Auxiliary device for wafer detection
By using an auxiliary device that adjusts the angle between the microscope objective and the wafer inspection plane, combined with a polarized light source and a camera, the problem of detecting dark cracks in wafers that is difficult to detect with traditional microscopes has been solved, achieving efficient and comprehensive wafer appearance inspection.
Patent Information
- Application Number
- CN202423002795.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-05
- Publication Date
- 2025-11-11
- Estimated Expiration
- 2034-12-05
AI Technical Summary
Traditional microscopes are difficult to inspect for dark cracks in wafers when placed normally, and there is a risk of dropping the wafer when placed at an angle, making it difficult to inspect the appearance of the wafer.
An auxiliary device for wafer inspection was designed. By adjusting the angle between the axis of the microscope objective and the wafer inspection plane, and combining a polarized light source and a camera, multi-angle inspection of the wafer can be achieved.
It improves the efficiency of wafer inspection, avoids missing visual features, reduces the risk of chip dropping, and enhances the comprehensiveness and accuracy of inspection.
Smart Images
Figure CN223538793U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of wafer inspection technology, specifically relating to an auxiliary device for wafer inspection. Background Technology
[0002] A bare die is a chip that has been diced but not yet packaged. It typically needs to undergo inspection and meet requirements before proceeding to the subsequent packaging process. Visual inspection of the die usually requires a microscope, where the vertical magnification is adjusted to obtain an image of the die. Ordinary microscopes are not effective at detecting dark cracks under white light, easily leading to missed detections. Therefore, the traditional method for detecting dark cracks involves tilting the die and obtaining an image under red light and a grayscale image. However, tilting the die carries the risk of dropping it, and the grayscale image still results in a blurry picture, making it difficult to detect other visual abnormalities.
[0003] Therefore, in view of the above-mentioned technical problems, it is necessary to provide an auxiliary device for wafer inspection. Utility Model Content
[0004] The purpose of this invention is to provide an auxiliary device for wafer inspection, which can solve the problem that it is not easy to detect dark cracks in wafers when the microscope is placed normally, but there is a risk of wafer dropping when the wafer is placed at an angle, which makes wafer appearance inspection difficult.
[0005] To achieve the above objectives, the technical solution provided by a specific embodiment of this utility model is as follows:
[0006] An auxiliary device for wafer inspection includes a main rod, a support rod, and a connector connecting the main rod and the support rod; the end of the support rod away from the connector is used to connect an external microscope, and the support rod and the connector are movably coupled so that the support rod can be operably rotated about its own axis to adjust the angle between the axis of the microscope objective and the wafer inspection plane.
[0007] In one or more embodiments of this utility model, the connector includes a first through hole and a second through hole that do not interfere with each other, the main rod is slidably inserted through the first through hole, and the support rod is rotatably inserted through the second through hole about its own axis.
[0008] In one or more embodiments of the present invention, the wafer inspection auxiliary device further includes a first locking member that can cooperate to lock the connector to the main rod, and a second locking member that can cooperate to lock the support rod to the connector.
[0009] In one or more embodiments of this utility model, the connector is provided with a locking hole communicating with the first through hole or the second through hole; the first locking member or the second locking member is a locking nut, the locking nut is threadedly connected to the locking hole, and the locking nut can be pressed against or moved away from the main rod or the support rod through the locking hole.
[0010] In one or more embodiments of this utility model, the support rod can also slide along the extension direction of the second through hole to adjust the position of the microscope objective.
[0011] In one or more embodiments of this utility model, at least two second locking members are provided, the axes of the at least two second locking members are located on both sides of the main rod, and the at least two second locking members are located on the same side of the connector.
[0012] In one or more embodiments of this utility model, the support rod can be operably rotated about its axis so that the angle between the axis of the microscope objective and the wafer detection plane is an acute angle or a right angle, respectively used to detect the appearance of dark cracks or non-dark cracks on the wafer.
