Reexposure correction equipment for exposure machine

Abstract

The utility model discloses re-exposure correction equipment of an exposure machine, which relates to the technical field of re-exposure correction of the exposure machine and comprises a casing, a support plate is fixedly connected to the upper side of the casing, an exposure box is fixedly connected to the inside of the support plate, an avoiding groove is formed in the side wall of the support plate, and the exposure box is fixedly connected with the avoiding groove. A transmission positioning mechanism is arranged in the machine shell and comprises four fixing blocks fixedly connected to the inner wall of the machine shell, a positioning plate is fixedly connected to one side of every two fixing blocks, and a correction column is controlled to slide through rotation of the output end of a second micro motor; the rotation of the output end of the first electric micro motor controls the correction column to turn, so that the correction column is controlled to abut against the PCB to move, the PCB is exposed in a correct area every time, the correction column can freely adjust the distance needing to be limited and corrected according to the size of the PCB, and the effects that the exposure accuracy of the PCB is high and the exposure position is automatically corrected are achieved.

Description

Technical Field

[0001] This utility model relates to the field of exposure machine re-exposure correction technology, and more specifically, it relates to an exposure machine re-exposure correction device. Background Technology

[0002] Exposure machines include various types with different exposure methods, such as contact exposure machines, projection exposure machines, and scanning exposure machines. Among them, the PCB inner layer CCD exposure machine is an advanced photolithography device, mainly used to manufacture high-precision PCB boards. Its product structure includes a CCD camera, light source, optical system, motion system, and control system. The PCB inner layer CCD exposure machine is suitable for manufacturing various high-precision PCB boards, such as mobile phone boards, computer boards, and automotive electronic boards. In addition, it can also be used to manufacture other electronic products that require high-precision photolithography processes.

[0003] The working principle of a PCB inner layer CCD exposure machine is as follows: light emitted from the light source passes through the optical system and projects the image onto the CCD camera. Then, the CCD camera converts the received image information into electronic signals, which are processed and calculated by the control system. Finally, the motion system moves the photomask to the corresponding position according to the processed signal for exposure.

[0004] In the current PCB exposure process, it is sometimes necessary to expose the PCB on both sides. Double-sided exposure is the process of flipping the PCB after one side has been exposed and exposing it again. However, when the PCB is flipped, the exposure position is prone to misalignment, which affects the double-sided exposure accuracy of the PCB. Utility Model Content

[0005] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide an exposure machine re-exposure correction device.

[0006] To achieve the above objectives, the present invention provides the following technical solution: an exposure machine re-exposure correction device, comprising a housing, a support plate fixedly connected to the upper side of the housing, an exposure box fixedly connected inside the support plate, an avoidance groove provided inside the side wall of the support plate, and a transmission positioning mechanism provided inside the housing.

[0007] The present invention is further configured such that: the transmission positioning mechanism includes four fixed blocks fixedly connected to the inner wall of the housing, and a positioning plate is fixedly connected to one side of every two fixed blocks. The interior of the positioning plate is divided into a first slot and a second slot. A first electric slide rail is fixedly connected to the interior of the first slot, and a second electric slide rail is fixedly connected to the interior of the second slot. The sliding end of the first electric slide rail is fixedly connected to a first correction component, and the sliding end of the second electric slide rail is fixedly connected to a second correction component.

[0008] The present invention is further configured such that: the first correction component and the second correction component have the same structure; the first correction component includes a slide plate fixedly connected to the sliding end of the first electric slide rail; a base plate is fixedly connected to one side of the slide plate; a top plate is hinged to the upper side of the base plate; and a clamping plate is fixedly connected to one side of both the top plate and the base plate.

[0009] The present invention is further configured such that: a cylinder is fixedly connected to one side of the base plate, a first connecting rod is hinged to the output end of the cylinder, the other end of the first connecting rod is hinged to the base plate, a connecting column is fixedly connected to one side of the first connecting rod, and the other end of the connecting column is fixedly connected to the top plate.

[0010] The present invention is further configured such that: the interior of the clamping plate is sequentially divided into a first sliding groove, a second sliding groove, a third sliding groove, a fourth sliding groove, a fifth sliding groove, a sixth sliding groove, a seventh sliding groove, and an eighth sliding groove, and two correction columns are slidably connected inside the first sliding groove, the fourth sliding groove, the fifth sliding groove, and the eighth sliding groove.

