Technical Summary
Existing technologies cannot effectively prevent leaks from the pipeline purging switch valve disc and the gas detector switch valve disc during special gas detection processes, which could lead to potential hazardous events.
The pipeline purging switch valve disc and the gas detector switch valve disc are integrated into an integrated special gas cylinder testing cabinet, and a special gas detector is installed through the exhaust port in the special gas cylinder testing cabinet to monitor for leaks in real time.
It effectively prevents leaks during the detection of special gases, avoids potential hazards, and improves safety and reliability.
Smart Images
Figure CN223526323U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a safety detection system for special gas analysis, in particular to an integrated special gas cylinder detection cabinet. BACKGROUND
[0002] Special gases have played an important role in semiconductor processes, such as dry etching, oxidation, ion implantation, thin film deposition, etc. A considerable amount of special gases must be used. However, the special gases are corrosive, flammable, or even toxic, and must be used with caution. These special gases are almost always supplied in steel cylinders.
[0003] During use, general visual inspection cannot determine the purity of the special gas in the gas cylinder. The gas cylinder may contain impurities, insufficient purity, or incomplete cleaning, which may mix with one or more other special gases. If not tested, direct use may cause problems due to the purity of the special gas, resulting in major problems in the entire semiconductor process (causing significant losses). Therefore, a purity detection system for special gas cylinders has been developed.
[0004] In a semiconductor manufacturing plant, a large amount of different special gases are required, and some of these special gases are corrosive or toxic, which are highly hazardous to the human body. Therefore, in the purity detection system for special gas cylinders, it is necessary to monitor whether the special gas leaks during the detection process to prevent harm to the human body and cause industrial safety incidents.
[0005] The purity detection system of special gas cylinder is composed of several parts according to known technology: gas pipeline, including two parts, one is special gas detection and purging pipeline, and the other is waste gas discharge pipeline; purging gas cylinder cabinet, loaded with purging gas cylinder, generally nitrogen; special gas cylinder cabinet, which is sealed and has an exhaust port connected to the outside (negative pressure generated by the external exhaust system to make the special gas cylinder cabinet gas fixedly exhaust to the exhaust port), the exhaust port has a special gas detector, which can detect the leakage of the special gas cylinder cabinet; pipeline purging switch valve disc, which first separates the gas in the pipeline to the waste gas treatment system, and then controls the purging gas cylinder to open, and the residual special gas in the special gas detection and purging pipeline is cleaned by nitrogen; gas detector switch valve disc, which is used to control the special gas cylinder to open, and then the special gas is transported to the gas detection analyzer through the special gas detection pipeline; gas detection analyzer, which is usually used to analyze the content of impurities / moisture / purity of special gas, and the gas detector switch valve disc can open and close the switch valve in the process of pipeline purging (pre-purging, post-purging), special gas detection, waste gas discharge, post-purging after detection, etc.; purging gas cylinder cabinet, special gas cylinder cabinet, pipeline purging pipeline control valve disc, gas detector switch valve disc and gas detection analyzer are connected in series by gas pipeline, and the opening and closing of the switch valve of pipeline purging switch valve disc and gas detector switch valve disc controls the process of pipeline purging (pre-purging, post-purging), special gas detection, waste gas discharge, post-purging after detection, etc. The above control mode is the content of known technology, which will not be described here.
[0006] The above known special gas cylinder purity detection system integrates the purging gas cylinder cabinet and the special gas cylinder cabinet, which are provided by the same gas supplier, and the pipeline purging switch valve disc and the gas detector switch valve disc are provided by another switch valve manufacturer. As mentioned above, the special gas cylinder cabinet that may leak has a special gas detector on the exhaust port that can detect the leakage, and the leakage can be discharged to the external waste gas treatment system. In other words, the special gas cylinder cabinet itself has a hazard control means. The pipeline purging switch valve disc and the gas detector switch valve disc have many gas switch valves, which may leak due to poor quality, aging, etc. At present, when the pipeline purging switch valve disc and the gas detector switch valve disc leak, a vacuum degree measuring instrument is used to measure whether there is a leakage. That is, a pump is used to make the gas pipeline approach a vacuum state; when the vacuum degree measuring instrument detects an abnormal result, it means that there is a switch valve leakage. If leakage is found, the switch valves in the pipeline purging switch valve disc and the gas detector switch valve disc can be checked one by one by manual method.
