Wafer feeding and transferring device

Abstract

The utility model relates to the technical field of automation, and relates to a wafer feeding and transferring device. According to the utility model, after the wafer carrier is conveyed to the jacking mechanism through the conveying track, the jacking mechanism jacks the wafer carrier on the conveying track to the transfer belt lines of the two sliding frames, and the adjusting mechanism drives the two sliding frames to move towards opposite directions so as to change the distance between the two transfer belt lines, so that the wafer carrier falls onto the transfer belt lines; therefore, the wafer carrier is transferred to the transfer belt line from the conveying track, the conveying direction of the transfer belt line is perpendicular to the conveying direction of the conveying track, the conveying direction of the wafer carrier is changed, the structure is compact, the occupied area can be effectively reduced, the conveying process is stable, and the situation that products fall off is avoided.

Description

Technical Field

[0001] This utility model relates to the field of automation technology, and specifically to a wafer loading and transfer device. Background Technology

[0002] During wafer manufacturing, it is often necessary to change the wafer transport direction, such as changing the wafer transport direction from a first horizontal direction to a second horizontal direction, and the second horizontal direction is perpendicular to the first horizontal direction. In this case, a corner transfer machine must be used. Traditional corner transfer machines use vacuum adsorption to transfer the wafer to different transport devices to complete the corner transfer. Vacuum adsorption method has the risk of product falling, and the equipment of this method is large in size, which directly affects the quality of the product. Utility Model Content

[0003] The technical problem to be solved by this utility model is to provide a wafer loading and transfer device that changes the transport direction of the wafer carrier, has a compact structure, can effectively reduce the floor space, and has a stable transport process.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0005] A wafer loading and transfer device, comprising:

[0006] A conveying mechanism includes a conveyor frame on which a conveyor track for conveying a wafer carrier is provided;

[0007] A transfer mechanism is provided on the conveyor frame. The transfer mechanism includes two sliding frames that slide on the conveyor frame. A transfer belt is provided on the sliding frames, and the transmission direction of the transfer belt is perpendicular to the transmission direction of the conveyor track.

[0008] An adjustment mechanism is connected to the transfer mechanism and is connected to two sliding frames. The adjustment mechanism is used to drive the two sliding frames to move in opposite or opposite directions to change the distance between the two transfer belt lines.

[0009] A lifting mechanism is located below the conveyor track. The lifting mechanism is used to lift the wafer carrier on the conveyor track onto the transfer belt line of the two sliding frames for corner transfer.

[0010] In one embodiment of the present invention, the lifting mechanism includes a lifting frame, which is drivenly connected to a lifting device. A lifting fixture is provided on the lifting frame, and the lifting device is used to drive the lifting fixture of the lifting frame to lift the wafer carrier.

[0011] In one embodiment of this utility model, the lifting device includes a rotary cylinder, which is mounted on a base plate. A guide rod is provided on the base plate, and the lifting frame is slidably mounted on the guide rod. A guide groove is provided on the lifting frame, and a guide wheel is provided on the guide groove. The rotary cylinder is drivenly connected to the rotary frame, and the guide wheel is rotatably mounted on the rotary frame.

[0012] In one embodiment of this utility model, the lifting fixture includes four lifting rods, which are disposed at the four corners of the lifting frame. A support block is provided on the free end of each lifting rod, and a lifting groove matching the wafer carrier is formed between the support block and the lifting rod. The lifting device drives the four lifting rods of the lifting frame to synchronously lift the four corners of the wafer carrier.

[0013] In one embodiment of the present invention, the conveying track includes two conveyor belts, which are respectively disposed on both sides of the conveying frame. Conveying guide plates are disposed on both sides of the conveying frame, and a conveying channel is formed between the two conveying guide plates. The conveying guide plates are disposed opposite to the conveyor belts.

[0014] In one embodiment of this utility model, a positioning frame is provided on the conveying frame, and a positioning cylinder is provided on the positioning frame. The positioning cylinder is driven to be connected to the positioning plate, and the positioning cylinder drives the positioning plate to pass through the conveying channel.