[0011] The present invention is further configured such that: the first slide groove, the second slide groove, the third slide groove and the fourth slide groove are parallel to each other, the fifth slide groove, the sixth slide groove, the seventh slide groove and the eighth slide groove are parallel to each other, and the first slide groove, the second slide groove, the third slide groove and the fourth slide groove intersect each other perpendicularly.

[0012] The present invention is further configured such that: the correction column includes a slip ring, a cover plate is fixedly connected to the upper side of the slip ring, a first electric micro motor is fixedly connected to the lower side of the cover plate, a cross-shaped fixing plate is fixedly connected to the output end of the first electric micro motor, a rotating ring is rotatably connected inside the slip ring, the rotating ring is fixedly connected to the cross-shaped fixing plate, a second micro motor is fixedly connected inside the rotating ring, a rotating wheel is fixedly connected to the output end of the second micro motor, the rotating wheel passes through the lower wall of the rotating ring, a rotating shaft is fixedly connected to the other side of the rotating wheel, and the other end of the rotating shaft is connected to the rotating ring bearing.

[0013] In summary, this application includes at least one of the following beneficial technical effects: by rotating the output end of the second micro motor, the correction column is controlled to slide, and by rotating the output end of the first micro motor, the correction column is controlled to turn, thereby controlling the correction column to move against the PCB board, so that the PCB board is exposed in the correct area each time, and the correction column can be freely adjusted according to the size of the PCB board to achieve the effect of high exposure accuracy of the PCB board and automatic correction of the exposure position. Attached Figure Description

[0014] Figure 1This is a schematic diagram of the overall structure of a re-exposure correction device for an exposure machine according to the present invention;

[0015] Figure 2 This is a schematic diagram of the transmission and positioning mechanism of this utility model;

[0016] Figure 3 This is a schematic diagram of the structure of the first correction component of this utility model;

[0017] Figure 4 This is a schematic diagram of the internal structure of the clamping plate of this utility model;

[0018] Figure 5 This is a schematic diagram of the internal structure of the correction column of this utility model.

[0019] Explanation of reference numerals in the attached drawings: 1. Housing; 2. Support plate; 3. Exposure chamber; 4. Transfer and positioning mechanism; 41. Fixing block; 42. Positioning plate; 43. First electric slide rail; 44. Second electric slide rail; 45. First correction assembly; 451. Connecting column; 452. Slide plate; 453. First connecting rod; 454. Cylinder; 455. Base plate; 456. Clamping plate; 457. Top plate; 46. Second correction assembly;

[0020] 51. Correction column; 511. Cover plate; 512. First micro motor; 513. Cross fixing plate; 514. Slip ring; 515. Second micro motor; 516. Rotating ring; 517. Rotating wheel; 518. Rotating shaft; 52. First slide groove; 53. Second slide groove; 54. Third slide groove; 55. Fourth slide groove; 56. Fifth slide groove; 57. Sixth slide groove; 58. Seventh slide groove; 59. Eighth slide groove. Detailed Implementation

[0021] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0022] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0023] Please see Figure 1-5 The present invention provides the following technical solution: an exposure machine re-exposure correction device, including a housing 1, a support plate 2 fixedly connected to the upper side of the housing 1, an exposure box 3 fixedly connected inside the support plate 2, an avoidance groove provided inside the side wall of the support plate 2, and a transmission positioning mechanism 4 provided inside the housing 1.

[0024] Please see Figure 2The transmission positioning mechanism 4 includes four fixed blocks 41 fixedly connected to the inner wall of the housing 1. A positioning plate 42 is fixedly connected to one side of every two fixed blocks 41. The interior of the positioning plate 42 is divided into a first slot and a second slot. A first electric slide rail 43 is fixedly connected to the interior of the first slot, and a second electric slide rail 44 is fixedly connected to the interior of the second slot. The sliding end of the first electric slide rail 43 is fixedly connected to the first correction component 45, and the sliding end of the second electric slide rail 44 is fixedly connected to the second correction component 46.

[0025] Specifically, the first electric slide rail 43 is used to control the first correction component 45 to move left and right, and the second electric slide rail 44 is used to control the second correction component 46 to move left and right. When the first electric slide rail 43 controls the PCB board inside the first correction component 45 to move to the right for exposure, the second electric slide rail 44 controls the PCB board inside the second correction component 46 to move to the left to wait for exposure.

