Target material assembly and coating equipment

Abstract

The utility model discloses a target material assembly and coating equipment, which comprises a support plate, a first side of the support plate is fixedly provided with a target material, a second side of the support plate is rotatably arranged on one side of a water diversion block, the first side and the second side are two opposite sides on the support plate, and the support plate is of a structure internally provided with a cavity and is communicated with the water diversion block through a connecting pipe; one end of the arc-shaped tooth is fixedly arranged on the second side of the supporting plate; and the magnetic fluid shaft is used for supporting the water diversion block, a bearing table is fixedly arranged on the magnetic fluid shaft, a first driving part is arranged on the bearing table, the periphery of a power output shaft of the first driving part is sleeved with a driving gear, and the driving gear is used for being meshed with the arc-shaped teeth and is driven by the first driving part to drive the arc-shaped teeth to rotate. The first driving part is arranged on the magnetic fluid shaft to drive the driving gear to rotate so as to drive the arc-shaped teeth, the arc-shaped teeth rotate under the meshing effect and drive the supporting plate to rotate, the angle of the target material is adjusted, and the production and experiment requirements are met.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and in particular to a target assembly and coating equipment. Background Technology

[0002] Ion beam sputtering (IBD) coating equipment holds a prominent position in semiconductor coating equipment due to its wide selection of coating materials and the ability to produce dense films. In this process, the film is deposited by a sputtering ion source that fires an ion beam to bombard the surface of a target material, sputtering the target material onto the substrate to form a dense film. The target's angle significantly impacts the coating quality. However, current common IBD coating equipment often suffers from limitations in adjusting the vacuum operating environment. Consequently, the target structures are typically fixed or require simultaneous adjustment of multiple targets, severely restricting process flexibility. Furthermore, during the research and development phase, different target angles need to be adjusted for varying process requirements for comparative analysis. Stopping the machine for each adjustment leads to inefficiency and introduces impurities, negatively affecting film quality.

[0003] Therefore, how to improve the ease of adjustment of the target material and meet the experimental and production needs of different target material setting angles is a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0004] In view of this, the purpose of this utility model is to provide a target assembly and coating equipment to improve the ease of target adjustment and meet the experimental and production needs of different target setting angles.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A target assembly, comprising:

[0007] A support plate, on which a target material is fixedly mounted on a first side and rotatably mounted on one side of a water distribution block on a second side, the first side and the second side being opposite sides of the support plate, the support plate having an internal cavity structure and being connected to the water distribution block through a connecting pipe;

[0008] The transmission part is fixedly disposed on the second side of the support plate;

[0009] A magnetofluid shaft is used to support the water distribution block. A support platform is fixedly installed on the magnetofluid shaft. A first driving part is installed on the support platform. An actuating part is installed on the power output shaft of the first driving part. The actuating part is driven by the first driving part to drive the transmission part to rotate and adjust the angle of the support plate.

[0010] Preferably, in the above-mentioned target assembly, the transmission part is an arc-shaped tooth, and one end of the arc-shaped tooth is fixedly disposed on the second side of the support plate; the actuation part is a drive gear sleeved on the outer periphery of the power output shaft of the first drive part, and the drive gear meshes with the arc-shaped tooth and drives the arc-shaped tooth to rotate under the drive of the first drive part.

[0011] Preferably, in the above-mentioned target assembly, the first driving part is slidably disposed on the support platform, and a telescopic cylinder is also fixedly disposed on the support platform to drive the first driving part to slide to reach or leave a preset position, and when the first driving part reaches the preset position, the driving gear meshes with the arc-shaped tooth.

[0012] Preferably, the above-mentioned target assembly further includes a limiting block, which is fixedly disposed on the rotation path of the arc-shaped tooth. When the support plate rotates to the initial position following the arc-shaped tooth, the second end of the arc-shaped tooth abuts against the limiting block.

[0013] Preferably, the above-mentioned target assembly further includes an elastic element, the two ends of which are respectively fixed to the second side of the support plate and the water distribution block;

[0014] When the first driving part leaves the preset position, the support plate is driven by the elastic force of the elastic element and rotates to the initial position.

