Conveying pipeline for semiconductor special gas
By installing monitoring, buffering, and sealing components in the special gas delivery pipelines for semiconductor manufacturing, the problems of leakage at pipeline welds and vibration damage have been solved, thereby improving safety and service life.
Patent Information
- Application Number
- CN202520097379.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-15
- Publication Date
- 2025-11-11
- Estimated Expiration
- 2035-01-15
AI Technical Summary
Existing special gas delivery pipelines for semiconductor manufacturing processes are prone to leakage when the weld joint breaks, and the pipelines are easily damaged by vibration during gas delivery, affecting safety and service life.
Monitoring and buffer components are installed at the pipe weld joints. The monitoring components detect leaks through gas detection sensors and alarms, the buffer components reduce shocks through arc-shaped elastic rubber pads and dampers, and the sealing components achieve tight sealing through rubber sealing tubes and bolt connections.
It effectively reduces the safety hazards of gas leaks, extends the service life of pipelines, and improves the safety and reliability of the transportation process.
Smart Images
Figure CN223537211U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of pipeline technology, and in particular relates to a pipeline for conveying special gases for semiconductors. Background Technology
[0002] Pipeline transportation is a long-distance transport method that uses pipelines as the means of transport to transport liquid and gaseous materials. It is a special mode of transportation that transports petroleum, coal, and chemical products from production sites to markets, and is a special component of trunk transportation in a unified transportation network.
[0003] The existing technology still has the following shortcomings:
[0004] In the existing technology, if the welded joints of the pipeline used to transport special gases in semiconductor manufacturing processes break accidentally during use, the special gases inside will leak directly. Operators will not have any reaction time to shut off the transport valve, posing a significant safety hazard. At the same time, during the gas transport process, the pipeline will vibrate under the influence of internal stress and fluid impact, which can easily lead to pipeline damage and affect the service life of the pipeline. Utility Model Content
[0005] This utility model provides a pipeline for conveying special gases in semiconductor manufacturing. It aims to solve the problem that in the prior art, if the weld joint of the pipeline breaks accidentally during use, the special gas inside will leak directly. The operator has no time to react and shut off the conveying valve, which poses a great safety hazard. At the same time, during the gas conveying process, the pipeline will vibrate under the impact of internal stress and fluid, which can easily lead to pipeline damage and affect the service life of the pipeline.
[0006] This utility model is implemented as follows: a pipeline for conveying special gases for semiconductors includes: a first pipeline, a second pipeline welded to one side of the first pipeline, and the first pipeline and the second pipeline being internally connected; a monitoring component is provided at the weld joint of the first pipeline and the second pipeline, and sealing components are respectively provided on both sides of the monitoring component; a buffer component is provided on both the first pipeline and the second pipeline; each of the two buffer components includes an outer cylinder, and a through hole is opened in the middle of each of the two outer cylinders, through which the first pipeline and the second pipeline pass respectively.
[0007] Preferably, each of the two buffer components further includes an arc-shaped fixing plate with an inner perimeter of the two through holes; an arc-shaped elastic rubber pad is detachably and fixedly connected to one side of each of the eight arc-shaped fixing plates near the first pipe and the second pipe; the eight arc-shaped elastic rubber pads are in contact with the outer perimeter of the first pipe and the second pipe respectively.
[0008] Preferably, the two buffer assemblies further include a plurality of dampers installed between the eight arc-shaped fixing plates and the two through-hole sidewalls, and each of the dampers is fitted with a buffer spring.
[0009] Preferably, the monitoring component includes a fixed frame with a cavity in the middle, a corrosion-resistant layer on the inner wall of the cavity, a gas detection sensor installed inside the cavity, and an alarm installed on the top of the fixed frame.
[0010] Preferably, the monitoring component further includes rubber sealing tubes fixedly connected to both sides of the fixed frame, and a connecting groove is opened in the middle of the two rubber sealing tubes. The two connecting grooves are connected to both sides of the cavity. The first pipe and the second pipe pass through the two connecting grooves and the cavity in sequence, and the welding point of the first pipe and the second pipe is located inside the cavity.
[0011] Preferably, the two rubber sealing tubes are in contact with the surfaces of the first pipe and the second pipe, respectively.
[0012] Preferably, each of the two sealing components includes an arc-shaped block at the upper and lower ends of the first pipe and the second pipe, wherein the lower ends of the two arc-shaped blocks near the upper end are respectively fixedly connected to the front and rear sides of the lower end of the arc-shaped blocks, and the upper ends of the two arc-shaped blocks near the lower end are respectively fixedly connected to the front and rear sides of the upper end of the arc-shaped blocks, and the eight first connecting blocks are respectively detachably fixedly connected to the eight second connecting blocks at corresponding positions with bolts and nuts.