[0026] Please see Figure 3 The first correction component 45 and the second correction component 46 have the same structure. The first correction component 45 includes a slide plate 452 fixedly connected to the sliding end of the first electric slide rail 43. A base plate 455 is fixedly connected to one side of the slide plate 452. A top plate 457 is hinged to the upper side of the base plate 455. A clamping plate 456 is fixedly connected to one side of both the top plate 457 and the base plate 455.

[0027] Specifically, the space between the two clamps 456 is used to place the PCB board.

[0028] A cylinder 454 is fixedly connected to one side of the base plate 455. A first connecting rod 453 is hinged to the output end of the cylinder 454. The other end of the first connecting rod 453 is hinged to the base plate 455. A connecting column 451 is fixedly connected to one side of the first connecting rod 453. The other end of the connecting column 451 is fixedly connected to the top plate 457.

[0029] Specifically, when the top plate 457 needs to be opened, the output end of the cylinder 454 extends, driving the first connecting rod 453 to rotate counterclockwise, thereby raising the connecting post 451. The connecting post 451 indirectly raises the top plate 457, and the top plate 457 rotates counterclockwise and opens, taking out the PCB board with one side exposed, flipping the PCB board and placing it back in to prepare for the exposure of the other side.

[0030] When the top plate 457 needs to be closed, the output end of the cylinder 454 retracts, causing the first connecting rod 453 to rotate clockwise, thereby pressing down the connecting post 451. The connecting post 451 indirectly presses down the top plate 457, and the top plate 457 rotates clockwise and closes, and the PCB board waits for exposure.

[0031] Please see Figure 4The interior of the clamping plate 456 is divided into a first sliding groove 52, a second sliding groove 53, a third sliding groove 54, a fourth sliding groove 55, a fifth sliding groove 56, a sixth sliding groove 57, a seventh sliding groove 58 and an eighth sliding groove 59. The interior of the first sliding groove 52, the fourth sliding groove 55, the fifth sliding groove 56 and the eighth sliding groove 59 are each slidably connected to two correction columns 51.

[0032] Specifically, when the two correction posts 51 slide inside the first slide groove 52, the fourth slide groove 55, the fifth slide groove 56 and the eighth slide groove 59, it indicates that the large PCB board needs to be limited at this time. While the correction posts 51 move, they press against one side of the large PCB board, and the large PCB board is driven to slide and correct. Every two correction posts 51 press against one side of the large PCB board, thereby pressing down the four sides of the large PCB board and performing positioning correction.

[0033] When the two correction posts 51 slide inside the second slide groove 53, the third slide groove 54, the sixth slide groove 57 and the seventh slide groove 58, it indicates that the small PCB board needs to be limited at this time. While the correction posts 51 move, they press against one side of the small PCB board, and the small PCB board is driven to slide and correct. Every two correction posts 51 press against one side of the small PCB board, thereby pressing down the four sides of the small PCB board for positioning and correction.

[0034] The first slide 52, the second slide 53, the third slide 54 and the fourth slide 55 are parallel to each other, the fifth slide 56, the sixth slide 57, the seventh slide 58 and the eighth slide 59 are parallel to each other, and the first slide 52, the second slide 53, the third slide 54, the fourth slide 55 and the fifth slide 56, the sixth slide 57, the seventh slide 58 and the eighth slide 59 intersect each other perpendicularly.

[0035] Please see Figure 5 The correction column 51 includes a slip ring 514. A cover plate 511 is fixedly connected to the upper side of the slip ring 514. A first electric micro motor 512 is fixedly connected to the lower side of the cover plate 511. A cross-shaped fixing plate 513 is fixedly connected to the output end of the first electric micro motor 512. A rotating ring 516 is rotatably connected inside the slip ring 514. The rotating ring 516 is fixedly connected to the cross-shaped fixing plate 513. A second micro motor 515 is fixedly connected inside the rotating ring 516. A rotating wheel 517 is fixedly connected to the output end of the second micro motor 515. The rotating wheel 517 passes through the lower wall of the rotating ring 516. A rotating shaft 518 is fixedly connected to the other side of the rotating wheel 517. The other end of the rotating shaft 518 is connected to the bearing of the rotating ring 516.

[0036] Specifically, when the correction column 51 needs to slide inside the first slide groove 52, the second slide groove 53, the third slide groove 54, the fourth slide groove 55, the fifth slide groove 56, the sixth slide groove 57, the seventh slide groove 58 and the eighth slide groove 59, the output end of the second micro motor 515 rotates, controlling the rotating wheel 517 to rotate. The rotating wheel 517 generates friction with the clamping plate 456, thereby causing the correction column 51 to slide in a straight line.