[0015] In one embodiment of this utility model, a detection frame is provided on the sliding frame, and a detection sensor for detecting the position of the wafer carrier is provided on the detection frame.

[0016] In one embodiment of the present invention, the adjusting mechanism includes an adjusting frame, which is mounted on a conveying frame. A gripper cylinder is mounted on the adjusting frame, and adjusting plates are respectively mounted on the two gripper arms of the gripper cylinder. The adjusting plates are hinged to one end of an adjusting rod, and the other end of the adjusting rod is hinged to a sliding frame.

[0017] In one embodiment of this utility model, a slide rail is provided on the conveyor frame, a slider is slidably mounted on the slide rail, a fixed frame is provided at the bottom of the slide frame, and the slider is mounted on the fixed frame.

[0018] In one embodiment of this utility model, the adjusting rod includes a first rod and a second rod. The first rod is provided with a waist-shaped groove, and a bolt is provided on the waist-shaped groove. The second rod is provided with a connecting hole, and the bolt passes through the waist-shaped groove and connects with the connecting hole.

[0019] The beneficial effects of this utility model are:

[0020] This invention uses a conveyor track to transfer a wafer carrier to a lifting mechanism. The lifting mechanism then lifts the wafer carrier from the conveyor track onto a transfer belt between two sliding frames. An adjustment mechanism drives the two sliding frames to move in opposite directions to change the distance between the two transfer belts, causing the wafer carrier to fall onto the transfer belt. This transfers the wafer carrier from the conveyor track to the transfer belt. The transfer direction of the transfer belt is perpendicular to the conveyor track, thus changing the conveying direction of the wafer carrier. The structure is compact, effectively reducing the floor space required. The conveying process is stable, and there is no risk of the product falling off. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of a wafer loading and transfer device according to the present invention.

[0022] Figure 2 This is a schematic diagram of the lifting mechanism of this utility model.

[0023] Figure 3 This is a schematic diagram of the adjustment mechanism of this utility model.

[0024] Figure 4 This is a schematic diagram of the conveying mechanism of this utility model.

[0025] The following are the labels in the diagram: 1. Conveyor frame; 11. Conveyor belt; 12. Conveyor guide plate; 13. Positioning cylinder; 14. Positioning plate; 2. Lifting mechanism; 21. Rotary cylinder; 22. Lifting frame; 23. Base plate; 24. Guide rod; 25. Rotary frame; 26. Guide groove; 27. Guide wheel; 28. Lifting rod; 29. ​​Support block; 291. Lifting groove; 4. Sliding frame; 41. Detection frame; 42. Detection sensor; 43. Transfer belt; 44. Slider; 45. Slide rail; 5. Adjusting mechanism; 51. Grip cylinder; 52. Adjusting plate; 53. Adjusting rod; 6. Waist carrier; 61. First rod; 62. Second rod; 63. Waist-shaped groove. Detailed Implementation

[0026] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0027] Reference Figure 1-4 As shown, a wafer loading and transfer device includes:

[0028] The conveying mechanism includes a conveying frame 1, on which a conveying track for conveying the wafer carrier 6 is provided;

[0029] A transfer mechanism is provided on the conveyor frame 1. The transfer mechanism includes two sliding frames 4, which are slidably mounted on the conveyor frame 1. A transfer belt 43 is provided on the sliding frame 4, and the transmission direction of the transfer belt 43 is perpendicular to the transmission direction of the conveyor track.

[0030] Adjustment mechanism 5 is connected to the transfer mechanism and is connected to the two sliding frames 4. The adjustment mechanism 5 is used to drive the two sliding frames 4 to move in opposite or opposite directions to change the distance between the two transfer belt lines 43.

[0031] The lifting mechanism 2 is located below the conveying track. The lifting mechanism 2 is used to lift the wafer carrier 6 on the conveying track onto the transfer belt 43 of the two sliding frames 4 for corner transfer.

