Cover opening and closing device and semiconductor device

Abstract

The utility model provides a cover opening and closing device and semiconductor equipment, relates to the technical field of semiconductors, and is used for realizing heavy-load cover opening and solving the technical problems of difficulty in manual cover opening and sagging risk of an upper cover. The cover opening and closing device comprises a support, a first assembly and a second assembly, wherein the first assembly and the second assembly are oppositely arranged. Each of the first assembly and the second assembly comprises a sliding mechanism, a lifting mechanism, a cover opening piece, a safety guide rod and a bottom plate. The uncovering piece is installed on the upper cover assembly so that the upper cover assembly can move along with the uncovering piece. The lifting mechanism is connected with the uncovering piece, the lifting mechanism is used for driving the uncovering piece to move in the vertical direction, the lifting mechanism is installed on the sliding mechanism, and the sliding mechanism is installed on the bottom plate and used for driving the uncovering piece to move in the horizontal direction. The bottom plate is installed on the support and provided with a guide groove. The safety guide rod is connected with the lifting mechanism and extends in the vertical direction, and the safety guide rod is installed in the guide groove.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and more particularly to a cover opening and closing device and a semiconductor device. Background Technology

[0002] Many semiconductor devices (such as measurement devices) include a cavity and a cover located above the cavity, which is opened to clean or maintain the cavity.

[0003] The lid can usually be opened by manually rotating it, or by connecting the top cover and the cantilever via a rotating shaft, and then driving the top cover to rise via a motor, and then rotating the top cover along the shaft to open it.

[0004] However, some covers also have other heavy equipment installed on them (such as the measuring chamber installed on the cover of some measuring equipment). Due to the increased weight, it is difficult to manually rotate and open the cover, and the cover installed on the cantilever is at risk of sagging. Utility Model Content

[0005] This application provides a lid opening and closing device and a semiconductor device for achieving heavy-duty lid opening, solving the technical problems of difficulty in manual lid opening and the risk of lid sagging.

[0006] To achieve the above objectives, this application provides the following technical solution:

[0007] On one hand, this application provides a cover opening and closing device, including a bracket and a first component and a second component arranged opposite to each other. Both the first and second components include a sliding mechanism, a lifting mechanism, a cover opening component, a safety guide rod, and a base plate. The cover opening component is mounted on an upper cover component so that the upper cover component moves with the cover opening component. The lifting mechanism is connected to the cover opening component and is used to drive the cover opening component to move vertically. The lifting mechanism is mounted on the sliding mechanism, which is mounted on the base plate and is used to drive the cover opening component to move horizontally. The base plate is mounted on the bracket and has a guide groove. The safety guide rod is connected to the lifting mechanism and extends vertically, and is installed in the guide groove. Compared with related technologies, the cover opening and closing device and semiconductor device provided by this application achieve cover opening by using a lifting mechanism to drive the upper cover component to move vertically and a sliding mechanism to drive the upper cover component to move horizontally, thus saving manpower and solving the technical problem of difficulty in manual cover opening. The opening and closing device includes a first component and a second component, both of which include the aforementioned lifting mechanism. The upper cover component is supported by the two lifting mechanisms. Compared with the related technology where the upper cover is mounted on a cantilever, this avoids the risk of the upper cover sagging on the cantilever.

[0008] In one possible implementation, the lifting mechanism includes a drive device and a lifting device, the lifting device being connected to the lid-opening component, and the drive device driving the lifting device to move along the vertical direction. By driving the lifting device to move vertically, the lid-opening component can rise or fall vertically with the lifting device, thereby achieving lid opening and closing.

[0009] In one possible implementation, the lifting device includes a top plate pressed against the driving device, the top of the safety guide rod mounted on the top plate, and the top of the top plate having a guide pin; the cover opening component is pressed against the top plate, the cover opening component has a guide hole, and the guide pin passes through the guide hole. During the opening and closing process, the guide pin achieves vertical positioning to prevent the cover opening component and the upper cover assembly from shifting during vertical movement, ensuring the accuracy of vertical movement.

[0010] In one possible implementation, the driving device includes the lifting cylinder, a pressure holding valve, and a three-position five-way center-sealed solenoid valve. The three-position five-way center-sealed solenoid valve is connected to the lifting cylinder to control it. The pressure holding valve is installed at the air inlet port of the lifting cylinder. The three-position five-way center-sealed solenoid valve has a self-sealing function in case of power failure or air failure. When power or air failure occurs, the pressure in the front and rear chambers of the cylinder remains at the state before the power or air failure, and the air inlet is closed, thereby maintaining the pressure stability of the pneumatic system, preventing the top cover assembly from falling, and improving the safety of the opening and closing device.

