Device for improving instantaneous pressure at valve end of gas pipeline

Abstract

The utility model discloses a device for improving instantaneous pressure of a gas pipeline valve end, and relates to the technical field of semiconductor etching, the device comprises a bottom plate, a main pipeline and a branch pipeline, the upper end face of the bottom plate is fixedly connected with a first diaphragm valve, and the upper end face of the bottom plate is fixedly connected with a second diaphragm valve; the gas pipeline system has the advantages that the pressure of the main pipeline can be shared by additionally arranging the branch pipelines, in the gas pipeline system, the pressure of the main pipeline is high, when gas is shunted to the branch pipelines, the pressure can be redistributed in the branches, and the pressure of the main pipeline can be redistributed by adjusting the opening degree of the valves on the branch pipelines. The gas flow in the branch can be changed, then the pressure of the branch is changed, the instantaneous pressure when the valve is opened can be reduced, the stable pressure can be achieved more quickly, the structure is simple, the stability is good, the adaptability is good, the instantaneous pressure of the gas can be remarkably reduced, and therefore the influence on a wafer is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor etching technology, specifically a device for improving the instantaneous pressure at the valve end of a gas pipeline. Background Technology

[0002] In the etching process, heat may be generated, which can affect the etching rate and the uniformity of etching. Cooling the back of the wafer using gas pipelines can regulate the wafer temperature, so that the etching process is carried out under the optimal temperature conditions, thereby improving the etching quality and reducing etching defects caused by temperature inhomogeneity.

[0003] In the prior art, the gas flow rate is stably controlled by setting the target pressure through a pressure controller. However, when the diaphragm valve at the back end of the pressure controller is closed, the gas accumulates in the pipeline and forms high pressure. When the diaphragm valve at the back end is opened, the gas pressure is too high, which can easily affect the adsorption of the wafer. Therefore, we propose a device to improve the instantaneous pressure at the valve end of the gas pipeline. Utility Model Content

[0004] The purpose of this invention is to provide a device for improving the instantaneous pressure at the valve end of a gas pipeline.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a device for improving the instantaneous pressure at the valve end of a gas pipeline, comprising a base plate, a main pipeline, and branch pipelines. A first diaphragm valve, a second diaphragm valve, a third diaphragm valve, and a fourth diaphragm valve are fixedly connected to the upper end face of the base plate. A pressure reducing valve and a manual valve are also fixedly connected to the upper end face of the base plate. An inlet pipe is installed at the inlet end of the manual valve, and a pressure gauge is installed at the outlet end of the pressure reducing valve. A filter is installed at the inlet end of the first diaphragm valve. A pressure controller is fixedly connected to the upper end face of the base plate. The pressure controller is connected to the second diaphragm valve via the main pipeline. An exhaust pipe is installed between the second and fourth diaphragm valves. A suction pipe is installed at the inlet end of the fourth diaphragm valve, and a needle valve is installed at the inlet end of the third diaphragm valve.

[0006] As a further embodiment of this utility model: the air inlet of the needle valve is connected to the main pipeline between the pressure controller and the second diaphragm valve through a branch pipeline.

[0007] As a further embodiment of this utility model: the outlet end of the third diaphragm valve is connected to the extraction pipe through a branch pipe.

[0008] As a further embodiment of this utility model: the first diaphragm valve and the pressure controller are connected via a main pipeline.

[0009] As a further embodiment of this utility model: the manual valve and the pressure reducing valve are connected together.

[0010] As a further embodiment of this invention: the filter is connected to the pressure gauge.

[0011] As a further embodiment of this utility model, the number of both the main pipeline and the branch pipeline is set to two.

[0012] Compared with the prior art, the beneficial effects of this utility model by adopting the above technical solution are as follows:

[0013] 1. This utility model can share the pressure of the main pipeline by adding branch pipelines. In a gas pipeline system, the pressure of the main pipeline is high. When the gas is diverted to the branch pipelines, the pressure will be redistributed in each branch. By adjusting the opening of the valve on the branch pipeline, the gas flow rate in the branch can be changed, thereby changing the pressure of the branch. This can reduce the instantaneous pressure when the valve is opened and reach a stable pressure more quickly. The structure is simple, stable, and adaptable. It can significantly reduce the instantaneous gas pressure, thereby reducing the impact on the wafer.

