Perfluoropolyether dehydration device for semiconductor heat conduction

Abstract

The utility model belongs to the technical field of dehydration of perfluoropolyether for semiconductors, and discloses a dehydration device of perfluoropolyether for heat conduction of semiconductors, which comprises a dehydration outer box, a dehydration inner box arranged in the dehydration outer box, a dehydration mechanism mounted in the dehydration outer box, an inner wall blanking component mounted in the dehydration outer box, and an inner wall blanking component mounted in the inner wall blanking component. The inner wall discharging assembly comprises a connecting plate, the connecting plate is installed on the bottom face of the inner dewatering box, a sliding groove matched with the connecting plate is formed in the surface of the outer dewatering box, the inner dewatering box and the outer dewatering box are connected in a sliding mode through the connecting plate and the sliding groove, a four-claw inclined plate is arranged in the outer dewatering box, and the four-claw inclined plate is connected with the inner wall of the inner dewatering box. The perfluoropolyether dehydration device for semiconductor heat conduction has the advantages that perfluoropolyether adhering to the interior of the dehydration box can be treated, and the situation that the next dehydration effect is affected by the perfluoropolyether adhering to the interior of the dehydration box is avoided.

Description

Technical Field

[0001] This utility model belongs to the field of perfluoropolyether dehydration technology for semiconductors, specifically a perfluoropolyether dehydration device for semiconductor thermal conductivity. Background Technology

[0002] Perfluoropolyethers are polymers composed of carbon, fluorine, and oxygen, with ether bonds in their main chain. Because the molecular chain of perfluoropolyethers contains only these three elements, and the fluorine element is relatively large, it protects the main chain from damage. Therefore, perfluoropolyethers possess excellent high-temperature thermal oxidation resistance, chemical inertness, weather resistance, and non-flammability. Due to the presence of ether bonds in the main chain, perfluoropolyethers also exhibit excellent low-temperature performance and are currently widely used as lubricants, vacuum pump oils, heat transfer media, cleaning solvents, and surfactants.

[0003] Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, diodes are devices made of semiconductors. From the perspective of both science and technology and economic development, semiconductors are of great importance. The core units of most electronic products, such as computers, mobile phones or digital recorders, are closely related to semiconductors. In the process of using semiconductors, perfluoropolyether is usually coated on the surface to conduct heat.

[0004] Generally, perfluoropolyethers need to be dehydrated in order to be coated on the surface of semiconductors. This requires a perfluoropolyether dehydration device.

[0005] During the dehydration process of perfluoropolyether, the perfluoropolyether changes from a liquid state to a gel state. Since the perfluoropolyether is stored in the dehydration tank before dehydration, the perfluoropolyether after dehydration is in a gel state and easily sticks to the inner wall of the dehydration tank. This requires the staff to deal with the perfluoropolyether stuck inside the dehydration tank, which increases the workload of the staff. Moreover, if the treatment is not timely, it can easily affect the dehydration effect of the perfluoropolyether in the next cycle.

[0006] Therefore, a perfluoropolyether dehydration device for semiconductor thermal conductivity is proposed to address the above problems. Utility Model Content

[0007] To address the problems mentioned in the background art, this utility model provides a perfluoropolyether dehydration device for semiconductor thermal conductivity, which has the advantage of being able to treat the perfluoropolyether adhering inside the dehydration tank and avoiding the perfluoropolyether adhering inside the dehydration tank from affecting the dehydration effect of the next dehydration.

[0008] To achieve the above objectives, the present invention provides the following technical solution: a perfluoropolyether dehydration device for semiconductor thermal conductivity, comprising a dehydration outer box, an inner dehydration box disposed inside the outer box, a dehydration mechanism installed inside the outer box, and an inner wall feeding assembly installed inside the outer box;

[0009] The inner wall feeding assembly includes a connecting plate. The bottom surface of the inner dehydration box is equipped with the connecting plate. The surface of the outer dehydration box is provided with a sliding groove that matches the connecting plate. The inner dehydration box and the outer dehydration box are slidably connected through the connecting plate and the sliding groove. The interior of the outer dehydration box is provided with a four-claw inclined plate. The surface of the four-claw inclined plate is provided with a mounting block. The surface of the mounting block is equipped with a servo motor. The output end of the servo motor passes through the mounting block and is connected to the four-claw inclined plate. The interior of the outer dehydration box is provided with a linkage downward moving assembly.