[0013] Preferably, each of the two sealing assemblies further includes a screw rod disposed on one side of the four arc-shaped blocks. Each of the four arc-shaped blocks has a threaded groove. The four screw rods are threadedly connected to the four threaded grooves. The extended ends of the four screw rods pass through the four threaded grooves and are respectively connected to arc-shaped positioning blocks via bearings. The four arc-shaped positioning blocks are respectively in contact with the outside of the two rubber sealing tubes. Guide rods are fixedly connected to both ends of the four arc-shaped positioning blocks near the four threaded grooves. The extended ends of the eight guide rods pass through the four arc-shaped blocks.
[0014] Compared with the prior art, the embodiments of this application have the following main advantages:
[0015] By setting up a buffer assembly to connect the outer cylinder and the pipe fixing frame, when the first and second pipes are conveying, the vibration generated comes into contact with the arc-shaped elastic rubber pad, damper and buffer spring to buffer and reduce the vibration force and reduce the impact of vibration. By setting up a monitoring assembly, it is easy to monitor whether there is any air leakage at the welding point of the first and second pipes. By setting up a sealing assembly, it is easy to seal, so that there is time to shut down the conveying in case of air leakage. Attached Figure Description
[0016] Figure 1 This is a three-dimensional structural diagram of the present invention;
[0017] Figure 2 This is a front view structural diagram of the present invention;
[0018] Figure 3 This is a front view cross-sectional structural diagram of the present invention;
[0019] Figure 4 This is a utility model Figure 3 Enlarged structural diagram at point A in the middle;
[0020] Figure 5 This is a utility model Figure 3 Enlarged structural diagram at point B;
[0021] In the diagram: 1. First pipe; 2. Second pipe; 3. Monitoring component; 4. Sealing component; 5. Buffer component; 6. Fixing frame; 7. Rubber sealing tube; 8. Gas detection sensor; 9. Arc-shaped block; 10. First connecting block; 11. Screw; 12. Arc-shaped positioning block; 13. Threaded groove; 14. Guide rod; 15. Outer cylinder; 16. Through hole; 17. Arc-shaped elastic rubber pad; 18. Arc-shaped fixing plate; 19. Damper; 20. Buffer spring; 21. Connecting groove; 22. Cavity; 23. Alarm; 24. Second connecting block. Detailed Implementation
[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein in the specification of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and foregoing drawings of this application are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or foregoing drawings of this application are used to distinguish different objects, not to describe a particular order.
[0023] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.
[0024] This utility model embodiment provides a pipeline for conveying special gases for semiconductors, such as... Figure 1-5 As shown, it includes: a first pipe 1, a second pipe 2 welded to one side of the first pipe 1, and the first pipe 1 and the second pipe 2 are internally connected; a monitoring component 3 is provided at the weld joint of the first pipe 1 and the second pipe 2, a sealing component 4 is provided on both sides of the monitoring component 3, and a buffer component 5 is provided on both the first pipe 1 and the second pipe 2; the two buffer components 5 each include an outer cylinder 15, and a through hole 16 is opened in the middle of the two outer cylinders 15, through which the first pipe 1 and the second pipe 2 pass respectively.
[0025] It should be noted that in existing technologies, if the weld joints of pipelines used for transporting special gases in semiconductor manufacturing processes break accidentally during use, the special gases will leak directly. Operators will have no time to react and shut off the transport valves, posing a significant safety hazard. Furthermore, during gas transport, the pipeline itself vibrates under internal stress and fluid impact, easily leading to pipeline damage and affecting its service life. This solution addresses this by installing a buffer assembly 5, connecting the outer cylinder 15 and the pipeline fixing frame. During transport in the first pipeline 1 and the second pipeline 2, vibrations occur and come into contact with the arc-shaped elastic rubber pad 17. The damper 19 and buffer spring 20 buffer and reduce the impact of vibration. A monitoring assembly 3 facilitates monitoring for leaks at the weld joints of the first pipeline 1 and the second pipeline 2. A sealing assembly 4 facilitates sealing, allowing time to shut off the transport in case of a leak.
[0026] In a further preferred embodiment of this utility model, such as Figure 1-5 As shown, the two buffer components 5 also include arc-shaped fixing plates 18 with two through holes 16 inside; arc-shaped elastic rubber pads 17 are detachably fixed to the side of the eight arc-shaped fixing plates 18 near the first pipe 1 and the second pipe 2; the eight arc-shaped elastic rubber pads 17 are in contact with the outer walls of the first pipe 1 and the second pipe 2 respectively.
[0027] In this embodiment, it is convenient to make the pipe vibrate in contact with the arc-shaped elastic rubber pad 17 when it vibrates.
