Clamping device, scanning electron microscope sample observation table and scanning electron microscope system

Abstract

The utility model discloses a clamping device, a scanning electron microscope sample observation table and a scanning electron microscope system.The clamping device comprises two clamping blocks and a pressing assembly, the two clamping blocks are each provided with a clamping face, and the clamping faces of the two clamping blocks are oppositely arranged; each clamping surface is provided with at least one clamping part, the number of the clamping parts on the two clamping surfaces is consistent, the clamping parts are in one-to-one correspondence, and the two corresponding clamping parts are used for combining and fixing a micro dropper; at least one clamping block is provided with a pressing assembly which is used for enabling the clamping part of the clamping block to slide towards the corresponding clamping part of the other clamping block in the clamping direction until the micro dropper is clamped after the micro dropper is placed between the two corresponding clamping parts; according to the device, the detection efficiency is effectively improved in the process of using the scanning electron microscope sample observation table, the nondestructive detection of the micro dropper is ensured, and the accuracy of a detection result is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of electron microscopy, in particular to a clamping device, a scanning electron microscope sample observation platform and a scanning electron microscope system. BACKGROUND

[0002] A scanning electron microscope (hereinafter referred to as a scanning electron microscope) is an observation means between a transmission electron microscope and an optical microscope. The scanning electron microscope collects and processes signals generated by the interaction between an electron beam and the surface of a sample, and finally forms an image on a fluorescent screen that reflects the topography and composition information of the sample surface. It can accurately detect very small apertures.

[0003] A micropipette is a glass product with a long length, a hollow interior and a thin wall. The top end of one side is drawn into a micron-level small hole after being fired. Due to the limited space of the electron microscope sample observation platform, the existing scanning electron microscope sample platform usually needs to cut off a part of the micropipette to put it into the sample observation platform when detecting the micron-level small hole of the micropipette. At the same time, in order to make the micropipette sample vertical, an auxiliary tool needs to be used for fixation. However, such a scanning electron microscope sample platform not only needs to fix the micropipettes one by one during use, but also is complicated to operate and time-consuming. At the same time, the use of auxiliary tools is easy to damage the micropipette, and also cannot completely ensure that the micropipette is in a vertical state, which is difficult to achieve the purpose of accurately detecting the micropipette. CONTENT OF THE UTILITY MODEL

[0004] The purpose of the present application is to provide a clamping device, a scanning electron microscope sample observation platform and a scanning electron microscope system, which aims to solve the technical problems of low detection efficiency, easy damage of micropipettes and inability to guarantee the accuracy of detection results when using a scanning electron microscope to detect micropipettes in the prior art.

[0005] In order to achieve the above-mentioned purpose, the clamping device provided by the embodiments of the present application comprises two clamping blocks and a pressing assembly. Each of the two clamping blocks is provided with a clamping surface, and the clamping surfaces of the two clamping blocks are oppositely arranged. At least one clamping block is provided with the pressing assembly. Each clamping surface is provided with at least one clamping part, and the number of clamping parts on the two clamping surfaces is consistent and one-to-one corresponding. The corresponding two clamping parts are used to combine and fix the micropipette. After the micropipette is placed between the two corresponding clamping parts, the clamping part of the clamping block slides along the clamping direction towards the corresponding clamping part of the other clamping block until the micropipette is clamped.

[0006] Optionally, the clamping part is configured as a clamping groove formed on the clamping surface.

[0007] Further, the two clamping grooves correspondingly form a fixed hole, which is a through hole with a rhombic cross section when the micropipette is not placed inside.

[0008] In one embodiment of the present application, the pressing assembly of the clamping device comprises a guide extending along the clamping direction, and the clamping block is provided with a guide part, and the clamping block slides along the guide through the guide part.

[0009] Further, the pressing assembly further comprises an elastic element, which is sleeved on the guide and connected with the guide part of the clamping block, so as to produce elastic deformation in the clamping direction when the clamping block slides along the guide, and provide a holding force for clamping the micropipette.

[0010] The second aspect of the present application provides a scanning electron microscope sample observation platform, comprising a base and at least one clamping device as described above, and the base is provided with at least two fixed ridges, and each clamping device is connected between two fixed ridges.

[0011] Further, the top surface of the base is provided with three parallel fixed ridges, which are divided into a central ridge and two side ridges respectively located on both sides of the central ridge, and at least one clamping device is arranged between each side ridge and the central ridge, and the clamping direction of each clamping device is perpendicular to the central ridge.