[0010] Preferably, a guide rod is slidably connected in the through hole on the surface of the connecting plate, both ends of the guide rod passing through the connecting plate and installed in a groove inside the dehydration outer box.

[0011] Preferably, a return spring is sleeved on the surface of the guide rod, one end of the return spring is connected to the connecting plate, and the other end of the return spring is installed in a groove opened inside the dehydration outer box.

[0012] Preferably, the inclination of the four-clawed inclined plate is adapted to the dehydration inner box.

[0013] Preferably, the linkage lowering assembly includes a movable rod, which is rotatably connected inside the dehydration outer box. A turntable is installed at one end of the movable rod, a push shaft rod is installed on the surface of the turntable, and a pull rod is rotatably connected to the surface of the push shaft rod. A universal ball is movably connected to the mounting block, and one end of the pull rod is connected to the universal ball.

[0014] Preferably, a gear one is mounted on the surface of the movable rod, a drive rod is rotatably connected inside the dehydration outer box, a gear two is mounted on the surface of the drive rod, the gear one meshes with the gear two, a linkage plate is mounted on the surface of the dehydration inner box, a rack plate is mounted in a groove on the surface of the linkage plate, and the rack plate meshes with the gear two.

[0015] Preferably, the second gear is of a different size than the first gear, and the diameter of the second gear is larger than the diameter of the first gear.

[0016] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0017] 1. This utility model, by setting up an inner wall feeding component, can process the gel-like perfluoropolyether adhering to the inner wall of the dehydration chamber, thus preventing the perfluoropolyether from sticking to the inner wall of the dehydration chamber after dehydration, which could easily affect the dehydration effect of the perfluoropolyether in the next cycle. It can also reduce the workload of workers and greatly improve the working effect of perfluoropolyether dehydration.

[0018] 2. This utility model improves the efficiency of treating perfluoropolyether adhering to the inner wall of the dehydration tank by setting up a linkage downward moving component, thereby reducing the workload of workers, facilitating operation, and greatly improving the effectiveness of the device. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the internal structure of the dehydration outer box of this utility model;

[0021] Figure 3 This is a schematic diagram of the structure of the four-claw inclined plate and tie rod of this utility model;

[0022] Figure 4 This is a schematic diagram of the structure of the four-claw inclined plate and the dehydration inner box of this utility model;

[0023] Figure 5 This is an enlarged schematic diagram of the internal structure of the mounting block of this utility model.

[0024] In the diagram: 1. Outer dehydration chamber; 12. Inner dehydration chamber; 13. Dehydration mechanism; 2. Inner wall feeding assembly; 21. Connecting plate; 22. Four-claw inclined plate; 23. Mounting block; 24. Servo motor; 25. Guide rod; 26. Return spring; 3. Linkage downward movement assembly; 31. Movable rod; 32. Turntable; 33. Push shaft rod; 34. Pull rod; 35. Universal ball; 36. Gear 1; 37. Gear 2; 38. Linkage plate; 39. Rack plate; 310. Drive rod. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] like Figures 1 to 5As shown, this utility model provides a perfluoropolyether dehydration device for semiconductor thermal conductivity, including a dehydration outer box 1, a dehydration inner box 12 disposed inside the dehydration outer box 1, a dehydration mechanism 13 installed inside the dehydration outer box 1, and an inner wall feeding assembly 2 installed inside the dehydration outer box 1.

[0027] The inner wall feeding assembly 2 includes a connecting plate 21. The connecting plate 21 is installed on the bottom surface of the inner dehydration chamber 12. The surface of the outer dehydration chamber 1 is provided with a sliding groove that matches the connecting plate 21. The inner dehydration chamber 12 and the outer dehydration chamber 1 are slidably connected through the connecting plate 21 and this sliding groove. The interior of the outer dehydration chamber 1 is provided with a four-claw inclined plate 22. The surface of the four-claw inclined plate 22 is provided with a mounting block 23. The surface of the mounting block 23 is provided with a servo motor 24. The output end of the servo motor 24 passes through the mounting block 23 and is connected to the four-claw inclined plate 22. The interior of the outer dehydration chamber 1 is provided with a linkage downward moving assembly 3, which can realize the treatment of the gel-like perfluoropolyether adhering to the inner wall of the inner dehydration chamber 12. This avoids the perfluoropolyether being gel-like after dehydration and adhering to the inner wall of the inner dehydration chamber 12, which can easily affect the dehydration effect of the next perfluoropolyether. It can also reduce the workload of the workers and greatly improve the working effect of perfluoropolyether dehydration.