[0028] In a further preferred embodiment of this utility model, such as Figure 1-5 As shown, the two buffer assemblies 5 also include several dampers 19 installed between the sidewalls of the eight arc-shaped fixed plates 18 and the two through holes 16, and each damper 19 is fitted with a buffer spring 20.
[0029] In this embodiment, the pipe vibration force is transmitted to the damper 19 through the arc-shaped elastic rubber pad 17.
[0030] In a further preferred embodiment of this utility model, such as Figure 1-4As shown, the monitoring component 3 includes a fixed frame 6, with a cavity 22 in the middle of the fixed frame 6. The inner wall of the cavity 22 is provided with a corrosion-resistant layer. A gas detection sensor 8, model MQ-135, is installed inside the cavity 22. An alarm 23 is installed on the top of the fixed frame 6.
[0031] It should be noted that the model and specification of the gas detection sensor 8, MQ-135, is not the only limitation, but is selected and determined according to the actual specifications of the device. The specific selection calculation method adopts the existing technology in this field, so it will not be described in detail.
[0032] The power supply and operating principle of the gas detection sensor 8 are clear to those skilled in the art and will not be described in detail here.
[0033] In this embodiment, it is convenient to monitor whether the welding points of the first pipe 1 and the second pipe 2 are cracked and leaking.
[0034] In a further preferred embodiment of this utility model, such as Figure 1-4 As shown, the monitoring component 3 also includes rubber sealing tubes 7 fixedly connected to both sides of the fixed frame 6. A connecting groove 21 is opened in the middle of the two rubber sealing tubes 7. The two connecting grooves 21 are connected to both sides of the cavity 22. The first pipe 1 and the second pipe 2 pass through the two connecting grooves 21 and the cavity 22 in sequence. The welding point of the first pipe 1 and the second pipe 2 is located inside the cavity 22.
[0035] In this embodiment, the rubber sealing tube 7 is provided to facilitate sealing on both sides of the welding point.
[0036] In a further preferred embodiment of this utility model, such as Figure 1-4 As shown, the two rubber sealing tubes 7 are in contact with the surfaces of the first pipe 1 and the second pipe 2, respectively.
[0037] In this embodiment, sealing is facilitated.
[0038] In a further preferred embodiment of this utility model, such as Figure 1-4 As shown, the two sealing components 4 each include an arc-shaped block 9 at the upper and lower ends of the first pipe 1 and the second pipe 2, respectively. The lower ends of the two arc-shaped blocks 9 near the upper end are respectively fixedly connected to the front and rear sides of the lower end of the first connecting block 9, and the upper ends of the two arc-shaped blocks 9 near the lower end are respectively fixedly connected to the front and rear sides of the upper end of the second connecting block 24. The eight first connecting blocks 10 are respectively detachably fixedly connected to the eight second connecting blocks 24 at the corresponding positions with bolts and nuts.
[0039] In this embodiment, installation is convenient.
[0040] In a further preferred embodiment of this utility model, such as Figure 1-4As shown, the two sealing components 4 also include screws 11 disposed on one side of the four arc-shaped blocks 9. Each of the four arc-shaped blocks 9 has a threaded groove 13. The four screws 11 are threadedly connected to the four threaded grooves 13 respectively. The extended ends of the four screws 11 pass through the four threaded grooves 13 and are respectively connected to arc-shaped positioning blocks 12 through bearings. The four arc-shaped positioning blocks 12 are in contact with the outside of the two rubber sealing tubes 7 respectively. Guide rods 14 are fixedly connected to both ends of the side of the four arc-shaped positioning blocks 12 near the four threaded grooves 13 respectively. The extended ends of the eight guide rods 14 pass through the four arc-shaped blocks 9 respectively.
[0041] In this embodiment, the rubber sealing tube 7 is designed to fit more closely to the first pipe 1 and the second pipe 2, resulting in a tighter seal.
[0042] All electrical components mentioned in this article are electrically connected to the controller and power supply. The control method of this utility model is controlled by the controller. The control circuit of the controller can be implemented by simple programming by those skilled in the art. The power supply is also common knowledge in the art. Furthermore, this utility model is mainly used to protect mechanical devices, so the control method and circuit connection will not be explained in detail.
[0043] It should be noted that, for the sake of simplicity, the foregoing embodiments are all described as a series of actions. However, those skilled in the art should understand that the present invention is not limited to the described order of actions, as some steps may be performed in other orders or simultaneously according to the present invention. Furthermore, those skilled in the art should also understand that the embodiments described in the specification are preferred embodiments, and the actions and modules involved are not necessarily essential to the present invention.
