Beam shaping module, laser light source system, laser cutting device and laser welding device

Abstract

The utility model provides a light beam shaping module, a laser light source system and a laser cutting and welding device, and relates to the field of light beam shaping. The light beam shaping module comprises a collimating mirror, a light beam mode adjusting aspherical mirror group and a focusing mirror group, the light beam mode adjusting aspherical mirror group is arranged between the collimating mirror and the focusing mirror group; the collimating mirror is configured to collimate incident laser which enters the light beam shaping module, and the light beam mode adjusting aspherical mirror group is configured to adjust the shape and energy distribution of emergent light of the collimating mirror. The focusing lens group is configured to focus emergent light of the light beam mode adjusting aspherical lens group on a target object and obtain a corresponding energy distribution shaping light beam; wherein the incident laser energy distribution is Gaussian or Gaussian-like distribution. When the light beam shaping module provided by the embodiment of the utility model is used in the field of laser cutting or laser welding, a better cutting effect or welding effect can be provided.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of beam shaping, in particular to a beam shaping module, a laser light source system, a laser cutting and welding device. BACKGROUND

[0002] Laser processing has been widely used in modern manufacturing industry, mainly including laser cutting and laser welding processes. The quality, efficiency and precision of laser processing are closely related to the energy distribution of the light beam. Therefore, in order to meet different processing needs, targeted beam shaping technology needs to be used.

[0003] At present, common beam shaping methods include using special optical fibers for beam shaping, applying micro-optical elements, and other static beam shaping technologies and dynamic beam shaping technologies. However, in both laser cutting and laser welding, the existing beam shaping technology still has certain room for improvement in processing capacity. CONTENT OF THE INVENTION

[0004] In view of the above problems, the purpose of the embodiments of the present application is to provide a beam shaping module, a laser light source system, a laser cutting and welding device, which optimizes the energy distribution in the laser processing process through beam shaping to improve the processing efficiency and quality.

[0005] In a first aspect, the embodiments of the present application provide a beam shaping module, which comprises: a collimating mirror, a beam mode adjusting aspherical mirror group and a focusing mirror group; the beam mode adjusting aspherical mirror group is arranged between the collimating mirror and the focusing mirror group; the collimating mirror is configured to collimate incident laser of the incident laser shaping module, the beam mode adjusting aspherical mirror group is configured to adjust the shape and energy distribution of the outgoing light of the collimating mirror, and the focusing mirror group is configured to focus the outgoing light of the beam mode adjusting aspherical mirror group on a target object and obtain a corresponding energy distribution shaped light beam; wherein the energy distribution of the incident laser is Gaussian or Gaussian-like distribution.

[0006] In the above implementation process, the beam shaping module provided by the embodiments of the present application realizes collimation of incident light through the collimating mirror, the beam mode adjusting aspherical mirror group can adjust the shape and energy distribution of the collimated light beam, and then the focusing mirror group focuses the optimized light beam on the target object and can obtain a corresponding energy distribution shaped light beam, ensuring accurate focusing effect, thereby improving processing precision and efficiency. The beam shaping module provided by the embodiments of the present application can improve the energy utilization rate and beam quality in the laser processing process, reduce processing errors, and improve the effect of laser cutting or welding.

[0007] Optionally, in the embodiments of the present application, the beam mode adjusting aspherical mirror group comprises at least two target aspherical mirrors; one mirror surface of the target aspherical mirror is aspherical, and the other mirror surface is spherical or planar.

[0008] Optionally, in the embodiments of the present application, the aspheric surface of the target aspheric mirror faces or is away from the collimating mirror, and the optical axis of the target aspheric mirror is coaxial with the incident laser.

[0009] Optionally, in the embodiments of the present application, the target aspheric mirror includes a first target aspheric mirror and a second target aspheric mirror; the central part of one of the first target aspheric mirror and the second target aspheric mirror is concave, and the edge part is convex; the central part of the other is convex, and the edge part is concave.

[0010] Optionally, in the embodiments of the present application, the first target aspheric mirror and the second target aspheric mirror are at a preset adjustable distance; wherein the preset adjustable distance is related to the defocus amount between the focal point of the exit light of the focusing lens group and the target object.