[0012] On the other hand, the two clamping blocks of the clamping device are divided into a fixed block and a movable block, the side of the fixed block away from the clamping surface is fixedly installed on the side ridge, and the movable block is provided with the pressing assembly, and the pressing assembly is connected between the central ridge and the movable block.

[0013] And / or, each side ridge, the central ridge and the clamping device between the side ridge and the central ridge form a sample observation area, and two sample observation areas are arranged in axial symmetry about the central ridge.

[0014] On the other hand, the side of the movable block away from the clamping surface is provided with a knob part.

[0015] And / or, the base is provided with a through hole for the micropipette to be clamped to pass through.

[0016] And / or, the bottom surface of the base is provided with two fixed rods, and the two fixed rods extend in a direction perpendicular to the bottom surface.

[0017] The third aspect of the present application provides a scanning electron microscope system, comprising the scanning electron microscope sample observation platform as described above.

[0018] One of the above technical solutions has the following advantages or beneficial effects: the clamping device can be used to stably fix at least one micropipette by arranging at least one clamping part on each of the two clamping blocks, thereby effectively improving the detection efficiency; during the use of the scanning electron microscope sample observation table, the micropipette does not need to be subjected to additional processing such as cutting, thereby avoiding damage to the micropipette and ensuring non-destructive detection of the micropipette sample; meanwhile, the at least one clamping block is provided with a pressing assembly, so that the micropipette can maintain a vertical state after being placed between the two corresponding clamping parts, thereby improving the accuracy of the detection result.

[0019] Other advantages of the present application and technical effects of the preferred embodiments will be further described in the specific embodiments below. BRIEF DESCRIPTION OF DRAWINGS

[0020] The accompanying drawings are included to provide a further understanding of the embodiments of the present application, and constitute a part of the specification, and are used together with the following specific embodiments to explain the embodiments of the present application, but do not constitute a limitation on the embodiments of the present application. In the drawings:

[0021] Figure 1 is an isometric view of the scanning electron microscope sample observation table provided by the embodiments of the present application;

[0022] Figure 2 is a front view of the scanning electron microscope sample observation table provided by the embodiments of the present application;

[0023] Figure 3 is a top view of the scanning electron microscope sample observation table provided by the embodiments of the present application;

[0024] Figure 4 is a bottom view of the scanning electron microscope sample observation table provided by the embodiments of the present application;

[0025] Figure 5 is a plan view of the moving block provided by the embodiments of the present application;

[0026] Figure 6 is a perspective view of the scanning electron microscope sample observation table provided by another embodiment of the present application;

[0027] Figure 7 is a perspective view of the scanning electron microscope sample observation table provided by another embodiment of the present application;

[0028] Figure 8 is a detection result diagram of the scanning electron microscope sample observation table provided by another embodiment of the present application.

[0029] BRIEF DESCRIPTION OF DRAWINGS

[0030] 1: clamping block 2: pressing assembly

[0031] 21: guide member 22: elastic element

[0032] 3: clamping portion 4: fixing hole

[0033] 5: guide portion 6: fixing ridge

[0034] 61: central ridge 62: side ridge

[0035] 7: actuating portion 8: through hole

[0036] 9: fixing rod 10: base

[0037] 11: clamping direction DETAILED DESCRIPTION

[0038] Embodiments of the present application are described in detail below with reference to the attached drawings, which show by way of example, embodiments in which the same or similar elements or elements having the same or similar functions are denoted by the same or similar reference numerals throughout the drawings. The embodiments described below with reference to the drawings are exemplary and are intended to explain the present application, and are not to be understood as limiting the present application.

[0039] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are used only to facilitate the description of the present application and simplify the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0040] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above-mentioned terms in the present application can be understood according to the specific circumstances.