[0015] Preferably, in the above-mentioned target material assembly, the support plate is connected to a fixed point on the water distribution block by a connecting pin, and the connecting pin can move along its axial direction to have at least two working states with the fixed point;

[0016] When the connecting pin is in the locked position, it is locked and fixed to the fixing point, and the support plate is locked to the water distribution block; when the connecting pin is in the relaxed position, it is rotatably connected to the fixing point, and the support plate is rotatably connected to the water distribution block.

[0017] Preferably, in the above-mentioned target material assembly, the water distribution block is provided with a plurality of fixed points, and the magnetohydrodynamic shaft is rotatably configured.

[0018] Preferably, in the above-mentioned target assembly, two slide rails are arranged parallel and spaced apart on the support platform and sliding grooves are formed thereon, and sliders are provided on both sides of the first drive unit and are respectively embedded in the sliding grooves on both sides.

[0019] Preferably, in the above-mentioned target material assembly, the limiting block is fixedly disposed on the water dividing block, and a soft pad is fixedly disposed on the side of the limiting block facing the arc-shaped tooth.

[0020] A coating apparatus includes a cavity, a sputtering deposition source, a wafer stage, and a target assembly as described in any of the above embodiments. The cavity is sealed, and both the sputtering deposition source and the wafer stage are disposed within the cavity. The support plate of the target assembly is inclined, and the sputtering deposition source and the wafer stage are symmetrically arranged about the normal of the target placement plane.

[0021] As can be seen from the above technical solution, the target assembly provided by this utility model uses a support plate and a water distribution block for fixing the target material, which are rotatably mounted to enable the support plate and the target material to have an angle adjustment function. Simultaneously, an arc-shaped tooth is fixedly mounted on the second side of the support plate, and a drive gear driven by a first drive unit meshes with the arc-shaped tooth. The drive gear is driven to rotate by the power of the first drive unit, thereby driving the arc-shaped tooth and the support plate to rotate. This structure enables the adjustment of the support plate and the target material through the action of the first drive unit. Furthermore, after the support plate is rotatably mounted on the water distribution block, the components used for angle adjustment only include the support plate... The arc-shaped teeth fixedly installed on the second side of the support plate, as well as the first driving part and driving gear corresponding to the arc-shaped teeth, mean that fewer parts are required for angle adjustment. Moreover, the arc-shaped teeth and the support plate are an integral structure. Therefore, it is relatively simple to improve the angle adjustment structure of a single target assembly. It is also more convenient when multiple adjustable support plates need to be set. For example, each support plate can be equipped with a separate set of arc-shaped teeth, a first driving part, and a driving gear, or each support plate can be driven through the working position to cooperate with a single set of first driving parts and driving gears, so as to meet the angle adjustment of each support plate in the working position, thereby achieving convenient adjustment of the target material. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the target assembly structure provided in an embodiment of the present utility model;

[0024] Figure 2 This is a schematic diagram of the fit between the limiting block and the arc-shaped teeth.

[0025] Figure 3 for Figure 2 Schematic diagram of the peripheral structure of the magnetohydrodynamic shaft;

[0026] Figure 4 for Figure 3 A top-down view;

[0027] Figure 5 for Figure 4 Side view;

[0028] Figure 6 This is a schematic diagram of the coating equipment provided in an embodiment of the present utility model.

[0029] Among them, 10-support plate; 110-arc tooth; 120-connecting pin; 20-target material; 30-connecting pipe; 40-water distribution block; 410-fixing point; 50-magnetic fluid shaft; 510-bearing platform; 5110-slide rail; 520-telescopic cylinder; 60-first driving part; 610-drive gear; 620-slider; 70-limiting block; 80-elastic element; 910-cavity; 920-sputtering deposition source; 930-wafer stage; 940-target material assembly. Detailed Implementation

[0030] The core of this utility model lies in disclosing a target assembly and coating equipment to improve the ease of target adjustment and meet the experimental and production needs of different target setting angles.

[0031] To enable those skilled in the art to better understand the present invention, embodiments of the present invention will be described below with reference to the accompanying drawings. Furthermore, the embodiments shown below do not limit the scope of the invention as described in the claims. Additionally, the complete contents of the configurations shown in the following embodiments are not limited to those necessary for the solution of the invention as described in the claims.