[0011] In one possible implementation, the sliding mechanism includes a slide rail, a sliding member, a mounting block, and a fixing pin; the slide rail is mounted on the base plate; the sliding member is connected to the lifting mechanism and is installed in conjunction with the slide rail; the mounting block is mounted on the sliding member, the lifting mechanism is mounted on the mounting block, and the fixing pin passes between the mounting block and the base plate. The fixing pin restricts the sliding member from sliding on the slide rail 11. Before the sliding mechanism drives the cover opening member to move horizontally, the fixing pin is removed. Then, by sliding the sliding member on the slide rail, the cover opening member is driven to move horizontally to the target position. Finally, the fixing pin is re-inserted between the mounting block and the base plate to prevent the sliding member from sliding arbitrarily on the slide rail.

[0012] In one possible implementation, the sliding mechanism further includes a handle mounted on the mounting block. This facilitates sliding the slider along the slide rail by gripping the handle.

[0013] In one possible implementation, the sliding mechanism further includes a power device for driving the sliding member to move on the slide rail; the power device includes a sliding cylinder, a sliding hydraulic cylinder, or a sliding motor. The power device is the driving part of the sliding mechanism and can include any one of a sliding cylinder, a sliding hydraulic cylinder, or a sliding motor, further saving manpower.

[0014] In one possible implementation, the bracket has multiple threaded holes, and the base plate has multiple first oblong holes. Threaded connectors are disposed between the threaded holes and the corresponding first oblong holes. The first oblong holes accommodate dimensional deviations in the bracket's machining, facilitating the mounting of the first and second components onto the bracket.

[0015] In one possible implementation, the guide hole in the first component is a second oblong hole; and / or, the guide hole in the second component is a second oblong hole. The second oblong hole allows for tolerance to machining deviations in the cover assembly or the opening mechanism.

[0016] On the other hand, this application provides a semiconductor device including a cover assembly and an opening / closing device as described above, wherein the opening member of the opening / closing device is mounted on the cover assembly.

[0017] The opening / closing device and semiconductor device provided in this application have the following advantages:

[0018] The opening and closing device provided in this application includes a bracket and a first component and a second component arranged opposite to each other. The first and second components are mounted on the bracket so that the bracket supports the first and second components. Both the first and second components include a sliding mechanism, a lifting mechanism, an opening component, and a safety guide rod extending vertically. The opening component is mounted on the upper cover assembly, allowing it to move the upper cover assembly. Since the lifting mechanism is connected to the opening component, it can move the opening component vertically, enabling the upper cover assembly to move vertically and thus separating the upper cover assembly from the cavity. The lifting mechanism is mounted on the sliding mechanism, allowing it to move horizontally, thus preventing the upper cover assembly from being positioned above the cavity and thus avoiding obstruction of cleaning or maintenance equipment from working inside the cavity.

[0019] A safety guide rod with a guide groove on the base plate and extending vertically is installed in the guide groove so that the top cover assembly can close when the first and second components are in their initial positions in the horizontal direction. Otherwise, the bottom of the safety guide rod abuts against the base plate, and the top cover assembly cannot close. This prevents the top cover assembly and the cavity from misaligning when closing, and avoids damage to the top cover assembly or the cavity during misaligned installation. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the structure of a semiconductor device provided in an embodiment of this application;

[0022] Figure 2 This is a schematic diagram of the structure of an opening and closing cover device provided in an embodiment of this application;

[0023] Figure 3 This is a schematic diagram of the structure of a first component provided in an embodiment of this application;

[0024] Figure 4 This is a schematic diagram of the structure of a cover opening component provided in an embodiment of this application;

[0025] Figure 5 This is a schematic diagram of another opening mechanism provided in an embodiment of this application;

[0026] Figure 6 This is a schematic diagram of the structure of a slide rail and a slider provided in an embodiment of this application;

[0027] Figure 7 This is a schematic diagram of the structure of a base plate provided in an embodiment of this application.