[0041] In addition, in the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0042] In one embodiment of the present application, please refer to Figure 1 and Figure 2The application discloses a clamping device, which comprises two clamping blocks 1 and a pressing assembly 2. Each of the two clamping blocks 1 is provided with a clamping surface, and the clamping surfaces of the two clamping blocks 1 are oppositely arranged. At least one clamping part 3 is arranged on each clamping surface, the number of the clamping parts 3 on the two clamping surfaces is consistent and one-to-one corresponding, and the corresponding two clamping parts 3 are used for combined fixing of a micro burette. The pressing assembly 2 is arranged on at least one clamping block 1, so that after the micro burette is placed between the two corresponding clamping parts 3, the clamping part 3 of the clamping block 1 slides along a clamping direction 11 towards the corresponding clamping part 3 of the other clamping block 1 until the micro burette is clamped. Specifically, the two clamping blocks 1 in the clamping device can be arranged as movable blocks which are movable along the clamping direction 11, or one movable block and one fixed block which are movable and fixed along the clamping direction 11. Correspondingly, the movable block is provided with the pressing assembly 2, so that the clamping device does not need additional pretreatment operation or accessories during sample detection, and only needs to turn the clamping block 1 to enable the clamping part 3 to be opened along the clamping direction 11 to place the micro burette, and the top end aperture of the micro burette can be determined from top to bottom, which can effectively avoid damage of the micro burette caused by operation failure and ensure that the micro burette can be placed in an electron microscope for detection without damage.

[0043] Further, as shown in Figure 1 , the clamping part 3 is configured as a clamping groove formed on the clamping surface. It should be noted that the clamping part 3 is used for clamping and fixing the micro burette, and the shape structure of the clamping part 3 is not limited to this, and can also be realized by other common anti-skid fixing structures, such as anti-skid coating, mechanical clamp structure and the like, which are not limited here.

[0044] Specifically, please refer to Figure 2 and Figure 4 , the corresponding two clamping grooves are combined to form a fixed hole 4, and the fixed hole 4 is a through hole with a rhombic cross section shape when there is no micro burette inside. The through hole is used for fixing the micro burette. Optionally, the side length of the fixed hole 4 is 0.8 mm, and the inner diameter of the fixed hole 4 is slightly smaller than the outer diameter of the micro burette, so that the fixed hole 4 can clamp the micro burette and at the same time can keep the micro burette vertical. It should be understood that the cross section shape of the through hole can be rhombic, or circular or other shapes, and of course can be changed according to different specifications of the micro burette or the hole spacing size of the scanning electron microscope sample table, which is not limited here.

[0045] In one embodiment, as shown in Figure 2 , the pressing assembly 2 comprises a guide 21 extending along the clamping direction 11, and the clamping block 1 is provided with a guide part 5, and the clamping block 1 slides along the guide 21 through the guide part 5. As further optimization, Figure 2 and Figure 5It can be seen that the pressing assembly 2 further comprises an elastic element 22, which is sleeved on the guide 21 and connected with the guide portion 5 of the clamping block 1, so as to be elastically deformed in the clamping direction 11 when the clamping block 1 slides along the guide 21, and provide a holding force for clamping the micropipette. Alternatively, in the embodiment, the guide portion 5 can be a portion with a circular through hole, the guide 21 can be a rod-shaped guide rail with a circular cross-sectional shape to pass through the circular through hole, and the elastic element 22 is connected to the circumferential inner wall of the circular through hole; further, the circular through hole can be provided as a stepped hole structure, and the elastic element 22 can be connected to the annular stepped surface, wherein the elastic element 22 can be movably abutted on the stepped surface, or can be fixedly connected to the stepped surface; the elastic element 22 can be selected as a spring structure, which can be set in a slightly compressed state when the spring is in a position, so as to abut against the clamping block 1. Of course, the guide 21 can also be a rod-shaped guide rail with a square cross-sectional shape or a linear strip-shaped sliding groove, which is not limited here, and the guide portion 5 can also be a portion with a through hole with other shapes of cross-sectional shape, as long as the guide portion 5 can smoothly slide on the guide 21, and the specific changes can be made according to the actual situation, which is not limited here. Figure 2

[0046] Further, as shown in Figure 1 , as a specific embodiment of the scanning electron microscope sample observation table provided in the present application, the top surface of the base 10 is provided with three parallel fixed ribs 6, which are divided into a central rib 61 and two side ribs 62 located on both sides of the central rib 61; at least one clamping device is arranged between each side rib 62 and the central rib 61, and the clamping direction 11 of each clamping device is perpendicular to the central rib 61. This embodiment can make full use of the space of the base 10 by dividing the area by the central rib 61, so that the central rib 61 divides the base 10 into left and right parts, and a plurality of micropipettes can be detected at one time, greatly improving the detection efficiency.

