Hydrogen peroxide feeding system for adjusting reducibility of electronic-grade sulfuric acid

Abstract

The utility model discloses a hydrogen peroxide feeding system for adjusting the reducibility of electronic-grade sulfuric acid. The system mainly comprises a raw material barrel, a liquid inlet pipe, a liquid outlet pipe, a waste liquid pipe, a first material conveying branch pipe, a second material conveying branch pipe, a material conveying header pipe, a first filter, a second filter, a return pipe and the like. Wherein the raw material barrel is arranged on the electronic scale to monitor the weight of hydrogen peroxide in real time; the liquid outlet pipe is vertically inserted into the top of the raw material barrel and is connected to the material conveying header pipe through a first material conveying branch pipe and a second material conveying branch pipe, and the material conveying header pipe is provided with a first filter and a second filter to ensure the purity of hydrogen peroxide; the liquid inlet pipe is connected with the top of the raw material barrel and provided with the backflow pipe, and material recycling can be achieved. In addition, the system is further provided with a sampling tube and a sampling box, so that samples can be conveniently extracted at any time for quality detection. The hydrogen peroxide feeding device has the advantages of being high in automation degree, easy and convenient to operate, capable of effectively guaranteeing the quality and performance of electronic-grade sulfuric acid and the like, and is suitable for the hydrogen peroxide feeding link in the electronic-grade sulfuric acid production process.

Description

Technical Field

[0001] This utility model relates to the field of chemical production technology, and in particular to a hydrogen peroxide feeding system for adjusting the reducing properties of electronic-grade sulfuric acid. Background Technology

[0002] In the semiconductor industry, electronic-grade sulfuric acid is an indispensable chemical. It is used not only as a cleaning agent to remove organic contaminants and particles from silicon wafer surfaces, but also as a reactant or catalyst in critical process steps such as chemical vapor deposition and wet etching. The quality and purity of electronic-grade sulfuric acid are crucial to ensuring the performance and reliability of semiconductor devices, as even trace impurities can lead to device defects, thereby affecting yield and product quality.

[0003] To maintain the high purity and stability of electronic-grade sulfuric acid, an appropriate amount of electronic-grade hydrogen peroxide is usually added to maintain or adjust its reducing properties. Hydrogen peroxide, as a strong oxidizing agent, can effectively remove reducing impurities from sulfuric acid, ensuring its purity. However, traditional hydrogen peroxide feeding methods have several shortcomings, mainly in the following aspects:

[0004] 1. Traditional methods typically rely on manually transporting hydrogen peroxide from 20L containers to the dispensing point and adding it to electronic-grade sulfuric acid via a metering pump. This process not only increases labor costs, but the frequent manual operations also increase the risk of human error.

[0005] 2. During the handling and replacement of packaging drums, electronic-grade hydrogen peroxide is easily contaminated by the external environment, especially by impurities such as dust and microorganisms in the air, which will directly affect the purity and performance of the final product.

[0006] 3. Traditional metering methods make it difficult to accurately control the amount of hydrogen peroxide added each time, especially when the ratio of hydrogen peroxide to sulfuric acid needs to be adjusted frequently. This can easily lead to over- or under-addition, affecting production efficiency and product quality.

[0007] 4. Because there may be residual hydrogen peroxide in the pipeline that has not been completely discharged, this residual substance will decompose or react with other substances over a long period of time, causing its oxidation capacity to gradually decrease, which in turn affects the effectiveness of the hydrogen peroxide added to sulfuric acid. Summary of the Invention

[0008] The technical problem to be solved by this utility model is to provide a hydrogen peroxide feeding system for adjusting the reducing properties of electronic grade sulfuric acid. This system should not only have an automated feeding function to reduce manpower requirements, but also be able to monitor and adjust the amount of hydrogen peroxide added in real time to ensure the quality and performance of electronic grade sulfuric acid, while reducing production costs and improving production efficiency.

[0009] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0010] A hydrogen peroxide feeding system for adjusting the reducing properties of electronic-grade sulfuric acid includes a raw material tank. The top surface of the raw material tank is connected to an inlet pipe and an outlet pipe, and the bottom of the raw material tank is connected to a waste liquid pipe. The other end of the outlet pipe is connected to a first conveying branch pipe and a second conveying branch pipe. The other ends of the first conveying branch pipe and the second conveying branch pipe are connected to a main conveying pipe. A first filter and a second filter are connected in series on the main conveying pipe. The other ends of the main conveying pipe and the inlet pipe are connected to an external circulation pipeline. A return pipe is connected between the main conveying pipe and the inlet pipe.