[0011] In the above implementation process, the beam mode adjusting aspheric mirror group in the embodiments of the present application can efficiently adjust the shape and energy distribution of the light beam by adopting the combination configuration of aspheric surface and spherical surface or plane, so as to ensure that the light beam quality meets the best requirements of laser welding or cutting; and further improve the energy utilization efficiency and processing precision in the laser processing process, and enhance the reliability of laser processing.

[0012] Optionally, in the embodiments of the present application, the focusing lens group includes at least one positive focal length lens.

[0013] Optionally, in the embodiments of the present application, the collimating mirror includes an aspheric collimating mirror.

[0014] In the above implementation process, the beam shaping mirror group in the embodiments of the present application can realize high-quality beam focusing and stable beam transmission by accurately adjusting the shape and energy distribution of the light beam, and significantly improve the processing effect in the laser welding and cutting process. The optical system based on the beam shaping mirror group has strong flexibility, can adapt to the requirements of different defocus amounts and beam shapes, reduces aberration, improves processing precision, and ensures stable beam outer contour, which is suitable for high-precision and high-efficiency laser processing applications.

[0015] In a second aspect, the present application provides a laser light source system, which includes a laser and the beam shaping module in the first aspect; the laser light beam emitted by the laser passes through the beam shaping module and is emitted.

[0016] In a third aspect, the present application provides a laser cutting device, which includes the laser light source system in the second aspect; wherein the beam mode adjusting aspheric mirror group is a limit diffraction optical system.

[0017] In a fourth aspect, the present application provides a laser welding device, which includes the laser light source system in the first aspect; wherein the beam mode adjusting aspheric mirror group is a non-limit diffraction optical system.

[0018] In summary, the light beam shaping module provided by the embodiments of the present application can realize the energy of the focused light beam with adjustable defocus compared with the point-ring laser, the point-ring length is extremely long, which helps to improve the welding depth; compared with the micro-optical element shaping group such as DOE, the cost and use risk are low, and the distance between the different defocus amounts and the ring is different, which provides a new process dimension for the point-ring welding application, and the optical matching and fiber core diameter compatibility are higher; compared with the optical lens combined with the ring band light splitting based on the axicon principle, the point-ring proportion adjustment and compatibility advantage are higher.

[0019] In laser cutting, compared with the micro-optical element shaping group such as DOE, the cost and use risk are low; compared with the ring-shaped light beam obtained by the axicon shaping, the peak power density is greatly improved, and the increase of the focusing divergence angle is greatly suppressed; compared with the dynamic beam shaping such as the conventional galvanometer system, the thin and medium thick cutting compatibility is improved, and the cutting speed and cross section quality are not restricted by the dynamic scanning frequency.

[0020] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the following embodiments are specifically described below, and the accompanying drawings are described in detail as follows. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments of the present application. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0022] Figure 1 The structure schematic diagram of the light beam shaping module provided by the embodiments of the present application is shown in the figure;

[0023] Figure 2 The structure schematic diagram of the light beam mode adjusting aspheric lens group provided by the embodiments of the present application is shown in the figure;

[0024] Figure 3 The focused light beam energy distribution profile diagram under the negative defocus amount in the laser welding provided by the embodiments of the present application is shown in the figure;

[0025] Figure 4 The focused light beam energy distribution profile diagram under the zero defocus amount in the laser welding provided by the embodiments of the present application is shown in the figure;

[0026] Figure 5 The focused light beam energy distribution profile diagram under the positive defocus amount in the laser welding provided by the embodiments of the present application is shown in the figure;

[0027] Figure 6 This is a schematic diagram of the energy distribution pattern of the dot ring at a defocusing depth of -4mm provided in an embodiment of this application.

[0028] Figure 7 Figure - A schematic diagram of the energy distribution pattern of the dot ring at a defocusing depth of 7mm provided for embodiments of this application;

[0029] Figure 8 Figure - is a schematic diagram of the energy distribution pattern of the dot ring at a defocusing depth of 10mm provided in the embodiments of this application;

[0030] Figure 9 This is a cross-sectional view of the focused beam energy distribution under negative defocusing in laser cutting, provided in an embodiment of this application.

