Filtering device for ultra-pure electronic-grade chemistry

Abstract

The utility model discloses a filtering device for ultra-pure electronic-grade chemistry, and belongs to the technical field of ultra-pure chemical production. The device comprises a first shell and a second shell, the first shell and the second shell are arranged in a buckled mode, meanwhile, an elastic piece elastically extrudes a first movable plate and a second movable plate, the effect of extruding and fixing filler in a first filtering area and a second filtering area is achieved, finally, the first movable plate and the second movable plate are detachable, and therefore the filtering effect is good. In this way, the filler in the first shell and the second shell can be conveniently discharged or filled, and the filler discharging or filling efficiency of the device is high.

Description

Technical Field

[0001] This application relates to the field of ultrapure chemical production technology, specifically a filtration device for ultrapure electronic-grade chemicals. Background Technology

[0002] Ultrapure electronic-grade chemicals are primarily used for inter-process cleaning in semiconductor chip manufacturing. Therefore, the production of electronic-grade chemicals requires multiple purification and filtration processes from industrial-grade chemicals to gradually remove impurities and achieve purification. During the research and development of ultrapure chemical filtration and purification, it is necessary to continuously load and unload the filter media. Existing filtration devices have complex structures and low loading and unloading efficiency. Summary of the Invention

[0003] The purpose of this application is to provide a filtration device for ultrapure electronic-grade chemistry, so as to at least partially solve the technical problems existing in the background art.

[0004] To achieve the above objectives, this application provides the following technical solution: a filtration device for ultrapure electronic-grade chemicals, comprising:

[0005] The first housing is semi-open. The sealed end of the first housing is provided with a first material port. Inside the first housing, near the sealed end, there is a first fixed plate and near the open end, there is a first movable plate. The first fixed plate and the first movable plate form a first filter area.

[0006] The second housing is semi-open. The sealed end of the second housing is provided with a second material port. Inside the second housing, there is a second fixed plate near the sealed end and a second movable plate near the open end. The second fixed plate and the second movable plate form a second filter area. The open end of the first housing and the open end of the second housing are interlocked.

[0007] An elastic element is disposed at the snap-fit ​​open end of the first housing and the second housing. The elastic element is elastically supported between the first movable plate and the second movable plate, and is configured to press the first movable plate toward the first fixed plate to change the size of the first filter area, and to press the second movable plate toward the second fixed plate to change the size of the second filter area.

[0008] Furthermore, the first fixed plate, the first movable plate, the second fixed plate, and the second movable plate are provided with material passage holes to facilitate the filtering of materials.

[0009] Furthermore, activated carbon particles are filled within the first filtration area.

[0010] Furthermore, the second filtration area is filled with molecular sieves.

[0011] Furthermore, the elastic element includes a telescopic rod and a fixed cylinder. One end of the telescopic rod is pressed against the first movable plate, and the other end is sleeved inside the fixed cylinder, where it extends and retracts. The fixed cylinder is disposed on the second movable plate.

[0012] Furthermore, the elastic element also includes a spring, which is disposed inside the fixed cylinder, with one end of the spring connected to the fixed cylinder and the other end disposed at the end of the telescopic rod.

[0013] Furthermore, the open end of the first housing is connected to the open end of the second housing by bolts.

[0014] Furthermore, elastic sealing gaskets are provided at the open ends of the first housing and the second housing.

[0015] Compared with the prior art, the beneficial effects of this application include at least the following:

[0016] The filtration device for ultrapure electronic-grade chemicals provided in this application includes a first housing and a second housing, wherein the first housing and the second housing are fastened together, and the elastic element elastically presses against the first movable plate and the second movable plate, thereby squeezing and fixing the packing material in the first filtration area and the second filtration area. Finally, the first movable plate and the second movable plate are detachable, which facilitates the removal or filling of the packing material in the first housing and the second housing, resulting in high efficiency in removing or filling the packing material in this device. Attached Figure Description

[0017] Figure 1 This is an internal cross-sectional view of the filtration device of this application;

[0018] Figure 2 This is an external overall structural diagram of the filtration device of this application;

[0019] Figure 3 This is a structural diagram of the first movable plate of the filter device of this application;

[0020] Figure 4 This is a cross-sectional structural diagram of the elastic element of the filtering device of this application. Detailed Implementation

[0021] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0022] This application provides a filtration device for ultrapure electronic-grade chemistry, combined with Figure 1-4 ,include:

[0023] The first housing 1 is semi-open. The sealed end of the first housing 1 is provided with a first feed port 10. The interior of the first housing 1 is provided with a first fixed plate 2 near the sealed end and a first movable plate 3 near the open end. The first fixed plate 2 and the first movable plate 3 form a first filter area 4.

[0024] The second housing 5 is semi-open. The sealed end of the second housing 5 is provided with a second material port 50. The interior of the second housing 5 is provided with a second fixed plate 6 near the sealed end and a second movable plate 7 near the open end. The second fixed plate 6 and the second movable plate 7 form a second filter area 8. The open end of the first housing 1 and the open end of the second housing 5 are interlocked.

[0025] The elastic element 9 is disposed at the snap-fit ​​open end of the first housing 1 and the second housing 5. The elastic element 9 is elastically supported between the first movable plate 3 and the second movable plate 7, and is configured to press the first movable plate 3 toward the first fixed plate 2 to change the size of the first filter area 4, and to press the second movable plate 7 toward the second fixed plate 6 to change the size of the second filter area 8.

