Spacing adjusting tool
By designing a multi-segment spacing adjustment tool, the problem of inconvenient spacing adjustment between the motor and coupling in the existing technology is solved, realizing fast and accurate spacing adjustment, improving motor replacement efficiency and equipment stability.
Patent Information
- Application Number
- CN202422724557.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-08
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-11-08
AI Technical Summary
Existing technologies are inconvenient to operate and time-consuming when adjusting the gap between the motor and the coupling, which can easily lead to gap deviation, equipment damage and transmission failure. In particular, when replacing the vertical motor of the temperature stabilization unit of the ASML lithography machine, there is a lack of effective tool support.
Design a gap adjustment tool, including a first section, a second section and a third section, with the thickness of each section increasing sequentially, for precisely adjusting the gap between the motor and the coupling, and for accommodating the motor shaft through a receiving groove to ensure that the gap is within a preset range. The tool is made of magnetic material to prevent it from falling.
It enables fast and precise spacing adjustment, reduces operation time, improves motor replacement efficiency, and ensures the stability and safety of the equipment.
Smart Images
Figure CN223527954U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor manufacturing, especially to a distance adjusting tool. BACKGROUND
[0002] When the existing equipment replaces the motor, the distance between the motor and the shaft coupling needs to be adjusted after the motor is fixed, so that the distance between the motor and the shaft coupling reaches the preset range requirement, avoiding the damage or transmission failure of the shaft coupling or the motor caused by the excessively large or small distance.
[0003] At present, when replacing the vertical motor of the ASML photoetching machine temperature stabilizing unit (TSU), the distance between the motor and the shaft coupling needs to reach the requirement of 1.5±0.1 mm. Generally, a 1.5 mm thick and thin gauge is used to assist in adjusting the distance, and then a 1+0.4 mm and a 1+0.6 mm thick and thin gauge are used to confirm that the distance meets the requirement. When adjusting the distance, the thick and thin gauge can only be inserted between the motor and the shaft coupling from below, and the thick and thin gauge is easy to fall off when locking the shaft coupling fixing screw, causing the distance between the shaft coupling and the motor to change. Therefore, when actually adjusting the distance, the operator usually adjusts the distance by feeling and locks the shaft coupling, and then uses the thick and thin gauge to confirm whether the distance is compliant, resulting in uncontrollable operation time of the entire distance adjustment, which may take more than half an hour sometimes. Moreover, because the general thick and thin gauge does not have a thickness of 1.4 mm and 1.6 mm, two thick and thin gauges of 1 mm and 0.4 mm or 1 mm and 0.6 mm need to be glued together to confirm the distance, and the thickness of the glued thick and thin gauge is generally larger, which may cause the distance to exceed the specification, and further cause the shaft coupling or the motor to be more easily damaged.
[0004] Therefore, for those skilled in the art, how to design a distance adjusting tool that is convenient to operate and can shorten the operation time is a technical problem that needs to be solved at present. UTILITY MODEL CONTENTS
[0005] To solve the technical problems in the prior art, the purpose of the utility model is to provide a distance adjusting tool, which is simple in structure and convenient to operate, and an operator can complete the distance adjustment between the shaft coupling and the motor by using the tool, and the distance between the shaft coupling and the motor meets the requirement, and the tool can also greatly reduce the adjustment and machine repair time and improve the motor replacement efficiency.
[0006] To achieve the above purpose, the utility model provides a distance adjusting tool for adjusting the distance between a motor and a shaft coupling, which comprises a first section, a second section and a third section connected in sequence in a first direction.
[0007] The size of the first section in a second direction is a first preset value, the size of the second section in the second direction is a second preset value, and the size of the third section in the second direction is a third preset value, and the first preset value, the second preset value and the third preset value increase in turn; the first direction is the length direction of the pitch adjusting tool, and the second direction is the thickness direction of the pitch adjusting tool.
[0008] Optionally, the pitch adjusting tool is provided with a containing groove on the first section and / or the second section, and the containing groove is used for containing a motor shaft, so that the pitch adjusting tool can be inserted into both sides of the motor shaft.