[0007] The above manner cannot rule out the situation that the switch valve in the pipeline purging switch valve disc and the gas detector switch valve disc suddenly leaks during the special gas detection process. In other words, the known technology still has the possibility of causing a hazardous event during the special gas detection process.
[0008] Therefore, how to prevent the leakage of special gas caused by the pipeline purging switch valve disc and the gas detector switch valve disc during the special gas detection process in the purity detection system of the special gas cylinder becomes an important technical development focus in the technical field. Practical new type content
[0009] In order to solve the problems and defects of the known technology, the integrated special gas cylinder detection cabinet integrates the pipeline purging switch valve disc and the gas detector switch valve disc into the integrated special gas cylinder detection cabinet, uses the special gas detector in the exhaust hole in the special gas cylinder detection cabinet as a tool for detecting whether the switch valve in the pipeline purging switch valve disc and the gas detector switch valve disc leaks, effectively solves the possible leakage problem in the detection that cannot be solved by the prior art, and achieves the special technical effect of preventing the leakage hazard that may occur during the special gas detection process.
[0010] To achieve the above purpose, the utility model provides an integrated special gas cylinder detection cabinet, which comprises a first cabinet body, a purging cylinder, a main gas pipeline connected to the purging cylinder, and a first control panel configured to control the discharge and stop of the gas in the purging cylinder; a second cabinet body, a to-be-detected cylinder area, a pipeline purging switch valve disc area, and a gas detector switch valve disc area, the to-be-detected cylinder area is provided with at least one to-be-detected cylinder, the pipeline purging switch valve disc area and the gas detector switch valve disc area are respectively provided with a plurality of manual switch valves, the second cabinet body is provided with an exhaust hole connected to a waste gas treatment system, the exhaust hole is provided with a special gas detector, the second cabinet body is provided with a second control panel configured to control the discharge and stop of a special gas in the to-be-detected cylinder, wherein part of the manual switch valves in the gas detector switch valve disc area is connected to a gas detection analyzer cabinet; wherein part of the manual switch valves in the pipeline purging switch valve disc area and part of the manual switch valves in the gas detector switch valve disc area are connected to the main gas pipeline, and another part of the manual switch valves in the pipeline purging switch valve disc area and another part of the manual switch valves in the gas detector switch valve disc area are connected to a waste gas discharge pipeline.
[0011] The utility model discloses still provide a kind of integrated special gas cylinder detection cabinet, include: a first cabinet, be equipped with a blow clean cylinder, and connect a main gas pipeline, and be equipped with a first control panel, the first control panel is used to control the discharge and stop discharging action of the gas of the blow clean cylinder;A second cabinet is equipped with a to-be-measured cylinder area, and the to-be-measured cylinder area is equipped with at least one to-be-measured cylinder, and the second cabinet is equipped with a first exhaust hole connected with a waste gas treatment system, and a special gas detector is arranged in the first exhaust hole, and the second cabinet is equipped with a second control panel, and the second control panel is used to control the discharge and stop discharging action of the special gas of the to-be-measured cylinder;And a third cabinet is equipped with a pipeline blow clean switch valve disc area and a gas detector switch valve disc area, and the pipeline blow clean switch valve disc area and the gas detector switch valve disc area are respectively equipped with a plurality of manual switch valves, and the third cabinet is equipped with a second exhaust hole connected with the waste gas treatment system, and the special gas detector is also arranged in the second exhaust hole, wherein, part of the manual switch valves of the gas detector switch valve disc area is connected with a gas detection analyzer cabinet;Wherein, a part of the plurality of manual switch valves of the blow clean cylinder, the to-be-measured cylinder, a part of the plurality of manual switch valves of the pipeline blow clean switch valve disc area and the plurality of manual switch valves of the gas detector switch valve disc area are connected with the main gas pipeline, and another part of the plurality of manual switch valves of the pipeline blow clean switch valve disc area and the plurality of manual switch valves of the gas detector switch valve disc area are connected with a waste gas discharge pipeline.