[0031] Figure 10 A cross-sectional view of the focused beam energy distribution under zero defocus in laser cutting, provided in an embodiment of this application;

[0032] Figure 11 This is a cross-sectional view of the focused beam energy distribution under positive defocusing in laser cutting, provided in an embodiment of this application.

[0033] Figure 12 This application provides different energy distribution diagrams under the same defocusing amount for embodiments of the present application;

[0034] Reference numerals: Beam shaping module-100; Collimating lens-110; Beam mode adjustment aspherical lens group-120; Target aspherical lens-121; First target aspherical lens-121(a); Second target aspherical lens-121(b); Focusing lens group-130. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0036] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0037] It should be noted that like reference numerals and letters refer to like items throughout the several views, and once an item is defined in one view, it should not be further defined and explained in subsequent views.

[0038] In the description of the utility model, it needs to be explained that the orientation or position relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like is based on the orientation or position relationship shown in the drawings, or is the orientation or position relationship commonly placed when the utility model product is used, and is merely for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second", "third" and the like are only used for differentiation in description and cannot be understood as indicating or implying relative importance.

[0039] In addition, the terms "horizontal", "vertical" and the like do not mean that the components must be absolutely horizontal or vertical, but can be slightly inclined. For example, "horizontal" only means that its direction is relatively more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0040] In the description of the utility model, it also needs to be explained that, unless otherwise explicitly specified and limited, the terms "arrangement", "installation", "connection" and "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For ordinary skilled persons in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0041] The inventors found in the research process that in laser welding, the conventional optical system is prone to cause strong spatter and various welding defects inside the welded part due to the focusing focal point beam energy concentration when welding high-reflectivity materials. In laser cutting, the energy utilization efficiency of the focusing beam section of the conventional laser processing head optical shaping system is not high, especially in thick plate processing applications, the off-focus use has a greater impact, so optimizing the energy distribution through beam shaping to improve the processing capacity of the optical system has become an important focus.

[0042] The beam shaping technology in the prior art includes the following types:

[0043] In the aspect of lasers, the adjustment of the final focal point energy distribution is realized through special optical fibers such as point-ring optical fibers and array optical fibers. However, it mainly changes the energy distribution form of the focusing focal point and the vicinity, and the beam shaping effect under a certain off-focus amount is general.

[0044] In the laser head, common shaping techniques include static beam shaping using diffractive optical elements (DOEs) and other micro-optical elements, or optical lenses based on the axicon principle combined with ring splitting.

[0045] In addition, there are also dynamic beam shaping methods based on programmable beam shaping and galvanometer scanning.

[0046] Based on micro-optical elements such as DOEs, the energy distribution is not adjustable. In laser cutting, if switching is not used, laser perforation will be a problem, and switching itself brings serious risks, which can easily lead to optical path burning; to obtain adjustable energy distribution, multiple optical elements are usually combined, which is extremely costly, and the energy utilization rate is insufficient, and the high temperature of the laser head will affect the cutting performance. In laser welding, in addition to the cost problem, the low energy utilization rate is also an unavoidable challenge, and the outer ring diameter is usually not adjustable and must be matched with a specific optical ratio and laser core diameter to be applied.

[0047] Based on the axicon principle combined with ring splitting, in laser cutting, this method fails to significantly improve the peak power density of the ring-shaped spot, and the divergence angle of the focused beam is significantly increased, which is not conducive to processing applications. In laser welding, the outer ring diameter is also not adjustable and needs to be matched with a specific optical ratio and laser core diameter, and because the point-ring energy ratio cannot be adjusted, the welding process is difficult to achieve optimal optimization effect.

[0048] In addition, the current programmable beam shaping has a limited damage threshold, and there are still many challenges in high-energy laser applications; the dynamic shaping system of galvanometer scanning has no improvement for thin plates, and can only show value in medium-thick plate processing applications, and the cross-section quality and cutting speed are subject to scanning frequency.