[0047] From Figure 3 , it can be seen that as a further optimization, the two clamping blocks 1 of the clamping device are divided into a fixed block and a movable block, the fixed block is fixedly installed on the side rib 62 away from the clamping surface thereof, and the movable block is provided with a pressing assembly 2 connected between the central rib 61 and the movable block; wherein the fixed block is connected with the base 10 as a whole after being fixed, and the movable block can be flexibly opened through the pressing assembly 2, so that more clamping devices can be installed on the base 10 in this embodiment, and the operation is convenient, time-saving and labor-saving, and the detection efficiency is improved.

[0048] In another embodiment of the present application, please refer to Figure 3 ​Each side ridge 62, the central ridge 61 and the clamping device between the side ridge 62 and the central ridge 61 form a sample observation area, and two sample observation areas are arranged in axial symmetry with respect to the central ridge 61, so that the same guide can be connected to the moving blocks in the two observation areas through the central ridge, facilitating processing and installation.

[0049] Further, as shown in Figure 3 , the central ridge 61 divides the base 10 into left and right sample observation areas, each observation area has six clamping devices, each clamping device has a clamping part 3, the length of the base 10 can be between about 0.09m and 0.1m, the width can be between about 0.06m and 0.07m, the distance between two adjacent clamping devices in one observation area can be between about 0.01m and 0.02m, and the distance between two clamping devices in the clamping direction 11 is about 0.04m.

[0050] In one embodiment, referring to Figure 2 , the side of the moving block away from the clamping surface is provided with a pushing part 7; specifically, the pushing part 7 can be a protruding structure on the side of the clamping block connected with the pressing assembly, so as to enhance the operation feeling and facilitate the sliding of the clamping block to open the fixed hole for placing the micropipette; it should be noted that the pushing part 7 is not limited to this, and other common pushing mechanisms can also be used, such as a rotary push switch, which can open the fixed hole by rotating the switch knob, and can be rotated to clamp after the micropipette is placed, which is not limited herein.

[0051] In one embodiment, as shown in Figure 4 and Figure 5 , the base 10 is provided with a through hole 8 for the micropipette to be clamped to pass through; optionally, the diameter of the through hole 8 is 2mm, the through hole 8 penetrates the base 10, so that the processing of the through hole 8 is more convenient, and different specifications of micropipettes can be adapted, and the length of the micropipette does not need to be cut additionally to meet the detection needs during the detection process.

[0052] In one embodiment, as shown in Figure 2 , the bottom surface of the base 10 is provided with two fixing rods 9, and the two fixing rods 9 extend in a direction perpendicular to the bottom surface. The two fixing rods 9 can be inserted into the scanning electron microscope instrument to play a fixing role, and the two insertion rods can prevent the observation table from rotating or moving, and play a protection role for the micropipette penetrating therein. It should be noted that the fixing structure of the base 10 is not limited to this, and a plurality of fixing rods 9 can be provided, or other fixing structures such as fixing screws, fixing buckles, etc. can be used, which are not limited herein.

[0053] In one embodiment, referring to Figure 6The scanning electron microscope sample observation platform provided by the application comprises a base 10 and at least one clamping device, and the base 10 is provided with at least two fixed protrusions 6, and each clamping device is connected between the two fixed protrusions 6. Specifically, at least one clamping device can be connected between the two fixed protrusions 6. It should be pointed out that if the scanning electron microscope sample observation platform is provided with two fixed protrusions 6 and one clamping device, a plurality of clamping parts 3 can be arranged on each clamping block 1 of the clamping device, and a plurality of compression assemblies 2 can be connected on the same clamping block 1, and the specific number can be set according to the actual situation. In the use process, only the clamping block 1 needs to be turned to open the fixing hole 4 on the clamping device, and the two clamping blocks 1 slide along the clamping direction 11 to compress the compression assembly 2, so that a plurality of micropipettes can be placed at one time, the operation time is effectively saved, and the detection efficiency is improved.

[0054] In another embodiment of the application, referring to Figure 7 The scanning electron microscope sample observation platform can also have two fixed protrusions and a plurality of clamping devices, one clamping part 3 can be arranged on each clamping block 1 of the clamping device, and one compression assembly 2 can be connected on each clamping block 1, in the use process, only the clamping block 1 needs to be turned to open the fixing hole 4 on the clamping device, and the two clamping blocks 1 slide along the clamping direction 11 to compress the compression assembly 2, so that the micropipette can be placed in a more flexible way. Alternatively, the size of the scanning electron microscope sample observation platform provided by the application is customized according to the electron microscope stage, and the corresponding hole spacing of the scanning electron microscope sample observation platform for placing the micropipette is designed by measuring the hole spacing on the electron microscope stage, therefore, the fixed protrusions 6, the clamping device and the compression assembly 2 in the above embodiment can be selected and combined according to the actual needs, which is not limited here.