[0012] The detailed features and advantages of the utility model are described in the following embodiments in detail, and the contents are sufficient to enable any person skilled in the relevant art to understand the technical content of the utility model and implement it, and according to the contents disclosed in the specification, the patent application range and the drawings, any person skilled in the relevant art can easily understand the related purposes and advantages of the utility model. BRIEF DESCRIPTION OF DRAWINGS
[0013] Figure 1 It is an embodiment system architecture diagram of the integrated special gas cylinder detection cabinet of the utility model.
[0014] Figure 2 It is another embodiment system architecture diagram of the integrated special gas cylinder detection cabinet of the utility model. DETAILED DESCRIPTION
[0015] For the convenience of understanding other feature contents and advantages of the utility model and the effects achieved by the utility model, the features and advantages of the utility model are described in detail in combination with the drawings, and the following embodiments are further detailed to illustrate the points of the utility model, but not limit the scope of the utility model in any point.
[0016] Please refer to Figure 1The utility model discloses an integrated special gas cylinder detection cabinet 10, which can be applied to a special steel cylinder gas purity detection system. Figure 1 The embodiment of the utility model discloses under the existing system architecture, by with the steel bottle area 12 of being measured, pipeline blow -clean switch valve disc area 13, gas detection instrument switch valve disc area 14, integrate to same airtight cabinet body, and share an exhaust hole 17, by the special gas detector of setting in exhaust hole 17 to detect whether the integrated airtight cabinet body has the special gas leakage situation. Figure 1 The embodiment of the utility model discloses integrated special gas cylinder detection cabinet 10 includes two cabinet bodies, and the first cabinet body with blow -clean steel bottle area 11 and the second cabinet body formed by the steel bottle area 12 of being measured, pipeline blow -clean switch valve disc area 13, gas detection instrument switch valve disc area 14.
[0017] Figure 1The main gas pipeline 20 and the exhaust gas discharge pipeline 90 are connected with the blow purging cylinder 30 (the blow purging cylinder area 11), the to-be-tested cylinder 40 (the to-be-tested cylinder area 12), the on-off valve 13-1, the on-off valve 13-2 and the on-off valve 13-3 in the pipeline blow purging on-off valve disc area 13, the on-off valve 14-1, the on-off valve 14-2, the on-off valve 14-3 and the on-off valve 14-4 in the gas detector on-off valve disc area 14, the on-off valve 52 in the gas detection and analysis instrument cabinet 50, and the on-off valve 61, the on-off valve 62, the on-off valve 63, the on-off valve 64, the on-off valve 65 and the on-off valve 81, like the known technology. The pump 60 and the vacuum degree measuring instrument 80 are used to perform the vacuum state work required in the processes of the front pipeline blow purging (the front blow and the rear blow), the special gas detection, the exhaust gas discharge, the detection rear pipeline blow purging and the like, which are part of the known technology and will not be described here. The gas detection and analysis unit 51 represents one of a plurality of gas detection and analysis units in the gas detection and analysis instrument cabinet 50. In practice, there are a plurality of (4-5) gas detection and analysis units in the gas detection and analysis instrument cabinet 50. They are also part of the known technology and will not be described here. The on-off valve 13-1, the on-off valve 13-2, the on-off valve 13-3, the on-off valve 14-2 and the on-off valve 14-4 are manual on-off valves, which are usually opened. The on-off valve 14-1 and the on-off valve 14-3 are electromagnetic on-off valves, which can be controlled to be opened or closed by the second control panel 16.
[0018] The processes of the front pipeline blow purging (the front blow and the rear blow), the special gas detection, the exhaust gas discharge, the detection rear pipeline blow purging and the like are set and controlled by the first control panel 15 and the second control panel 16, which are part of the known technology and will not be described here. The first control panel is used to control the discharge and stop of the gas in the blow purging cylinder. The second control panel is used to control the discharge and stop of the special gas in the to-be-tested cylinder.
[0019] The to-be-tested cylinder area 12 in the above embodiment is only provided with one to-be-tested cylinder 40, and only some basic number of on-off valves in each area are drawn, which are used to illustrate the integrity of the utility model and do not limit the number of related components of the utility model. Figure 1 The to-be-tested cylinder area 12 in the above embodiment is only provided with one to-be-tested cylinder 40, and only some basic number of on-off valves in each area are drawn, which are used to illustrate the integrity of the utility model and do not limit the number of related components of the utility model.