[0032] like Figure 1 and Figure 2 As shown, the target assembly provided in this embodiment of the present invention mainly includes a support plate 10, a target 20, a water distribution block 40, an arc-shaped tooth 110, and a magnetohydrodynamic shaft 50. The support plate 10 serves as a basic load-bearing structure, used to fix and rotate the target 20, allowing for angle adjustment of the target 20 while it is fixed in place. Based on common target assembly structures, in some embodiments of this invention, the support plate 10 is rotatably mounted on the water distribution block 40. It should be noted that the water distribution block 40 has a water flow channel inside, while the support plate 10 has an internal cavity or flow channel. The cavity or flow channel inside the support plate 10 communicates with the water distribution block 40 to form a circulation path. The water distribution block 40 receives cooling water and distributes it into the support plate 10, thereby timely cooling of the target 20 fixed on the support plate 10 during the coating process and preventing damage to the various components of the target assembly due to excessive temperature.

[0033] It should be noted that a connecting structure is provided on the first side of the support plate 10 for fixing the target material 20, while the second side of the support plate 10 is rotatably connected to the water distribution block 40. The first side and the second side are opposite sides of the support plate 10. Here, opposite sides refer to the first side and the second side being two parallel planes, and located at the farthest sides of the support plate 10 in a single direction, preferably a direction perpendicular to the support plate 10. The opposite arrangement of the first side and the second side can effectively protect the rotating structure of the second side through the target material 20 on the first side. Furthermore, the parallel arrangement of the first side and the second side allows the first side to rotate at the same angle while the angle of the second side is adjusted, thereby improving the accuracy of the angle adjustment of the target material 20.

[0034] Based on the above embodiments, a transmission part is also fixedly provided on the second side of the support plate 10 as an extension structure of the support plate 10, so that external power can drive the transmission part to rotate the support plate 10 to adjust the angle of the target material 20. It should be noted that, in order to improve the driving stability, in some embodiments of this utility model, the transmission part is preferably an arc-shaped tooth 110. The arc-shaped tooth 110 specifically includes an arc-shaped main body structure, and one end of the arc-shaped main body structure is fixedly provided on the second side of the support plate 10. At the same time, teeth are provided on the surface of the arc-shaped main body structure facing away from the second side of the support plate 10.

[0035] The magnetofluid shaft 50 supports the water distribution block 40. This is a commonly used support shaft structure in coating equipment, enabling the water distribution block 40 to be stably positioned as needed, forming a connection structure where the magnetofluid shaft 50 supports the water distribution block 40, and the water distribution block 40 supports the support plate 10 and the target material 20. Simultaneously, a support platform 510 is fixedly mounted on the magnetofluid shaft 50. The support platform 510 serves as a support platform and is equipped with a first drive unit 60. The first drive unit 60 can be a servo motor or a stepper motor, enabling rapid response and precise adjustment, such as... Figure 3 As shown, an actuating part is fixedly provided on the outer periphery of the power output shaft of the first drive unit 60. The actuating part receives the power from the first drive unit 60 and acts on the transmission unit to drive the transmission unit to move and satisfy the angle adjustment of the support plate 10 and the target material 20. Considering the stability of the transmission, the actuating part in this embodiment of the present invention is preferably a drive gear 610 fixedly sleeved on the outer periphery of the first drive unit 60. The drive gear 610 can mesh with the arc-shaped teeth 110. When the first drive unit 60 is running, the rotation of the drive gear 610 drives the arc-shaped teeth 110 to rotate, thereby driving the support plate 10 to adjust its angle. It should be noted that the first drive unit 60 can drive the drive gear 610 to rotate clockwise and counterclockwise to realize the forward or reverse angle adjustment of the support plate 10.