[0049] Overall, the existing beam shaping technology still has problems such as low energy utilization rate, high cost, poor adaptability, etc., especially in high-energy laser applications, there is still a lot of room for improvement.

[0050] Based on this, the embodiments of the present application provide a beam shaping module, a laser light source system, a laser cutting and a laser welding device, which optimizes the energy distribution in the laser processing process through beam shaping to improve the processing efficiency and quality.

[0051] Please refer to Figure 1 , Figure 1This is a schematic diagram of the beam shaping module 100 provided in an embodiment of this application. This embodiment of the application provides a beam shaping module 100, which can be applied to laser welding or laser cutting. The beam shaping module 100 includes a collimating lens 110, a beam mode adjusting aspherical lens group 120, and a focusing lens group 130.

[0052] like Figure 1 As shown, the beam mode adjusting aspherical lens group 120 is disposed between the collimating lens 110 and the focusing lens group 130.

[0053] The collimating lens 110 is configured to collimate the incident laser beam of the beam shaping module 100.

[0054] The beam mode adjustment aspherical mirror group 120 is configured to adjust the shape and energy distribution of the emitted light from the collimating mirror 110.

[0055] The focusing lens group is configured to focus the emitted light from the beam mode-adjustable aspherical lens group 120 onto the target object and obtain a corresponding energy distribution-shaped beam.

[0056] Optionally, the focusing lens group 130 includes at least one positive focusing lens.

[0057] Optionally, the collimating lens 110 includes an aspherical collimating lens 110. The aspherical collimating lens 110 can significantly improve the collimation quality of the incident light, thereby improving the performance of the entire beam shaping module 100 and ensuring that the laser beam does not have large errors and deviations in subsequent processing and focusing.

[0058] It should be noted that the incident laser energy distribution in this embodiment is uniform, and it is parallel or nearly parallel light. The incident beam must have a "circular Gaussian" or "near-Gaussian axisymmetric" energy distribution. In other words, the incident beam in this embodiment has a uniform energy distribution and good focusing characteristics.

[0059] pass Figure 1 As can be seen, the beam shaping module 100 provided in this application embodiment achieves collimation of the incident light through the collimating lens 110, the beam mode adjustment aspherical lens group 120 can adjust the shape and energy distribution of the collimated beam, and then the focusing lens group 130 focuses the optimized beam onto the target object, and can obtain a beam with corresponding energy distribution shaping, ensuring accurate focusing effect, thereby improving processing accuracy and efficiency. The beam shaping module 100 provided in this application embodiment can improve the energy utilization rate and beam quality in the laser processing process, reduce processing errors, and improve the effect of laser cutting or welding.

[0060] Please refer to Figure 2 , Figure 2A structure diagram of the beam mode adjustment aspheric lens group 120 is provided in the embodiments of the present application; in an optional embodiment, the beam mode adjustment aspheric lens group 120 comprises at least two target aspheric lenses 121.

[0061] One of the target aspheric lenses 121 is aspheric, and the other is spherical or planar.

[0062] In the light beam shaping module provided in the embodiments of the present application, one of the target aspheric lenses 121 is aspheric, and the other is spherical or planar. The aspheric surface can change the shape and energy distribution of the incident light beam to adjust the light beam to meet the requirements of subsequent processing, and the spherical or planar surface is usually used to adjust the path of the light beam or as a symmetry adjustment to further optimize the characteristics of the light beam.

[0063] The aspheric surface of the target aspheric lens 121 satisfies the odd-even equation as follows:

[0064] ,

[0065] or satisfies the even equation as follows:

[0066] .

[0067] wherein z is the surface profile parallel to the optical axis, R is the radius, k is the conic constant, to are the 1st to 8th aspheric coefficients, and y is the radial distance to the optical axis.

[0068] In an optional embodiment, the target aspheric lens 121 can be combined with reference to Figure 1 , the aspheric surface of the target aspheric lens 121 is directed towards or away from the collimating lens 110, and the optical axis of the target aspheric lens 121 is coaxial with the incident light beam. The optical axis of the target aspheric lens 121 is coaxial with the incident light beam, which ensures the accuracy and consistency of the light beam adjustment and avoids errors caused by deviation of the optical axis.