[0020] Figure 2 Another embodiment of the utility model is disclosed, which is compared with the embodiment Figure 1 , Figure 2 The to-be-tested cylinder area sub-cabinet 12A is a separate airtight cabinet body, and the pipeline blow purging on-off valve disc area 13A and the gas detector on-off valve disc area 14A are integrated into a sub-cabinet, in other words, Figure 2The embodiment of the present application comprises three cabinets, the first cabinet with the blow-down cylinder area 11, the second cabinet with the to-be-tested cylinder area sub-cabinet 12A, and the third cabinet with the pipeline blow-down switch valve plate area 13A and the gas detector switch valve plate area 14A integrated into one sub-cabinet. In addition, another exhaust hole 18 is opened on the third cabinet, which is designed the same as the exhaust hole 17, and also has a special gas detector.
[0021] Compared with Figure 1 The embodiment of the present application, Figure 2 The embodiment of the present application can master whether the special gas leaks from the to-be-tested cylinder area sub-cabinet 12A through the exhaust hole 17, and whether the special gas leaks from the pipeline blow-down switch valve plate area 13A and the gas detector switch valve plate area 14A through the exhaust hole 18. That is, the embodiment of the present application can confirm which switch valve in which sub-cabinet leaks, so that the leaky switch valve can be quickly found.
[0022] Although the technical content of the present application has been disclosed above with the preferred embodiment, it is not intended to limit the present application, and any person skilled in the art can make some changes and decorations without departing from the spirit of the present application, which should be covered in the scope of the present application. Therefore, the protection scope of the present application should be defined by the appended patent claim.
Claims
1. An integrated special gas cylinder detection cabinet, characterized in that, The first cabinet is provided with a purging cylinder, connected to a main gas pipeline, and provided with a first control panel for controlling the discharge and stop of gas from the purging cylinder. The second cabinet is provided with a test cylinder area, a pipeline purging valve plate area and a gas detector valve plate area, the test cylinder area is provided with at least one test cylinder, the pipeline purging valve plate area and the gas detector valve plate area are respectively provided with a plurality of manual valves, the second cabinet is provided with an exhaust hole connected to a waste gas treatment system, the exhaust hole is provided with a special gas detector, the second cabinet is provided with a second control panel for controlling the discharge and stop of special gas from the test cylinder, and part of the manual valves in the gas detector valve plate area is connected to a gas detection analyzer cabinet. The purging cylinder, the test cylinder, part of the manual valves in the pipeline purging valve plate area and part of the manual valves in the gas detector valve plate area are connected to the main gas pipeline, and the other part of the manual valves in the pipeline purging valve plate area and the other part of the manual valves in the gas detector valve plate area are connected to a waste gas discharge pipeline. The first cabinet is provided with a purging cylinder, connected to a main gas pipeline, and provided with a first control panel for controlling the discharge and stop of gas from the purging cylinder.
2. The integrated special gas cylinder detection cabinet, characterized in that, The second cabinet is provided with a test cylinder area, the test cylinder area is provided with at least one test cylinder, the second cabinet is provided with a first exhaust hole connected to a waste gas treatment system, the first exhaust hole is provided with a special gas detector, the second cabinet is provided with a second control panel for controlling the discharge and stop of special gas from the test cylinder. The third cabinet is provided with a pipeline purging valve plate area and a gas detector valve plate area, the pipeline purging valve plate area and the gas detector valve plate area are respectively provided with a plurality of manual valves, the third cabinet is provided with a second exhaust hole connected to the waste gas treatment system, and the second exhaust hole is also provided with the special gas detector, and part of the manual valves in the gas detector valve plate area is connected to a gas detection analyzer cabinet. The purging cylinder, the test cylinder, part of the manual valves in the pipeline purging valve plate area and part of the manual valves in the gas detector valve plate area are connected to the main gas pipeline, and the other part of the manual valves in the pipeline purging valve plate area and the other part of the manual valves in the gas detector valve plate area are connected to a waste gas discharge pipeline.