[0028] Explanation of reference numerals in the attached figures:

[0029] 1-Opening and closing device; 2-Upper cover assembly; 3-Cavity;

[0030] A - Support; B - First component; C - Second component;

[0031] 10-Sliding mechanism;

[0032] 11-Slide rail; 12-Sliding component; 13-Mounting block; 14-Fixing pin; 15-Handle;

[0033] 20 - Lifting mechanism;

[0034] 21-Drive device; 211-Lifting cylinder; 212-Pressure holding valve; 22-Lifting device;

[0035] 221-Top plate; 222-Guide pin;

[0036] 30 - Opening part;

[0037] 31-Guide hole;

[0038] 40 - Safety guide rod;

[0039] 50-Base plate;

[0040] 51-Guide groove; 52-First oblong hole. Detailed Implementation

[0041] In related technologies, there are technical problems such as difficulty in manually opening the lid under heavy loads and the risk of the lid sagging. This is because the lid contains measuring chambers and other equipment, making the lid assembly heavy and thus difficult to open manually. Furthermore, since the lid is mounted on a cantilever and supported only by the cantilever, there is a risk of the lid sagging.

[0042] To address the aforementioned technical problems, this application provides a cover opening and closing device and a semiconductor device. A lifting mechanism drives the upper cover assembly to move vertically, and a sliding mechanism drives it to move horizontally, thereby opening the cover and saving manpower, thus solving the technical problem of difficulty in manually opening the cover. The cover opening and closing device includes opposing first and second components, both of which include the aforementioned lifting mechanism. The upper cover is supported by the two lifting mechanisms, avoiding the risk of sagging that exists when the upper cover is mounted on a cantilever in related technologies.

[0043] To make the above-mentioned objectives, features, and advantages of the embodiments of this application more apparent and understandable, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0044] like Figure 1 and Figure 2 As shown, this application provides a lid opening and closing device 1, which is used to open and close the lid. Opening the lid involves driving the upper cover assembly 2 away from the cavity 3, and closing the lid involves fastening the upper cover assembly 2 onto the cavity 3.

[0045] refer to Figure 1 and Figure 2The opening and closing device 1 includes a bracket A and a first component B and a second component C arranged opposite to each other. The bracket A serves as a support structure for the opening and closing device 1; for example, the bracket A can be a base for placing the cavity 3. The first component B and the second component C are mounted on the bracket A, for example, by welding, snap-fitting, or threading them to the top of the bracket A. The first component B and the second component C are the actuating structures that drive the upper cover assembly 2 to move; the first component B and the second component C are symmetrically arranged on the bracket A.

[0046] refer to Figure 2 Both component B and component C include a sliding mechanism 10, a lifting mechanism 20, a cover opening component 30, a safety guide rod 40, and a base plate 50. (Reference) Figure 1 and Figure 3 Taking the first component B as an example, the opening component 30 is installed on the upper cover component 2, for example, by welding, snap-fitting, or threading the opening component 30 to the upper cover component 2. Preferably, the opening component 30 and the upper cover component 2 are connected by a detachable connection method such as snap-fitting or threading, so as to facilitate the assembly and disassembly of the opening and closing device 1 and the upper cover component 2. Since the opening component 30 is installed on the upper cover component 2, the upper cover component 2 can move with the opening component 30.

[0047] refer to Figure 3 The lifting mechanism 20 is connected to the cover opening component 30, which is mounted on the lifting mechanism 20. For example, the cover opening component 30 is welded, snap-fitted, or threaded to the top of the lifting mechanism 20. The lifting mechanism 20 has lifting and lowering functions to drive the cover opening component 30 to move the upper cover assembly 2 vertically upwards or downwards. (Reference) Figure 1 and Figure 3 When the lid opening and closing device 1 opens the lid, the lifting mechanism 20 drives the lid opening component 30 to move the upper lid assembly 2 vertically upward. When the lid opening and closing device 1 closes the lid, the lifting mechanism 20 drives the lid opening component 30 to move the upper lid assembly 2 vertically downward.

[0048] refer to Figure 3 The sliding mechanism 10 is mounted on the base plate 50. The sliding mechanism 10 can be welded, snap-fitted, or threaded to the base plate 50. Preferably, the sliding mechanism 10 and the base plate 50 are connected by a detachable connection method such as snap-fitting or threaded connection to facilitate the assembly and disassembly of the opening and closing cover device 1 from the base plate 50. (Reference) Figure 3 The sliding mechanism 10 is connected to the lifting mechanism 20. For example, the lifting mechanism 20 and the sliding part of the sliding mechanism 10 are welded, snapped, or threaded together. The sliding mechanism 10 can drive the lifting mechanism 20 to move in the horizontal direction. Since the lifting mechanism 20 is connected to the cover opening member 30, which is installed on the upper cover assembly 2, the lifting mechanism 20 can drive the upper cover assembly 2 to move in the horizontal direction.

