Cavity vacuum cover for vacuum coating machine

Abstract

The utility model discloses a cavity vacuum cover for a vacuum coating machine, which comprises a vacuum cover and an air inlet piece, an air guide pipe is communicated and fixed on the outer wall of the vacuum cover, the end part of the air guide pipe is rotatably communicated with a screw cap, a support piece is arranged below the vacuum cover, the air inlet piece comprises a water tank, and the water tank is arranged on one side of the vacuum cover. An air inlet pipe is vertically and fixedly communicated with one side of the water tank, a first air pump is fixedly communicated with the air inlet pipe, a dehumidification cylinder is vertically and fixedly communicated with the top surface of the water tank, the bottom end of the dehumidification cylinder is fixedly communicated with the top surface of the water tank, the top surface of the dehumidification cylinder is open, and the open end of the dehumidification cylinder is assembled on a screw cover; and a second air pump is assembled on the pipeline at the bottom end of the dehumidification cylinder in a communicating manner. The utility model overcomes the problems that impurities exist in the air outside the existing vacuum chamber, and dust in the air enters the vacuum cover due to lack of a filtering device when the air is introduced, so that the cleanliness of a coating film is influenced.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating machine technology, and in particular to a cavity vacuum cover for a vacuum coating machine. Background Technology

[0002] Vacuum coating refers to the technique of depositing a certain metal or metal compound in the form of a gas phase onto the surface of a material in a vacuum environment to form a conductive film. Vacuum evaporation coating equipment includes a vacuum hood and a vacuum pumping device. The vacuum hood contains an evaporation source for evaporating the coating material. The substrate to be coated is positioned in front of the evaporation source. During the coating process, the vacuum hood is pumped to a high vacuum, the substance in the evaporation source evaporates, and the atoms or molecules of the evaporated substance are deposited on the surface of the substrate by condensation to form a thin film.

[0003] The existing announcement number CN216274342U, entitled "A Coating Chamber for a Vacuum Coating Machine," includes a vacuum chamber consisting of a vacuum hood and a base located at the bottom of the vacuum hood, and a drying chamber connected to the vacuum chamber via a material inlet and outlet. The drying chamber is used to dry the vapor deposition material. Its bottom is equipped with a drying device consisting of a heating wire and a blower, and its top is equipped with an exhaust port. The material inlet and outlet are used for the vapor deposition material to enter the vacuum chamber, and a sealing mechanism is also provided inside the vacuum chamber to close the material inlet and outlet. The vacuum chamber is equipped with a coating mechanism, a vacuum extraction pipe, and a substrate stage. The coating chamber is divided into a drying chamber and a vacuum chamber. The drying chamber is used to dry the vapor deposition material transported into the vacuum chamber, so as to avoid the generation of water vapor during the evaporation process of the vapor deposition material, which would affect the coating effect and the vacuum effect in the vacuum chamber, thereby improving the quality of the coated product. The material inlet and outlet for the vapor deposition material to enter the vacuum chamber can be opened and closed by the sealing mechanism to ensure that there is no air leakage in the vacuum chamber without affecting the transport of the vapor deposition material.

[0004] However, after the vacuum coating machine has applied the coating, in order to easily open the vacuum chamber door, air needs to be introduced into the vacuum hood. However, there are impurities in the air outside the vacuum chamber, and there is no filter device when introducing the air, which causes dust in the air to enter the vacuum hood, thus affecting the cleanliness of the coating. Utility Model Content

[0005] The purpose of this invention is to provide a cavity vacuum cover for a vacuum coating machine, which aims to improve the above-mentioned problems.

[0006] This utility model is implemented as follows:

[0007] A vacuum chamber for a vacuum coating machine includes a vacuum chamber and an air inlet. An air guide pipe is fixedly connected to the outer wall of the vacuum chamber, and a screw cap is rotatably connected to the end of the air guide pipe. A support is provided below the vacuum chamber. The air inlet includes a water tank, which is located on one side of the vacuum chamber. An air inlet pipe is vertically connected to and fixed on one side of the water tank, and a first air pump is fixedly connected to and fixed on the air inlet pipe. A dehumidifier cylinder is vertically connected to and fixed on the top surface of the water tank, and the bottom end of the dehumidifier cylinder is fixedly connected to and fixed on the top surface of the water tank. The top surface of the dehumidifier cylinder is open, and the open end of the dehumidifier cylinder is assembled on the screw cap. A second air pump is assembled to and connected to the pipe at the bottom end of the dehumidifier cylinder.