[0011] In a preferred embodiment, the liquid outlet pipe is vertically inserted into the top liquid outlet of the raw material barrel and extends to the bottom of the raw material barrel. A liquid outlet valve is provided on the liquid outlet pipe near the liquid outlet. The liquid inlet pipe is vertically inserted into the top liquid inlet of the raw material barrel and connects to the top surface of the raw material barrel. A liquid inlet valve is provided on the liquid inlet pipe near the liquid inlet. The raw material barrel is placed on an electronic scale.

[0012] In a preferred embodiment, a first shut-off valve and a first feed pump are installed on the first feed branch pipe, and a second shut-off valve and a second feed pump are installed on the second feed pipe.

[0013] In a preferred embodiment, a sampling tube is connected to the inlet pipe, and the other end of the sampling tube is connected to a sampling box. A sampling valve is installed on the sampling tube.

[0014] In the preferred embodiment, a third shut-off valve is installed on the main conveying pipe, a fourth shut-off valve is installed on the inlet pipe, and a fifth shut-off valve is installed on the return pipe.

[0015] In the preferred embodiment, the other end of the waste liquid pipe is connected to the waste liquid pool; the sampling box, the inlet pipe, the first feed pump, the second feed pump, the first filter, and the second filter are all connected to the waste liquid pipe through the drain pipe.

[0016] A hydrogen peroxide feeding system for adjusting the reducing properties of electronic-grade sulfuric acid, the device having the following advantages:

[0017] 1. This system achieves fully automated hydrogen peroxide feeding by setting up raw material barrels, feed branch pipes, feed main pipes, and various valves and feed pumps, which greatly reduces the need for manpower and improves work efficiency.

[0018] 2. By setting up an electronic scale, the weight of hydrogen peroxide in the raw material barrel can be monitored in real time, ensuring the accuracy of the feeding amount;

[0019] 3. The first and second filters installed on the main feed pipe can effectively filter out particulate impurities in hydrogen peroxide, ensuring the purity of hydrogen peroxide and thus improving the quality and performance of electronic-grade sulfuric acid.

[0020] 4. The design of the sampling tube and sampling box allows for the collection and testing of hydrogen peroxide samples without interrupting production, further ensuring the quality of hydrogen peroxide. Attached Figure Description

[0021] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0022] Figure 1 This is a schematic diagram of the system of this utility model;

[0023] Figure 2 This is a schematic diagram of the drainage system of this utility model;

[0024] Figure 3 This is a cross-sectional view of the raw material barrel structure of this utility model.

[0025] In the diagram: 1. Raw material tank; 2. Inlet pipe; 3. Outlet pipe; 4. Waste pipe; 5. First feed branch pipe; 6. First shut-off valve; 7. Second feed branch pipe; 8. Second shut-off valve; 9. First feed pump; 10. Second feed pump; 11. Main feed pipe; 12. Return pipe; 13. First filter; 14. Second filter; 15. Drain pipe; 16. Waste liquid tank; 17. Third shut-off valve; 18. Fourth shut-off valve; 19. Fifth shut-off valve; 20. Sampling pipe; 21. Sampling box; 22. Sampling valve; 23. Inlet valve; 24. Outlet valve; 25. Electronic scale. Detailed Implementation

[0026] like Figure 1 As shown, a hydrogen peroxide feeding system for adjusting the reducing properties of electronic-grade sulfuric acid includes a raw material tank 1. The top surface of the raw material tank 1 is connected to an inlet pipe 2 and an outlet pipe 3. The bottom of the raw material tank 1 is connected to a waste liquid pipe 4. The other end of the outlet pipe 3 is connected to a first conveying branch pipe 5 and a second conveying branch pipe 7. The other ends of the first conveying branch pipe 5 and the second conveying branch pipe 7 are connected to a main conveying pipe 11. A first filter 13 and a second filter 14 are connected in series on the main conveying pipe 11. The other ends of the main conveying pipe 11 and the inlet pipe 2 are connected to an external circulation pipeline. A return pipe 12 is connected between the main conveying pipe 11 and the inlet pipe 2.