[0069] In an optional embodiment, the target aspheric lens 121 comprises a first target aspheric lens 121(a) and a second target aspheric lens 121(b); one of the first target aspheric lens 121(a) and the second target aspheric lens 121(b) has a concave center and a convex edge, and the other has a convex center and a concave edge.

[0070] The shapes of the first target aspherical mirror 121(a) and the second target aspherical mirror 121(b) are symmetrical and have different curvature distributions, one of which is concave in the center and convex at the edge, and the other is convex in the center and concave at the edge. Thus, the shape of the light beam can be better controlled, and different light intensity distributions can be generated in different regions, respectively, so as to achieve more accurate beam shaping.

[0071] By Figure 2 It can be seen that the beam mode adjusting aspherical mirror group 120 in the embodiment of the present application can efficiently adjust the shape and energy distribution of the light beam by adopting the combined configuration of aspherical surface and spherical surface or plane, so as to ensure that the light beam quality meets the best requirements of laser welding or cutting. In turn, the energy utilization efficiency and processing precision in the laser processing process are improved, and the reliability of laser processing is enhanced.

[0072] In an optional embodiment, a preset adjustable distance is provided between the first target aspherical mirror 121(a) and the second target aspherical mirror 121(b); wherein the preset adjustable distance is related to the defocusing amount between the focal point of the light emitted by the focusing lens group 130 and the target object.

[0073] In laser cutting, when the distance is adjusted to be close, the focusing point of the light beam is more concentrated, and the energy density is increased, which is suitable for cutting that requires high energy density (such as thick plate cutting). When the distance is adjusted to be far, the focusing point of the light beam is farther, the spot is larger, and the energy distribution is more uniform, which is suitable for applications that require a larger spot and a lower power density (such as thin plate cutting).

[0074] In laser welding, when the distance is adjusted to be close, the light beam is more focused, which is suitable for high power density welding and is suitable for thick plate or deep welding. When the distance is adjusted to be far, the light beam spot is larger, and the energy distribution is more uniform, which is suitable for thin plate welding, surface treatment or other applications that require lower energy density.

[0075] For example, in laser welding, according to the design of introducing different optical aberrations, the point ring energy distribution in the positive or negative defocusing direction of the focused light beam segment can be realized, and the proportion of the point ring energy of the corresponding focused light beam segment can be adjusted by adjusting the distance between the beam mode adjusting aspherical mirror group 120. Please refer to Figure 1 The focal length of the collimating mirror 110 is designed to be 100 mm, the focal length of the focusing lens group 130 is designed to be 200 mm, and the first target aspherical mirror 121(a) and the second target aspherical mirror 121(b) are designed to obtain a negative defocusing point ring distribution. Under the output light beam of a 50 um core diameter and BPP = 2 mm*mrad fiber laser, by adjusting the distance between the first target aspherical mirror 121(a) and the second target aspherical mirror 121(b), the following Figures 3 to 5The illustrated focused beam energy distribution (cross section along the optical axis); under the above parameters, the focused beam has different defocusing amounts, and the point ring energy distribution form is as shown in Figures 6 to 7 . Figure 3 The focused beam energy distribution profile under negative defocusing in laser welding provided by the embodiment of the present application; Figure 4 The focused beam energy distribution profile under zero defocusing in laser welding provided by the embodiment of the present application; Figure 5 The focused beam energy distribution profile under positive defocusing in laser welding provided by the embodiment of the present application; and Figure 6 The point ring energy distribution form under-4mm defocusing provided by the embodiment of the present application; Figure 7 The point ring energy distribution form under-7mm defocusing provided by the embodiment of the present application; Figure 8 The point ring energy distribution form under-10mm defocusing provided by the embodiment of the present application; Figures 3 to 5 The horizontal axis is the position of the focal point in the horizontal direction, and the vertical axis is the position of the focal point in the vertical direction.