[0028] Specifically, a guide rod 25 is slidably connected in the through hole opened on the surface of the connecting plate 21. Both ends of the guide rod 25 pass through the connecting plate 21 and are installed in the sliding groove opened inside the dehydration outer box 1, so as to guide the movement of the connecting plate 21 and prevent the connecting plate 21 from shifting when moving.

[0029] like Figures 1 to 5 As shown, a return spring 26 is sleeved on the surface of the guide rod 25. One end of the return spring 26 is connected to the connecting plate 21, and the other end of the return spring 26 is installed in a groove opened inside the dehydration outer box 1, so that the position of the dehydration inner box 12 can be adjusted according to the weight of the perfluoropolyether before and after dehydration.

[0030] It is worth noting that the inclination of the four-claw inclined plate 22 is adapted to the dehydration inner box 12, thereby improving the effect of perfluoropolyether treatment on the inner wall of the dehydration inner box 12.

[0031] like Figures 1 to 5 As shown, the linkage lowering assembly 3 includes a movable rod 31, which is rotatably connected to the inside of the dehydration outer box 1. A turntable 32 is installed at one end of the movable rod 31, and a push shaft rod 33 is installed on the surface of the turntable 32. A pull rod 34 is rotatably connected to the surface of the push shaft rod 33. A universal ball 35 is movably connected to the mounting block 23, and one end of the pull rod 34 is connected to the universal ball 35. This improves the efficiency of treating the perfluoropolyether adhering to the inner wall of the dehydration inner box 12, reduces the workload of the staff, facilitates the operation of the staff, and greatly improves the effect of the device.

[0032] Specifically, a gear 36 is mounted on the surface of the movable rod 31, and a drive rod 310 is rotatably connected inside the dehydration outer box 1. A gear 37 is mounted on the surface of the drive rod 310, and the gear 36 meshes with the gear 37. A linkage plate 38 is mounted on the surface of the dehydration inner box 12, and a rack plate 39 is installed in the groove on the surface of the linkage plate 38. The rack plate 39 meshes with the gear 37, thereby enabling linkage during the upward movement of the dehydration inner box 12, allowing the four-claw inclined plate 22 to move within the dehydration inner box 12, further improving the efficiency of the device.

[0033] It is worth emphasizing that gear 2 37 is different in size from gear 1 36, and the diameter of gear 2 37 is larger than that of gear 1 36, which enables the movable rod 31 to rotate and improves the adaptability of the device.

[0034] The structure of the electric motor is existing technology and will not be described in detail. Additionally, this utility model also includes a power supply, controller, and switch, which are not the main technical points of this patent and will not be described in detail. The wiring diagram of the motor in this utility model is common knowledge in the field, and its working principle is already known technology. The appropriate model is selected based on actual use; therefore, the control method and wiring layout of the motor will not be explained in detail.

[0035] Working principle and process: When dehydrating perfluoropolyether, the perfluoropolyether liquid is first poured into the dehydration inner tank 12 through the feed port on the surface of the dehydration outer tank 1. Then, the dehydration mechanism 13 is started to dehydrate the perfluoropolyether liquid inside the dehydration inner tank 12.

[0036] After the perfluoropolyether is dehydrated, the weight in the dehydration inner box 12 decreases due to the reduction of moisture inside the perfluoropolyether. At this time, the pressure on the return spring 26 decreases, thereby causing the dehydration inner box 12 to move upward. The dehydration inner box 12 causes the connecting plate 21 to slide in the groove opened inside the dehydration outer box 1. The connecting plate 21 slides on the surface of the guide rod 25. The guide rod 25 can guide the movement of the connecting plate 21 to prevent the connecting plate 21 from shifting position during movement. At this time, the four-claw inclined plate 22 is attached to the inner wall of the dehydration inner box 12. Then, the servo motor 24 inside the mounting block 23 is activated, so that the extension end of the servo motor 24 drives the four-claw inclined plate 22 to rotate inside the dehydration inner box 12. Then, the position of the four-claw inclined plate 22 is adjusted to discharge the gel-like perfluoropolyether adhering inside the dehydration inner box 12.