[0049] refer to Figure 2The base plate 50 is mounted on bracket A. (Reference) Figure 7 The base plate 50 has a guide groove 51, the opening of which faces the upper cover assembly 2. (Reference) Figure 3 The safety guide rod 40 extends vertically and is connected to the lifting mechanism 20.

[0050] refer to Figure 1 and Figure 2 The second component C is symmetrically arranged with the first component B. The sliding mechanism 10, lifting mechanism 20, opening cover 30, safety guide rod 40 and base plate 50 in the second component C can be referenced from the first component B, and will not be described in detail here.

[0051] The opening process of the cover opening device 1 provided in this application is as follows: When the upper cover assembly 2 is fastened onto the cavity 3, the safety guide rod 40 is installed in the guide groove 51. The lifting mechanism 20 in the first component B and the second component C drives the cover opening component 30 and the upper cover assembly 2 to move vertically upward, so that the upper cover assembly 2 is disengaged from the cavity 3. Subsequently, the sliding mechanism 10 in the first component B and the second component C drives the lifting mechanism 20, the cover opening component 30, and the upper cover assembly 2 to move horizontally, so that the upper cover assembly 2 moves away from the cavity 3 in the horizontal direction, preventing the upper cover assembly 2 from being located above the cavity 3, thereby facilitating the maintenance or cleaning of the cavity 3 and completing the opening process.

[0052] The closing process of the opening and closing device 1 provided in this application is as follows: When the upper cover assembly 2 is not fastened to the cavity 3, the sliding mechanism 10 in the first component B and the second component C drives the lifting mechanism 20, the opening component 30, and the upper cover assembly 2 to move horizontally, so that the upper cover assembly 2 moves away from the cavity 3 in the horizontal direction until the upper cover assembly 2 is aligned with the cavity 3 in the height direction. Then, the lifting mechanism 20 in the first component B and the second component C drives the opening component 30 and the upper cover assembly 2 to move vertically downward, so that the upper cover assembly 2 moves closer to the cavity 3 until the upper cover assembly 2 is fastened to the cavity 3, thus completing the closing process.

[0053] During the closing process, if the upper cover assembly 2 fails to move to the position aligned with the cavity 3 under the action of the sliding mechanism 10, the safety guide rod 40 is not aligned with the guide groove 51. If the upper cover assembly 2 is moved downward by the lifting mechanism 20, the safety guide rod 40 will press against the base plate 50, restricting the continued downward movement of the upper cover assembly 2. The upper cover assembly 2 will be unable to close, preventing misalignment between the upper cover assembly 2 and the cavity 3 during closing and avoiding damage to the upper cover assembly 2 or the cavity 3 if they are installed in a misaligned manner.

[0054] The opening and closing device 1 provided in this application drives the upper cover assembly 2 to move vertically via a lifting mechanism 20 and drives the upper cover assembly 2 to move horizontally via a sliding mechanism 10, thereby achieving heavy-duty opening and closing of the cover and saving manpower, thus solving the technical problem of difficulty in manually opening the cover. The opening and closing device 1 includes a first component B and a second component C, both of which include the aforementioned lifting mechanism 20. The upper cover assembly 2 is supported by the two lifting mechanisms. Compared with related technologies where the upper cover is mounted on a cantilever, this avoids the risk of the upper cover sagging on the cantilever.

[0055] In some embodiments, such as Figure 3 As shown, the lifting mechanism 20 includes a drive device 21 and a lifting device 22. The drive device 21 is the power unit of the lifting mechanism 20, and can be a hydraulic drive device, a pneumatic drive device, or a motor drive device. The lifting device 22 is the execution unit of the lifting mechanism 20. The drive device 21 is connected to the lifting device 22, for example, by welding, snap-fitting, or threading, to drive the lifting device 22 to rise or fall vertically. The lifting device 22 is connected to the cover opening member 30, for example, by welding, snap-fitting, or threading, so that the cover opening member 30 moves with the lifting device 22 under the drive of the drive device 21.