[0055] In another embodiment of the application, as Figure 8 The detection result of the scanning electron microscope sample observation platform provided by the application is shown in the figure, and the micropipette sample needs to be placed vertically in the fixing hole 4 on the clamping device during testing, and the top end hole diameter D of the micropipette is measured from top to bottom, in a group of micropipette measurement experiments, the detection result D can accurately reach the micron level.

[0056] For further optimization, the scanning electron microscope system provided by the application comprises the scanning electron microscope sample observation platform and the scanning electron microscope stage, and in a specific embodiment, the scanning electron microscope sample observation platform can be fixed on the scanning electron microscope stage through two aforementioned fixed rods.

[0057] It should be noted that, although the numerical ranges and parameters setting forth the broad scope of the application are approximations, the numerical values set forth in the specific examples are reported as precisely as possible. Any numerical value, however, inherently contains certain errors necessarily resulting from the standard deviation found in their respective testing measurements, from the acceptance of mean values, and from the use of logical rounding.

[0058] Obviously, the above-described embodiments of the present application are only examples for clearly illustrating the present application, and are not intended to limit the implementation of the present application. Based on the above description, other different forms of changes or variations can also be made by those skilled in the art. Here, it is not necessary and also impossible to enumerate all the implementations. Any modification, equivalent replacement and improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the claims of the present application.

Claims

1. A clamping device, characterized in that The clamping device comprises two clamping blocks, each of which is provided with a clamping surface, and a pressing assembly. Each clamping surface is provided with at least one clamping part, and the number of clamping parts on the two clamping surfaces is consistent and one-to-one corresponding. The corresponding two clamping parts are used to combine and fix a micropipette. The pressing assembly is arranged on at least one clamping block to enable the clamping part of the clamping block to slide along the clamping direction towards the corresponding clamping part of the other clamping block until the micropipette is clamped.

2. The clamping device of claim 1, wherein The clamping part is a clamping groove formed on the clamping surface.

3. The clamping device of claim 2, wherein The corresponding two clamping grooves combine to form a fixing hole, which is a through hole with a rhombic cross-sectional shape when no micropipette is placed inside.

4. The clamping device according to any one of claims 1 to 3, characterized in that The pressing assembly comprises a guide member extending along the clamping direction, and the clamping block is provided with a guide part to slide along the guide member.

5. The clamping device of claim 4, wherein The pressing assembly further comprises an elastic element, which is sleeved on the guide member and connected with the guide part of the clamping block to generate elastic deformation in the clamping direction when the clamping block slides along the guide member, and provide a holding force for clamping the micropipette.

6. A scanning electron microscope sample stage, characterized by, The scanning electron microscope sample observation table comprises a base and at least one clamping device according to any one of claims 1 to 5. The base is provided with at least two fixed ribs, and each clamping device is connected between two fixed ribs.

7. A scanning electron microscope sample stage according to claim 6, wherein, The top surface of the base is provided with three fixed ribs parallel to each other, which are divided into a central rib and two side edge ribs located on both sides of the central rib. At least one clamping device is arranged between each side edge rib and the central rib, and the clamping direction of each clamping device is perpendicular to the central rib.

8. A scanning electron microscope sample stage according to claim 7, characterised in that, The two clamping blocks of the clamping device are divided into a fixed block and a movable block. The side of the fixed block away from the clamping surface is fixedly installed on the side edge rib, and the movable block is provided with the pressing assembly connected between the central rib and the movable block. Each side edge rib, the central rib, and the clamping device between the side edge rib and the central rib form a sample observation area, and two sample observation areas are arranged in axial symmetry about the central rib.

9. A scanning electron microscope sample stage according to claim 8, wherein, The side of the movable block away from the clamping surface is provided with a pushing part. The base is provided with a through hole for the micropipette to pass through. The bottom surface of the base is provided with two fixed rods extending in a direction perpendicular to the bottom surface.

10. A scanning electron microscope system, characterized by, The scanning electron microscope sample observation table comprises a base and at least one clamping device according to any one of claims 1 to 5. The base is provided with at least two fixed ribs, and each clamping device is connected between two fixed ribs.

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