[0032] This invention uses a conveyor track to transfer the wafer carrier 6 to the lifting mechanism 2. The lifting mechanism 2 then lifts the wafer carrier 6 from the conveyor track onto the transfer belt 43 of the two sliding frames 4. The adjusting mechanism 5 drives the two sliding frames 4 to move in opposite directions to change the distance between the two transfer belts 43, causing the wafer carrier 6 to fall onto the transfer belt 43. This achieves the transfer of the wafer carrier 6 from the conveyor track to the transfer belt 43. The transmission direction of the transfer belt 43 is perpendicular to the transmission direction of the conveyor track, thus changing the transmission direction of the wafer carrier 6. The structure is compact, effectively reducing the floor space required. The conveying process is stable, and there is no risk of the product falling off.

[0033] In one embodiment of the present invention, the lifting mechanism 2 includes a lifting frame 22, which is drivenly connected to a lifting device. A lifting fixture is provided on the lifting frame 22, and the lifting device is used to drive the lifting fixture of the lifting frame 22 to lift the wafer carrier 6.

[0034] In one embodiment of this utility model, the lifting device includes a rotary cylinder 21, which is mounted on a base plate 23. A guide rod 24 is mounted on the base plate 23. The lifting frame 22 is slidably mounted on the guide rod 24. A guide groove 26 is mounted on the lifting frame 22. A guide wheel 27 is mounted on the guide groove 26. The rotary cylinder 21 is drivenly connected to the rotary frame 25, and the guide wheel 27 is rotatably mounted on the rotary frame 25.

[0035] The rotary cylinder 21 drives the guide wheel 27 on the rotary frame 25 to move within the guide groove 26 of the lifting frame 22, forming a crank-slider 44 structure between the rotary frame 25 and the lifting frame 22. This causes the lifting frame 22 to move upward along the guide rod 24, and simultaneously causes the four lifting rods 28 of the lifting frame 22 to rise. This allows the lifting groove 291 to clamp and position the edge of the wafer carrier 6. The rise of the four lifting rods 28 causes the four corners of the wafer carrier 6 to be lifted synchronously, facilitating the loading and unloading of the wafer carrier 6, saving equipment space and improving equipment efficiency.

[0036] In one embodiment of the present invention, the lifting fixture includes four lifting rods 28, which are disposed at the four corners of the lifting frame 22. Support blocks 29 are provided on the free ends of the lifting rods 28, and lifting grooves 291 matching the wafer carrier 6 are formed between the support blocks 29 and the lifting rods 28. The lifting device drives the four lifting rods 28 of the lifting frame 22 to synchronously lift the four corners of the wafer carrier 6.

[0037] In one embodiment of the present invention, the conveying track includes two conveyor belts 11, which are respectively arranged on both sides of the conveying frame 1. Conveying guide plates 12 are arranged on both sides of the conveying frame 1, and a conveying channel is formed between the two conveying guide plates 12. The conveying guide plates 12 are arranged opposite to the conveyor belts 11.

[0038] In one embodiment of this utility model, a positioning frame is provided on the conveying frame 1, and a positioning cylinder 13 is provided on the positioning frame. The positioning cylinder 13 is driven to connect with the positioning plate 14. The positioning cylinder 13 drives the positioning plate 14 to pass through the conveying channel. The positioning cylinder 13 drives the positioning plate 14 to pass through the conveying channel to limit the transmission position of the wafer carrier 6. The positioning plate 14 stops the wafer carrier 6, so that the wafer carrier 6 can be relatively stationary, thereby improving the positioning accuracy of the lifting mechanism 2 for the wafer carrier 6.

[0039] In one embodiment of this utility model, a detection frame 41 is provided on the sliding frame 4, and a detection sensor 42 for detecting the position of the wafer carrier 6 is provided on the detection frame 41. This sensor can accurately obtain the height information of the wafer carrier 6 and prevent the wafer carrier 6 from rising too high or too low, which could damage the equipment.

