Integrated special gas cylinder detection cabinet
By integrating the pipeline purging switch valve disc and the gas detector switch valve disc into an integrated special gas cylinder detection cabinet, and using the detector in the exhaust port, the leakage problem in the existing technology is solved, achieving safe prevention of the special gas detection process and avoiding potential hazards.
Patent Information
- Application Number
- CN202422702618.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-06
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-11-06
AI Technical Summary
Existing technologies cannot effectively prevent leaks from the pipeline purging switch valve disc and the gas detector switch valve disc during special gas detection processes, which could lead to potential hazardous events.
The pipeline purging switch valve disc and the gas detector switch valve disc are integrated into an integrated special gas cylinder detection cabinet. A special gas detector is installed using the exhaust port in the special gas cylinder detection cabinet to monitor the leakage situation in real time.
It effectively prevents the hazards of leakage during the detection of special gases, improves safety and reliability, and avoids industrial safety incidents caused by leakage.
Smart Images
Figure CN223526324U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a safety detection system for special gas analysis, in particular to an integrated special gas cylinder detection cabinet. BACKGROUND
[0002] Special gases have played an important role in semiconductor processes, such as dry etching, oxidation, ion implantation, thin film deposition, etc. A considerable amount of special gases must be used. However, the special gases are corrosive, flammable, or even toxic, and must be used with caution. These special gases are almost always supplied in steel cylinders.
[0003] During use, general visual inspection cannot determine the purity of the special gas in the gas cylinder. The gas cylinder may contain impurities, insufficient purity, or incomplete cleaning, which may mix with one or more other special gases. If not tested, direct use may cause problems due to the purity of the special gas, resulting in major problems in the entire semiconductor process (causing significant losses). Therefore, a purity detection system for special gas cylinders has been developed.
[0004] In a semiconductor manufacturing plant, a large amount of different special gases are required, and some of these special gases are corrosive or toxic, which are highly hazardous to the human body. Therefore, in the purity detection system for special gas cylinders, it is necessary to monitor whether the special gas leaks during the detection process to prevent harm to the human body and cause industrial safety incidents.
[0005] The purity detection system of special gas cylinder is composed of several parts according to known technology: gas pipeline, including two parts, one is special gas detection and purging pipeline, and the other is waste gas discharge pipeline; purging gas cylinder cabinet, loaded with purging gas cylinder, generally nitrogen; special gas cylinder cabinet, which is sealed and has an exhaust port connected to the outside (negative pressure generated by the external exhaust system to make the special gas cylinder cabinet gas fixedly exhaust to the exhaust port), the exhaust port has a special gas detector, which can detect the leakage of the special gas cylinder cabinet; pipeline purging switch valve disc, which first separates the gas in the pipeline to the waste gas treatment system, and then controls the purging gas cylinder to open, and the residual special gas in the special gas detection and purging pipeline is cleaned by nitrogen; gas detector switch valve disc, which is used to control the special gas cylinder to open, and then the special gas is transported to the gas detection analyzer through the special gas detection pipeline; gas detection analyzer, which is usually used to analyze the content of impurities / moisture / purity of special gas, and the gas detector switch valve disc can open and close the switch valve in the process of pipeline purging (pre-purging, post-purging), special gas detection, waste gas discharge, post-purging after detection, etc.; purging gas cylinder cabinet, special gas cylinder cabinet, pipeline purging pipeline control valve disc, gas detector switch valve disc and gas detection analyzer are connected in series by gas pipeline, and the opening and closing of the switch valve of pipeline purging switch valve disc and gas detector switch valve disc controls the process of pipeline purging (pre-purging, post-purging), special gas detection, waste gas discharge, post-purging after detection, etc. The above control mode is the content of known technology, which will not be described here.
[0006] The above known special gas cylinder purity detection system integrates the purging gas cylinder cabinet and the special gas cylinder cabinet, which are provided by the same gas supplier, and the pipeline purging switch valve disc and the gas detector switch valve disc are provided by another switch valve manufacturer. As mentioned above, the special gas cylinder cabinet that may leak has a special gas detector on the exhaust port that can detect the leakage, and the leakage can be discharged to the external waste gas treatment system. In other words, the special gas cylinder cabinet itself has a hazard control means. The pipeline purging switch valve disc and the gas detector switch valve disc have many gas switch valves, which may leak due to poor quality, aging, etc. At present, when the pipeline purging switch valve disc and the gas detector switch valve disc leak, a vacuum degree measuring instrument is used to measure whether there is a leakage. That is, a pump is used to make the gas pipeline approach a vacuum state; when the vacuum degree measuring instrument detects an abnormal result, it means that there is a switch valve leakage. If leakage is found, the switch valves in the pipeline purging switch valve disc and the gas detector switch valve disc can be checked one by one by manual method.
[0007] The above manner cannot rule out the situation that the switch valve in the pipeline purging switch valve disc and the gas detector switch valve disc suddenly leaks during the special gas detection process. In other words, the known technology still has the possibility of causing a hazardous event during the special gas detection process.