[0008] Furthermore, the upper part of the inner circumferential surface of the dehumidifier cylinder is provided with an internal thread, and the internal thread of the dehumidifier cylinder is assembled and connected with the thread of the screw cap.

[0009] Furthermore, the inside of the dehumidifier cylinder is filled with a desiccant.

[0010] Furthermore, a water guide pipe is vertically connected and fixed on the bottom surface of the water tank, and a water guide valve is assembled on the water guide pipe.

[0011] Furthermore, an intake valve is connected to the intake pipe.

[0012] Furthermore, the support includes a hole seat, which is vertically positioned below the vacuum chamber, and a hydraulic rod is vertically fixed on the top surface of the hole seat.

[0013] Furthermore, a rod seat is vertically slidably assembled on the hole seat, and the rod seat is fixedly connected to the output end of the hydraulic rod.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows: When in use, the first air pump on the air inlet pipe of the water tank is started, which drives the external air through the water tank. After the air is washed by water in the water tank, the air rises into the dehumidification cylinder. After the air removes moisture in the dehumidification cylinder, the air is guided into the vacuum hood through the air inlet pipe. Thus, the air introduced is washed by water to remove dust, and after being dried, it is guided into the vacuum hood, which improves the cleanliness of the incoming air and ensures the cleanliness of the coating. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2This is an exploded structural diagram of the present invention;

[0018] Figure 3 This is a schematic diagram of the air intake component in the disassembled state in an embodiment of this utility model;

[0019] Figure 4 This is a schematic diagram of the vacuum cover in the disassembled state in an embodiment of this utility model;

[0020] Figure 5 This is a structural schematic diagram of the support member in the disassembled state in an embodiment of this utility model.

[0021] In the diagram: 1. Vacuum hood; 11. Air guide pipe; 111. Air inlet valve; 12. Screw cap; 13. Support component; 131. Hole seat; 132. Rod seat; 133. Hydraulic rod; 2. Air inlet component; 21. Water tank; 22. Air inlet pipe; 221. First air pump; 23. Dehumidifier cylinder; 231. Internal thread; 232. Second air pump; 24. Dehumidifier; 25. Water guide pipe; 251. Water guide valve. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely represents selected embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0023] Please see Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5As shown, a vacuum chamber for a vacuum coating machine includes a vacuum chamber 1 and an air inlet 2. An air guide pipe 11 is fixedly connected to the outer wall of the vacuum chamber 1, and a screw cap 12 is rotatably connected to the end of the air guide pipe 11. A support member 13 is provided below the vacuum chamber 1. The air inlet 2 includes a water tank 21, which is located on one side of the vacuum chamber 1. An air inlet pipe 22 is vertically fixedly connected to one side of the water tank 21, and a first air pump 221 is fixedly connected to the air inlet pipe 22. A dehumidifier cylinder 23 is vertically fixedly connected to the top surface of the water tank 21, and the bottom end of the dehumidifier cylinder 23 is fixedly connected to the top surface of the water tank 21. The dehumidifier cylinder 23 has an opening, and the opening end of the dehumidifier cylinder 23 is assembled on the screw cap 12. A second air pump 232 is connected to the pipe at the bottom of the dehumidifier cylinder 23. During use, the first air pump 221 on the air inlet pipe 22 of the water tank 21 is started, which drives the outside air through the water tank 21. After the air is washed with water in the water tank 21, the air rises into the dehumidifier cylinder 23. After the air is dehumidified in the dehumidifier cylinder 23, the air is guided into the vacuum chamber 1 through the air inlet pipe 11. The air introduced is washed with water to remove dust, and after being dried, it is guided into the vacuum chamber 1, which improves the cleanliness of the incoming air and ensures the cleanliness of the coating.