[0027] During system operation, hydrogen peroxide is stored in raw material tank 1 and fed to external circulation pipeline through liquid outlet pipe 3 and material conveying main pipe 11. Unqualified materials can be discharged into waste liquid pool 16 through waste liquid pipe 4. The purification effect of hydrogen peroxide can be effectively improved by using multi-stage filters in series.

[0028] Preferred solutions include Figure 3As shown, the liquid outlet pipe 3 is vertically inserted into the top liquid outlet of the raw material barrel 1 and extends to the bottom of the raw material barrel 1 to extract hydrogen peroxide from the raw material barrel 1. A liquid outlet valve 24 is provided on the liquid outlet pipe 3 near the liquid outlet to control the opening and closing of the liquid outlet. The liquid inlet pipe 2 is vertically inserted into the top liquid inlet of the raw material barrel 1 and connects to the top surface of the raw material barrel 1 to return hydrogen peroxide to the inside. A liquid inlet valve 23 is provided on the liquid inlet pipe 2 near the liquid inlet to control the opening and closing of the liquid inlet. The raw material barrel 1 is placed on an electronic scale 25. The electronic scale 25 can measure the amount of hydrogen peroxide in the raw material barrel 1 and ensure the accuracy of the feeding amount.

[0029] Preferred solutions include Figure 1 As shown, a first shut-off valve 6 and a first feed pump 9 are installed on the first feed branch pipe 5, and a second shut-off valve 8 and a second feed pump 10 are installed on the second feed pipe; the first feed pump 9 and the second feed pump 10 are connected in parallel, so that if one of them fails, the backup feed route can be activated immediately to ensure the stability and continuity of the system's material supply.

[0030] Preferred solutions include Figure 1 As shown, a sampling tube 20 is connected to the inlet pipe 2, and the other end of the sampling tube 20 is connected to the sampling box 21. A sampling valve 22 is provided on the sampling tube 20. The above device can sample the materials in the system to ensure that hydrogen peroxide samples are collected and tested without interrupting production, thereby further ensuring the quality of hydrogen peroxide.

[0031] Preferred solutions include Figure 1 As shown, a third shut-off valve 17 is installed on the main conveying pipe 11, a fourth shut-off valve 18 is installed on the inlet pipe 2, and a fifth shut-off valve 19 is installed on the return pipe 12. By controlling the opening and closing of each shut-off valve, the opening and closing of each pipe can be controlled in sections, thereby realizing the replacement of materials and switching of feed in the system.

[0032] Preferred solutions include Figure 2 As shown, the other end of the waste liquid pipe 4 is connected to the waste liquid pool 16; the drain ports of the sampling box 21, the inlet pipe 2, the first feed pump 9, the second feed pump 10, the first filter 13 and the second filter 14 are all connected to the waste liquid pipe 4 through the drain pipe 15. Each drain pipe 15 is equipped with a valve. Through the above system, the stored material in each component can be fully discharged before feeding, and the material in the pipes and components can be replaced, further ensuring the purity of the hydrogen peroxide supply.

[0033] The operating principle of this system is as follows:

[0034] 1. Before feeding materials, the system delivers hydrogen peroxide to each component of the system through the outlet pipe 3, the first feed pump 9 or the second feed pump 10. The system uses ultrapure hydrogen peroxide to clean the equipment and pipelines. After cleaning, the valves on each drain pipe 15 are opened, and the waste is discharged into the waste liquid pipe 4 through the drain pipe 15 and then discharged into the waste liquid pool 16.

[0035] 2. Open the outlet valve 24 and close the inlet valve 23, start the first feed pump 9 or the second feed pump 10, open the third stop valve 17 and the fourth stop valve 18, and close the fifth stop valve 19 and the sampling valve 22; open the drain pipe 15 valve connected to the inlet pipe 2, and close the other drain pipe 15 valves.

[0036] The hydrogen peroxide in the raw material tank 1 is transported to the external circulation pipeline by the first conveying pump 9 or the second conveying pump 10. After replacement, it is discharged into the waste liquid pipe 4 and the waste liquid pool 16 through the drain pipe 15 on the inlet pipe 2.