[0040] In one embodiment of the present invention, the adjusting mechanism 5 includes an adjusting frame, which is mounted on the conveying frame 1. A gripper cylinder 51 is mounted on the adjusting frame, and adjusting plates 52 are respectively mounted on the two gripper arms of the gripper cylinder 51. The adjusting plates 52 are hinged to one end of the adjusting rod 53, and the other end of the adjusting rod 53 is hinged to the sliding frame 4.

[0041] Specifically, the gripper cylinder 51 drives the two adjusting plates 52 to move closer to each other, causing the two sliding frames 4 to move relative to each other along the slide rail 45, so that the two ends of the wafer carrier 6 are above the transfer belt 43. The lifting device drives the four lifting rods 28 of the lifting frame 22 to synchronously lower the four corners of the wafer carrier 6, placing the wafer carrier 6 onto the transfer belt 43. The wafer carrier 6 continues to be transported through the transfer belt 43. The synchronous movement of the two adjusting rods 53 driven by the gripper cylinder 51 can ensure the movement accuracy of the sliding frame 4, ensure the consistency of the opening and closing of the two sliding frames 4, and improve the transmission accuracy of the wafer carrier 6.

[0042] In one embodiment of this utility model, a slide rail 45 is provided on the conveyor frame 1, and a slider 44 is slidably mounted on the slide rail 45. A fixed frame is provided at the bottom of the sliding frame 4, and the slider 44 is mounted on the fixed frame. The sliding frame 4 is slidably mounted on the slide rail 45, which can ensure the movement accuracy of the sliding frame 4, ensure the synchronous opening and closing effect of the two sliding frames 4, and reduce the assembly difficulty.

[0043] In one embodiment of the present invention, the adjusting rod 53 includes a first rod 61 and a second rod 62. The first rod 61 is provided with a waist-shaped groove 63 and a bolt is provided on the waist-shaped groove 63. The second rod 62 is provided with a connecting hole, and the bolt passes through the waist-shaped groove 63 and connects with the connecting hole.

[0044] Specifically, the first rod 61 is provided with a waist-shaped groove 63, and the bolt passes through the waist-shaped groove 63 and connects to the connecting hole. In this way, the relative position of the first rod 61 and the second rod 62 can be changed, thereby adjusting the total length of the adjusting rod 53 and changing the distance between the two sliding frames 4. It can be adapted to the transmission of wafer carriers 6 of multiple specifications and has a wide range of applications.

[0045] Usage process

[0046] The wafer product is placed on the wafer carrier 6, which is then placed on two conveyor belts 11. A positioning cylinder 13 drives a positioning plate 14 through the conveyor channel to limit the transport position of the wafer carrier 6. The conveyor belt 11 carries the wafer carrier 6 along the conveyor channel formed between the two conveyor guide plates 12 to the positioning plate 14, causing the positioning plate 14 to abut against the wafer carrier 6. A rotary cylinder 21 drives the guide wheel 27 on the rotary frame 25 to move within the guide groove 26 of the lifting frame 22, forming a crank-slider 44 structure between the rotary frame 25 and the lifting frame 22. This causes the lifting frame 22 to move upward along the guide rod 24, simultaneously raising the four lifting rods 28 of the lifting frame 22. The lifting slot 291 clamps and positions the edge of the wafer carrier 6. The four lifting rods 28 rise and drive the four corners of the wafer carrier 6 to rise synchronously, lifting the wafer carrier 6 between the two transfer belts 43 until the detection sensor 42 detects the position of the wafer carrier 6 and stops the rise. The gripper cylinder 51 drives the two adjusting plates 52 to move closer to each other, so that the two sliding frames 4 move relative to each other along the slide rail 45, so that the two ends of the wafer carrier 6 are above the transfer belt 43. The lifting device drives the four lifting rods 28 of the lifting frame 22 to lower the four corners of the wafer carrier 6 synchronously, and put the wafer carrier 6 onto the transfer belt 43, through which the wafer carrier 6 continues to be transported.