[0036] The target assembly provided in this embodiment of the invention rotates the support plate 10 for fixing the target 20 and the water distribution block 40, thereby enabling the support plate 10 and the target 20 to have an angle adjustment function. Simultaneously, an arc-shaped tooth 110 is fixedly provided on the second side of the support plate 10, and a drive gear 610 driven by the first drive unit 60 meshes with the arc-shaped tooth 110. The drive gear 610 is driven to rotate by the power of the first drive unit 60, thereby driving the arc-shaped tooth 110 and the support plate 10 to rotate. This structure enables the adjustment of the support plate 10 and the target 20 through the action of the first drive unit 60. Furthermore, after the support plate 10 is rotatably mounted on the water distribution block 40, the only component for angle adjustment is the support plate 10. The arc-shaped tooth 110 fixedly arranged on the second side, as well as the first drive part 60 and drive gear 610 corresponding to the arc-shaped tooth 110, means that fewer parts are required for angle adjustment. Moreover, the arc-shaped tooth 110 and the support plate 10 are an integral structure. Therefore, it is relatively simple to improve the angle adjustment structure of a single target material assembly. It is also more convenient when multiple adjustable support plates 10 need to be set. For example, each support plate 10 can be set with a separate set of arc-shaped teeth 110, first drive part 60 and drive gear 610, or each support plate 10 can be driven through the working position to cooperate with a single set of first drive part 60 and drive gear 610 to meet the angle adjustment of each support plate 10 in the working position, thereby realizing the convenience of target material 20 adjustment.

[0037] To improve the stability and safety of the target assembly during use, in some embodiments of this utility model, the first driving unit 60 is slidably disposed on the support platform 510 so that its position can be adjusted on the support platform 510. At the same time, a telescopic cylinder 520 is also fixedly disposed on the support platform 510. The telescopic cylinder 520 is fixedly disposed, and its telescopic rod is connected to the first driving unit 60 for transmission, so as to drive the first driving unit 60 to slide on the support platform 510. It should be noted that the telescopic cylinder 520 will pass through at least a preset position in the path of driving the first driving unit 60. The preset position can be the unilateral extreme position of the first driving unit 60 under the action of the telescopic cylinder 520, or it can be a process position. Specifically, when the first driving unit 60 reaches the preset position, the driving gear 610 meshes with the arc-shaped tooth 110. In this embodiment, when the support plate 10 and the target material 20 are in normal use and working state, the first drive unit 60 can be set at any position. Only when the position of the support plate 10 needs to be adjusted, the telescopic cylinder 520 drives the first drive unit 60 to move to a preset position, and then the first drive unit 60 is turned on so that the adjustment of the support plate 10 can be achieved through the meshing action of the drive gear 610 and the arc-shaped tooth 110.

[0038] Furthermore, based on the above embodiments, in order to improve the safety of the use of the arc-shaped tooth 110, the target assembly also includes a limiting block 70 to limit and protect the arc-shaped tooth 110 and the support plate 10. Specifically, the limiting block 70 is fixedly disposed on the rotation path of the arc-shaped tooth 110 driven by the first driving part 60, and when the support plate 10 rotates to the initial position following the arc-shaped tooth 110, the second end of the arc-shaped tooth 110 abuts against the limiting block 70. It should be noted that the first end of the arc-shaped tooth 110 is a fixed end for fixed connection with the support plate 10, while the setting of the limiting block 70 can protect the arc-shaped tooth 110, avoid the risk of excessive rotation of the arc-shaped tooth 110, and provide a limit for the initial position of the support plate 10. When the angle of the support plate 10 and the target material 20 is adjusted multiple times, the setting of the limiting block 70 can first position the support plate 10 in the initial position and provide an adjustment reference point, so that each angle adjustment of the first drive unit 60 is based on the same position. Thus, it is only necessary to determine the angle of the first drive unit 60 from the initial position to achieve precise adjustment of the support plate 10 and the target material 20. The adjustment process is more convenient and reduces the cumulative error of multiple adjustments.

[0039] Based on the above embodiments, to reduce the difficulty of adjusting the support plate 10, the target assembly also includes an elastic element 80. The two ends of the elastic element 80 are respectively fixed to the second side of the support plate 10 and the water distribution block 40. During the adjustment of the support plate 10 by the first drive unit 60, the elastic element 80 is always in a compressed state. At this time, the position of the support plate 10 is stabilized by the meshing and limiting action of the arc-shaped teeth 110 and the drive gear 610 on the first drive unit 60. When it is necessary to adjust the support plate 10 to its initial position for subsequent angle adjustments, the first drive unit 60 only needs to be moved away from the preset position by the telescopic cylinder 520. This allows the support plate 10 to be rotated to its initial position by the elastic force of the elastic element 80, and the limiting action of the limiting block 70 stabilizes the support plate 10 in its initial position. This eliminates the need for the first drive unit 60 to move, thus improving the ease of use of the target assembly.