[0056] In one possible implementation, such as Figure 3 As shown, the lifting device 22 includes a top plate 221, which is pressed onto the driving device 21 so that the driving device 21 can move the top plate 221 vertically. The top of the safety guide rod 40 is mounted on the top plate 221, for example, by welding, threading, or snapping the top of the safety guide rod 40 to the top plate 221. This allows the safety guide rod 40 to move vertically with the top plate 221.

[0057] refer to Figure 3 The top of the top plate 221 has a guide pin 222, which can be a cylindrical pin extending vertically. The guide pin 222 can be integrally formed with the top plate 221, or it can be welded, threaded, or snap-fitted to the top of the top plate 221. The cover opening component 30 is pressed onto the top plate 221, enabling the drive device 21 to open and close the cover by driving the top plate 221 and the cover opening component 30 to move vertically. (Reference) Figure 4 The cover opening component 30 is provided with a guide hole 31. The axis of the guide hole 31 is the same as the axis of the guide pin 222, so that the guide pin 222 passes through the guide hole 31. During the opening and closing of the cover, the guide pin 222 achieves vertical positioning to prevent the cover opening component 30 and the upper cover assembly 2 from deviating when moving in the vertical direction, and to ensure the accuracy of vertical movement.

[0058] In some embodiments, the driving device 21 drives the cover opening component 30 to move vertically via a cylinder, thereby reducing the manual operation intensity of opening and closing the cover. Figure 3 As shown, the drive device 21 includes a lifting cylinder 211, a pressure holding valve 212, and a three-position five-way center-sealed solenoid valve (not shown in the figure). The lifting cylinder 211 is the main body of the drive device 21, and the lifting device 22 is mounted on the lifting cylinder 211. For example, the lifting cylinder 211 has a piston rod that can move vertically. The lifting device 22 is connected to the piston rod, causing the piston rod to drive the lifting device 22 to move vertically.

[0059] The three-position five-way center-sealed solenoid valve is the control part of the drive device 21. It is connected to the lifting cylinder 211, thereby controlling the start / stop, speed, and direction of movement of the cylinder. The three-position five-way center-sealed solenoid valve has a self-sealing function in case of power or air failure. When power or air is cut off, the pressure in the front and rear chambers of the cylinder remains at the state before the power or air failure, and the air inlet is closed, thus maintaining the pressure stability of the pneumatic system, preventing the top cover assembly 2 from falling, and improving the safety of the opening and closing device 1.

[0060] refer to Figure 3 The pressure holding valve 212 is installed at the air inlet of the lifting cylinder 211 to control the pressure stability in the air pressure system, prevent the pressure from being too high or too low, and further improve the safety of the opening and closing cover device 1.

[0061] It should be noted that the drive device 21 can also drive the cover opening part 30 to move in the vertical direction by means of hydraulic cylinder drive or motor drive.

[0062] In some embodiments, reference Figure 3 The sliding mechanism 10 includes a slide rail 11, a slider 12, a mounting block 13, and a fixing pin 14. The slide rail 11 provides the sliding path within the sliding mechanism 10. The slide rail 11 is mounted on the base plate 50, for example, by welding, threading, or snapping the slide rail 11 to the base plate 50. The slide rail 11 extends horizontally, for example, along the length or width of the upper cover assembly 2. The slider 12 is the portion of the sliding mechanism 10 that slides relative to the slide rail 11. The slider 12 is installed in conjunction with the slide rail 11. For example, see reference... Figure 6 One of the slide rail 11 and the slider 12 has a groove, and the other has a protrusion that matches the groove. The groove and the protrusion engage to allow the slider 12 to slide on the slide rail 11.

[0063] refer to Figure 3Mounting block 13 is the part of sliding mechanism 10 that connects to lifting mechanism 20. Mounting block 13 is mounted on sliding member 12, for example, by welding, threading, or snapping. Lifting device 22 in lifting mechanism 20 is mounted on mounting block 13, for example, by welding, threading, or snapping. This allows sliding member 12, mounting block 13, lifting mechanism 20, cover opening member 30, and top cover assembly 2 to slide along slide rail 11, preventing the top cover assembly 2 from being located above cavity 3, thereby preventing the top cover assembly 2 from obstructing the cleaning or maintenance equipment from working inside cavity 3.