[0014] 2. This utility model uses branch pipes as backup channels. If the main pipe or other branch pipes experience blockages, leaks, or other malfunctions, the branch pipes can continue to operate and maintain a certain cooling function. In the actual wafer manufacturing process, the cooling intensity of different areas can be flexibly adjusted by controlling the opening and closing of the branch pipes according to different process requirements and wafer heat generation.

[0015] Other advantages, objectives and features of this invention will be set forth in part in the description which follows, and in part will be apparent to those skilled in the art from the following examination or study, or may be taught from the practice of this invention. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure in an embodiment of the present utility model;

[0017] Figure 2 This is a top view of the structure in an embodiment of the present invention.

[0018] In the diagram: 1. Base plate; 2. First diaphragm valve; 3. Filter; 4. Pressure gauge; 5. Pressure reducing valve; 6. Manual valve; 7. Inlet pipe; 8. Extraction pipe; 9. Pressure controller; 10. Second diaphragm valve; 11. Third diaphragm valve; 12. Needle valve; 13. Branch pipe; 14. Main pipe; 15. Exhaust pipe; 16. Fourth diaphragm valve. Detailed Implementation

[0019] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings. It should be noted that the description of these embodiments is for the purpose of helping to understand this utility model, but does not constitute a limitation on this utility model.

[0020] Furthermore, the technical features involved in the various embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0021] Please see the appendix Figure 1 - Appendix Figure 2 This utility model discloses a device for improving the instantaneous pressure at the valve end of a gas pipeline. It includes a base plate 1, a main pipeline 14, and a branch pipeline 13. A first diaphragm valve 2, a second diaphragm valve 10, a third diaphragm valve 11, and a fourth diaphragm valve 16 are fixedly connected to the upper end of the base plate 1. A pressure reducing valve 5 and a manual valve 6 are also fixedly connected to the upper end of the base plate 1. An inlet pipe 7 is installed at the inlet end of the manual valve 6. A pressure gauge 4 is installed at the outlet end of the pressure reducing valve 5. The inlet end of the first diaphragm valve 2... A filter 3 is installed, and a pressure controller 9 is fixedly connected to the upper end of the base plate 1. The pressure controller 9 is connected to the second diaphragm valve 10 through the main pipeline 14. The second diaphragm valve 10 and the fourth diaphragm valve 16 are connected by an exhaust pipe 15. An air extraction pipe 8 is installed at the air inlet of the fourth diaphragm valve 16. A needle valve 12 is installed at the air inlet of the third diaphragm valve 11. The first diaphragm valve 2 is connected to the pressure controller 9 through the main pipeline 14. The manual valve 6 is connected to the pressure reducing valve 5. The filter 3 is connected to the pressure gauge 4. The number of main pipeline 14 and branch pipeline 13 is set to two.

[0022] In the first embodiment, the air inlet of the needle valve 12 is connected to the main pipeline 14 between the pressure controller 9 and the second diaphragm valve 10 via the branch pipeline 13.

[0023] Specifically, the gas in the main pipeline 14 can be diverted to the branch pipeline 13 for depressurization. At the same time, the flow rate on the branch pipeline 13 can be adjusted by the needle valve 12. When the main pipeline 14 is blocked or leaking, the branch pipeline 13 can continue to work and maintain a certain cooling function.

[0024] In Example 2, the outlet of the third diaphragm valve 11 is connected to the extraction pipe 8 through the branch pipe 13.

[0025] Specifically, the gas in the branch pipe 13 can enter the extraction pipe 8 through the third diaphragm valve 11. The extraction pipe 8 can be used to release excess instantaneous pressure, reduce the instantaneous pressure of the gas in the main pipe 14, and reduce the impact of the instantaneous pressure of the gas discharge on the wafer.