[0009] Optionally, the containing groove is arranged on the outer wall of the first section parallel to the third direction, and the third direction is the width direction of the pitch adjusting tool.
[0010] Optionally, the containing groove can pass through the first section to reach the second section, and at least part of the motor shaft can be arranged in the part of the containing groove located in the first section and the part of the containing groove located in the second section, respectively.
[0011] Optionally, the pitch adjusting tool comprises two insertion parts separated by the containing groove and a connecting part connecting the two insertion parts, and the two insertion parts and the connecting part enclose the containing groove.
[0012] Optionally, the slot width of the containing groove matches the diameter of the motor shaft.
[0013] Optionally, the pitch adjusting tool is symmetrically arranged in the first direction and the third direction.
[0014] Optionally, the shape of the pitch adjusting tool is H-shaped.
[0015] Optionally, the size of the insertion part in the third direction is 0.8cm-1.2cm,
[0016] and / or, the distance between the two insertion parts in the third direction is 0.8cm-1.2cm,
[0017] and / or, the size of the connecting part in the first direction is 0.8cm-1.2cm.
[0018] Optionally, the pitch adjusting tool is made of a magnetic material.
[0019] The distance adjusting tool is provided with the structure of the first preset value, the second preset value and the third preset value thickness, the distance adjusting tool can be used to adjust the distance between the motor and the shaft coupling during replacement of the vertical motor of the photoetching machine, and the distance between the shaft coupling and the motor can be ensured to be within the preset range. The distance adjusting tool is simple in structure, convenient to carry and operate, can realize rapid adjustment, is high in adjustment efficiency, can greatly reduce adjustment and machine repair time and improve motor replacement efficiency. BRIEF DESCRIPTION OF DRAWINGS
[0020] Fig. 1 It is a front view structural schematic view of the distance adjusting tool in the preferred embodiment of the utility model;
[0021] Fig. 2 It is a side view structural schematic view of the distance adjusting tool in the preferred embodiment of the utility model;
[0022] Fig. 3 It is a use scene schematic view of the distance adjusting tool in the preferred embodiment of the utility model.
[0023] In the drawings, the reference signs are explained as follows:
[0024] Distance adjusting tool 1, first section 11, second section 12, third section 13, accommodating groove 14, insertion part 15, connecting part 16;
[0025] Motor 2, motor shaft 21, shaft coupling 3. DETAILED DESCRIPTION
[0026] The utility model will be further explained in detail in combination with the drawings and specific embodiments. According to the following description, the advantages and characteristics of the utility model will be more clear. It should be noted that the drawings are all very simplified and all use non-precise proportions, only to facilitate, clearly assist the purpose of explaining the embodiments of the utility model.
[0027] In the present specification, the terms "first", "second", etc. are only used for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second", etc. can explicitly or implicitly include one or more features.
[0028] In the following description, the distance adjusting tool of the utility model is easy to accurately, conveniently and quickly adjust the distance between the motor and the shaft coupling during replacement of the vertical motor of the photoetching machine temperature stabilizing unit, but the person skilled in the art should know that the distance adjusting tool can also be preferably applied to other devices that need to adjust the distance between the motor and the shaft coupling.
[0029] As Figs. 1-3As shown, the utility model provides a kind of interval adjusting tool 1, for adjusting the interval between motor 2 and shaft coupling 3.Interval adjusting tool 1 is sheet, including first section 11, second section 12 and third section 13 sequentially connected in first direction a, and first direction a is the length direction of interval adjusting tool 1.
[0030] Further, the size z1 (i.e., thickness) of the first section 11 in the second direction b is a first preset value, the size z2 (i.e., thickness) of the second section 12 in the second direction b is a second preset value, and the size (i.e., thickness) z3 of the third section 13 in the second direction b is a third preset value. The first preset value, the second preset value and the third preset value increase in turn. The interval adjusting tool 1 is sequentially provided with the first section 11 having the first preset value, the second section 12 having the second preset value and the third section 13 having the third preset value in the length direction (i.e., the first direction a) of itself.