[0044] It should be understood that the disclosed apparatus can be implemented in other ways, given the several embodiments provided in this application. For example, the apparatus embodiments described above are merely illustrative. For instance, the division of units described above may be implemented in other ways in practice. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or communication connections shown or discussed may be through some interfaces; indirect coupling or communication connections between devices or units may be telecommunications or other forms.
[0045] The units described above as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.
[0046] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit the scope of protection of this utility model. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on these embodiments, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Although this utility model has been described in detail with reference to the above embodiments, those skilled in the art can still combine, add, delete, or otherwise adjust the features of the various embodiments of this utility model according to the circumstances without conflict or creative effort, thereby obtaining different technical solutions that do not fundamentally depart from the concept of this utility model. These technical solutions are also within the scope of protection of this utility model.
Claims
1. A conduit for conveying special gases for semiconductors, characterized in that, include: A first pipe (1) is connected to a second pipe (2) welded to one side of the first pipe (1). The first pipe (1) and the second pipe (2) are internally connected. A monitoring component (3) is provided at the weld joint of the first pipe (1) and the second pipe (2), and a sealing component (4) is provided on both sides of the monitoring component (3). A buffer component (5) is provided on both the first pipe (1) and the second pipe (2). The two buffer components (5) each include an outer cylinder (15), and a through hole (16) is provided in the middle of the two outer cylinders (15). The first pipe (1) and the second pipe (2) pass through the two through holes (16) respectively.
2. The pipeline for conveying semiconductor special gases as described in claim 1, characterized in that, The two buffer components (5) also include arc-shaped fixing plates (18) with the inside periphery of the two through holes (16); Each of the eight arc-shaped fixing plates (18) has an arc-shaped elastic rubber pad (17) detachably fixedly connected to one side of the first pipe (1) and the second pipe (2); The eight arc-shaped elastic rubber pads (17) respectively contact the outer walls of the first pipe (1) and the second pipe (2).
3. The pipeline for conveying semiconductor special gases as described in claim 2, characterized in that, The two buffer assemblies (5) also include a plurality of dampers (19) installed between the eight arc-shaped fixing plates (18) and the sidewalls of the two through holes (16), and each of the dampers (19) is fitted with a buffer spring (20).
4. The pipeline for conveying semiconductor special gases as described in claim 1, characterized in that, The monitoring component (3) includes a fixed frame (6), a cavity (22) is provided in the middle of the fixed frame (6), a corrosion-resistant layer is provided on the inner wall of the cavity (22), a gas detection sensor (8) is installed inside the cavity (22), and an alarm (23) is installed on the top of the fixed frame (6).
5. A pipeline for conveying semiconductor special gases as described in claim 4, characterized in that, The monitoring component (3) also includes rubber sealing tubes (7) fixedly connected to both sides of the fixed frame (6). A connecting groove (21) is opened in the middle of each of the two rubber sealing tubes (7). The two connecting grooves (21) are connected to both sides of the cavity (22). The first pipe (1) and the second pipe (2) pass through the two connecting grooves (21) and the cavity (22) in sequence. The welding point of the first pipe (1) and the second pipe (2) is located inside the cavity (22).
6. The pipeline for conveying semiconductor special gases as described in claim 5, characterized in that, The two rubber sealing tubes (7) are in contact with the surfaces of the first pipe (1) and the second pipe (2), respectively.
7. A pipeline for conveying semiconductor special gases as described in claim 6, characterized in that, The two sealing components (4) each include an arc-shaped block (9) at the upper and lower ends of the first pipe (1) and the second pipe (2), wherein the lower ends of the two arc-shaped blocks (9) near the upper end are respectively fixedly connected to the front and rear sides of the lower end of the first connecting block (10), and the upper ends of the two arc-shaped blocks (9) near the lower end are respectively fixedly connected to the front and rear sides of the upper end of the second connecting block (24), and the eight first connecting blocks (10) are respectively detachably fixedly connected to the eight second connecting blocks (24) at corresponding positions with bolts and nuts.
8. The pipeline for conveying semiconductor special gases as described in claim 7, characterized in that, The two sealing components (4) also include screws (11) disposed on one side of the four arc blocks (9). Each of the four arc blocks (9) is provided with a threaded groove (13). The four screws (11) are threadedly connected to the four threaded grooves (13). The extended ends of the four screws (11) pass through the four threaded grooves (13) and are respectively connected to arc-shaped positioning blocks (12) via bearings. The four arc-shaped positioning blocks (12) are respectively in contact with the outside of the two rubber sealing tubes (7). Guide rods (14) are fixedly connected to both ends of the side of the four arc-shaped positioning blocks (12) near the four threaded grooves (13). The extended ends of the eight guide rods (14) pass through the four arc blocks (9).