[0040] Furthermore, in the target material assembly provided in this embodiment of the present invention, a fixing point 410 is provided on the water distribution block 40, and the support plate 10 is connected to the fixing point 410 on the water distribution block 40 by a connecting pin 120, so that it can rotate relative to the water distribution block 40 through the through-feeding action of the connecting pin 120. On this basis, the connecting pin 120 can move along its axial direction relative to the fixing point 410 to achieve at least two connection states with the fixing point 410, thereby corresponding to at least two working states of the connecting pin 120. Specifically, when the connecting pin 120 is in the locked position, it is locked and fixed to the fixing point 410. At this time, the circumferential direction of the connecting pin 120 is limited and locked with the fixing point 410, so that the connecting pin 120 cannot rotate, and thus the support plate 10 is locked to the water distribution block 40, and the support plate 10 is stably located in the current position. When the connecting pin 120 is in the relaxed position, the circumferential direction of the connecting pin 120 is unlocked from the fixing point 410, and it can rotate relative to the fixing point 410. At this time, the support plate 10 can rotate under the driving action of the first drive unit 60 to adjust its position. The two working position settings of the connecting pin 120 can provide a more stable position limit for the support plate 10. That is, after the support plate 10 is adjusted to the corresponding position, the connecting pin 120 is switched to the locked position so that the support plate 10 is stable in the current position for setting the angle support of the target material 20.

[0041] It should be noted that the connection structure between the connecting pin 120 and the fixing point 410 can be a connection structure similar to that of a key and a lock hole, that is, the connecting pin 120 locks or unlocks with the fixing point 410 through its axial movement.

[0042] Considering that multiple targets 20 may be needed in a single coating process, in some embodiments of this invention, the water distribution block 40 is provided with several fixing points 410. Each fixing point 410 can accommodate a mounting plate. Simultaneously, the magnetic fluid shaft 50 rotates. During use, after a single support plate 10 and target 20 are used, the magnetic fluid shaft 50 rotates to move another fixing point 410 on the water distribution block 40, thereby moving another support plate 10 and target 20 to the working position for subsequent use. This structure allows for the movement of other support plates 10 and target 20 solely through the rotation of the magnetic fluid shaft 50, making operation convenient and eliminating the need to activate the coating setup, thus reducing the workload associated with downtime.

[0043] Furthermore, in some embodiments of this utility model, such as Figure 4 and Figure 5As shown, the sliding arrangement of the first driving unit 60 is specifically as follows: two slide rails 5110 are arranged parallel and spaced apart on the support platform 510, and each slide rail 5110 is provided with a sliding groove. Correspondingly, sliders 620 are provided on both sides of the first driving unit 60. The first driving unit 60 is embedded in the sliding grooves on both sides by the sliders 620 on both sides, so that the first driving unit 60 has a stable sliding path by limiting the movement on both sides.

[0044] In addition, to avoid damage to the arc-shaped tooth 110 caused by rigid collisions, in some embodiments of this utility model, the limiting block 70 is fixedly set on the water-dividing block 40, and a soft pad is fixedly set on the side of the limiting block 70 facing the arc-shaped tooth 110. The soft pad is made of sponge or rubber. When the second end of the arc-shaped tooth 110 is limited by the limiting block 70, it contacts the soft pad, thereby reducing the risk of collision damage to the arc-shaped tooth 110 while maintaining a stable limiting effect.

[0045] Furthermore, considering that the support plate 10 rotates, in order to maintain its cooling effect on the target material 20 and avoid blockage of the cooling water supply during the movement, the connecting pipe 30 used to connect the support plate 10 and the water distribution block 40 is a stainless steel hose or a rubber hose, so as to maintain an effective connection during the rotation.