[0037] When the correction column 51 needs to turn, the output end of the first micro motor 512 rotates 90 degrees, thereby controlling the rotating ring 516 to rotate, which in turn controls the rotating wheel 517 to rotate, causing the direction of the correction column 51 to slide to rotate 90 degrees.

[0038] The rotation of the output of the second micro motor 515 controls the sliding of the correction column 51, while the rotation of the output of the first micro motor 512 controls the turning of the correction column 51. This controls the correction column 51 to move against the PCB board, ensuring that the PCB board is exposed in the correct area each time. Furthermore, the correction column 51 can be freely adjusted according to the size of the PCB board to achieve the desired limit correction distance, resulting in high exposure accuracy and automatic correction of the exposure position.

[0039] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

Claims

1. A re-exposure correction device for an exposure machine, characterized in that: Includes a housing (1), a support plate (2) is fixedly connected to the upper side of the housing (1), an exposure box (3) is fixedly connected inside the support plate (2), an avoidance groove is provided inside the side wall of the support plate (2), and a transmission positioning mechanism (4) is provided inside the housing (1). The transmission positioning mechanism (4) includes four fixed blocks (41) fixedly connected to the inner wall of the housing (1). A positioning plate (42) is fixedly connected to one side of every two fixed blocks (41). The interior of the positioning plate (42) is divided into a first slot and a second slot. A first electric slide rail (43) is fixedly connected to the interior of the first slot, and a second electric slide rail (44) is fixedly connected to the interior of the second slot. The sliding end of the first electric slide rail (43) is fixedly connected to the first correction component (45), and the sliding end of the second electric slide rail (44) is fixedly connected to the second correction component (46). The first correction component (45) and the second correction component (46) have the same structure. The first correction component (45) includes a slide plate (452) fixedly connected to the sliding end of the first electric slide rail (43). A base plate (455) is fixedly connected to one side of the slide plate (452). A top plate (457) is hinged to the upper side of the base plate (455). A clamping plate (456) is fixedly connected to one side of both the top plate (457) and the base plate (455).

2. The re-exposure correction device for an exposure machine according to claim 1, characterized in that: A cylinder (454) is fixedly connected to one side of the base plate (455). A first connecting rod (453) is hinged to the output end of the cylinder (454). The other end of the first connecting rod (453) is hinged to the base plate (455). A connecting column (451) is fixedly connected to one side of the first connecting rod (453). The other end of the connecting column (451) is fixedly connected to the top plate (457).

3. The re-exposure correction device for an exposure machine according to claim 1, characterized in that: The interior of the clamp (456) is divided into a first slide (52), a second slide (53), a third slide (54), a fourth slide (55), a fifth slide (56), a sixth slide (57), a seventh slide (58), and an eighth slide (59). The interior of the first slide (52), the fourth slide (55), the fifth slide (56), and the eighth slide (59) are each slidably connected to two correction columns (51).

4. The re-exposure correction device for an exposure machine according to claim 3, characterized in that: The first slide (52), the second slide (53), the third slide (54) and the fourth slide (55) are parallel to each other, and the fifth slide (56), the sixth slide (57), the seventh slide (58) and the eighth slide (59) are parallel to each other. The first slide (52), the second slide (53), the third slide (54), the fourth slide (55) and the fifth slide (56), the sixth slide (57), the seventh slide (58) and the eighth slide (59) intersect each other perpendicularly.

5. The re-exposure correction device for an exposure machine according to claim 4, characterized in that: The correction column (51) includes a slip ring (514), a cover plate (511) is fixedly connected to the upper side of the slip ring (514), a first electric micro motor (512) is fixedly connected to the lower side of the cover plate (511), a cross fixing plate (513) is fixedly connected to the output end of the first electric micro motor (512), and a rotating ring (516) is rotatably connected inside the slip ring (514).

6. The re-exposure correction device for an exposure machine according to claim 5, characterized in that: The rotating ring (516) is fixedly connected to the cross fixing plate (513). A second micro motor (515) is fixedly connected inside the rotating ring (516). A rotating wheel (517) is fixedly connected to the output end of the second micro motor (515). The rotating wheel (517) passes through the lower wall of the rotating ring (516). A rotating shaft (518) is fixedly connected to the other side of the rotating wheel (517). The other end of the rotating shaft (518) is connected to the bearing of the rotating ring (516).

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