[0076] Through Figures 3 to 8 , it can be known that the beam shaping mirror group provided by the embodiment of the present application introduces optical aberration when applied to laser welding, and forms a non-limited diffraction optical system. The system can keep the focal point as a solid spot and has extremely high peak power density. In the positive or negative defocusing direction, the beam presents a point ring energy distribution, and the length of the point ring can vary from several millimeters to tens of millimeters. The proportion of the point ring changes with the change of the spacing of the aspheric mirror group, and the width of the ring-shaped peak remains basically unchanged under different defocusing amounts. Correspondingly, in the non-targeted negative or positive defocusing direction, the energy distribution of the beam gradually changes from super-energy ring to super-energy Gaussian distribution. In addition, the divergence and convergence of the outer beam of the focused beam are almost not affected.

[0077] Exemplarily, in laser cutting, the over-adjusted beam mode adjusts the spacing of the aspheric mirror group 120 to adjust the energy distribution of the focused beam segment. Please refer to FIG. 1 for the structure, the focal length of the collimating mirror 110 is 100mm, and the focal length of the focusing mirror group 130 is 200mm. Under the output beam of the 100um core diameter, BPP=4mm*mrad fiber laser, by adjusting the spacing of the aspheric mirror group 120, the focused beam energy distribution (cross section along the optical axis) as shown in Figures 9 to 11 , and under the above parameters, the focused beam has the same defocusing amount, and the super-energy ring, the super-energy Gaussian, the conventional Gaussian distribution form under the conventional non-shaping, and the conventional ring distribution form obtained by the axicon can be achieved as shown in Figure 12 . Figure 9 The focused beam energy distribution profile under negative defocusing in laser cutting provided by the embodiment of the present application;Figure 10 A focused beam energy distribution profile diagram under zero defocus amount in laser cutting is provided for the embodiment of the present application; Figure 11 A focused beam energy distribution profile diagram under positive defocus amount in laser cutting is provided for the embodiment of the present application; Figure 12 Different energy distribution diagrams under the same defocus amount are provided for the embodiment of the present application. Among them, Figures 10 to 12 The horizontal axis is the position of the focal point in the horizontal direction, and the vertical axis is the position of the focal point in the vertical direction.

[0078] Based on Figures 9 to 12 , it can be known that the beam shaping mirror group applied to laser cutting in the embodiment of the present application is designed as a limit diffraction optical system. The system can keep the focal point as a solid spot, and has a very high peak power density. In the positive defocus direction, the beam gradually changes from a super-Gaussian distribution to a near-collimated state distribution, and then gradually transitions to a super-energy ring distribution. Correspondingly, in the negative defocus direction, the beam gradually changes from a super-energy ring distribution to a near-collimated state distribution, and then gradually changes to a super-Gaussian distribution. The divergence and convergence of the outer contour of the focused beam are basically not affected. From left to right, they are negative defocus, focal point and positive defocus states. The super-energy ring length and the super-Gaussian length that can be achieved can reach tens of millimeters, and the beam outer contour is basically consistent with the conventional non-shaping beam outer contour.

[0079] Since the focal point always maintains a solid high-energy density distribution state, laser perforation and cutting in parallel under different non-spherical mirror group spacings can be ensured. At the same time, according to the thickness of the plate and the defocus process, super-Gaussian distribution to super-energy ring distribution or any shaping distribution can be selectively used, which can effectively improve the cutting efficiency and the quality of the section.

[0080] It should be noted that, in the above implementation process, the super-Gaussian distribution is higher in spot center concentration than the conventional Gaussian or Gaussian-like distribution, and the peak power density can be several times that of the Gaussian distribution. The super-energy ring distribution is higher in peak width compression than the conventional ring distribution, and the peak width is compressed to the diameter level of the focal spot to obtain a higher peak power density, which can be several times that of the conventional ring distribution. The near-collimated state distribution refers to the energy distribution form after the beam shaping mirror group 120 shapes the output under the incidence of a Gaussian or Gaussian-like beam. Commonly seen are flat-top type or super-Gaussian type.

[0081] Therefore, the beam shaping mirror group in the embodiment of the present application can realize high-quality beam focusing and stable beam transmission by accurately adjusting the shape and energy distribution of the beam, and significantly improve the processing effect in the laser welding and cutting process. The optical system composed of the beam shaping mirror group has strong flexibility and can adapt to different defocus amounts and beam shapes, reduce aberration, improve processing precision, and ensure stable beam outer contour, which is suitable for high-precision and high-efficiency laser processing applications.