[0031] By setting the interval adjusting tool 1 to have the first preset value, the second preset value and the third preset value thickness at the same time, the interval between the motor 2 and the shaft coupling 3 can be adjusted only using the interval adjusting tool 1 during the replacement of the vertical motor 2 of the lithography machine, and the interval between the shaft coupling 3 and the motor 2 can be ensured to be within the preset range. The interval adjusting tool 1 has a simple structure, is convenient to carry and operate, can realize rapid adjustment, has high adjustment efficiency, and can greatly reduce the adjustment and repair time. Generally, an operator can complete the interval adjustment in about 5 minutes, thereby improving the replacement efficiency of the motor 2.
[0032] Specifically, when replacing the vertical motor of the ASML lithography machine temperature stabilization unit (TSU), the first preset value can be set to 1.4 mm, the second preset value can be set to 1.5 mm, and the third preset value can be set to 1.6 mm. At this time, the preset range of the interval between the shaft coupling 3 and the motor 2 is 1.5 ± 0.1 mm.
[0033] More specifically, when using the interval adjusting tool 1 to adjust the interval between the motor 2 and the shaft coupling 3, the second section 12 in the interval adjusting tool 1 can be inserted between the motor 2 and the shaft coupling 3 first, so as to fix the distance between the motor 2 and the shaft coupling 3 to 1.5 mm. Then, the first section 11 and the third section 13 in the interval adjusting tool 1 are respectively tried to be inserted between the motor 2 and the shaft coupling 3. If the first section 11 in the interval adjusting tool 1 can be inserted between the motor 2 and the shaft coupling 3, while the third section 13 in the interval adjusting tool 1 cannot be inserted between the motor 2 and the shaft coupling 3, it means that the interval between the motor 2 and the shaft coupling 3 is within the preset range of 1.5 ± 0.1 mm. At this time, the distance between the motor 2 and the shaft coupling 3 meets the installation requirements.
[0034] In some embodiments, the spacing adjustment tool 1 is provided with the accommodation groove 14 on the first section 11. In other embodiments, the spacing adjustment tool 1 is provided with the accommodation groove 14 on the second section 12. In yet other embodiments, the spacing adjustment tool 1 is provided with the accommodation groove 14 on both the first section 11 and the second section 12.
[0035] Further, the accommodation groove 14 is used to accommodate the motor shaft 21, so that the spacing adjustment tool 1 can be inserted into both sides of the motor shaft 21. Specifically, the operator can place the motor shaft 21 in the accommodation groove 14 during use, and the two side portions of the accommodation groove 14 in the spacing adjustment tool 1 can be inserted between the motor 2 and the coupling 3 and placed in the gap on both sides of the motor shaft 21, so as to ensure that the spacing on both sides of the motor 2 and the coupling 3 is substantially equal, thereby ensuring smooth transmission between the motor 2 and the coupling 3.
[0036] Referring to Fig. 1 and Fig. 2 , the accommodation groove 14 is provided on the outer wall of the first section 11 parallel to the third direction c, i.e. the accommodation groove 14 is provided at the end of the first section 11. It should be understood that the third direction c is the width direction of the spacing adjustment tool 1.
[0037] Preferably, the accommodation groove 14 can pass through the first section 11 to the second section 12. That is, the accommodation groove 14 includes a portion located in the first section 11 and a portion located in the second section 12. At least part of the motor shaft 21 can be placed in the portion of the accommodation groove 14 located in the second section 12, thereby adjusting the spacing between the motor 2 and the coupling 3. At least part of the motor shaft 21 can be placed in the portion of the accommodation groove 14 located in the first section 11, so as to ensure that the spacing between the motor 2 and the coupling 3 is not less than a first predetermined value.
[0038] In another embodiment, the third section 13 of the spacing adjustment tool 1 is also provided with the accommodation groove 14 on the outer wall parallel to the third direction c, i.e. the spacing adjustment tool 1 is provided with the accommodation groove 14 at both ends along the length direction of the spacing adjustment tool 1.