[0013] In one or more embodiments of this utility model, the auxiliary device for wafer inspection further includes an adapter rod installed at the end of the support rod away from the connector, the adapter rod being used to connect an external microscope, and the axis of the adapter rod having an angle with the axis of the support rod.
[0014] In one or more embodiments of this utility model, an adapter is fixed to one end of the support rod away from the connector, the adapter has an adapter hole, the adapter rod is slidably inserted through the adapter hole, and one end of the adapter rod is fixed with a limiting cap that can abut against the adapter.
[0015] In one or more embodiments of the present invention, the auxiliary device for wafer inspection further includes a polarized light source controllably configured in conjunction with the microscope objective, wherein the illumination direction of the polarized light source is toward the wafer;
[0016] And / or, the wafer inspection auxiliary device further includes a camera mounted in conjunction with the microscope, the camera being externally connected to a computer.
[0017] Compared with existing technologies, in the auxiliary device for wafer inspection of this invention, when the support rod is rotated to make the angle between the axis of the microscope objective and the wafer inspection plane acute, the microscope is tilted while the wafer is placed horizontally. This allows for the detection of dark cracks on the wafer and reduces the risk of wafer breakage. When the support rod is rotated to make the angle between the axis of the microscope objective and the wafer inspection plane right, it can be used to detect grinding marks, scratches, and other appearance features. Therefore, when the auxiliary device for wafer inspection of this invention is connected to a microscope, the angle between the axis of the microscope objective and the wafer inspection plane can be adjusted by rotating the support rod, which can assist in the detection of various appearance features of the wafer, avoid missed appearance features, and improve the efficiency of wafer inspection. Attached Figure Description
[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0019] Figure 1 This is a schematic diagram of the structure of an auxiliary device for wafer inspection in one embodiment of the present invention;
[0020] Figure 2 This is a schematic diagram of the connecting member of the auxiliary device for wafer inspection in one embodiment of the present invention;
[0021] Figure 3 This is a schematic diagram of the assembly of the auxiliary device for wafer inspection and the microscope in one embodiment of the present invention;
[0022] Figure 4 This is a schematic diagram of the structure of the auxiliary device for microscope relative to wafer inspection tilting and rotating in one embodiment of the present invention.
[0023] Explanation of key figure labels:
[0024] 1. Main rod; 2. Support rod; 3. Connector; 31. First through hole; 32. Second through hole; 33. Locking hole; 4. First locking component; 5. Second locking component; 6. Adapter rod; 61. Limiting cover; 7. Adapter; 8. Base. Detailed Implementation
[0025] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.
[0026] Reference Figure 1 In one embodiment of this utility model, the auxiliary device for wafer inspection includes a main rod 1, a support rod 2, and a connector 3 connecting the main rod 1 and the support rod 2; the end of the support rod 2 away from the connector 3 is used to connect an external microscope (see...). Figure 3 The support rod 2 and the connecting piece 3 are movably coupled, allowing the support rod 2 to be operably rotated about its own axis to adjust the angle between the axis of the microscope objective and the wafer detection plane. In this embodiment, the axis of the support rod 2 is parallel to the wafer detection plane. The support rod 2 can be operably rotated about its axis so that the angle between the axis of the microscope objective and the wafer detection plane is an acute angle or a right angle, respectively used to detect the appearance features of dark cracks or non-dark cracks on the wafer.
[0027] When inspecting for dark cracks in a wafer, operate the rotating support rod 2 so that the angle between the axis of the microscope objective and the wafer inspection plane is an acute angle (in conjunction with...). Figure 4 At this point, the microscope is tilted while the wafer is placed horizontally. Next, the microscope's focus is adjusted to make the image clear, and a red light source is set accordingly, with the image displayed in grayscale. This allows for the detection of any dark cracks on the wafer.
[0028] When detecting grinding marks and scratches on a wafer, rotate the support rod 2 so that the angle between the axis of the microscope objective and the wafer detection plane is a right angle. At this time, it can be used to detect whether there are grinding marks or scratches on the wafer.