[0037] As the dehydration inner chamber 12 moves upward, it drives the linkage plate 38 to move upward. The diameter of gear 2 37 is larger than that of gear 1 36. The rack plate 39 with a groove on the surface of the linkage plate 38 meshes with gear 2 37. As the linkage plate 38 moves, it drives gear 2 37 on the drive rod 310 to rotate. When gear 2 37 meshes with gear 1 36, it drives gear 1 36 to rotate. At this time, gear 1 36 drives the movable rod 31 to rotate. Gear 2 37 can change the rotation direction of gear 1 36, so that the movable rod 31 drives the push shaft rod 33 on the turntable 32 to rotate downward. As the movable rod 31 rotates, it drives the turntable 32 to rotate. When the turntable 32 rotates, it pushes the pull rod 34 downward through the push shaft rod 33. At this time, the pull rod 34 drives the four-jaw inclined plate 22 to move downward inside the dehydration inner chamber 12 through the universal ball 35, thereby facilitating the treatment of the perfluoropolyether adhering inside the dehydration inner chamber 12.

[0038] It should be noted that the dehydration unit 13 uses drying technology to dehydrate the perfluoropolyether. This process usually involves passing hot air through the material to evaporate and remove the moisture. This is a mature existing technology and will not be explained in detail here.

[0039] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0040] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A perfluoropolyether dehydration device for semiconductor thermal conductivity, comprising a dehydration outer casing (1), characterized in that: The dehydration outer box (1) is provided with a dehydration inner box (12), the dehydration outer box (1) is equipped with a dehydration mechanism (13), and the dehydration outer box (1) is equipped with an inner wall feeding assembly (2). The inner wall feeding assembly (2) includes a connecting plate (21). The bottom surface of the dehydration inner box (12) is equipped with the connecting plate (21). The surface of the dehydration outer box (1) is provided with a sliding groove that is compatible with the connecting plate (21). The dehydration inner box (12) and the dehydration outer box (1) are slidably connected through the connecting plate (21) and this sliding groove. The interior of the dehydration outer box (1) is provided with a four-claw inclined plate (22). The surface of the four-claw inclined plate (22) is provided with an mounting block (23). The surface of the mounting block (23) is equipped with a servo motor (24). The output end of the servo motor (24) passes through the mounting block (23) and is connected to the four-claw inclined plate (22). The interior of the dehydration outer box (1) is provided with a linkage downward moving assembly (3).

2. The perfluoropolyether dehydration device for semiconductor thermal conductivity according to claim 1, characterized in that: A guide rod (25) is slidably connected in the through hole opened on the surface of the connecting plate (21). Both ends of the guide rod (25) pass through the connecting plate (21) and are installed in the sliding groove opened inside the dehydration outer box (1).

3. The perfluoropolyether dehydration device for semiconductor thermal conductivity according to claim 2, characterized in that: A return spring (26) is sleeved on the surface of the guide rod (25). One end of the return spring (26) is connected to the connecting plate (21), and the other end of the return spring (26) is installed in a groove opened inside the dehydration outer box (1).

4. The perfluoropolyether dehydration device for semiconductor thermal conductivity according to claim 3, characterized in that: The inclination of the four-clawed inclined plate (22) is adapted to the dehydration inner box (12).

5. The perfluoropolyether dehydration device for semiconductor thermal conductivity according to claim 1, characterized in that: The linkage lowering assembly (3) includes a movable rod (31). The movable rod (31) is rotatably connected inside the dehydration outer box (1). A turntable (32) is installed at one end of the movable rod (31). A push shaft rod (33) is installed on the surface of the turntable (32). A pull rod (34) is rotatably connected to the surface of the push shaft rod (33). A universal ball (35) is movably connected to the mounting block (23). One end of the pull rod (34) is connected to the universal ball (35).

6. The perfluoropolyether dehydration device for semiconductor thermal conductivity according to claim 5, characterized in that: Gear 1 (36) is mounted on the surface of the movable rod (31). A drive rod (310) is rotatably connected inside the dehydration outer box (1). Gear 2 (37) is mounted on the surface of the drive rod (310). Gear 1 (36) meshes with Gear 2 (37). A linkage plate (38) is mounted on the surface of the dehydration inner box (12). A rack plate (39) is installed in a groove on the surface of the linkage plate (38). The rack plate (39) meshes with Gear 2 (37).

7. The perfluoropolyether dehydration device for semiconductor thermal conductivity according to claim 6, characterized in that: The second gear (37) is different in size from the first gear (36), and the diameter of the second gear (37) is larger than the diameter of the first gear (36).

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