[0037] 3. Then stop the first feed pump 9 or the second feed pump 10, read the electronic scale 25 as the initial value, subtract the pre-calculated amount of hydrogen peroxide as the target value, and then open the valve of the external large circulation pipeline to the production unit (sulfuric acid storage tank);

[0038] 4. Close the fourth shut-off valve 18 and the drain pipe 15 valve on the inlet pipe 2, and restart the first feed pump 9 or the second feed pump 10. Stop the feed pump when the electronic scale 25 reads the target value. At this time, the feeding is completed.

[0039] 5. When the system does not need to be fed, the third shut-off valve 17 and the fourth shut-off valve 18 can be closed, the fifth shut-off valve 19, the outlet valve 24 and the inlet valve 23 can be opened, and all valves on the drain pipe 15 can be closed. At this time, the hydrogen peroxide circulates in the system and is circulated through the first filter 13 and the second filter 14 to reduce the particle size of the electronic grade hydrogen peroxide.

[0040] 6. When it is necessary to sample and test the materials in the system, the sampling valve 22 can be opened, and the hydrogen peroxide in the inlet pipe 2 enters the sampling box 21 through the sampling pipe 20 to ensure that the raw material supply quality of electronic grade sulfuric acid is not affected.

Claims

1. A hydrogen peroxide feeding system for adjusting the reducing properties of electronic-grade sulfuric acid, comprising a raw material tank (1), characterized in that: The top surface of the raw material barrel (1) is connected to the inlet pipe (2) and the outlet pipe (3), and the bottom of the raw material barrel (1) is connected to the waste liquid pipe (4). The other end of the outlet pipe (3) is connected to the first conveying branch pipe (5) and the second conveying branch pipe (7). The other end of the first conveying branch pipe (5) and the second conveying branch pipe (7) is connected to the main conveying pipe (11). The main conveying pipe (11) is connected in series with the first filter (13) and the second filter (14). The other end of the main conveying pipe (11) and the inlet pipe (2) is connected to the external circulation pipeline. The main conveying pipe (11) and the inlet pipe (2) are connected to the return pipe (12).

2. The hydrogen peroxide feeding system for adjusting the reducing properties of electronic-grade sulfuric acid according to claim 1, characterized in that: The liquid outlet pipe (3) is vertically inserted into the top liquid outlet of the raw material barrel (1) and extends into the bottom of the raw material barrel (1). A liquid outlet valve (24) is provided on the liquid outlet pipe (3) near the liquid outlet. The liquid inlet pipe (2) is vertically inserted into the top liquid inlet of the raw material barrel (1) and connects to the top surface of the raw material barrel (1). A liquid inlet valve (23) is provided on the liquid inlet pipe (2) near the liquid inlet. The raw material barrel (1) is placed on the electronic scale (25).

3. The hydrogen peroxide feeding system for adjusting the reducing properties of electronic-grade sulfuric acid according to claim 1, characterized in that: The first feed branch pipe (5) is equipped with a first shut-off valve (6) and a first feed pump (9), and the second feed pipe is equipped with a second shut-off valve (8) and a second feed pump (10).

4. The hydrogen peroxide feeding system for adjusting the reducing properties of electronic-grade sulfuric acid according to claim 1, characterized in that: A sampling tube (20) is connected to the inlet pipe (2), and the other end of the sampling tube (20) is connected to the sampling box (21). A sampling valve (22) is provided on the sampling tube (20).

5. The hydrogen peroxide feeding system for adjusting the reducing properties of electronic-grade sulfuric acid according to claim 1, characterized in that: A third shut-off valve (17) is installed on the main conveying pipe (11), a fourth shut-off valve (18) is installed on the inlet pipe (2), and a fifth shut-off valve (19) is installed on the return pipe (12).

6. The hydrogen peroxide feeding system for adjusting the reducing properties of electronic-grade sulfuric acid according to claim 3 or 4, characterized in that: The other end of the waste liquid pipe (4) is connected to the waste liquid pool (16); the discharge ports of the sampling box (21), the inlet pipe (2), the first feed pump (9), the second feed pump (10), the first filter (13) and the second filter (14) are all connected to the waste liquid pipe (4) through the discharge pipe (15).

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