[0047] The above-described embodiments are merely preferred embodiments provided to fully illustrate the present invention, and the scope of protection of the present invention is not limited thereto. Equivalent substitutions or modifications made by those skilled in the art based on the present invention are all within the scope of protection of the present invention. The scope of protection of the present invention is defined by the claims.

Claims

1. A wafer loading and transfer device, characterized in that, include: A conveying mechanism includes a conveyor frame on which a conveyor track for conveying a wafer carrier is provided; A transfer mechanism is provided on the conveyor frame. The transfer mechanism includes two sliding frames that slide on the conveyor frame. A transfer belt is provided on the sliding frames, and the transmission direction of the transfer belt is perpendicular to the transmission direction of the conveyor track. An adjustment mechanism is connected to the transfer mechanism and is connected to two sliding frames. The adjustment mechanism is used to drive the two sliding frames to move in opposite or opposite directions to change the distance between the two transfer belt lines. A lifting mechanism is located below the conveyor track. The lifting mechanism is used to lift the wafer carrier on the conveyor track onto the transfer belt line of the two sliding frames for corner transfer.

2. The wafer loading and transfer device as described in claim 1, characterized in that, The lifting mechanism includes a lifting frame, which is driven and connected to a lifting device. A lifting fixture is provided on the lifting frame, and the lifting device is used to drive the lifting fixture of the lifting frame to lift the wafer carrier.

3. The wafer loading and transfer device as described in claim 2, characterized in that, The lifting device includes a rotary cylinder, which is mounted on a base plate. A guide rod is provided on the base plate. The lifting frame is slidably mounted on the guide rod. A guide groove is provided on the lifting frame. A guide wheel is provided on the guide groove. The rotary cylinder is drivenly connected to the rotary frame. The guide wheel is rotatably mounted on the rotary frame.

4. The wafer loading and transfer device as described in claim 2, characterized in that, The lifting fixture includes four lifting rods, which are located at the four corners of the lifting frame. Support blocks are provided on the free ends of the lifting rods. The support blocks and the lifting rods form lifting grooves that match the wafer carrier. The lifting device drives the four lifting rods of the lifting frame to synchronously lift the four corners of the wafer carrier.

5. The wafer loading and transfer device as described in claim 1, characterized in that, The conveying track includes two conveyor belts, which are respectively arranged on both sides of the conveying frame. Conveying guide plates are arranged on both sides of the conveying frame, and a conveying channel is formed between the two conveying guide plates. The conveying guide plates are arranged opposite to the conveyor belts.

6. The wafer loading and transfer device as described in claim 5, characterized in that, The conveyor frame is equipped with a positioning frame, and the positioning frame is equipped with a positioning cylinder. The positioning cylinder is driven to be connected to the positioning plate, and the positioning cylinder drives the positioning plate to pass through the conveyor channel.

7. The wafer loading and transfer device as described in claim 1, characterized in that, The sliding frame is equipped with a detection frame, and the detection frame is equipped with a detection sensor for detecting the position of the wafer carrier.

8. The wafer loading and transfer device as described in claim 1, characterized in that, The adjustment mechanism includes an adjustment frame, which is mounted on a conveyor frame. A gripper cylinder is mounted on the adjustment frame, and an adjustment plate is mounted on each of the two gripper arms of the gripper cylinder. The adjustment plate is hinged to one end of an adjustment rod, and the other end of the adjustment rod is hinged to a sliding frame.

9. The wafer loading and transfer device as described in claim 1, characterized in that, The conveyor frame is equipped with a slide rail, and a slider slides on the slide rail. A fixed frame is provided at the bottom of the slide frame, and the slider is mounted on the fixed frame.

10. The wafer loading and transfer device as described in claim 8, characterized in that, The adjusting rod includes a first rod and a second rod. The first rod is provided with a waist-shaped groove and a bolt is provided in the waist-shaped groove. The second rod is provided with a connecting hole, and the bolt passes through the waist-shaped groove and connects with the connecting hole.

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