[0046] Furthermore, such as Figure 6 As shown, this embodiment of the present invention also provides a coating apparatus, which includes a cavity 910, a sputtering deposition source 920, a wafer stage 930, and a target assembly 940 provided in any of the above embodiments. Specifically, the cavity 910 is a sealed and hollow area to provide the environment required for coating. The sputtering deposition source 920 and the wafer stage 930 are both disposed inside the cavity 910. The sputtering deposition source 920 is used to emit an ion beam to bombard the target assembly 940. The target 20 on the 40 is supported by a wafer stage 930, which receives sputtered material from the target 20 and deposits it to form a dense film on the wafer. In order to meet the sputtering requirements, in this embodiment, the support plate 10 of the target assembly 940 is inclined, and the sputtering deposition source 920 and the wafer stage 930 are symmetrically arranged about the normal of the plane where the target 20 is set, so that the wafer can receive the bombardment reflection material from the target 20 to the maximum extent according to the reflection path, thereby improving the coating rate.

[0047] The terms "first," "second," "third," "left side," and "right side," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units may include steps or units not listed, but rather not listed.

[0048] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A target assembly, characterized in that, include: A support plate, on which a target material is fixedly mounted on a first side and rotatably mounted on one side of a water distribution block on a second side, the first side and the second side being opposite sides of the support plate, the support plate having an internal cavity structure and being connected to the water distribution block through a connecting pipe; The transmission part is fixedly disposed on the second side of the support plate; A magnetofluid shaft is used to support the water distribution block. A support platform is fixedly installed on the magnetofluid shaft. A first driving part is installed on the support platform. An actuating part is installed on the power output shaft of the first driving part. The actuating part is driven by the first driving part to drive the transmission part to rotate and adjust the angle of the support plate.

2. The target assembly as described in claim 1, characterized in that, The transmission part is an arc-shaped tooth, and one end of the arc-shaped tooth is fixedly disposed on the second side of the support plate; the actuation part is a drive gear sleeved on the outer periphery of the power output shaft of the first drive part, and the drive gear meshes with the arc-shaped tooth and drives the arc-shaped tooth to rotate under the drive of the first drive part.

3. The target assembly as described in claim 2, characterized in that, The first driving part is slidably disposed on the support platform, and a telescopic cylinder is fixedly disposed on the support platform to drive the first driving part to slide to reach or leave a preset position. When the first driving part reaches the preset position, the driving gear meshes with the arc-shaped tooth.

4. The target assembly as described in claim 3, characterized in that, It also includes a limiting block, which is fixedly disposed on the rotation path of the arc-shaped tooth. When the support plate rotates to the initial position following the arc-shaped tooth, the second end of the arc-shaped tooth abuts against the limiting block.

5. The target assembly as described in claim 4, characterized in that, It also includes an elastic element, the two ends of which are respectively fixed to the second side of the support plate and the water distribution block; When the first driving part leaves the preset position, the support plate is driven by the elastic force of the elastic element and rotates to the initial position.

6. The target assembly as described in claim 2, characterized in that, The support plate is connected to a fixed point on the water distribution block by a connecting pin, and the connecting pin can move along its axial direction to have at least two working states with the fixed point. When the connecting pin is in the locked position, it is locked and fixed to the fixing point, and the support plate is locked to the water distribution block; when the connecting pin is in the relaxed position, it is rotatably connected to the fixing point, and the support plate is rotatably connected to the water distribution block.

7. The target assembly as described in claim 6, characterized in that, The water distribution block is provided with several fixed points, and the magnetohydrodynamic shaft is rotatably configured.

8. The target assembly as described in claim 3, characterized in that, The support platform is provided with two parallel and spaced slide rails and has sliding grooves. The first drive unit has sliders on both sides and is respectively embedded in the sliding grooves on both sides.

9. The target assembly as claimed in claim 4, characterized in that, The limiting block is fixedly installed on the water distribution block, and a soft pad is fixedly installed on the side of the limiting block facing the arc-shaped tooth.

10. A coating apparatus, characterized in that, The device includes a cavity, a sputtering deposition source, a wafer stage, and a target assembly as described in any one of claims 1-9. The cavity is sealed, the sputtering deposition source and the wafer stage are both disposed within the cavity, the support plate of the target assembly is inclined, and the sputtering deposition source and the wafer stage are symmetrically arranged about the normal of the target placement plane.

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