Scratch detection device

Abstract

The utility model discloses a scratch detection device which comprises a support assembly, a detection assembly, an adjusting assembly and a rotating assembly, wherein the detection assembly and the adjusting assembly are arranged at the two ends of the support assembly respectively, and the rotating assembly is arranged on the side, close to the detection assembly, of the adjusting assembly. The ceramic plate is arranged on the rotating assembly, the detection assembly comprises a lighting part, a shooting part arranged at the end, away from the adjusting assembly, of the lighting part and a display part electrically connected with the shooting part, the shooting part directly faces the hollow part of the lighting part so as to be aligned with the ceramic plate, and the adjusting assembly is adjusted to drive the ceramic plate to move in the length direction of the adjusting assembly. And adjusting the rotating assembly and driving the ceramic disc to rotate so as to enable the wafer to directly face the shooting piece, thereby displaying the image of the wafer on the display piece. According to the utility model, the ceramic disc is arranged on the rotating assembly, the wafer is aligned with the shooting piece by controlling the adjusting assembly and the rotating assembly, and the image of the wafer is displayed on the display piece, so that smaller scratches are amplified and detected more easily.

Description

Technical Field

[0001] This utility model relates to the field of sapphire wafer processing, and specifically to a scratch detection device. Background Technology

[0002] In the semiconductor industry, sapphire substrates are crucial materials for processing blue light-emitting diodes (LEDs), holding a pivotal position in the semiconductor field. Typically, the epitaxial layers of GaN-based materials and devices are primarily grown on sapphire substrates. Sapphire substrate manufacturing technology is mature, resulting in high-quality devices. Furthermore, sapphire's excellent stability allows for high-temperature growth processes, and its high mechanical strength makes it easy to handle and clean. Therefore, sapphire is generally used as the substrate material in most processes.

[0003] Currently, in electronic display devices, the thickness of sapphire substrates is only a few hundred micrometers. In the CMP (mechanical chemical polishing) process of sapphire substrates, the substrate is attached to a ceramic disk, and the surface of the wafer is etched and oxidized through chemical action. Combined with the mechanical processing of polishing abrasives, the surface of the product is cut to obtain better smoothness and flatness. Since the abrasives used in CMP are prone to crystallization and scratches, it is necessary to remove the wafer from the ceramic disk by scraping, clean it, and then arrange for inspection personnel to visually inspect it.

[0004] However, small scratches are difficult to detect with the naked eye, so only random sampling is possible, making it difficult to detect defective products and resulting in low detection efficiency. Utility Model Content

[0005] Based on this, the purpose of this utility model is to provide a scratch detection device, which aims to solve the problem that small scratches are difficult to detect by direct visual inspection, resulting in only random sampling and making it difficult to detect defective products, thus leading to low detection efficiency.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a scratch detection device, comprising a support assembly, a detection assembly and an adjustment assembly respectively disposed at both ends of the support assembly, and a rotation assembly disposed on the side of the adjustment assembly closer to the detection assembly;

[0007] A ceramic disk is disposed on the rotating assembly. The detection assembly includes an illumination element, an imaging element disposed at the end of the illumination element away from the adjustment assembly, and a display element electrically connected to the imaging element. The imaging element is aligned with the cutout portion of the illumination element to align with the ceramic disk. The adjustment assembly is adjusted to move the ceramic disk along the length direction of the adjustment assembly, and the rotating assembly is adjusted to rotate the ceramic disk so that the wafer is aligned with the imaging element, thereby displaying the image of the wafer on the display element.

[0008] In summary, the scratch detection device proposed in this utility model, by placing a ceramic disc on a rotating assembly and controlling the adjusting and rotating assemblies to align the wafer with the imaging element, displays the image of the wafer on a display, thus magnifying smaller scratches and making them easier to detect. Specifically, the ceramic disc is placed on the rotating assembly, and the detection assembly includes an illumination element, an imaging element located at the end of the illumination element away from the adjusting assembly, and a display electrically connected to the imaging element. The imaging element faces the cutout portion of the illumination element to align with the ceramic disc. Adjusting the adjusting assembly moves the ceramic disc along the length of the adjusting assembly, while simultaneously adjusting the rotating assembly to rotate the ceramic disc, ensuring that all wafers on the ceramic disc are illuminated by the imaging element, and the image is displayed on the display, allowing inspectors to more intuitively and clearly detect scratches on the wafer.