[0008] Therefore, how to prevent the leakage of special gas caused by the pipeline purging switch valve disc and the gas detector switch valve disc during the special gas detection process in the purity detection system of the special gas cylinder becomes an important technical development focus in the technical field. Practical new type content
[0009] In order to solve the problems and defects of the known technology, the integrated special gas cylinder detection cabinet integrates the pipeline purging switch valve disc and the gas detector switch valve disc into the integrated special gas cylinder detection cabinet, uses the special gas detector in the exhaust hole in the special gas cylinder detection cabinet as a tool for detecting whether the switch valve in the pipeline purging switch valve disc and the gas detector switch valve disc leaks, effectively solves the possible leakage problem in the detection that the previous technology cannot solve, and achieves the special technical effect of preventing the leakage hazard that may occur during the special gas detection process.
[0010] In order to achieve the above purpose, the integrated special gas cylinder detection cabinet comprises a first cabinet body, a purging cylinder, a main gas pipeline connected to the purging cylinder, and a first control panel configured to control the discharge and stop of the gas in the purging cylinder; and a second cabinet body, a to-be-detected cylinder area, a pipeline purging switch valve disc area, and a gas detector switch valve disc area, the to-be-detected cylinder area is provided with at least one to-be-detected cylinder, the pipeline purging switch valve disc area and the gas detector switch valve disc area are respectively provided with a plurality of electromagnetic switch valves, the second cabinet body is provided with an exhaust hole connected to an external waste gas treatment system, the exhaust hole is provided with a special gas detector, the second cabinet body is provided with a second control panel configured to control the discharge and stop of a special gas in the to-be-detected cylinder, wherein part of the electromagnetic switch valves in the gas detector switch valve disc area is connected to a gas detection analyzer cabinet; wherein the purging cylinder, the to-be-detected cylinder, part of the electromagnetic switch valves in the pipeline purging switch valve disc area, and part of the electromagnetic switch valves in the gas detector switch valve disc area are connected to the main gas pipeline, and another part of the electromagnetic switch valves in the pipeline purging switch valve disc area and another part of the electromagnetic switch valves in the gas detector switch valve disc area are connected to a waste gas discharge pipeline.
[0011] The following detailed description of the features and advantages of this utility model in the embodiments is sufficient to enable anyone skilled in the art to understand the technical content of this utility model and implement it accordingly. Furthermore, based on the content disclosed in this specification, the scope of the patent application, and the drawings, anyone skilled in the art can easily understand the related objectives and advantages of this utility model. Attached Figure Description
[0012] Figure 1 This is a system architecture diagram of an embodiment of the integrated special gas cylinder testing cabinet of this utility model.
[0013] Figure 2 This is a system architecture diagram of another embodiment of the integrated special gas cylinder testing cabinet of this utility model. Detailed Implementation
[0014] To facilitate a quick and easy understanding of the other features, advantages, and effects of this utility model, the features and advantages of this utility model will be described in detail with reference to the accompanying drawings. The following embodiments are for further detailed explanation of the viewpoints of this utility model, but are not intended to limit the scope of this utility model in any way.
[0015] Please refer to Figure 1 This utility model discloses an integrated special gas cylinder testing cabinet 10, which can be used in a gas purity testing system for special steel cylinders. The gas purity testing system for special steel cylinders includes: the integrated special gas cylinder testing cabinet 10, a gas detection and analysis instrument cabinet 50, a pump 60, waste gas treatment equipment 70 (including a waste gas chimney 71), a vacuum measuring instrument 80, a main gas pipeline 20, and a waste gas emission pipeline 90, etc. Figure 1 In one embodiment, under the existing system architecture, the gas cylinder area 12 to be tested, the pipeline purging switch valve panel area 13, and the gas detector switch valve panel area 14 are integrated into the same airtight cabinet and share a vent 17. A special gas detector installed in the vent 17 is used to detect whether there is any special gas leakage in this integrated airtight cabinet. Figure 1 The embodiments disclosed in this paper reveal that the integrated special gas cylinder testing cabinet 10 comprises two cabinets: a first cabinet with a purged cylinder area 11, and a second cabinet consisting of a test cylinder area 12, a pipeline purging switch valve panel area 13, and a gas detector switch valve panel area 14. In other words, when the special gas detector in the exhaust port 17 detects a special gas leak, it indicates that at least one of the test cylinder area 12, the pipeline purging switch valve panel area 13, or the gas detector switch valve panel area 14 is leaking. Since the exhaust port 17 is externally connected to the waste gas treatment system, even if a special gas leak occurs, it will be confined within the airtight cabinet and will not cause any harm. This invention effectively prevents potential accidents caused by special gas leaks.