[0026] This filtration device changes the size of the first filtration area 4 by pressing the first movable plate 3 with the elastic element 9. At the same time, the first movable plate 3 also presses and fixes the packing material in the first filtration area 4. The second filtration area 8 works on the same principle. This way of changing the size of the space between the first filtration area 4 and the second filtration area 8 by using the elastic element 9 is beneficial for filling different amounts of filter packing material. At the same time, when unloading and filling the packing material, it is only necessary to loosen the connection between the first housing 1 and the second housing 5, remove the elastic element 9, the first movable plate 3 and the second movable plate 7, and then unload or fill the packing material into the first filtration area 4 and the second filtration area 8. Therefore, this filtration device has a simple structure, is easy to install, and has high efficiency in filling or unloading the packing material.

[0027] In one embodiment, the first fixed plate 2, the first movable plate 3, the second fixed plate 6, and the second movable plate 7 are provided with material passage holes 11 to facilitate the flow of the material being filtered. The material passage holes 11 facilitate the flow of the material within the filtration device.

[0028] In one embodiment, activated carbon particles are filled in the first filtration zone 4.

[0029] In one embodiment, the second filtration zone 8 is filled with a molecular sieve.

[0030] In one embodiment, the elastic element 9 includes a telescopic rod 91 and a fixed cylinder 92. One end of the telescopic rod 91 is pressed onto the first movable plate 3, and the other end is sleeved inside the fixed cylinder 92 and moves telescopically within the fixed cylinder 92. The fixed cylinder 92 is disposed on the second movable plate 7.

[0031] In one embodiment, the elastic element 9 further includes a spring 93, which is disposed inside the fixed cylinder 92. One end of the spring 93 is connected to the fixed cylinder 92, and the other end is disposed at the end of the telescopic rod 91. The elastic element 9 with this configuration has a simple structure and is easy to remove. At the same time, the spring is disposed inside the fixed cylinder, which avoids contact with the material and reduces contamination of the material.

[0032] In one embodiment, the open end of the first housing 1 is connected to the open end of the second housing 5 by bolts.

[0033] In one embodiment, elastic sealing gaskets are provided at the open ends of the first housing 1 and the second housing 5. The elastic sealing gaskets prevent gaps from forming between the first housing and the second housing during the fastening process, thus achieving a sealing effect on the filter device.

[0034] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0035] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", and "counterclockwise" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0036] It should be noted that all directional indications in the embodiments of this application are only used to explain the relative positional relationship and movement of each component in a specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0037] In this application, unless otherwise expressly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a removable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two elements or the interaction between two elements, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0038] Furthermore, the use of terms such as "first" and "second" in this application is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined with "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0039] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0040] Furthermore, the technical solutions of the various embodiments can be combined with each other, but only if they are based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed in this application.

[0041] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A filtration device for ultrapure electronic-grade chemistry, characterized in that, Including: The first housing (1) is semi-open. The sealing end of the first housing (1) is provided with a first material port (10). The first housing (1) has a first fixed plate (2) near the sealing end and a first movable plate (3) near the open end. The first fixed plate (2) and the first movable plate (3) form a first filter area (4). The second housing (5) is semi-open. The sealed end of the second housing (5) is provided with a second material port (50). The interior of the second housing (5) is provided with a second fixed plate (6) near the sealed end and a second movable plate (7) near the open end. The second fixed plate (6) and the second movable plate (7) form a second filter area (8). The open end of the first housing (1) and the open end of the second housing (5) are interlocked. The elastic element (9) is disposed at the snap-fit ​​open end of the first housing (1) and the second housing (5). The elastic element (9) is elastically supported between the first movable plate (3) and the second movable plate (7). The first movable plate (3) is pressed towards the first fixed plate (2) to change the size of the first filter area (4), and the second movable plate (7) is pressed towards the second fixed plate (6) to change the size of the second filter area (8).

2. The filtration device for ultrapure electronic-grade chemistry according to claim 1, characterized in that, The first fixed plate (2), the first movable plate (3), the second fixed plate (6), and the second movable plate (7) are provided with material passage holes (11) to facilitate the filtering of materials.

3. A filtration device for ultrapure electronic-grade chemistry according to claim 1, characterized in that, The first filtration area (4) is filled with activated carbon particles.

4. A filtration device for ultrapure electronic-grade chemistry according to claim 1, characterized in that, Molecular sieves are filled in the second filtration area (8).

5. A filtration device for ultrapure electronic-grade chemistry according to claim 1, characterized in that, The elastic element (9) includes a telescopic rod (91) and a fixed cylinder (92). One end of the telescopic rod (91) is pressed onto the first movable plate (3), and the other end is sleeved inside the fixed cylinder (92) and moves telescopically within the fixed cylinder (92). The fixed cylinder (92) is mounted on the second movable plate (7).

6. A filtration device for ultrapure electronic-grade chemistry according to claim 1, characterized in that, The elastic element (9) also includes a spring (93), which is disposed inside the fixed cylinder (92), with one end of the spring (93) connected to the fixed cylinder (92) and the other end disposed at the end of the telescopic rod (91).

7. A filtration device for ultrapure electronic-grade chemistry according to claim 1, characterized in that, The open end of the first housing (1) is connected to the open end of the second housing (5) by bolts.

8. A filtration device for ultrapure electronic-grade chemistry according to claim 1, characterized in that, The open ends of the first housing (1) and the open ends of the second housing (5) are provided with elastic sealing gaskets.

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