[0009] Furthermore, the adjustment component includes a guide rail disposed on the support assembly, a support member clamped on the guide rail, and a rotating member disposed at one end of the guide rail, one end of the rotating member being inserted into the interior of the guide rail.

[0010] Furthermore, a transmission rod is provided between the rotating component and the bearing component, and rotating the rotating component drives the bearing component to move along the length direction of the guide rail.

[0011] Furthermore, the rotating assembly includes a fixing member disposed on the support member, a connecting rod disposed on the side of the fixing member away from the support member, and a turntable rotatably connected to the connecting rod, the connecting rod passing through the center of the turntable.

[0012] Furthermore, the turntable is provided with multiple support columns for connecting the ceramic disc.

[0013] Furthermore, the bracket assembly includes a base for fixing the guide rail, a first bracket perpendicular to the base, and a second bracket perpendicular to the first bracket. The lighting element and the shooting element are connected to the first bracket, and the display element is disposed on the second bracket.

[0014] Furthermore, both the first bracket and the second bracket have several parallel mounting grooves along their length on their sides.

[0015] Furthermore, reinforcing brackets are provided at the connection points between the base and the first bracket, and between the first bracket and the second bracket, and fasteners pass through the reinforcing brackets and are connected to the mounting slots.

[0016] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0018] Figure 1 This is a schematic diagram of the scratch detection device in one embodiment of the present invention;

[0019] Figure 2 This is a schematic diagram of the rotating assembly in one embodiment of the present invention;

[0020] Figure 3 This is a schematic diagram of the support assembly in one embodiment of the present invention;

[0021] Figure 4 This is a schematic diagram of the structure of the adjustment component in one embodiment of the present invention.

[0022] Component symbol explanation in the attached diagram:

[0023] The components include: detection component 100, illumination component 110, first connecting bracket 111, imaging component 120, second connecting bracket 121, display component 130, adjustment component 200, guide rail 210, bearing component 220, rotating component 230, transmission rod 240, rotation component 300, fixing component 310, connecting rod 320, turntable 330, support column 340, bracket assembly 400, base 410, first bracket 420, first mounting slot 421, second bracket 430, second mounting slot 431, reinforcing bracket 440, ceramic disk 500, and wafer 600. Detailed Implementation

[0024] To make the objectives, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model are described in detail below with reference to the accompanying drawings. Several embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to make the disclosure of this utility model more thorough and complete.

[0025] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "left," "right," "upper," "lower," and similar expressions used herein are for illustrative purposes only and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention.

[0026] In this utility model, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances. The term "and / or" as used herein includes any and all combinations of one or more of the related listed items.

[0027] Please see Figures 1-4 The diagram shows a schematic representation of a scratch detection device according to an embodiment of the present invention. The scratch detection device includes a support assembly 400, a detection assembly 100 and an adjustment assembly 200 respectively disposed at both ends of the support assembly 400, and a rotation assembly 300 disposed on the side of the adjustment assembly 200 near the detection assembly 100.

[0028] To support the detection component 100, adjustment component 200, and rotation component 300, the support assembly 400 includes a base 410, a first support 420 perpendicular to the base 410, and a second support 430 perpendicular to the first support 420. The adjustment component 200 is mounted on the base 410, the rotation component 300 is located on the side of the adjustment component 200 away from the base 410, and the detection component 100 is mounted on the first support 420 and the second support 430. The adjustment component 200 and the rotation component 300 work together to rotate or move the ceramic disk 500, thereby positioning the wafer 600 directly below the detection component 100 for detection.