[0016] Figure 1 Similar to known technologies, the main gas pipeline 20 and the exhaust gas pipeline 90 connect to: the purging cylinder 30 (purging cylinder area 11), the cylinder to be tested 40 (testing cylinder area 12), the switching valves 13-4, 13-5, and 13-6 in the pipeline purging switching valve panel 13, the switching valves 14-5, 14-6, 14-7, and 14-8 in the gas detector switching valve panel 14, the switching valve 52 in the gas detection analyzer cabinet 50, and the switching valves 61, 62, 63, 64, 65, and 81. The pump 60 and the vacuum measuring instrument 80 are used to perform the vacuum operations required in the processes of pre-pipeline purging (pre-purge, post-purge), special gas detection, exhaust gas emission, and post-detection pipeline purging. These are known technologies and will not be described in detail here. The gas detection and analysis unit 51 represents one of the multiple gas detection and analysis units in the gas detection and analysis cabinet 50. In practice, there are multiple (4-5) gas detection and analysis units in the gas detection and analysis cabinet 50. This is also a part of known technology, so it will not be described in detail here.
[0017] Unlike known technologies, the switching valves 13-4, 13-5, 13-6, 14-5, 14-6, 14-7, and 14-8 used in this invention are all electromagnetic switching valves. Furthermore, a third control panel 16-1 and a fourth control panel 16-2 are added to the pipeline purging switching valve panel 13 and the gas detector switching valve panel 14, respectively, to control the opening or closing of each electromagnetic switching valve.
[0018] The aforementioned processes, including pre-pipeline purging (pre-purge and post-purge), special gas detection, exhaust gas emission, and post-detection pipeline purging, are set and executed by the first control panel 15 and the second control panel 16. These are known technologies and will not be elaborated upon here. The first control panel controls the emission and cessation of emission of a gas from the purging cylinder; the second control panel controls the emission and cessation of emission of a special gas from the cylinder under test.
[0019] in, Figure 1 In the test cylinder area 12, only one test cylinder 40 is drawn, and the switch valves in the other areas are only drawn in a basic number. This is used to illustrate the overall nature of this utility model and is not intended to limit the number of related components of this utility model.
[0020] Figure 2 Another embodiment of this utility model is disclosed, compared to Figure 1 , Figure 2 The embodiments willFigure 1 The third control panel 16-1 and the fourth control panel 16-2 are integrated into a fifth control panel 16-3. Similarly, the utility model can also be extended as follows: the functions of the control switch valves 13-4, 13-5, 13-6, 14-5, 14-6, 14-7 and 14-8 of the third control panel 16-1 and the fourth control panel 16-2 are integrated into the second control panel 16, and the second control panel 16 is used for unified control.
[0021] Although the technical content of the utility model has been disclosed above with the preferred embodiments, it is not intended to limit the utility model, and any person skilled in the art can make some changes and decorations without departing from the spirit of the utility model, which should be covered in the scope of the utility model. Therefore, the protection scope of the utility model should be defined by the appended patent claim.
Claims
1. An integrated special gas cylinder detection cabinet, characterized in that, Comprising: a first cabinet configured with a purging cylinder, connected with a main gas pipeline, and configured with a first control panel for controlling the discharging and stopping discharging of a gas of the purging cylinder; and a second cabinet configured with a testing cylinder area, a pipeline purging switch valve disk area, and a gas detector switch valve disk area, the testing cylinder area configured with at least one testing cylinder, the pipeline purging switch valve disk area and the gas detector switch valve disk area respectively configured with a plurality of electromagnetic switch valves, the second cabinet configured with an exhaust hole connected with an external waste gas treatment system, the exhaust hole configured with a special gas detector, the second cabinet configured with a second control panel for controlling the discharging and stopping discharging of a special gas of the testing cylinder, wherein part of the electromagnetic switch valves of the gas detector switch valve disk area are connected with a gas detection analyzer cabinet. Wherein, part of the electromagnetic switch valves of the pipeline purging switch valve disk area and part of the electromagnetic switch valves of the gas detector switch valve disk area are connected with the main gas pipeline, and another part of the electromagnetic switch valves of the pipeline purging switch valve disk area and another part of the electromagnetic switch valves of the gas detector switch valve disk area are connected with a waste gas discharge pipeline.
2. The integrated special gas cylinder detection cabinet according to claim 1, characterized in that, Further comprising: a third control panel configured in the pipeline purging switch valve disk area for controlling the opening and closing of the electromagnetic switch valves in the pipeline purging switch valve disk area; and a fourth control panel configured in the gas detector switch valve disk area for controlling the opening and closing of the electromagnetic switch valves in the gas detector switch valve disk area.
3. The integrated special gas cylinder detection cabinet according to claim 1, characterized in that, Further comprising: a fifth control panel configured in the pipeline purging switch valve disk area and the gas detector switch valve disk area for controlling the opening and closing of the electromagnetic switch valves in the pipeline purging switch valve disk area and the gas detector switch valve disk area.
4. The integrated special gas cylinder detection cabinet according to claim 1, characterized in that, The second control panel controls the opening and closing of the electromagnetic switch valves in the pipeline purging switch valve disk area and the gas detector switch valve disk area.