[0082] The application provides a laser light source system, which comprises a laser and the above-mentioned beam shaping module 100, and a laser beam emitted by the laser is emitted after passing through the beam shaping module 100. The laser light source system can be used in laser cutting or laser welding, and the energy distribution in the laser processing process is optimized by beam shaping to improve the processing efficiency and quality.

[0083] The application provides a laser cutting device, which comprises the above-mentioned laser light source system; wherein the beam mode adjustment aspherical lens group is a limit diffraction optical system.

[0084] The application provides a laser welding device, which comprises the above-mentioned laser light source system; wherein the beam mode adjustment aspherical lens group is a non-limit diffraction optical system.

[0085] In summary, the laser light source system, laser cutting device and laser welding device provided by the application combine the laser and the beam shaping module, optimize the energy distribution of the laser beam, and significantly improve the efficiency and quality in the laser processing process. For the laser cutting device, the beam mode adjustment aspherical lens group of the limit diffraction optical system can accurately adjust the beam shape, ensure efficient energy transmission and focusing accuracy in the cutting process. For the laser welding device, the beam mode adjustment aspherical lens group of the non-limit diffraction optical system further optimizes the focusing characteristics of the beam, ensures high peak power density and stable beam transmission in the welding process.

[0086] The above is only an embodiment of the application and is not used to limit the protection scope of the application. For those skilled in the art, the application can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the application shall be included in the protection scope of the application.

Claims

1. A beam shaping module, characterized in that, The light beam shaping module comprises a collimating mirror, a light beam mode adjusting aspherical mirror group and a focusing mirror group. The light beam mode adjusting aspherical mirror group is arranged between the collimating mirror and the focusing mirror group. The collimating mirror is configured to collimate incident laser beams into the light beam shaping module, the light beam mode adjusting aspherical mirror group is configured to adjust the shape and energy distribution of the light beams exiting the collimating mirror, and the focusing mirror group is configured to focus the light beams exiting the light beam mode adjusting aspherical mirror group on a target object and obtain a corresponding energy distribution shaped light beam; wherein the energy distribution of the incident laser beams is Gaussian or Gaussian-like.

2. The beam shaping module of claim 1, wherein, The light beam mode adjusting aspherical mirror group comprises at least two target aspherical mirrors. One mirror surface of the target aspherical mirror is aspherical, and the other mirror surface is spherical or planar.

3. The beam shaping module of claim 2, wherein, The aspherical mirror surface of the target aspherical mirror faces or is away from the direction of the collimating mirror, and the optical axis of the target aspherical mirror is coaxial with the incident laser beams.

4. The beam shaping module of claim 2, wherein, The target aspherical mirror comprises a first target aspherical mirror and a second target aspherical mirror. The central part of one of the first target aspherical mirror and the second target aspherical mirror is concave, and the edge part is convex; the central part of the other is convex, and the edge part is concave. The first target aspherical mirror and the second target aspherical mirror are at a preset adjustable distance.

5. The beam shaping module of claim 4, wherein, The preset adjustable distance is related to the defocus amount between the focal point of the light beams exiting the focusing mirror group and the target object. The focusing mirror group comprises at least one positive focal length lens.

6. The beam shaping module of claim 1, wherein, The collimating mirror comprises an aspherical collimating mirror.

7. The beam shaping module of claim 1, wherein, The laser light source system comprises a laser and a light beam shaping module as claimed in any one of claims 1-7, and the laser light beams emitted by the laser exit after passing through the light beam shaping module.

8. A laser light source system characterized by comprising: The laser cutting device comprises the laser light source system as claimed in claim 8; wherein the light beam mode adjusting aspherical mirror group is an extreme diffraction optical system.

9. A laser cutting apparatus characterized by, The laser cutting device comprises the laser light source system as claimed in claim 8; wherein the light beam mode adjusting aspherical mirror group is a non-extreme diffraction optical system.

10. A laser welding apparatus characterized by comprising: ​

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