[0029] To facilitate the assembly of the first bracket 420 and the second bracket 430, and the mounting of the detection component 100 onto the first bracket 420 and the second bracket 430, several parallel first mounting grooves 421 and second mounting grooves 431 are provided along the length of each side of the first bracket 420 and the second bracket 430. In this embodiment, the first bracket 420 and the second bracket 430 are rectangular elongated mounting ridges, and each side is provided with two mounting grooves.

[0030] Furthermore, since the ends of the first bracket 420 and the second bracket 430 cannot be supported for mounting, a reinforcing bracket 440 is provided at the ends of the first bracket 420 and the second bracket 430 to mount the first bracket 420 to the base 410 and the second bracket 430 to the side of the first bracket 420. The reinforcing bracket 440 is an L-shaped bracket with mounting holes on both sides, and the distance between the mounting holes on the same side is equal to the distance between the mounting slots on the same side. At the connection between the base 410 and the first bracket 420, fasteners pass through the mounting holes on both sides of the reinforcing bracket 440 to connect to the first bracket 420 and the base 410 respectively, thereby fixing the first bracket 420 to the base 410. At the connection between the first bracket 420 and the second bracket 430, fasteners pass through the mounting holes on both sides of the reinforcing bracket 440 to connect to the mounting slots on the first bracket 420 and the second bracket 430 respectively, thereby assembling the base 410, the first bracket 420, and the second bracket 430 into a single unit. In this embodiment, two reinforcing brackets 440 are provided at the connection between the first bracket 420 and the base 410, and at the connection between the first bracket 420 and the second bracket 430.

[0031] To improve detection efficiency, a detection assembly 100 is provided on the first support 420 and the second support 430. The detection assembly 100 includes an illumination element 110, an imaging element 120 disposed at the end of the illumination element 110 away from the adjustment assembly 200, and a display element 130 electrically connected to the imaging element 120. The illumination element 110 is connected to the first mounting slot 421 via a first connecting bracket 111, and the imaging element 120 is connected to the second mounting slot 431 via a second connecting bracket 121. To avoid obstructing the imaging element 120 from capturing the image of the chip 600 in well-lit environments, a cutout is provided in the middle of the illumination element 110, and the imaging element 120 faces the cutout to align with the chip 600 directly below it. In addition, to display the images captured by the camera 120 and to avoid interference between components, the display 130 is mounted on the second bracket 430. After the camera 120 captures an image of the chip 600, the image is displayed to the inspection personnel in real time through the display 130, magnifying smaller scratches and making them easier to detect, further improving inspection efficiency. In this embodiment, the camera 120 is a 0.5x 4K 1.85µm vision camera; the display 130 is a 19-inch display.

[0032] Since the position of the imaging component 120 is fixed, the position of the ceramic disk 500 needs to be adjusted using the adjustment component 200 and the rotation component 300 to ensure that each wafer 600 can be imaged. The adjustment component 200 includes a guide rail 210 mounted on the base 410, a support component 220 mounted on the guide rail 210, and a rotating component 230 located at one end of the guide rail 210. One end of the rotating component 230 passes inside the guide rail 210, and a transmission rod 240 is provided between the rotating component 230 and the support component 220. After the imaging component 120 images the wafers 600 on the outer ring of the ceramic disk 500, the rotating component 230 is rotated, causing the transmission rod 240 to move the support component 220 along the length of the guide rail 210, so that the wafers 600 on the inner ring are directly below the imaging component 120. In this embodiment, the length of the guide rail 210 is approximately 2800 mm.