[0026] Working principle:

[0027] First, high-pressure gas enters the entire device through the inlet pipe 7. Operators can manually open the manual valve 6 to allow the high-pressure gas to enter the pressure reducing valve 5 for pressure reduction. The pressure reducing valve 5 lowers the pressure of the high-pressure gas to below the set value and maintains a stable outlet pressure. The pressure of the reduced-pressure gas is monitored in real time by the pressure gauge 4, which accurately displays the pressure of the gas on the dial. Simultaneously, the gas passes through the filter 3 to remove impurities. During normal operation, the first diaphragm valve 2 is opened, and the treated gas, after pressure control by the pressure controller 9, enters the main pipeline. In pipeline 14, simultaneously, the third diaphragm valve 11 is opened, allowing a portion of the gas in the main pipeline 14 to enter the third diaphragm valve 11 through the branch pipeline 13, thus stabilizing the pressure in the entire pipeline. Then, the second diaphragm valve 10 is opened, preventing pressure fluctuations in the exhaust pipe 15 due to excessive instantaneous pressure. Based on the required process pressure, the needle valve 12 on the bypass pipeline is adjusted to regulate the bypass flow rate, resulting in the total flow rate at that pressure = bypass flow rate + main pipeline flow rate. The branch pipeline 13, connected to the extraction pipe 8, releases excess instantaneous pressure. At this point, the entire workflow is complete.

[0028] The terms "front," "back," "left," "right," "top," and "bottom" all refer to the figures in the accompanying drawings. Figure 1 Based on the perspective of the observer, the side of the device facing the observer is defined as the front, the left side of the observer is defined as the left, and so on.

[0029] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this utility model.

[0030] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments.

[0031] For those skilled in the art, various changes, modifications, substitutions, and alterations to these embodiments without departing from the principles and spirit of this utility model will still fall within the protection scope of this utility model.

Claims

1. A device for improving the instantaneous pressure at the valve end of a gas pipeline, comprising a base plate (1), a main pipeline (14), and a branch pipeline (13), characterized in that: A first diaphragm valve (2) is fixedly connected to the upper end face of the base plate (1), a second diaphragm valve (10) is fixedly connected to the upper end face of the base plate (1), a third diaphragm valve (11) is fixedly connected to the upper end face of the base plate (1), a fourth diaphragm valve (16) is fixedly connected to the upper end face of the base plate (1), a pressure reducing valve (5) is fixedly connected to the upper end face of the base plate (1), a manual valve (6) is fixedly connected to the upper end face of the base plate (1), an air inlet pipe (7) is installed at the air inlet end of the manual valve (6), and the air outlet of the pressure reducing valve (5) is... A pressure gauge (4) is installed at the end of the first diaphragm valve (2), a filter (3) is installed at the air inlet end of the first diaphragm valve (2), a pressure controller (9) is fixedly connected to the upper end face of the base plate (1), the pressure controller (9) is connected to the second diaphragm valve (10) through the main pipeline (14), the second diaphragm valve (10) and the fourth diaphragm valve (16) are connected by an exhaust pipe (15), the air inlet end of the fourth diaphragm valve (16) is connected by an air extraction pipe (8), and the air inlet end of the third diaphragm valve (11) is connected by a needle valve (12).

2. The device for improving the instantaneous pressure at the valve end of a gas pipeline according to claim 1, characterized in that: The air inlet of the needle valve (12) is connected to the main pipeline (14) between the pressure controller (9) and the second diaphragm valve (10) via a branch pipeline (13).

3. The device for improving the instantaneous pressure at the valve end of a gas pipeline according to claim 1, characterized in that: The outlet of the third diaphragm valve (11) is connected to the extraction pipe (8) through a branch pipe (13).

4. The device for improving the instantaneous pressure at the valve end of a gas pipeline according to claim 1, characterized in that: The first diaphragm valve (2) is connected to the pressure controller (9) via the main pipeline (14).

5. The device for improving the instantaneous pressure at the valve end of a gas pipeline according to claim 1, characterized in that: The manual valve (6) is connected to the pressure reducing valve (5).

6. The device for improving the instantaneous pressure at the valve end of a gas pipeline according to claim 1, characterized in that: The filter (3) is connected to the pressure gauge (4).

7. The device for improving the instantaneous pressure at the valve end of a gas pipeline according to claim 1, characterized in that: The number of main pipeline (14) and branch pipeline (13) is set to two.

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