[0029] Therefore, after the auxiliary device for wafer inspection in this embodiment is connected to an external microscope, the angle between the axis of the microscope objective and the wafer inspection plane can be adjusted by rotating the support rod 2. This can help complete the inspection of various appearance features of the wafer, avoid the situation of missing appearance features of the lens, and improve the efficiency of wafer inspection.
[0030] Reference Figure 1 and Figure 2 The connector 3 includes a first through hole 31 and a second through hole 32 that do not interfere with each other. The main rod 1 is slidably inserted through the first through hole 31, and the support rod 2 is rotatably inserted through the second through hole 32 about its own axis. In this embodiment, the axes of the first through hole 31 and the second through hole 32 are perpendicular to each other.
[0031] Reference Figure 1The wafer inspection auxiliary device of this embodiment also includes a first locking member 4 that can cooperate to lock the connecting member 3 to the main rod 1, and a second locking member 5 that can cooperate to lock the support rod 2 to the connecting member 3. Therefore, during inspection, the connecting member 3 can move along the extension direction of the main rod 1 to adjust the height of the microscope. The support rod 2 can rotate within the first through hole 31 on its own axis to adjust the position of the axis of the microscope objective lens and the wafer inspection plane; at the same time, the first locking member 4 and the second locking member 5 can lock the support rod 2, the connecting member 3 and the main rod 1 to determine the optimal position of the microscope.
[0032] Reference Figure 1 and Figure 2 Specifically, the connector 3 has a locking hole 33 that communicates with the first through hole 31 or the second through hole 32; the first locking member 4 or the second locking member 5 is a locking nut, which is threadedly connected to the locking hole 33. The locking nut can be pressed against or moved away from the main rod 1 or the support rod 2 through the locking hole 33. Therefore, after adjusting the height and tilt angle of the microscope, the cooperation between the locking nut and the locking hole 33 can effectively lock the connector 3 to the main rod 1 and the support rod 2 to the connector 3.
[0033] Reference Figure 1 Furthermore, the support rod 2 can also slide along the extension direction of the second through hole 32 to adjust the position of the microscope objective. By sliding the support rod 2 along the extension direction of the second through hole 32, the microscope objective can be adjusted to be directly above the crystal.
[0034] Reference Figure 1 At least two second locking elements 5 are provided, with their axes located on both sides of the main rod 1 and on the same side of the connecting member 3. After the support rod 2 rotates around its own axis, the second locking elements 5 ensure a secure lock between the support rod 2 and the connecting member 3. In this embodiment, two second locking elements 5 are provided; however, this is not a limitation on the number of second locking elements 5 in this embodiment. In other embodiments, there may be three, four, or even more second locking elements 5.
[0035] Reference Figure 1 The wafer inspection auxiliary device in this embodiment also includes an adapter rod 6 installed at the end of the support rod 2 away from the connector 3. The adapter rod 6 is used to connect an external microscope, and the axis of the adapter rod 6 forms an angle with the axis of the support rod 2. In this embodiment, the angle between the axis of the adapter rod 6 and the axis of the support rod 2 is a right angle. For example, see... Figure 1 and Figure 3The adapter rod 6 can be inserted into the corresponding mating hole of the microscope, and the microscope can also be locked to the adapter rod 6 by setting a locking nut. It should be noted that the above fixing method is only an example and does not impose specific restrictions on the connection method between the microscope and the adapter rod 6. Any method that can fix the microscope and the adapter rod 6 is acceptable.
[0036] Reference Figure 1 Furthermore, an adapter 7 is fixed to the end of the support rod 2 away from the connector 3. The adapter 7 has an adapter hole, through which the adapter rod 6 can slidably pass. One end of the adapter rod 6 is fixed with a limiting cap 61 that can abut against the adapter 7. After the limiting cap 61 abuts against the adapter 7, it can prevent the microscope connected to the adapter rod 6 from slipping off along the axial direction of the adapter rod 6.