[0039] Continuing to refer to Fig. 1 and Fig. 2 , in a preferred scheme, the portion of the accommodation groove 14 located in the first section 11 and the portion of the accommodation groove 14 located in the second section 12 are substantially equal, so that the spacing adjustment tool 1 is compact in structure, facilitating carrying and use.
[0040] As a more preferred embodiment, the groove width of the accommodation groove 14 matches the diameter of the motor shaft 21. That is, the groove width of the accommodation groove 14 is slightly larger than the outer diameter of the motor shaft 21, preventing large displacement of the spacing adjustment tool 1 when inserted between the motor 2 and the coupling 3.
[0041] In a preferred embodiment, the spacing adjustment tool 1 is symmetrically arranged in the first direction a and the third direction c, i.e. symmetrically arranged in the length direction and the width direction of the spacing adjustment tool 1, so as to facilitate the use of the spacing adjustment tool 1. In a specific example, the spacing adjustment tool 1 is in the shape of H. At this time, the spacing adjustment tool 1 is symmetrically arranged in the first direction a and the third direction c, and the spacing adjustment tool 1 is provided with the receiving groove 14 at both ends in the length direction. Meanwhile, the receiving groove 14 is symmetrically arranged in the first direction a and the third direction c, so as to facilitate the symmetric insertion of the spacing adjustment tool 1 into the gap between the motor 2 and the coupling 3.
[0042] With reference to the foregoing Fig. 1 and Fig. 2 , the spacing adjustment tool 1 comprises two insertion portions 15 separated by the receiving groove 14, and a connecting portion 16 connecting the two insertion portions 15, and the two insertion portions 15 and the connecting portion 16 enclose the receiving groove 14. In this way, when the receiving groove 14 passes through the first section 11 to the second section 12, part of the insertion portion 15 is located in the first section 11 and the other part is located in the second section 12.
[0043] Now, the H-shaped spacing adjustment tool 1 is taken as an example for description.
[0044] In actual use, first, the part of the spacing adjustment tool 1 in which the insertion portion 15 is located in the second section 12 is inserted into both sides of the motor shaft 21, at this time, at least part of the motor shaft 21 is placed in the part of the receiving groove 14 located in the second section 12, and then the spacing between the motor 2 and the coupling 3 is set to be around the second preset value. Then, the part of the spacing adjustment tool 1 in which the insertion portion 15 is located in the first section 11 and the part of the spacing adjustment tool 1 in which the insertion portion 15 is located in the third section 13 are sequentially inserted between the motor 2 and the coupling 3.
[0045] If the part of the spacing adjustment tool 1 in which the insertion portion 15 is located in the first section 11 can be inserted between the motor 2 and the coupling 3, and the part of the spacing adjustment tool 1 in which the insertion portion 15 is located in the third section 13 cannot be inserted between the motor 2 and the coupling 3, it indicates that the spacing between the motor 2 and the coupling 3 is within the preset range (for example, 1.5±0.1mm), at this time, the spacing between the motor 2 and the coupling 3 meets the requirements.
[0046] If the part of the spacing adjustment tool 1 in which the insertion portion 15 is located in the first section 11 cannot be inserted between the motor 2 and the coupling 3, it indicates that the spacing between the motor 2 and the coupling 3 is less than the first preset value. If the part of the spacing adjustment tool 1 in which the insertion portion 15 is located in the third section 13 can be inserted between the motor 2 and the coupling 3, it indicates that the spacing between the motor 2 and the coupling 3 is not less than the third preset value.
[0047] The above two cases show that the distance between the motor 2 and the coupling 3 does not meet the requirements, at this time the part of the insertion part 15 in the distance adjusting tool 1 located in the second section 12 needs to be reinserted between the motor 2 and the coupling 3 to readjust the distance between the motor 2 and the coupling 3.