[0033] Since each wafer 600 located in both the outer and inner rings needs to be photographed, a rotating assembly 300 is provided on the carrier 220. The rotating assembly 300 includes a fixing member 310 located on the carrier 220, a connecting rod 320 located on the side of the fixing member 310 away from the carrier 220, and a turntable 330 rotatably connected to the connecting rod 320. The connecting rod 320 passes through the center of the turntable 330, and the turntable 330 is provided with multiple support columns 340 for connecting the ceramic disk 500. The fixing member 310 is fixed to the carrier 220 by fasteners. The two ends of the connecting rod 320 pass through the fixing member 310 and the turntable 330, respectively. Since the turntable 330 and the ceramic disk 500 are connected as one unit through the support columns 340, when the turntable 330 rotates, it can drive the ceramic disk 500 to rotate simultaneously, so that the wafers 600 located in either the inner or outer ring can be photographed. The above structure significantly improves the inspection efficiency of the wafer 600, making it easy to detect even small scratches, reducing the workload of inspection personnel and minimizing visual fatigue. In this embodiment, the turntable 330 is a stainless steel base plate capable of supporting a weight of over 20KG; the turntable 330 is a 360° rotating platform with a diameter of approximately 5200mm; and there are four support columns 340, each approximately 20mm high.

[0034] In summary, the scratch detection device proposed in this utility model, by placing a ceramic disc on a rotating assembly and controlling the adjusting and rotating assemblies to align the wafer with the imaging element, displays the image of the wafer on a display, thus magnifying smaller scratches and making them easier to detect. Specifically, the ceramic disc is placed on the rotating assembly, and the detection assembly includes an illumination element, an imaging element located at the end of the illumination element away from the adjusting assembly, and a display electrically connected to the imaging element. The imaging element faces the cutout portion of the illumination element to align with the ceramic disc. Adjusting the adjusting assembly moves the ceramic disc along the length of the adjusting assembly, while simultaneously adjusting the rotating assembly to rotate the ceramic disc, ensuring that all wafers on the ceramic disc are illuminated by the imaging element, and the image is displayed on the display, allowing inspectors to more intuitively and clearly detect scratches on the wafer.

[0035] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0036] The above-described embodiments are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A scratch detection device, characterized in that, It includes a support assembly, a detection assembly and an adjustment assembly respectively disposed at both ends of the support assembly, and a rotation assembly disposed on the side of the adjustment assembly closer to the detection assembly; A ceramic disc is mounted on the rotating assembly. The detection assembly includes an illumination element, an imaging element located at the end of the illumination element away from the adjustment assembly, and a display element electrically connected to the imaging element. The imaging element faces the cutout portion of the illumination element to align with the ceramic disc. The adjustment assembly is adjusted to move the ceramic disc along the length of the adjustment assembly, and the rotating assembly is adjusted to rotate the ceramic disc so that the wafer faces the imaging element, thereby displaying the image of the wafer on the display element.

2. The scratch detection device according to claim 1, characterized in that, The adjustment assembly includes a guide rail disposed on the support assembly, a support member clamped on the guide rail, and a rotating member disposed at one end of the guide rail, with one end of the rotating member extending into the interior of the guide rail.

3. The scratch detection device according to claim 2, characterized in that, A transmission rod is provided between the rotating component and the bearing component. Rotating the rotating component drives the bearing component to move along the length direction of the guide rail.

4. The scratch detection device according to claim 1, characterized in that, The rotating assembly includes a fixing member disposed on a support member, a connecting rod disposed on the side of the fixing member away from the support member, and a turntable rotatably connected to the connecting rod, wherein the connecting rod passes through the center of the turntable.

5. The scratch detection device according to claim 4, characterized in that, The turntable is equipped with multiple support columns for connecting ceramic discs.

6. The scratch detection device according to claim 1, characterized in that, The bracket assembly includes a base with a fixed guide rail, a first bracket perpendicular to the base, and a second bracket perpendicular to the first bracket. The lighting element and the shooting element are connected to the first bracket, and the display element is disposed on the second bracket.

7. The scratch detection device according to claim 6, characterized in that, Both the first bracket and the second bracket have several parallel first mounting grooves and second mounting grooves on their sides along their length.

8. The scratch detection device according to claim 7, characterized in that, The base and the first bracket, as well as the connection between the first bracket and the second bracket, are all provided with reinforcing brackets. Fasteners pass through the reinforcing brackets and are connected to the first mounting slot and the second mounting slot.

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