[0024] Please see Figure 3 The dehumidifier cylinder 23 has an internal thread 231 on the upper part of its inner circumference surface, and the internal thread 231 of the dehumidifier cylinder 23 is threadedly connected to the screw cap 12. The dehumidifier cylinder 23 is filled with dehumidifier 24 during use. The screw cap 12 is later assembled with the internal thread 231 of the dehumidifier cylinder 23, which facilitates the replacement of the internal dehumidifier 24.

[0025] Please see Figure 3 A water pipe 25 is vertically connected and fixed on the bottom surface of the water tank 21, and a water valve 251 is connected and assembled on the water pipe 25. An air valve 111 is connected and assembled on the air inlet pipe 22. When draining the water from the water tank 21 in the middle and later stages of use, the water valve 251 on the water pipe 25 is opened to drain the sewage and dust, and the air valve 111 on the air inlet pipe 22 is opened to facilitate the introduction of air into the vacuum chamber 1 in the later stages.

[0026] Please see Figure 5 The support member 13 includes a hole seat 131, which is vertically disposed below the vacuum chamber 1. A hydraulic rod 133 is vertically fixed on the top surface of the hole seat 131. A rod seat 132 is vertically slidably assembled on the hole seat 131, and the rod seat 132 is fixedly connected to the output end of the hydraulic rod 133. In use, the hydraulic rod 133 is activated to push the rod seat 132 to support the vacuum chamber 1 and move vertically, thereby adjusting the height of the support.

[0027] Working principle: During use, the first air pump 221 on the air inlet pipe 22 of the water tank 21 is started, which drives the outside air through the water tank 21. After being washed by water in the water tank 21, the air rises into the dehumidification cylinder 23. After the air is dehumidified in the dehumidification cylinder 23, the air is guided into the vacuum hood 1 through the air inlet pipe 11. Thus, the air introduced is washed by water to remove dust, and after being dried, it is guided into the vacuum hood 1, which improves the cleanliness of the incoming air.

[0028] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A cavity vacuum shroud for a vacuum coating machine, characterized in that, The device includes a vacuum hood (1) and an air inlet (2). An air guide pipe (11) is fixedly connected to the outer wall of the vacuum hood (1), and a screw cap (12) is rotatably connected to the end of the air guide pipe (11). A support member (13) is provided below the vacuum hood (1). The air inlet (2) includes a water tank (21). The water tank (21) is located on one side of the vacuum hood (1), and an air inlet pipe (22) is vertically fixedly connected to one side of the water tank (21). A first air pump (221) is fixedly connected to the air inlet pipe (22). A dehumidifier cylinder (23) is vertically fixedly connected to the top surface of the water tank (21), and the bottom end of the dehumidifier cylinder (23) is fixedly connected to the top surface of the water tank (21). The top surface of the dehumidifier cylinder (23) is open, and the open end of the dehumidifier cylinder (23) is assembled on the screw cap (12). A second air pump (232) is assembled on the pipe at the bottom end of the dehumidifier cylinder (23).

2. The vacuum chamber cover for a vacuum coating machine according to claim 1, characterized in that, The inner circumferential surface of the dehumidifier cylinder (23) is provided with an internal thread (231), and the internal thread (231) of the dehumidifier cylinder (23) is threadedly connected to the screw cap (12).

3. The vacuum chamber cover for a vacuum coating machine according to claim 2, characterized in that, The dehumidifier cylinder (23) is filled with a dehumidifier (24).

4. The vacuum chamber cover for a vacuum coating machine according to claim 3, characterized in that, A water pipe (25) is vertically connected and fixed on the bottom surface of the water tank (21), and a water valve (251) is connected and assembled on the water pipe (25).

5. A cavity vacuum shroud for a vacuum coating machine according to claim 4, characterized in that, An intake valve (111) is connected to the intake pipe (22).

6. A vacuum chamber cover for a vacuum coating machine according to claim 5, characterized in that, The support member (13) includes a hole seat (131), which is vertically disposed below the vacuum hood (1), and a hydraulic rod (133) is vertically fixed on the top surface of the hole seat (131).

7. A cavity vacuum shroud for a vacuum coating machine according to claim 6, characterized in that, A rod seat (132) is vertically slidably assembled on the hole seat (131), and the rod seat (132) is fixedly connected to the output end of the hydraulic rod (133).

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