[0048] Referring to Fig. 1 As shown in the optional solution, the size x1 of the insertion part 15 in the third direction c is preferably 0.8cm-1.2cm, the distance x2 of the two insertion parts 15 in the third direction c is preferably 0.8cm-1.2cm, and the size y1 of the connecting part 16 in the first direction a is preferably 0.8cm-1.2cm, so that the distance adjusting tool 1 can be conveniently carried while meeting the distance adjustment requirements between the motor 2 and the coupling 3.
[0049] Since the distance adjusting tool 1 needs to be inserted between the motor 2 and the coupling 3 from below, in order to avoid the distance adjusting tool 1 from falling during the adjustment of the distance between the motor 2 and the coupling 3, the distance adjusting tool 1 is preferably made of a magnetic material, and the distance adjusting tool 1 made of a magnetic material can be adsorbed on the coupling 3 or the motor 2, thereby preventing the distance adjusting tool 1 from falling during use.
[0050] In order to firmly adsorb the distance adjusting tool 1 on the coupling 3 or the motor 2, the material for preparing the distance adjusting tool 1 includes but is not limited to ferrite or iron-cobalt-nickel alloy.
[0051] In summary, the distance adjusting tool 1 is provided with the structure of the first preset value, the second preset value and the third preset value thickness at the same time, so that the distance adjustment between the motor 2 and the coupling 3 can be completed only by using the distance adjusting tool during the replacement of the vertical motor 2 of the photoetching machine, and the distance between the coupling 3 and the motor 2 can be ensured to be within the preset range. The distance adjusting tool has a simple structure, is convenient to carry and operate, can realize rapid adjustment, has high adjustment efficiency, can greatly reduce the adjustment and machine repair time, and improves the replacement efficiency of the motor 2.
[0052] The above description is only a description of the preferred embodiments of the utility model, and does not limit the scope of the utility model in any way. Any modification or modification of the utility model made by a person skilled in the art according to the above disclosure is within the protection scope of the utility model.
Claims
1. A pitch adjusting tool for adjusting the pitch between an electric motor and a coupling, characterized in that The spacing adjustment tool comprises a first section, a second section and a third section connected in sequence in a first direction; The first section has a first preset value in a second direction, the second section has a second preset value in the second direction, and the third section has a third preset value in the second direction, the first preset value, the second preset value and the third preset value increase in sequence; the first direction is the length direction of the spacing adjustment tool, and the second direction is the thickness direction of the spacing adjustment tool.
2. The spacing adjustment tool of claim 1, wherein, The spacing adjustment tool is provided with an accommodation groove on the first section and / or the second section, and the accommodation groove is used for accommodating a motor shaft, so that the spacing adjustment tool can be inserted on both sides of the motor shaft.
3. The spacing adjustment tool of claim 2, wherein, The accommodation groove is arranged on the outer wall of the first section parallel to a third direction, and the third direction is the width direction of the spacing adjustment tool.
4. The spacing adjustment tool of claim 3, wherein, The accommodation groove can pass through the first section to reach the second section, and at least part of the motor shaft can be arranged in the part of the accommodation groove located in the first section and the part of the accommodation groove located in the second section, respectively.
5. Spacing adjustment tool according to any one of claims 2-4, characterized in that The spacing adjustment tool comprises two insertion parts separated by the accommodation groove and a connecting part connecting the two insertion parts; the two insertion parts and the connecting part enclose the accommodation groove.
6. The spacing adjustment tool of claim 5, wherein, The groove width of the accommodation groove matches the diameter of the motor shaft.
7. The spacing adjustment tool of claim 5, wherein, The spacing adjustment tool is symmetrically arranged in the first direction and the third direction.
8. The spacing adjustment tool of claim 7, wherein, The shape of the spacing adjustment tool is H-shaped.
9. The spacing adjustment tool of claim 7, wherein, The size of the insertion part in the third direction is 0.8cm-1.2cm, And / or, the distance between the two insertion parts in the third direction is 0.8cm-1.2cm, And / or, the size of the connecting part in the first direction is 0.8cm-1.2cm.
10. The spacing adjustment tool of any one of claims 1-4, wherein, The spacing adjustment tool is made of a magnetic material.