[0064] refer to Figure 3 The fixing pin 14 is used to restrict the sliding member 12 from sliding on the slide rail 11. The fixing pin 14 passes between the mounting block 13 and the base plate 50. Before the sliding mechanism 10 drives the cover opening member 30 to move horizontally, the fixing pin 14 is removed. Then, by sliding the sliding member 12 on the slide rail 14, the cover opening member 30 is driven to move horizontally to the target position. Finally, the fixing pin 14 is re-inserted between the mounting block 13 and the base plate 50 to prevent the sliding member 12 from sliding freely on the slide rail 11.

[0065] Based on the above embodiments, refer to Figure 3 The sliding mechanism 10 also includes a handle 15, which may be ring-shaped. The handle 15 is mounted on the mounting block 13 or on the slider 12 so that the slider 12 can be pushed to slide on the slide rail 11 by gripping the handle 15.

[0066] In other embodiments, the sliding mechanism 10 further includes a power device (not shown in the figure), which is the driving part of the sliding mechanism 10. The power device may include any one of a sliding cylinder, a sliding hydraulic cylinder, or a sliding motor. The power device may be connected to the sliding member 12, the mounting block 13, or the handle 15 to drive the sliding member 12 and the upper cover assembly 2 to slide along the slide rail 11, further saving manpower and preventing the upper cover assembly 2 from being located above the cavity 3, thereby preventing the upper cover assembly 2 from obstructing the cleaning or maintenance equipment from working inside the cavity 3.

[0067] In some embodiments, the bracket A has multiple threaded holes, the number of which can be two, three, four, or more. The axial direction of the threaded holes can be vertical. (Reference) Figure 7 The base plate 50 has multiple first oblong holes 52, the number of which is the same as the number of threaded holes. The length direction of the first oblong holes 52 can be perpendicular to the length direction of the slide rail 11. Threaded connectors, such as screws, are provided between the first oblong holes 52 and their corresponding threaded holes. The first oblong holes 52 accommodate the machining dimensional deviations of the bracket A, facilitating the installation of the first component B and the second component C on the bracket A.

[0068] In some embodiments, reference Figure 2 In the guide hole 31 of the first component B and the guide hole 31 of the second component C, at least one of the guide holes 31 is a second waist-shaped hole, which is waist-shaped. Figure 5 As shown in the example, the guide hole 31 on the cover opening component 30 is oblong in shape. The second oblong hole can accommodate machining deviations of the cover assembly 2 or the cover opening component 30.

[0069] Preferably, in the two opening parts 30, reference Figure 4 The guide hole 31 in the cover opening component 30 is a round hole. (Reference) Figure 5 The guide hole 31 in the other cover piece 30 is a second oblong hole. For ease of description, the cover piece 30 with the guide hole 31 being a round hole is the first cover piece, and the other is the second cover piece. This is so that during the assembly process, the first cover piece can be used for pre-positioning of the assembly, and the second oblong hole on the second cover piece can accommodate the machining redundancy deviation of the upper cover assembly 2 or the cover piece 30.

[0070] This application also provides a semiconductor device, which may include, but is not limited to, semiconductor process equipment, semiconductor production metrology equipment, and X-ray inspection equipment. (Reference) Figure 1 The semiconductor device includes a cover assembly 2 and an opening / closing device 1 as described in any of the above embodiments, wherein the opening component 30 of the opening / closing device 1 is installed in the cover assembly 2.

[0071] The specific structure and related effects of the opening and closing cover device 1 can be referred to the relevant descriptions in the above embodiments. Since this semiconductor device adopts all the technical solutions of any of the above embodiments, it has at least all the beneficial effects brought about by any of the above embodiments, and will not be described in detail here.

[0072] The various embodiments or implementation methods described in this specification are presented in a progressive manner. Each embodiment focuses on the differences from other embodiments, and the same or similar parts between the embodiments can be referred to each other.

[0073] It should be noted that the embodiments referred to in the specification as "in particular implementation," "in some embodiments," "in this embodiment," "exemplarily," etc., may include specific features, structures, or characteristics, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Moreover, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not, is within the knowledge scope of those skilled in the art.

[0074] Generally speaking, terms should be understood at least in part by their use in context. For example, at least in part by context, the term "one or more" as used in the text can be used to describe any feature, structure, or characteristic of the singular meaning, or a combination of features, structures, or characteristics of the plural meaning. Similarly, at least in part by context, terms such as "one" or "" can also be understood to convey either singular or plural usage.