[0037] Reference Figure 3 The wafer inspection auxiliary device in this embodiment also includes a polarized light source that can be controllably configured in conjunction with the microscope objective (see...). Figure 3 Mark b) indicates that the polarized light source is directed towards the wafer. Therefore, after adjusting the tilt angle between the microscope objective axis and the wafer detection plane, the focus can be adjusted to make the image clear. Then, the angle knob of the polarized light source can be adjusted until the dark crack is clearly visible. By setting a polarized light source, the detection of dark cracks on the wafer can be further enhanced, avoiding the possibility of missing dark cracks.
[0038] The wafer inspection auxiliary device in this embodiment also includes a camera (see [reference]) that is mounted in conjunction with the microscope. Figure 3 Marked as a), the camera can be connected to an external computer. Connecting the camera to a computer allows the visual inspection footage to be uploaded to the computer for observation by relevant personnel.
[0039] In one optional embodiment, refer to Figure 1 The main rod 1 is fixedly connected to the base 8, and the connection point between the main rod 1 and the base 8 is located at the edge of the base 8. The base 8 provides effective support for the main rod 1, the support rod 2, and the microscope externally connected to the support rod 2.
[0040] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.
[0041] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
Claims
1. An auxiliary device for wafer inspection, characterized in that, It includes a main rod (1), a support rod (2), and a connector (3) connecting the main rod (1) and the support rod (2); The end of the support rod (2) away from the connector (3) is used to connect an external microscope. The support rod (2) is movably engaged with the connector (3) so that the support rod (2) can be operably rotated about its own axis to adjust the angle between the axis of the microscope objective and the wafer detection plane.
2. The auxiliary device for wafer inspection according to claim 1, characterized in that, The connector (3) includes a first through hole (31) and a second through hole (32) that do not interfere with each other. The main rod (1) is slidably inserted through the first through hole (31), and the support rod (2) is rotatably inserted through the second through hole (32) about its own axis.
3. The auxiliary device for wafer inspection according to claim 2, characterized in that, It also includes a first locking member (4) that can cooperate to lock the connector (3) to the main rod (1), and a second locking member (5) that can cooperate to lock the support rod (2) to the connector (3).
4. The auxiliary device for wafer inspection according to claim 3, characterized in that, The connector (3) has a locking hole (33) that communicates with the first through hole (31) or the second through hole (32); the first locking member (4) or the second locking member (5) is a locking nut, which is threadedly connected to the locking hole (33). The locking nut can be pressed against or moved away from the main rod (1) or the support rod (2) through the locking hole (33).
5. The auxiliary device for wafer inspection according to claim 3, characterized in that, The support rod (2) can also slide along the extension direction of the second through hole (32) to adjust the position of the microscope objective.
6. The auxiliary device for wafer inspection according to claim 3, characterized in that, The second locking member (5) is provided in at least two, the axes of the at least two second locking members (5) are located on both sides of the main rod (1), and the at least two second locking members (5) are located on the same side of the connector (3).
7. The auxiliary device for wafer inspection according to claim 1, characterized in that, The support rod (2) can be operably rotated about its axis so that the angle between the axis of the microscope objective and the wafer detection plane is an acute angle or a right angle, respectively used to detect the appearance of dark cracks or non-dark cracks on the wafer.
8. The auxiliary device for wafer inspection according to claim 1, characterized in that, It also includes an adapter rod (6) installed at the end of the support rod (2) away from the connector (3), the adapter rod (6) being used to connect an external microscope, and the axis of the adapter rod (6) having an angle with the axis of the support rod (2).
9. The auxiliary device for wafer inspection according to claim 8, characterized in that, The support rod (2) is fixed with a connector (7) at one end away from the connector (3). The connector (7) has a connector hole. The connector rod (6) is slidably inserted through the connector hole. One end of the connector rod (6) is fixed with a limiting cap (61) that can abut against the connector (7).
10. The auxiliary device for wafer inspection according to claim 1, characterized in that, It also includes a polarizing light source that can be controllably configured in conjunction with the microscope objective, wherein the illumination direction of the polarizing light source is toward the wafer; And / or, it also includes a camera that is mounted in conjunction with the microscope, the camera being connectable to an external computer.