[0075] It should be readily understood that “on,” “above,” and “on top of” in this disclosure should be interpreted in the broadest manner, such that “on” means not only “directly on something” but also “on something” with an intermediate feature or layer therebetween, and that “above” or “on top of” means not only “on something” but also “on something” without an intermediate feature or layer therebetween (i.e., directly on something).

[0076] Furthermore, for ease of explanation, spatially relative terms such as "below," "below," "under," "above," and "above" may be used to describe the relationship of one element or feature relative to other elements or features as shown in the figures. Spatially relative terms are intended to encompass different orientations of the device in use or operation other than those shown in the figures. The device may have other orientations (rotated 90 degrees or in other orientations), and the spatially relative descriptive terms used herein may be interpreted accordingly.

[0077] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A lid opening and closing device, characterized in that, It includes a bracket (A) and a first component (B) and a second component (C) arranged opposite to each other. The first component (B) and the second component (C) each include a sliding mechanism (10), a lifting mechanism (20), a cover opening component (30), a safety guide rod (40), and a base plate (50). The opening element (30) is mounted on the upper cover assembly (2) so that the upper cover assembly (2) moves with the opening element (30); The lifting mechanism (20) is connected to the opening part (30). The lifting mechanism (20) is used to drive the opening part (30) to move in the vertical direction. The lifting mechanism (20) is installed on the sliding mechanism (10). The sliding mechanism (10) is installed on the base plate (50). The sliding mechanism (10) is used to drive the opening part (30) to move in the horizontal direction. The base plate (50) is mounted on the bracket (A), and the base plate (50) has a guide groove (51); The safety guide rod (40) is connected to the lifting mechanism (20) and extends in the vertical direction. The safety guide rod (40) is installed in the guide groove (51).

2. The opening and closing cover device according to claim 1, characterized in that, The lifting mechanism (20) includes a driving device (21) and a lifting device (22). The lifting device (22) is connected to the cover opening member (30). The driving device (21) is used to drive the lifting device (22) to move along the vertical direction.

3. The opening and closing cover device according to claim 2, characterized in that, The lifting device (22) includes a top plate (221), which is pressed against the driving device (21). The top of the safety guide rod (40) is mounted on the top plate (221), and the top of the top plate (221) has a guide pin (222). The cover opening component (30) is pressed onto the top plate (221), and a guide hole (31) is provided on the cover opening component (30), and the guide pin (222) passes through the guide hole (31).

4. The opening and closing cover device according to claim 2, characterized in that, The drive device (21) includes a lifting cylinder (211), a pressure holding valve (212), and a three-position five-way center-sealed solenoid valve; The three-position five-way center-sealed solenoid valve is connected to the lifting cylinder (211) to control the lifting cylinder (211). The pressure holding valve (212) is installed at the air inlet of the lifting cylinder (211).

5. The opening and closing cover device according to any one of claims 1-4, characterized in that, The sliding mechanism (10) includes a slide rail (11), a sliding member (12), a mounting block (13), and a fixing pin (14). The slide rail (11) is mounted on the base plate (50); The sliding member (12) is connected to the lifting mechanism (20), and the sliding member (12) is installed in conjunction with the slide rail (11); The mounting block (13) is mounted on the sliding member (12), and the lifting mechanism (20) is mounted on the mounting block (13). The fixing pin (14) passes between the mounting block (13) and the base plate (50).

6. The opening and closing cover device according to claim 5, characterized in that, The sliding mechanism (10) also includes a handle (15) which is mounted on the mounting block (13).

7. The opening and closing cover device according to claim 6, characterized in that, The sliding mechanism (10) also includes a power device for driving the sliding member (12) to move on the slide rail (11); The power equipment includes a sliding cylinder, a sliding hydraulic cylinder, or a sliding motor.

8. The opening and closing cover device according to any one of claims 1-4, characterized in that, The bracket (A) has multiple threaded holes, and the base plate (50) has multiple first waist-shaped holes (52). A threaded connector is provided between the threaded holes and the corresponding first waist-shaped holes (52).

9. The opening and closing cover device according to claim 3, characterized in that, The guide hole (31) in the first component (B) is a second oblong hole; And / or, the guide hole (31) in the second component (C) is a second waist-shaped hole.

10. A semiconductor device, characterized in that, It includes a cover assembly (2) and an opening and closing device (1) as described in any one of claims 1-9, wherein the opening part (30) of the opening and closing device (1) is mounted on the cover assembly (2).

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